SEMICONDUCTOR DEVICE

TECHNICAL FIELD

The present disclosure relates to semiconductor devices.

BACKGROUND ART

Conventional semiconductor devices incorporating power switching elements, such as metal-oxide-semiconductor field-effect transistors (MOSFETs) and insulated gate bipolar transistors (IGBTs), are known. Such semiconductor devices are used in various electronic devices, ranging from industrial devices to home appliances and information terminals, or even to vehicle-mount devices. JP-A-2021-190505 discloses a conventional semiconductor device (power module). The semiconductor device disclosed in JP-A-2021-190505 includes a semiconductor element and a supporting substrate (ceramic substrate). In one example, the semiconductor element is an IGBT made of silicon (Si). The supporting substrate supports the semiconductor element. The supporting substrate includes an insulating base and conductive layers stacked on the opposite sides of the base. The base is made of, for example a ceramic material. The conductive layers are made of, for example, copper (Cu), and one of the conductive layers is bonded to the semiconductor element. The semiconductor element is covered with, for example, the sealing resin.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a semiconductor device according to a first embodiment of the present disclosure.

FIG. 2 is a fragmentary perspective view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 3 is a fragmentary perspective view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 4 is a plan view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 5 is a fragmentary plan view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 6 is a fragmentary side view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 7 is an enlarged fragmentary plan view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 8 is a fragmentary plan view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 9 is a fragmentary plan view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 10 is a side view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 11 is a bottom view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 12 is a sectional view taken along line XII-XII in FIG. 5.

FIG. 13 is a sectional view taken along line XIII-XIII in FIG. 5.

FIG. 14 is an enlarged fragmentary sectional view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 15 is an enlarged fragmentary sectional view of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 16 is a sectional view taken along line XVI-XVI in FIG. 5.

FIG. 17 is a sectional view taken along line XVII-XVII in FIG. 5.

FIG. 18 is a sectional view taken along line XVIII-XVIII in FIG. 5.

FIG. 19 is a sectional view taken along line XIX-XIX in FIG. 5.

FIG. 20 is a sectional view taken along line XX-XX in FIG. 5.

FIG. 21 is a perspective view of a second conductive member of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 22 is a plan view of the second conductive member of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 23 is a front view of the second conductive member of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 24 is an enlarged fragmentary front view of the second conductive member of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 25 is a side view of the second conductive member of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 26 is a sectional view showing a first variation of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 27 is a sectional view showing the first variation of the semiconductor device according to the first embodiment of the present disclosure.

FIG. 28 is a fragmentary perspective view of a semiconductor device according to a second embodiment of the present disclosure.

FIG. 29 is a fragmentary perspective view of the semiconductor device according to the second embodiment of the present disclosure.

FIG. 30 is a fragmentary plan view of the semiconductor device according to the second embodiment of the present disclosure.

FIG. 31 is a sectional view taken along line XXXI-XXXI in FIG. 30.

FIG. 32 is a sectional view taken along line XXXII-XXXII in FIG. 30.

FIG. 33 is a sectional view taken along line XXXIII-XXXIII in FIG. 30.

FIG. 34 is a perspective view of a second conductive member of the semiconductor device according to the second embodiment of the present disclosure.

FIG. 35 is a plan view of the second conductive member of the semiconductor device according to the second embodiment of the present disclosure.

FIG. 36 is a perspective view of a second conductive member of a semiconductor device according to a third embodiment of the present disclosure.

FIG. 37 is a front view of the second conductive member of the semiconductor device according to the third embodiment of the present disclosure.

FIG. 38 is a plan view of a second conductive member of a semiconductor device according to a fourth embodiment of the present disclosure.

FIG. 39 is a front view of the second conductive member of the semiconductor device according to the fourth embodiment of the present disclosure.

FIG. 40 is an enlarged fragmentary sectional view taken along line XL-XL in FIG. 38.

FIG. 41 is a plan view showing a first variation of the second conductive member of the semiconductor device according to the fourth embodiment of the present disclosure.

FIG. 42 is a plan view showing a second variation of the second conductive member of the semiconductor device according to the fourth embodiment of the present disclosure.

FIG. 43 is a fragmentary front view of a second conductive member of a semiconductor device according to a fifth embodiment of the present disclosure.

FIG. 44 is a perspective view of a first conductive member of a semiconductor device according to a sixth embodiment of the present disclosure.

FIG. 45 is a front view of the first conductive member of the semiconductor device according to the sixth embodiment of the present disclosure.

FIG. 46 is a side view of the first conductive member of the semiconductor device according to the sixth embodiment of the present disclosure.

FIG. 47 is an enlarged fragmentary sectional view schematically showing second semiconductor elements and second conductive joints of a semiconductor device according to a seventh embodiment of the present disclosure.

FIG. 48 is an enlarged fragmentary sectional view schematically showing first semiconductor elements and first conductive joints of a semiconductor device according to an eighth embodiment of the present disclosure.

FIG. 49 is a vehicle incorporating a semiconductor device according to the present disclosure.

DETAILED DESCRIPTION OF EMBODIMENTS

The following describes preferred embodiments of the present disclosure in detail with reference to the drawings.

In the present disclosure, the terms such as “first”, “second”, “third”, and so on are used merely as labels and are not intended to impose a specific order or sequence on the items modified by the terms.

In the present disclosure, the expression “An object A is formed in an object B”, and “An object A is formed on an object B” imply the situation where, unless otherwise specifically noted, “the object A is formed directly in or on the object B”, and “the object A is formed in or on the object B, with something else interposed between the object A and the object B”. Likewise, the expression “An object A is disposed in an object B”, and “An object A is disposed on an object B” imply the situation where, unless otherwise specifically noted, “the object A is disposed directly in or on the object B”, and “the object A is disposed in or on the object B, with something else interposed between the object A and the object B”. Further, the expression “An object A is located on an object B” implies the situation where, unless otherwise specifically noted, “the object A is located on the object B, in contact with the object B”, and “the object A is located on the object B, with something else interposed between the object A and the object B”. Still further, the expression “An object A overlaps with an object B as viewed in a certain direction” implies the situation where, unless otherwise specifically noted, “the object A overlaps with the entirety of the object B”, and “the object A overlaps with a portion of the object B”. Still further, “A surface A faces in a direction B (or faces a first side or a second side in the direction B) is not limited, unless otherwise specifically noted, to the situation where the surface A forms an angle of 90° with the direction B but includes the situation where the surface A is inclined with respect to the direction B.

FIGS. 1 to 25 show a semiconductor device according to a first embodiment of the present disclosure. The semiconductor device A1 of the present embodiment includes a plurality of first semiconductor elements 10A, a plurality of second semiconductor elements 10B, a supporting substrate 3, a first terminal 41, a second terminal 42, a plurality of third terminals 43, a fourth terminal 44, a plurality of control terminals 45, a control terminal support 48, a first conductive member 5, a second conductive member 6, and a sealing resin 8.

FIG. 1 is a perspective view of the semiconductor device A1. FIGS. 2 and 3 are fragmentary perspective views of the semiconductor device A1. FIG. 4 is a plan view of the semiconductor device A1. FIG. 5 is a fragmentary plan view of the semiconductor device A1. FIG. 6 is a fragmentary side view of the semiconductor device A1. FIG. 7 is an enlarged fragmentary plan view of the semiconductor device A1. FIGS. 8 and 9 are fragmentary plan views of the semiconductor device A1. FIG. 10 is a side view of the semiconductor device A1. FIG. 11 is a bottom view of the semiconductor device A1. FIG. 12 is a sectional view taken along line XII-XII in FIG. 5. FIG. 13 is a sectional view taken along line XIII-XIII in FIG. 5. FIGS. 14 and 15 are enlarged fragmentary sectional views of the semiconductor device A1. FIG. 16 is a sectional view taken along line XVI-XVI in FIG. 5. FIG. 17 is a sectional view taken along line XVII-XVII in FIG. 5. FIG. 18 is a sectional view taken along line XVIII-XVIII in FIG. 5. FIG. 19 is a sectional view taken along line XIX-XIX in FIG. 5. FIG. 20 is a sectional view taken along line XX-XX in FIG. 5. FIG. 21 is a perspective view of the second conductive member 6 of the semiconductor device A1. FIG. 22 is a plan view of the second conductive member 6 of the semiconductor device A1. FIG. 23 is a front view of the second conductive member 6 of the semiconductor device A1. FIG. 24 is an enlarged fragmentary front view of the second conductive member of the semiconductor device A1. FIG. 25 is a side view of the second conductive member 6 of the semiconductor device A1.

In these figures, the z direction is an example of the thickness direction of the present disclosure, the x direction is an example of the first direction of the present disclosure, and the y direction is an example of the second direction of the present disclosure. In addition, a first side in the x direction is defined as the x1 side in the x direction, and a second side in the x direction is defined as the x2 side in the x direction. Also, a first side in the y direction is defined as the y1 side in the y direction, and a second side in the y direction is defined as the y2 side in the y direction. Also, a first side in the z direction is defined as the z1 side in the z direction, and a second side in the z direction is defined as the z2 side in the z direction.

The first semiconductor elements 10A and the second semiconductor elements 10B are electronic components integral to the functionality of the semiconductor device A1. The first semiconductor elements 10A and the second semiconductor elements 10B are made of a semiconductor material primarily consisting of silicon carbide (Sic), for example. The semiconductor material is not limited to SiC, and examples include silicon (Si), gallium nitride (GaN), and diamond (C). Each of the first semiconductor elements 10A and the second semiconductor elements 10B may be a power semiconductor chip, such as a metal-oxide semiconductor field-effect transistor (MOSFET) having a switching function. The first semiconductor elements 10A and the second semiconductor elements 10B of the present embodiment are MOSFETs, but this is a non-limiting example. The first semiconductor elements 10A and the second semiconductor elements 10B may be other types of transistors, such as insulated gate bipolar transistors (IGBTs). The first semiconductor elements 10A and the second semiconductor elements 10B are identical elements. The first semiconductor elements 10A and the second semiconductor elements 10B are n-channel MOSFETs. Alternatively, however, the first semiconductor elements 10A and the second semiconductor elements 10B may be p-channel MOSFETS.

As shown in FIGS. 14 and 15, each of the first semiconductor elements 10A and the second semiconductor elements 10B has an element obverse surface 101 and an element reverse surface 102. In each of the first semiconductor elements 10A and the second semiconductor elements 10B, the element obverse surface 101 and the element reverse surface 102 are spaced apart in the z direction. The element obverse surface 101 faces the z1 side in the z direction, and the element reverse surface 102 faces the z2 side in the z direction.

In the present embodiment, the semiconductor device A1 includes four first semiconductor elements 10A and four second semiconductor elements 10B. The numbers of the first semiconductor elements 10A and the second semiconductor elements 10B, however, are not limited to this example, and can be appropriately changed depending on the performance required for the semiconductor device A1. In the example shown in FIGS. 8 and 9, four first semiconductor elements 10A and four second semiconductor element 10B are arranged. In another example, the respective numbers of the first semiconductor elements 10A and the second semiconductor elements 10B may be two or three, or even five or greater. In addition, the numbers of the first semiconductor elements 10A and the second semiconductor elements 10B may be the same or different. The numbers of the first semiconductor elements 10A and the second semiconductor elements 10B are determined depending on the current capacity to be handled by the semiconductor device A1.

The semiconductor device A1 is configured as a half-bridge switching circuit, for example. In this case, the first semiconductor elements 10A form an upper arm circuit of the semiconductor device A1, and the second semiconductor elements 10B form a lower arm circuit. In the upper arm circuit, the first semiconductor elements 10A are connected in parallel. In the lower arm circuit, the second semiconductor elements 10B are connected in parallel. Each first semiconductor element 10A is connected in series to a second semiconductor element 10B to form a bridge layer.

As shown in FIGS. 8, 9, and 19 in particular, the first semiconductor elements 10A are mounted on a later-described first conductive part 32A of the supporting substrate 3. In the example shown in FIGS. 8 and 9, the first semiconductor elements 10A are spaced apart in the y direction. The first semiconductor elements 10A are electrically bonded to the first conductive part 32A each via a conductive joint 19. The first semiconductor elements 10A are bonded to the first conductive part 32A, such that their element reverse surfaces 102 face the first conductive part 32A. Different from the present embodiment, the first semiconductor elements 10A may be mounted on a metal member that is not a part of the substrate, such as a DBC substrate. In this case, the metal member corresponds to the first conductive part of the present disclosure. The metal member may be supported on the first conductive part 32A, for example.

As shown in FIGS. 8, 9, and 18 in particular, the second semiconductor elements 10B are mounted on a later-described second conductive part 32B of the supporting substrate 3. In the example shown in FIGS. 8 and 9, the second semiconductor elements 10B are spaced apart in the y direction. The second semiconductor elements 10B are electrically bonded to the second conductive part 32B each via a conductive joint 19. The second semiconductor elements 10B are bonded to the second conductive part 32B, such that their element reverse surfaces 102 face the second conductive part 32B. As can be understood from FIG. 9, the first semiconductor elements 10A and the second semiconductor elements 10B overlap with each other as viewed in the x direction, but this overlap is not necessary. Different from the present embodiment, in addition, the second semiconductor elements 10B may be mounted on a metal member that is not a part of the substrate, such as a DBC substrate. In this case, the metal member corresponds to the second conductive part of the present disclosure. The metal member may be supported on the second conductive part 32B, for example.

Each of the first semiconductor elements 10A and the second semiconductor elements 10B includes a first obverse-surface electrode 11, a second obverse-surface electrode 12, a third obverse-surface electrode 13, and a reverse-surface electrode 15. The description given below of the first obverse-surface electrode 11, the second obverse-surface electrode 12, the third obverse-surface electrode 13, and the reverse-surface electrode 15 is common to all the first semiconductor elements 10A and the second semiconductor elements 10B. The first obverse-surface electrode 11, the second obverse-surface electrode 12, and the third obverse-surface electrode 13 are disposed on the element obverse surface 101. The first obverse-surface electrode 11, the second obverse-surface electrode 12, and the third obverse-surface electrode 13 are insulated by an insulating film not shown in the figures. The reverse-surface electrode 15 is disposed on the element reverse surface 102.

The first obverse-surface electrode 11 is a gate electrode, for example, and receives a drive signal (e.g., gate voltage) inputted to drive the first semiconductor element 10A (the second semiconductor element 10B). The second obverse-surface electrode 12 of the first semiconductor element 10A (the second semiconductor element 10B) is a source electrode, for example, and conducts the source current. The second obverse-surface electrode 12 of the present embodiment includes a gate finger 121. In one example, the gate finger 121 is a linear insulator that extends in the x direction and divides the second obverse-surface electrode 12 into two regions in the y direction. The third obverse-surface electrode 13 is a source-sense electrode, for example, and conducts the source current. The reverse-surface electrode 15 is a drain electrode, for example, and conducts the drain current. The reverse-surface electrode 15 covers substantially the entire region of the element reverse surface 102. The reverse-surface electrode 15 may be composed of a silver (Ag) plating, for example.

Each first semiconductor 10A element (each second semiconductor element 10B) switches between a conducting state and a non-conducting state in response to a drive signal (gate voltage) inputted to the first obverse-surface electrode 11 (the gate electrode). In the conducting state, the current flows from the reverse-surface electrode 15 (the drain electrode) to the second obverse-surface electrode 12 (the source electrode). In the non-conducting state, such electric current does not flow. In short, each first semiconductor element 10A (each second semiconductor element 10B) performs a switching operation. With the switching functions of the first semiconductor elements 10A and the second semiconductor elements 10B, the semiconductor device A1 converts the DC voltage applied between the fourth terminal 44 and each of the first terminal 41 and the second terminal 42 into AC voltage, for example. The semiconductor device A1 then outputs the resulting AC voltage from the third terminals 43.

The semiconductor device A1 includes thermistors 17 as shown in FIGS. 5, 8, and 9 in particular. The thermistors 17 are used as temperature sensors. The semiconductor device A1 may include temperature-sensing diodes in addition to, or in alternative to the thermistors 17.

The supporting substrate 3 supports the first semiconductor elements 10A and the second semiconductor elements 10B. The specific configuration of the supporting substrate 3 is not limited. For example, the supporting substrate 3 may be composed of a direct bonded copper (DBC) substrate or an active metal brazing (AMB) substrate. The supporting substrate 3 includes an insulating layer 31, a first metal layer 32, and a reverse-surface metal layer 33. The first metal layer 32 includes the first conductive part 32A and the second conductive part 32B. In one example, the supporting substrate 3 has a z-direction dimension of at least 0.4 mm and at most 3.0 mm.

The insulating layer 31 is made of a ceramic material with excellent thermal conductivity. Examples of such a ceramic material include silicon nitride (SiN). The insulating layer 31 is not limited to a ceramic material and may be an insulating resin sheet, for example. The insulating layer 31 is rectangular in plan view, for example. In one example, the insulating layer 31 has a z-direction dimension of at least 0.05 mm and at most 1.0 mm.

The first conductive part 32A supports the first semiconductor elements 10A, and the second conductive part 32B supports the second semiconductor elements 10B. The first conductive part 32A and the second conductive part 32B are formed on the upper surface (the surface facing the z1 side in the z direction) of the insulating layer 31. The first conductive part 32A and the second conductive part 32B are made of a material containing copper (Cu), for example. The material may contain other substances, such as aluminum (Al). The first conductive part 32A and the second conductive part 32B are spaced apart in the x direction. The first conductive part 32A is located on the x1 side in the x direction from the second conductive part 32B. Each of the first conductive part 32A and the second conductive part 32B is rectangular in plan view, for example. The first conductive part 32A and the second conductive part 32B, together with the first conductive member 5 and the second conductive member 6, form the path of the main circuit current that is switched by the first semiconductor elements 10A and the second semiconductor elements 10B.

The first conductive part 32A has a first obverse surface 301A. The first obverse surface 301A is a flat plane facing the z1 side in the z direction. The first semiconductor elements 10A are bonded to the first obverse surface 301A of the first conductive part 32A each via a conductive joint 19. The second conductive part 32B has a second obverse surface 301B. The second obverse surface 301B is a flat plane facing the z1 side in the z direction. The second semiconductor elements 10B are bonded to the second obverse surface 301B of the second conductive part 32B each via a conductive joint 19. The material of the conductive joints 19 is not specifically limited, and examples include solder, metal paste, and sintered metal. Each of the first conductive part 32A and the second conductive part 32B has a z-direction dimension of at least 0.1 mm and at most 1.5 mm, for example.

The reverse-surface metal layer 33 is formed on the lower surface (the surface facing the z2 side in the z direction) of the insulating layer 31. The reverse-surface metal layer 33 is made of the same material as that of a first metal layer 32. The reverse-surface metal layer 33 has a reverse surface 302. The reverse surface 302 is a flat plane facing the z2 side in the z direction. In the example shown in FIG. 11, the reverse surface 302 is exposed from the sealing resin 8, for example. The reverse surface 302 is available for attachment of a component, such as a heat dissipating member (such as a heat sink), which is not shown in the figure. In another example, the reverse surface 302 may be covered with the sealing resin 8, instead of being exposed from the sealing resin 8. In plan view, the reverse-surface metal layer 33 overlaps with both the first conductive part 32A and the second conductive part 32B.

The first terminal 41, the second terminal 42, the third terminals 43, and the fourth terminal 44 are made with metal plates. The metal plates may contain copper (Cu) or an alloy of copper (Cu), for example. In the example shown in FIGS. 1 to 5, 8, 9, and 11, the semiconductor device A1 includes one first terminal 41, one second terminal 42, one fourth terminal 44, and two third terminals 43, but the numbers of the respective terminals are not specifically limited.

The first terminal 41, the second terminal 42, and the fourth terminal 44 are input terminals for DC voltage that is to be converted. The fourth terminal 44 is a positive electrode (P terminal), and the first terminal 41 and the second terminal 42 are negative electrodes (N terminals). The third terminals 43 are output terminals for the AC voltage converted by the first semiconductor elements 10A and the second semiconductor elements 10B. The first terminal 41, the second terminal 42, the third terminals 43, and the fourth terminal 44 each have a portion covered with the sealing resin 8 and a portion exposed from the sealing resin 8.

As shown in FIG. 13, the fourth terminal 44 is electrically bonded to the first conductive part 32A. The method of electrical bonding is not limited and may be include options such as ultrasonic bonding, laser bonding, welding, or bonding via, for example, solder, metal paste or a sintered silver. As shown in FIGS. 8 and 9 in particular, the fourth terminal 44 is located on the x1 side in the x direction from the first semiconductor elements 10A and the first conductive part 32A. The fourth terminal 44 is electrically connected to the first conductive part 32A, and also to the reverse-surface electrodes 15 (the drain electrodes) of the first semiconductor elements 10A via the first conductive part 32A.

The first terminal 41 and the second terminal 42 are electrically connected to the second conductive member 6. In the present embodiment, the first terminal 41 and the second conductive member 6 are integrally formed. The first terminal 41 and the second conductive member 6 that are integrally formed have no bonding material or joints, and they may be formed from a single metal plate by cutting, bending, and other processing. In the present embodiment, the second terminal 42 and the second conductive member 6 are also integrally formed. As long as the first terminal 41 and the second terminal 42 are electrically connected to the second conductive member 6, they may be separate components that are bonded together and thus have a joint. As shown in FIGS. 5 and 8 in particular, the first terminal 41 and the second terminal 42 are located on the x1 side in the x direction from the first semiconductor elements 10A and the first conductive part 32A. The first terminal 41 and the second terminal 42 are electrically connected to the second conductive member 6, and also to the second obverse-surface electrodes 12 (the source electrodes) of the respective second semiconductor elements 10B via the second conductive member 6.

As shown in FIGS. 1 to 5, and 11, the first terminal 41, the second terminal 42, and the fourth terminal 44 of the semiconductor device A1 protrude from the sealing resin 8 toward the x1 side in the x direction. The first terminal 41, the second terminal 42, and the fourth terminal 44 are spaced apart from each other. The first terminal 41 and the second terminal 42 are located opposite to each other across the fourth terminal 44 in the y direction. The first terminal 41 is located on the y1 side in the y direction from the fourth terminal 44, and the second terminal 42 is located on the y2 side in the y direction from the fourth terminal 44. The first terminal 41, the second terminal 42, and the fourth terminal 44 overlap with each other as viewed in the y direction.

As can be seen from FIGS. 8, 9, and 12, the two third terminals 43 are electrically bonded to the second conductive part 32B. The method of electrical bonding is not limited and may be include options such as ultrasonic bonding, laser bonding, welding, or bonding via, for example, solder, metal paste or a sintered silver. As shown in FIG. 8 in particular, the two third terminals 43 are located on the x2 side in the x direction from the second semiconductor elements 10B and the second conductive part 32B. The third terminals 43 are electrically connected to the second conductive part 32B, and also to the reverse-surface electrodes 15 (the drain electrodes) of the second semiconductor elements 10B via the second conductive part 32B. Note that the number of the third terminals 43 is not limited to two. For example, one third terminal 43 may be provided, or three or more third terminals 43 may be provided. In the case where one third terminal 43 is provided, it is preferably connected to the central portion of the second conductive part 32B in the y direction.

The control terminals 45 are pin-like terminals for controlling the first semiconductor elements 10A and the second semiconductor elements 10B. The control terminals 45 include a plurality of first control terminals 46A to 46E and a plurality of second control terminals 47A to 47D. The first control terminals 46A to 46E are used, for example, to control the first semiconductor elements 10A. The second control terminals 47A to 47D are used, for example, to control the second semiconductor elements 10B.

The first control terminals 46A to 46E are spaced apart in the y direction. As shown in FIGS. 8, 13, and 20 in particular, the first control terminals 46A to 46E are supported on the first conductive part 32A via the control terminal support 48 (a first support part 48A described later). As shown in FIGS. 5 and 8, the first control terminals 46A to 46E are located between the plurality of first semiconductor elements 10A and the first, second, and fourth terminals 41, 42, and 44 in the x direction.

The first control terminal 46A is a terminal for receiving input of a drive signal for the first semiconductor elements 10A (a gate terminal). The first control terminal 46A receives a drive signal (e.g., gate voltage) for driving the first semiconductor elements 10A.

The first control terminal 46B is a terminal for sensing the source signal of the first semiconductor elements 10A (a source sense terminal). The voltage applied to the second obverse-surface electrodes 12 (the source electrodes) of the first semiconductor elements 10A (the voltage corresponding to the source current) is detected at the first control terminal 46B.

The first control terminals 46C and 46D are electrically connected to a thermistor 17.

The first control terminal 46E is a terminal for sensing the drain signal of the first semiconductor elements 10A (a drain-sense terminal). The voltage applied to the reverse-surface electrodes 15 (the drain electrodes) of the first semiconductor elements 10A (the voltage corresponding to the drain current) is detected at the first control terminal 46E.

The second control terminals 47A to 47D are spaced apart in the y direction. As shown in FIGS. 8 and 13 in particular, the second control terminals 47A to 47D are supported on the second conductive part 32B via the control terminal support 48 (a second support part 48B described later). As shown in FIGS. 5 and 8, the second control terminals 47A to 47D are located between the second semiconductor elements 10B and the two third terminals 43 in the x direction.

The second control terminal 47A is a terminal for receiving input of a drive signal for the second semiconductor elements 10B (a gate terminal). The second control terminal 47A receives a drive signal (e.g., gate voltage) for driving the second semiconductor elements 10B. The second control terminal 47B is a terminal for sensing the source signal of the second semiconductor elements 10B (a source sense terminal). The voltage applied to the second obverse-surface electrodes 12 (the source electrodes) of the second semiconductor elements 10B (the voltage corresponding to the source current) is detected at the second control terminal 47B. The second control terminals 47C and 47D are electrically connected to a thermistor 17.

Each of the control terminals 45 (the first control terminals 46A to 46E and the second control terminals 47A to 47D) includes a holder 451 and a metal pin 452.

The holder 451 is made of a conductive material. As shown in FIGS. 14 and 15, the holder 451 is bonded to the control terminal support 48 (a first metal layer 482 described later) via a conductive joint 459. The holder 451 includes a tubular part, an upper flange, and a lower flange. The upper flange extends from the upper end of the tubular part, and the lower flange extends from the lower end. The metal pin 452 is inserted into the holder 451, extending at least from the upper flange to the tubular part. The holder 451 is covered with the sealing resin 8 (a second projection 852 described later).

The metal pin 452 is a rod-like member extending in the z direction. The metal pin 452 is pressed into the holder 451 and supported by the holder 451. The metal pin 452 is electrically connected to the control terminal support 48 (the first metal layer 482 described later) at least through the holder 451. When the lower end (the end on the z2 side in the z direction) of the metal pin 452 is in contact with the conductive joint 459 within the insertion hole of the holder 451 as in the example shown in FIGS. 14 and 15, the electrical connection of the metal pin 452 to the control terminal support 48 is established also through the conductive joint 459.

The control terminal support 48 supports the control terminals 45. In the z direction, the control terminal support 48 is located between the first and second obverse surfaces 301A and 301B and the plurality of control terminals 45.

The control terminal support 48 includes a first support part 48A and a second support part 48B. The first support part 48A is disposed on the first conductive part 32A and supports the first control terminals 46A to 46E out of the plurality of control terminals 45. As shown in FIG. 14, the first support part 48A is bonded to the first conductive part 32A via a joint 49. The joint 49 can either be conductive or insulating, and solder is used in one example. The second support part 48B is disposed on the second conductive part 32B and supports the second control terminals 47A to 47D out of the plurality of control terminals 45. As shown in FIG. 15, the second support part 48B is bonded to the second conductive part 32B via the joint 49.

The control terminal support 48 (each of the first support part 48A and the second support part 48B) may be made with a direct bonded copper (DBC) substrate, for example. The control terminal support 48 includes a stack of an insulating layer 481, a first metal layer 482, and a second metal layer 483.

The insulating layer 481 is made of a ceramic material, for example. The insulating layer 481 is rectangular in plan view, for example.

As shown in FIGS. 14 and 15 in particular, the first metal layer 482 is formed on the upper surface of the insulating layer 481. Each control terminal 45 stands on the first metal layer 482. The first metal layer 482 is made of copper (Cu) or an alloy of copper (Cu), for example. As shown in FIG. 8 in particular, the first metal layer 482 includes a first segment 482A, a second segment 482B, a third segment 482C, a fourth segment 482D, a fifth segment 482E, and a sixth segment 482F. The first segment 482A, the second segment 482B, the third segment 482C, the fourth segment 482D, the fifth segment 482E, and the sixth segment 482F are spaced apart and insulated from each other.

A plurality of wires 71 are bonded to the first segment 482A. The wires 71 electrically connect the first segment 482A to the first obverse-surface electrodes 11 (the gate electrodes) of the first semiconductor elements 10A (the second semiconductor elements 10B). A plurality of wires 73 are bonded to the first segment 482A and the sixth segment 482F. Thus, the sixth segment 482F is electrically connected to the first obverse-surface electrodes 11 (the gate electrodes) of the first semiconductor elements 10A (the second semiconductor elements 10B) via the wires 73 and 71. As shown in FIG. 8, the first control terminal 46A is bonded to the sixth segment 482F of the first support part 48A, and the second control terminal 47A is bonded to the sixth segment 482F of the second support part 48B.

A plurality of wires 72 are bonded to the second segment 482B. The wires 72 electrically connects the second segment 482B to the third obverse-surface electrodes 13 (the source-sense electrodes) of the first semiconductor elements 10A (the second semiconductor elements 10). As shown in FIG. 8, the first control terminal 46B is bonded to the second segment 482B of the first support part 48A, and the second control terminal 47B is bonded to the second segment 482B of the second support part 48B.

A thermistor 17 is bonded to the third segment 482C and the fourth segment 482D. As shown in FIG. 8, the first control terminals 46C and 46D are respectively bonded to the third segment 482C and the fourth segment 482D of the first support part 48A. In addition, the second control terminals 47C and 47D are respectively bonded to the third segment 482C and the fourth segment 482D of the second support part 48B.

A wire 74 is bonded to the fifth segment 482E of the first support part 48A. The wire 74 electrically connects the fifth segment 482E to the first conductive part 32A. As shown in FIG. 8, the first control terminal 46E is bonded to the fifth segment 482E of the first support part 48A. The fifth segment 482E of the second support part 48B is not electrically connected to any part or component. The wires 71 to 74 mentioned above are bonding wires, for example. The wires 71 to 74 are made of a material containing gold (Au), Al or copper (Cu), for example.

As shown in FIGS. 14 and 15 in particular, the second metal layer 483 is formed on the lower surface of the insulating layer 481. As shown in FIG. 14, the second metal layer 483 of the first support part 48A is bonded to the first conductive part 32A via the joint 49. As shown in FIG. 15, the second metal layer 483 of the second support part 48B is bonded to the second conductive part 32B via the joint 49.

The first conductive member 5 and the second conductive member 6, together with the first conductive part 32A and the second conductive part 32B, form the path of the main circuit current that is switched by the first semiconductor elements 10A and the second semiconductor elements 10B. The first conductive member 5 and the second conductive member 6 are spaced apart from the first obverse surface 301A and the second obverse surface 301B toward the z1 side in the z direction. In plan view, the first conductive member 5 and the second conductive member 6 overlap with the first obverse surface 301A and the second obverse surface 301B. In the present embodiment, each of the first conductive member 5 and the second conductive member 6 is made with a metal plate, and the metal contains copper (Cu) or an alloy of copper (Cu), for example. Specifically, the first conductive member 5 and the second conductive member 6 are metal plates having been bent as needed.

The first conductive member 5 is connected to the second obverse-surface electrodes 12 (the source electrodes) of the first semiconductor elements 10A and to the second conductive part 32B, thereby establishing an electrical connection between the second obverse-surface electrodes 12 of the first semiconductor elements 10A and the second conductive part 32B. The first conductive member 5 forms the path of the main circuit current that is switched by the first semiconductor elements 10A. As shown in FIGS. 7 and 8, the first conductive member 5 includes a main part 51, a plurality of first bonding parts 52, and a plurality of second bonding parts 53.

The main part 51 is located between the first semiconductor elements 10A and the second conductive part 32B in the x direction and has the shape of a strip extending in the y direction in plan view. The main part 51 overlaps with both the first conductive part 32A and the second conductive part 32B in plan view and is spaced apart from the first obverse surface 301A and the second obverse surface 301B toward the z1 side in the z direction. As shown in FIG. 16 in particular, the main part 51 is located on the z2 side in the z direction from a plurality of third path parts 66 and a fourth path part 67 of the second conductive member 6 described later, and is closer than the third path parts 66 and the fourth path part 67 to the first obverse surface 301A and the second obverse surface 301B.

In the present embodiment, the main part 51 is parallel to the first obverse surface 301A and the second obverse surface 301B.

As shown in FIG. 8 in particular, the main part 51 extends in the y direction to cover a region in which the first semiconductor elements 10A are positioned. As shown in FIGS. 7, 8, and 13 in particular, the main part 51 has a plurality of first openings 514. The first openings 514 may be through-holes extending in the z direction (the direction of the plate thickness of the main part 51), for example. The first openings 514 are spaced apart in the y direction. The first opening 514 are provided for the respective first semiconductor elements 10A. In the present embodiment, the main part 51 has four first openings 514, each of which corresponds in position in the y direction to one of the plurality of (four) first semiconductor elements 10A.

As shown in FIGS. 8 and 13 in particular, the first openings 514 of the present embodiment overlap with the space between the first conductive part 32A and the second conductive part 32B in plan view. The first openings 514 are provided to facilitate the flow of a molten resin material between the upper region (on the z1 side in the z direction) and the lower region (on the z2 side in the z direction) around the main part 51 (the first conductive member 5) when the molten resin material is injected in the process of forming the sealing resin 8.

As shown in FIG. 8 in particular, the first bonding parts 52 and the second bonding parts 53 extend from the main part 51 at positions corresponding to the first semiconductor elements 10A. Specifically, the first bonding parts 52 are located on the x1 side of the main part 51 in the x direction. The second bonding parts 53 are located on the x2 side of the main part 51 in the x direction. As shown in FIG. 14, each first bonding part 52 is bonded to the second obverse-surface electrode 12 of a corresponding first semiconductor element 10A via a conductive joint 59. Each second bonding part 53 is bonded to the second conductive part 32B via a conductive joint 59. The material of the conductive joints 59 is not specifically limited, and examples include solder, metal paste, and sintered metal. In the present embodiment, each first bonding part 52 includes two regions separated in the y direction by the gate finger 121 of the second obverse-surface electrode 12 of a corresponding first semiconductor element 10A. The two regions are bonded to the second obverse-surface electrode 12.

The second conductive member 6 electrically connects the second obverse-surface electrodes 12 (the source electrodes) of the second semiconductor elements 10B to the first terminal 41 and the second terminal 42. The second conductive member 6 is integrally formed with the first terminal 41 and the second terminal 42. The second conductive member 6 forms the path of the main circuit current that is switched by the second semiconductor elements 10B. As shown in FIGS. 7, and 21 to 25, the second conductive member 6 includes a plurality of third bonding parts 61, a first path part 64, a second path part 65, a plurality of third path parts 66, and a fourth path part 67. In the illustrated example, in addition, the second conductive member 6 includes a first ramp part 602 and a second ramp part 603.

The third bonding parts 61 are bonded to the respective second semiconductor elements 10B. Each third bonding part 61 is bonded to the second obverse-surface electrode 12 of a corresponding second semiconductor element 10B via a conductive joint 69. The material of the conductive joints 69 is not specifically limited, and examples include solder, metal paste, and sintered metal. In the present embodiment, each third bonding part 61 includes two flat sections 611 and two first inclined sections 612.

The two flat sections 611 are aligned in the y direction. The two flat sections 611 are spaced apart from each other in the y direction. The shape of the flat sections 611 is not specifically limited. In the illustrated example, the flat sections 611 are rectangular. The two flat sections are bonded to the second obverse-surface electrode 12 of a corresponding second semiconductor element 10B at locations on the opposite sides of the gate finger 121 in the y direction.

The two first inclined sections 612 are connected to the outer ends of the respective two flat sections 611 in the y direction. That is, the first inclined section 612 that is located on the y1 side in the y direction is connected to the y1-side end of the flat section 611 that is located on the y1 side in the y direction. The first inclined section 612 that is located on the y2 side in the y direction is connected to the y2-side end of the flat section 611 that is located on the y2 side in the y direction. Each first inclined section 612 is inclined toward the z1 side in the z direction with an increasing distance from the flat section 611 in the y direction.

The first path part 64 is located between the third bonding parts 61 and the first terminal 41. In the illustrated example, the first path part 64 is connected to the first terminal 41 via the first ramp part 602. The first path part 64 overlaps with the first conductive part 32A in plan view. The first path part 64 generally extends in the x direction.

The first path part 64 includes a first band-shaped section 641 and a first extended section 643. The first band-shaped section 641 is located on the x2 side in the x direction from the first terminal 41 and is substantially parallel to the first obverse surface 301A. The first band-shaped section 641 generally extends in the x direction. In the illustrated example, the first band-shaped section 641 has a recess 649. The recess 649 is a portion of the first band-shaped section 641 that is recessed toward the y1 side in the y direction. In FIG. 5, a first metal part 35 is visible through the recess 649.

The first extended section 643 extends from the end on the y1 side in the y direction of the first band-shaped section 641 toward the z2 side in the z direction. The first extended section 643 is spaced apart from the first conductive part 32A. In the illustrated example, the first extended section 643 extends in the z direction and has a rectangular shape that is elongated in the x direction. Note that the first path part 64 may be configured without the first extended section 643.

The second path part 65 is located between the third bonding parts 61 and the second terminal 42. In the illustrated example, the second path part 65 is connected to the second terminal 42 via the second ramp part 603. The second path part 65 overlaps with the first conductive part 32A in plan view. The second path part 65 generally extends in the x direction.

The second path part 65 includes a second band-shaped section 651 and a second extended section 653. The second band-shaped section 651 is located on the x2 side in the x direction from the second terminal 42 and is substantially parallel to the first obverse surface 301A. The second band-shaped section 651 generally extends in the x direction. In the illustrated example, the second band-shaped section 651 has a recess 659. The recess 659 is a portion of the second band-shaped section 651 that is recessed toward the y2 side in the y direction. In FIG. 5, a second metal part 36 is visible through the recess 659.

The second extended section 653 extends from the end on the y2 side in the y direction of the second band-shaped section 651 toward the z2 side in the z direction. The second extended section 653 is spaced apart from the first conductive part 32A. In the illustrated example, the second extended section 653 extends in the z direction and has a rectangular shape that is elongated in the x direction. Note that the second path part 65 may be configured without the second extended section 653.

In the description given below, other configurations of the first path part 64 may be presented according to variations and other embodiments. Such configurations may also apply to the second path part 65, because the first path part 64 and the second path part 65 are symmetrical with respect to, for example, the centerline extending in the x direction.

The third path parts 66 are separately connected to the third bonding parts 61. The third path parts 66 extend in the x direction and spaced apart from each other in the y direction. The number of the third path parts 66 to be provided is not specifically limited. In the illustrated example, five third path parts 66 are provided. Each third path part 66 is located either between the second semiconductor elements 10B in the y direction or outside of the second semiconductor elements 10B in the y direction.

The two outermost third path parts 66 in the y direction are formed with recesses 669. Each recess 669 is recessed from the inner side toward the outer side in the y direction. In the illustrated example, each of the two outermost third path parts 66 has one recess 669. In FIG. 5, the second conductive part 32B is visible through the recesses 669.

In the present embodiment, each third bonding part 61 is located between two third path parts 66 adjacent in the y direction. Each third bonding part 61 has two first inclined sections 612, one on the y1 side in the y direction and the other on the y2 side. The first inclined section 612 on the y1 side is connected to one of the two adjacent third path parts 66 that is located on the y1 side in the y direction. The first inclined section 612 on the y2 side is connected to one of the two adjacent third path parts 66 that is on the y2 side in the y direction.

The fourth path part 67 is connected to the ends of the respective third path parts 66 on the x1 side in the x direction. The fourth path part 67 generally extends in the y direction. The fourth path part 67 is connected to the x2-side end of the first band-shaped section 641 of the first path part 64 and also to the x2-side end of the second band-shaped section 651 of the second path part 65. In the illustrated example, the fourth path part 67 is connected to the first path part 64 at the end on the y1 side in the y direction and to the second path part 65 at the end of the y2 side in the y direction.

As shown in FIGS. 23 and 24, the third bonding parts 61 of the present embodiment include third end sections 615. The third end sections 615 are the portions located farther toward the z2 side in the z direction within the third bonding parts 61. Note that the third bonding parts 61 may be configured in a variety of shapes and configurations, including the portions that form the third end section 615. In the illustrated example, the surface of each flat section 611 on the z2 side in the z direction forms a third end section 615.

The third end sections 615 of the third bonding parts 61 are designed such that their positions in the z direction conform to warping of the supporting substrate 3. More specifically, as shown in FIG. 23, the positions of the third path parts 66 in the z direction are uniform. Additionally, the positions of the third path parts 66 and the fourth path part 67 in the z direction are uniform. The distances Gz between the third end sections 615 of the third bonding parts 61 and a fifth bonding part 63 are designed to conform to warping of the supporting substrate 3.

With reference to FIG. 23, the distances Gz of the respective third bonding parts 61 are denoted as a distance Gz1, a distance Gz2, a distance Gz3, and a distance Gz4 in the order from the y2 side in the y direction. The imaginary line in the figure represents the curve of the second obverse surface 301B of the supporting substrate 3 due to warping. Note that the curve is exaggerated for illustration purpose. In the illustrated example, the second obverse surface 301B is curved such that the middle portion in the y direction is closer toward the z2 side in the z direction, and the ends in the y direction are closer toward the z1 side in the z direction. In this example, the distance Gz1 is smaller than the distance Gz2, and the distance Gz4 is smaller than the distance Gz3. The distances Gz1 and Gz4 may be substantially the same, and the distances Gz2 and Gz3 may be substantially the same. The difference between the distances Gz1 and Gz2 is about 40 μm, for example. The difference between the distances Gz3 and Gz4 is about 40 μm, for example. The thickness of the conductive joints 69 may be at least 60 μm and at most 120 μm, for example. Note that the size relation among the distances Gz1 and Gz4 is designed in consideration of the direction and magnitude of warping occurring in the supporting substrate 3 (the second obverse surface 301B).

As shown in FIG. 24, in the present embodiment, the thickness t2 of each first inclined section 612 is smaller than the thickness t1 of each flat section 611. In addition, the thickness t2 of each first inclined section 612 is smaller than the thickness to of each path part 66. In addition, the thickness t1 of each flat section 611 is the same as the thickness to of each third path part 66.

The process of forming the third bonding parts 61 described above begins with cutting or other processes of a metal plate to form intermediate sections, which will be formed into the flat sections 611 and the first inclined sections 612. Note that two intermediate sections are formed into one third bonding part 61. The two intermediate portions are separated by a gap 619. The gap 619 serves as a space for placing a gate finger 121 of the second obverse-surface electrode 12 of a second semiconductor element 10B. Thus, the gap 619 is designed to be substantially equal to or slightly larger than the y-direction dimension of a gate finger 121.

Subsequently, appropriate portions of the two intermediate sections, which will be formed into two flat sections 611, are clamped with a die or the like and moved toward the z2 side in the z direction relative to the third path parts 66 and the fourth path part 67. As a result, each of the two intermediate sections has an inclined portion, forming the two first inclined sections 612. In this process, the first inclined sections 612 are pulled, so that the thickness t2 is reduced to be smaller than thicknesses t1 and to. The y-direction dimension of the gap 619 remains virtually unchanged before and after the process of moving the die toward the z2 side in the z direction. The lengths of the distances Gz1 to Gz4 can be adjusted by, for example, changing the travel amount of the die.

The sealing resin 8 covers the first semiconductor elements 10A, the second semiconductor elements 10B, the supporting substrate 3 (except for the reverse surface 302), a portion of each of the first, second, third, and fourth terminals 41, 42, 43, and 44, a portion of each control terminal 45, the control terminal support 48, the first conductive member 5, the second conductive member 6, and the wires 71 to 74. The sealing resin 8 may be made of a black epoxy resin, for example. The sealing resin 8 may be formed by molding, for example. In one example, the sealing resin 8 has an x-direction dimension of about 35 to 60 mm, a y-direction dimension of about 35 to 50 mm, and a z-direction dimension of about 4 to 15 mm. These dimensions are measured at the largest portions in the respective directions. The sealing resin 8 has a resin obverse surface 81, a resin reverse surface 82, and resin side surfaces 831 to 834.

As shown in FIGS. 10, 12, and 18 in particular, the resin obverse surface 81 and the resin reverse surface 82 are spaced apart in the z direction. The resin obverse surface 81 faces the z1 side in the z direction, and the reverse surface 82 faces z2 side in the z direction. The control terminals 45 (the first control terminals 46A to 46E and the second control terminals 47A to 47D) protrude from the resin obverse surface 81. As shown in FIG. 11, the resin reverse surface 82 has the shape of a frame surrounding the reverse surface 302 (the lower surface of the reverse-surface metal layer 33) of the supporting substrate 3 in plan view. The reverse surface 302 of the supporting substrate 3 is exposed from the resin reverse surface 82 and is flush with the resin reverse surface 82, for example. The resin side surfaces 831 to 834 are connected to both the resin obverse surface 81 and the resin reverse surface 82 and are located between the resin obverse surface 81 and the resin reverse surface 82 in the z direction. As shown in FIG. 4 in particular, the resin side surfaces 831 and 832 are spaced apart in the x direction. The resin side surface 831 faces the x2 side in the x direction, and the resin side surface 832 faces the x1 side in the x direction. The two third terminals 43 protrude from the resin side surface 831, whereas the first terminal 41, the second terminal 42, and the fourth terminal 44 protrude from the resin side surface 832. As shown in FIG. 4 in particular, the resin side surfaces 833 and 834 are spaced apart in the y direction. The resin side surface 833 faces the y2 side in the y direction, and the resin side surface 834 faces the y1 side in the y direction.

As shown in FIG. 4, the resin side surface 832 has a plurality of recesses 832a. Each recess 832a is recessed in the x direction in plan view. The recesses 832a include one formed between the first terminal 41 and the fourth terminal 44, and one formed between the second terminal 42 and the fourth terminal 44. The recesses 832a are provided to increase the creepage distance along the resin side surface 832 between the first terminal 41 and the fourth terminal 44 and also between the second terminal 42 and the fourth terminal 44.

As shown in FIGS. 12 and 13 in particular, the sealing resin 8 includes a plurality of first projections 851, a plurality of second projections 852, and a resin cavity 86.

The first projections 851 protrude from the resin obverse surface 81 in the z direction. The first projections 851 are located near the four corners of the sealing resin 8 in plan view. Each first projection 851 has a first-projection end surface 851a at its end (the end on the z1 side in the z direction). The first-projection end surfaces 851a of the first projections 851 are substantially parallel to the resin obverse surface 81 and are contained in the same plane (x-y plane). Each first projection 851 has the shape of a hollow truncated cone with a bottom, for example. The first projections 851 serve as spacers when the semiconductor device A1 is mounted on, for example, a control circuit board of a device that operates on the power generated by the semiconductor device A1. Each first projection 851 has a recess 851b and an inner wall 851c of the recess 851b. Each first projection 851 is columnar, which preferably is a cylindrical column. The recess 851b has a cylindrical shape, preferably with the inner wall 851c defining a perfect circle in plan view.

The semiconductor device A1 may be mechanically fastened to the control circuit board or the like by screwing, for example. In such a case, each first projection 851 may be formed with an internal thread on the inner wall 851c of the recess 851b. For example, an insert nut may be inserted into the recess 851b of each first projection 851.

As shown in FIG. 13 in particular, the second projections 852 protrude from the resin obverse surface 81 in the z direction. The second projections 852 overlap with the control terminals 45 in plan view. The metal pin 452 of each control terminal 45 protrudes from a second projection 852. Each second projection 852 has the shape of a truncated cone. Each second projection 852 covers the holder 451 and a portion of the metal pin 452 of a control terminal 45.

Next, the following describes effects of the present embodiment.

The first terminal 41 and the second conductive member 6 are integrally formed. Unlike the configuration in which the first terminal 41 and the second conductive member 6 are bonded to each other, the semiconductor device A1 of this configuration can be manufactured without a bonding process. In addition, the semiconductor device A1 of this configuration can avoid a risk of cracking or delamination at such a joint during operation. Therefore, the semiconductor device A1 can be manufactured with simplified processes and enhance operational reliability.

The second terminal 42 and the second conductive member 6 are integrally formed. Unlike the configuration in which the second terminal 42 and the second conductive member 6 are bonded to each other, the semiconductor device A1 of this configuration can be manufactured without a bonding process. In addition, the semiconductor device A1 of this configuration can avoid a risk of cracking or delamination at such a joint during operation.

Therefore, the semiconductor device A1 can be manufactured with simplified processes and enhance operational reliability.

The second conductive member 6 includes the first ramp part 602 connected to the first terminal 41. This configuration increases the rigidity of the connection between the second conductive member 6 and the first terminal 41.

The second conductive member 6 includes the second ramp part 603 connected to the second terminal 42. This configuration increases the rigidity of the connection between the second conductive member 6 and the second terminal 42.

Each third bonding part 61 includes two flat sections 611 and two first inclined sections 612. The two first inclined sections 612 are connected to the outer ends of the two flat sections 611 in the y direction. This means that the current flowing through each second obverse-surface electrode 12 flows to both sides in the y direction through the flat sections 611 and the first inclined sections 612. This prevents concentration of electric current flowing through the second obverse-surface electrodes 12 at one point.

The two flat sections 611 of each third bonding part 61 are spaced apart from each other in the y direction. This ensures that the electric current flows efficiently through both of the two flat sections 611 and both of the two first inclined sections 612, which is effective for preventing current concentration.

The two flat sections 611 of each third bonding part 61 are spaced apart from each other. This allows the gate finger 121 of a second obverse-surface electrode 12 to be placed between the two flat sections 611.

Each third bonding part 61 is provided between two third path parts 66 adjacent to each other in the y direction. This enables the distribution of the electric current flowing through the second obverse-surface electrode 12 of a second semiconductor element 10B to disperse into two third path parts 66.

The third bonding parts 61 are configured such that the positions of the third end sections 615 in the z direction correspond to warping of the supporting substrate 3 (the second obverse surface 301B). This configuration ensures more uniform distances in the z direction between the third end sections 615 of the third bonding parts 61 and the second obverse-surface electrodes 12 of the second semiconductor elements 10B. This ensures that any conductive joint 69 bonding the second obverse-surface electrode 12 of a second semiconductor element 10B to a third bonding part 61 is not undesirably thin, thereby reducing the risk of cracking or delamination of the conductive joints 69. The present embodiment can therefore prevent the shortening of product life.

In the present embodiment, the flat sections 611 of the third bonding parts 61 are designed such that the distance Gz between each flat section 611 and a corresponding third path part 66 in the z direction conform to warping of the supporting substrate 3 (the second obverse surface 301B). This configuration allows the third path parts 66 and the fourth path part 67 to be formed with flat shapes, for example, without consideration of warping of the supporting substrate 3. Consideration of warping of the supporting substrate 3 is necessary only in relation to the shapes of the third bonding parts 61.

The thickness t2 of each first inclined section 612 is smaller than the thickness t1 of each flat section 611. This configuration is achieved by applying a die pulling process as described above. Such a process facilitates forming the gap 619 to a desired size.

FIGS. 26 to 48 show variations and other embodiments of the present disclosure. In these figures, elements that are identical or similar to those described in the embodiment described above are indicated by the same reference numerals. In addition, the configuration of each part of any embodiment or variation can be combined in any way unless a technical contradiction arises.

FIGS. 26 and 27 show a first variation of the semiconductor device A1. The semiconductor device A11 of this variation features that the second conductive member 6 does not include the first ramp part 602 and the second ramp part 603 described above.

In this variation, the position of the first terminal 41 in the z direction is the same as the position of the first band-shaped section 641 of the first path part 64 in the z direction. That is, the first terminal 41 and the first band-shaped section 641 are connected as one continuous flat plate.

Similarly, the position of the second terminal 42 in the z direction is the same as the position of the second band-shaped section 651 of the second path part 65 in the z direction. That is, the second terminal 42 and the second band-shaped section 651 are connected as one continuous flat plate.

Therefore, the semiconductor device A11 of this variation can be manufactured with simplified processes and enhance operational reliability. As can be understood from this variation, in addition, the shapes of the connection between the second conductive member 6 and each of the first terminal 41 and the second terminal 42 is not specifically limited.

FIGS. 28 to 35 show a semiconductor device according to a second embodiment of the present disclosure. The semiconductor device A2 of the present embodiment differs from the first embodiment mainly in the configuration of the second conductive member 6.

As shown in FIGS. 28, and 30 to 35, the fourth path part 67 of the second conductive member 6 has an x-direction dimension larger than that of the fourth path part 67 of the first embodiment. The fourth path part 67 of this embodiment is large enough to overlap with both the first conductive part 32A and the second conductive part 32B as viewed in the z direction. In addition, each third path part 66 has an x-direction dimension that is significantly smaller than the x-direction dimension of the fourth path part 67. The gap between the fourth path part 67 and each third bonding part 61 in the x direction is smaller than the x-direction dimension of each third bonding part 61.

As shown in FIGS. 28, 30, 31, and 33, in the present embodiment, the second conductive member 6 and each of the first terminal 41 and the second terminal 42 are bonded via a conductive joint 69. In other words, the second conductive member 6 and the first and second terminals 41 and 42 are not integrally formed. The material of the conductive joints 69 may be solder, metal paste, or sintered metal, for example.

The second conductive member 6 includes a fourth bonding part 62 and a fifth bonding part 63. The fourth bonding part 62 is connected to the end of the first path part 64 on the x1 side in the x direction. The fourth bonding part 62 is bonded to the first terminal 41 via the conductive joint 69. The fifth bonding part 63 is connected to the end of the second path part 65 on the x1 side in the x direction. The fifth bonding part 63 is bonded to the second terminal 42 via the conductive joint 69.

As shown in FIGS. 28 to 30, in addition, the first support part 48A is not provided with thermistors 17. Thus, the semiconductor device A2 does not include the first control terminals 46C and 46D of the embodiment described above.

The present embodiment prevents concentration of electric current flowing through the second obverse-surface electrodes 12 at one point. As can be understood from the present embodiment, the second conductive member 6 and the first and second terminals 41 and 42 are not required to be formed integrally.

The fourth path part 67 of this embodiment has a relatively large x-direction dimension, larger than the x-direction dimension of the third path part 66, for example. This configuration helps to prevent concentration of electric current in the fourth path part 67.

FIGS. 36 and 37 show a second conductive member 6 of a semiconductor device according to a third embodiment of the present disclosure. The second conductive member 6 of the present embodiment includes six third bonding parts 61. The six third bonding parts 61 correspond to the six second semiconductor elements 10B of the semiconductor device of the present embodiment. The second conductive member 6 includes seven third path parts 66 corresponding to the six third bonding parts 61.

As shown in FIG. 37, in this embodiment, the distances Gz1 to Gz6 from the respective third end sections 615 of the six third bonding parts 61 to the third path parts 66 in the z direction are designed to conform to warping of the supporting substrate 3 (the second obverse surface 301B).

The present embodiment can therefore prevent the shortening of product life. As can be understood from the present embodiment, in addition, the second conductive member 6 may be provided with an appropriate number of third bonding parts 61 in accordance with the number of the second semiconductor elements 10B.

FIGS. 38 to 40 show a second conductive member 6 of a semiconductor device according to a fourth embodiment of the present disclosure. The third bonding parts 61 according to the present embodiment include projections 613. Each projection 613 sticks out from a flat section 611 toward the z2 side in the z direction. The number, size, shape, and other details of the projections 613 are not specifically limited. In the illustrated example, each projection 613 is circular as viewed in in the z direction. Each flat section 611 has one projection 613. In the present embodiment, the tip of each projection 613 on the z2 side forms a third end section 615.

The method for forming the projections 613 is not specifically limited. For example, the projections 613 may be formed by embossing a portion of each flat section 611.

The present embodiment can prevent cracking or delamination at the conductive joints 69 and also prevent the shortening of product life. Note, in addition, that an unintentional deformation in a portion of the second conductive member 6 or the supporting substrate 3 may cause a third bonding part 61 and the second obverse surface 301B to be closer to each other. In the present embodiment, however, each third bonding part 61 has a projection 613. Each projection 613 sticks out from a flat section 611. Thus, if a third bonding part 61 and the second obverse surface 301B are moved closer to each other, the projection 613 comes into contact with the second obverse surface 301B. Consequently, a space is maintained between the insulating layer 311 and the second obverse surface 301B. Thus, this configuration prevents the formation of conductive joints 69 that are extremely thin or have nearly no thickness.

FIG. 41 shows a first variation of the second conductive member 6 of the semiconductor device according to the fourth embodiment of the present disclosure. In this variation, each flat section 611 has two projections 613. The two projections 613 are aligned in the x direction. As can be understood from this variation, the number of projections 613 is not specifically limited.

FIG. 42 shows a second variation of the second conductive member 6 of the semiconductor device according to the fourth embodiment of the present disclosure. In this variation, each projection 613 has a shape elongated in the x direction as viewed in the z direction. The projection 613 extends across the flat section 611, from one end to the opposite end in the x direction. As can be understood from this variation, the shape of projections 613 is not specifically limited.

FIG. 43 show a second conductive member 6 of a semiconductor device according to a fifth embodiment of the present disclosure. The second conductive member 6 of the present embodiment includes flat sections 611 that are inclined relative to the y direction. The tip of each flat section 611 on the z2 side in the z direction forms a third end section 615. In the present embodiment, the distance Gz is provided by adjusting the angle of the flat sections 611 relative to the first inclined sections 612.

FIGS. 44 and 45 show a first conductive member 5 of a semiconductor device according to a sixth embodiment of the present disclosure. The first conductive member 5 of the present embodiment includes a plurality of first bonding parts 52 each having a first end section 525. The positions of the first end sections 525 in the z direction are designed to conform to warping of the supporting substrate 3 (the first obverse surface 301A).

Each first bonding part 52 includes two flat sections 521 and two inclined sections 522. The two flat sections 521 are spaced apart in the y direction. The two inclined sections 522 connect the respective flat sections 521 to the main part 51. Each inclined section 522 is inclined toward the z1 side in the z direction with an increasing distance in the x direction from the flat section 521 toward the x2 side. In the present embodiment, the surface of each flat section 521 on the z2 side in the z direction forms a first end section 525.

In the illustrated example, as shown in FIG. 45, the distances Gz1 to Gz4 from the first end sections 525 of the first bonding parts 52 to the main part 51 in the z direction are designed to conform to warping of the first obverse surface 301A.

The present embodiment can therefore prevent the shortening of product life. As can be understood from the present embodiment, either or both of the first conductive member 5 and the second conductive member 6 may be configured to conform to warping of the supporting substrate 3.

FIG. 46 shows a first variation of the first conductive member 5 of the semiconductor device according to the sixth embodiment of the present disclosure. In this variation, each first bonding part 52 has a projection 523.

Each projection 523 sticks out from a flat section 521 toward the z2 side in the z direction. The configuration of the projections 523 is not specifically limited and may be similar to that of the projections 613 described above. In this variation, the tip of each projection 523 on the z2 side in the z direction forms a first end section 525.

The present variation can therefore prevent the shortening of product life. In addition, the first bonding parts 52 may be configured in a variety of configurations, including the portions that form the first end sections 525.

FIG. 47 is an enlarged fragmentary sectional view of a semiconductor device according to a seventh embodiment of the present disclosure, schematically showing second semiconductor elements 10B and second conductive joints 19B.

In the present embodiment, the thicknesses in the thickness direction z of the second conductive joints 19B are designed to conform to warping of the supporting substrate 3. More specifically, as shown in FIG. 47, the second conductive joints 19B are configured such that the thicknesses Tb in the thickness direction z correspond too warping of the supporting substrate 3.

In FIG. 47, the thicknesses Tb of the second conductive joints 19B are denoted as a thickness Tb1, a thickness Tb2, a thickness Tb3, and a thickness Tb4 in the order from the y2 side in the second direction y. The imaginary line in the figure represents the curve of the second obverse surface 301B of the supporting substrate 3 due to warping. Note that the curve is exaggerated for illustration purpose. In addition, the thicknesses of the second semiconductor elements 10B and the second conductive joints 19B are also exaggerated in the figure for illustration purpose. In the illustrated example, the second obverse surface 301B is curved such that the middle portion in the second direction y is closer toward the z2 side in the thickness direction z, and the ends in the second direction y are closer toward the z1 side in the thickness direction z. In this case, the thickness Tb1 is smaller than the thickness Tb2. In addition, the thickness Tb4 is smaller than the thickness Tb3. The thicknesses Tb1 and Tb4 may be substantially the same, and the thicknesses Tb2 and Tb3 may be substantially the same. The difference between the thicknesses Tb1 and Tb2 is about 40 μm, for example. The difference between the thicknesses Tb3 and Tb4 is about 40 μm, for example. The thickness of the second conductive joints 19B may be at least 70 μm and at most 130 μm, for example. Note that the size relation among the thicknesses Tb1 to Tb4 is designed in consideration of the direction and magnitude of warping to occur in the supporting substrate 3 (the second obverse surface 301B).

When the second conductive joints 19B are solder joints, the thicknesses Tb1 to Tb4 are formed to conform to warping of the second obverse surface 301B by adjusting the amount of solder paste applied to form the respective second conductive joints 19B.

The thicknesses Tb of the second conductive joints 19B in the thickness direction z are designed to conform to warping of the supporting substrate 3 (the second obverse surface 301B). This ensures that any second conductive joint 19B bonding a second semiconductor element 10B to a second obverse surface 301B is not undesirably thin, thereby reducing the risk of cracking or delamination of the second conductive joints 19B. The present embodiment can therefore prevent the shortening of product life, even if the supporting substrate 3 experiences deformation, such as warping.

In addition, since the thicknesses Tb of the second conductive joints 19B in the thickness direction z are configured to conform to warping of the supporting substrate 3 (the second obverse surface 301B), it is ensured that none of the second conductive joints 19B is excessively thick. A second conductive joint 19B that is too thick may inhibit heat dissipation from the second semiconductor elements 10B to the second conductive parts 32B. The present embodiment can therefore ensure more uniform heat dissipation from the second semiconductor elements 10B.

FIG. 48 is an enlarged fragmentary sectional view of a semiconductor device according to an eighth embodiment of the present disclosure, schematically showing first semiconductor elements 10A and first conductive joints 19A.

In the present embodiment, the thicknesses of the first conductive joints 19A in the thickness direction z are designed to conform to warping of the supporting substrate 3. More specifically, the first conductive joints 19A are configured such that the thicknesses Ta in the thickness direction z conform to warping of the supporting substrate 3.

In FIG. 48, the thicknesses Ta of the first conductive joints 19A are denoted as a thickness Ta1, a thickness Ta2, a thickness Ta3, and a thickness Ta4 in the order from the y2 side in the second direction y. The imaginary line in the figure represents the curve of the first obverse surface 301A of the supporting substrate 3 due to warping. Note that the curve is exaggerated for illustration purpose. In addition, the thicknesses of the first semiconductor elements 10A and the first conductive joints 19A are also exaggerated in the figure for illustration purpose. In the illustrated example, the first obverse surface 301A is curved such that the middle portion in the second direction y is closer toward the z2 side in the thickness direction z, and the ends in the second direction y are closer toward the z1 side in the thickness direction z. In this case, the thickness Ta1 is smaller than the thickness Ta2. In addition, the thickness Ta4 is smaller than the thickness Ta3. The thicknesses Ta1 and Ta4 may be substantially the same, and the thicknesses Ta2 and Ta3 may be substantially the same. The difference between the thicknesses Ta1 and Ta2 is about 40 μm, for example. The difference between the thicknesses Ta3 and Ta4 is about 40 μm, for example. The thickness of the first conductive joint 19A may be at least 70 μm and at most 130 μm, for example. Note that the size relation among the thicknesses Ta1 to Ta4 is designed in consideration of the direction and magnitude of warping to occur in the supporting substrate 3 (the first obverse surface 301A). When the first conductive joints 19A are solder joints, the thicknesses Ta1 to Ta4 are formed to conform to warping of the first obverse surface 301A by adjusting the amount of solder paste applied to form the respective first conductive joints 19A.

The present embodiment can therefore prevent the shortening of product life, even if the supporting substrate 3 experiences deformation, such as warping. As can be understood from the present embodiment, in addition, either or both of the thicknesses Ta of the first conductive joints 19A and the thicknesses Tb of the second conductive joints 19B may be formed to conform to the curve the supporting substrate 3 due to warping (the location, direction, and amount of warping, for example) of the supporting substrate 3.

Next, with reference to FIG. 49, a vehicle B with a semiconductor device A according to the present disclosure is described. The vehicle B is an electric vehicle (EV), for example.

As shown in FIG. 49, the vehicle B includes an on-board charger 91, a storage battery 92, and a drive system 93. The on-board charger 91 receives power wirelessly from an outdoor power supply facility (not shown). In a different example, the on-board charger 91 may be receive power from a power supply facility via wired connection. The on-board charger 91 includes a step-up DC-DC converter. The voltage supplied to the on-board charger 91 is boosted by the converter and then supplied to the storage battery 92. The voltage is boosted to 600 V, for example. The drive system 93 is used to drive the vehicle B. The drive system 93 includes an inverter 931 and a drive source 932. The semiconductor device A constitutes a part of the inverter 931. The power stored on the storage battery 92 is supplied to the inverter 931. The power supplied from the storage battery 92 to the inverter 931 is DC power. In an example different from FIG. 24, the power system may additionally include a DC-DC converter between the storage battery 92 and the inverter 931. The inverter 931 converts the DC power into AC power. The inverter 931 that includes the semiconductor device A is electrically connected to the drive source 932. The drive source 932 include an AC motor and a transmission. The AC power converted by the inverter 931 is supplied to the drive source 932 to rotate the AC motor. The rotation of the AC motor is transmitted to the transmission. The transmission appropriately reduces the rotational speed transmitted from the AC motor and drives the drive shaft of the vehicle B. This drives the vehicle B. Driving the vehicle B requires regulating the rotational speed of the AC motor based on the amount of accelerator pedal operation and other information. The semiconductor device A included in the inverter 931 is necessary for outputting the AC power at frequencies appropriately adjusted to match the required rotational speed of the AC motor.

The semiconductor device according to the present disclosure is not limited to the embodiments described above. Various modifications in design may be made freely in the specific structure of each part of the semiconductor device according to the present disclosure.

Clause X1.

A semiconductor device comprising:

- a supporting substrate including:
  - a first conductive part that includes a first obverse surface facing a first side in a thickness direction and is located on a first side in a first direction orthogonal to the thickness direction; and
  - a second conductive part that includes a second obverse surface facing the first side in the thickness direction and is located on a second side in the first direction;
- a plurality of first semiconductor elements mounted on the first conductive part and each having a switching function, the plurality of first semiconductor elements being aligned in a second direction orthogonal to both the thickness direction and the first direction;
- a plurality of second semiconductor elements mounted on the second conductive part and each having a switching function, the plurality of second semiconductor elements being aligned in the second direction;
- a first terminal protruding toward the first side in the first direction relative to the first conductive part;
- a first conductive member electrically connecting the plurality of first semiconductor elements and the second conductive part;
- second conductive member electrically connecting the plurality of second semiconductor elements and the first terminal; and
- a sealing resin covering the plurality of first semiconductor elements, the plurality of second semiconductor elements, the first conductive member, the second conductive member, a portion of the supporting substrate, and a portion of the first terminal,
- wherein the first conductive member includes a plurality of first bonding parts bonded to the respective first semiconductor elements and a second bonding part bonded to the second conductive part,
- the second conductive member includes a plurality of third bonding parts bonded to the respective second semiconductor elements,
- each of the plurality of first bonding parts includes a first end section located farthest on a second side in the thickness direction,
- each of the plurality of third bonding parts includes a third end section located farthest on the second side in the thickness direction, and
- positions of at least either the first end sections of the plurality of first bonding parts or the third end sections of the plurality of third bonding parts in the thickness direction are designed to conform to warping of the supporting substrate.

Clause X2.

The semiconductor device according to Clause X1, wherein the positions of the third end sections of the plurality of third bonding parts in the thickness direction are designed to conform to warping of the supporting substrate.

Clause X3.

The semiconductor device according to Clause X2, wherein each of the plurality of third bonding parts includes a flat section bonded to the plurality of first semiconductor elements.

Clause X4.

The semiconductor device according to Clause X3, further comprising a second terminal protruding toward the first side in the first direction relative to the first conductive part, the second terminal being located on a second side in the second direction relative to the first terminal,

- wherein the second conductive member includes:
  - a first path part located between the plurality of third bonding parts and the first terminal;
  - a second path part located between the plurality of third bonding parts and the second terminal;
  - a plurality of third path parts each extending in the first direction; and
  - a fourth path part extending in the second direction and connected to ends of the plurality of third path parts on the first side in the first direction, the first path part, and the second path part, and
- the plurality of third bonding parts are connected to the plurality of third path parts.

Clause X5.

The semiconductor device according to Clause X4, wherein the plurality of third path parts are located at a same position in the thickness direction, and

- distances from the flat sections of the plurality of third bonding parts to the third path parts in the thickness direction are designed to conform to warping of the supporting substrate.

Clause X6.

The semiconductor device according to Clause X5, wherein each of the third bonding parts includes a first inclined section located between one of the third path parts and one of the flat sections.

Clause X7.

The semiconductor device according to Clause X6, wherein a thickness of the first inclined sections is equal to or less than a thickness of the flat sections.

Clause X8.

The semiconductor device according to Clause X6 or X7, wherein the thickness of the first inclined sections is equal to or less than a thickness of the third path parts.

Clause X9.

The semiconductor device according to any one of Clauses X6 to x8, wherein a thickness of the flat sections is equal to a thickness of the third path parts.

Clause X10.

The semiconductor device according to any one of Clauses X6 to X9, wherein the first terminal and the second conductive member are integrally formed.

Clause X11.

The semiconductor device according to Clause X10, wherein the second terminal and the second conductive member are integrally formed.

Clause X12.

The semiconductor device according to Clause X6, wherein each of the third bonding parts includes:

- two flat sections each bonded to the second semiconductor elements and aligned in the second direction; and
- two first inclined sections connected to outer ends of the two flat sections in the second direction.

Clause X13.

The semiconductor device according to Clause X12, wherein each of the first inclined sections extends from one of the third path parts in the second direction as viewed in the thickness direction.

Clause X14.

The semiconductor device according to Clause X13, wherein the two flat sections of each of the third bonding parts are spaced apart in the second direction.

Clause X15.

The semiconductor device according to any one of Clauses X3 to X14, wherein each of the plurality of third bonding parts includes a projection that protrudes from one of the flat sections toward the second side in the thickness direction.

Clause X16.

A vehicle comprising:

- a drive source; and
- a semiconductor device according to any one of Clauses X1 to X15,
- wherein the semiconductor device is electrically connected to the drive source.

Clause Y1.

A semiconductor device comprising:

- a supporting substrate including:
  - a first conductive part that includes a first obverse surface facing a first side in a thickness direction and is located on a first side in a first direction orthogonal to the thickness direction; and
  - a second conductive part that includes a second obverse surface facing the first side in the thickness direction and is located on a second side in the first direction;
- a plurality of first semiconductor elements each mounted on the first conductive part via a first conductive joint and each having a switching function, the plurality of first semiconductor elements being aligned in a second direction orthogonal to both the thickness direction and the first direction;
- a plurality of second semiconductor elements each mounted on the second conductive part via a second conductive joint and each having a switching function, the plurality of second semiconductor elements being aligned in the second direction;
- a first terminal protruding toward the first side in the first direction relative to the first conductive part;
- a first conductive member electrically connecting the plurality of first semiconductor and the second elements conductive part;
- a second conductive member electrically connecting the plurality of second semiconductor elements and the first terminal; and
- a sealing resin covering the plurality of first semiconductor elements, the plurality of second semiconductor elements, the first conductive member, the second conductive member, a portion of the supporting substrate, and a portion of the first terminal,
- wherein thicknesses of at least either the plurality of first conductive joints or the plurality of second conductive joints in the thickness direction are designed to conform to warping of the supporting substrate.

Clause Y2.

The semiconductor device according to Clause Y1, wherein the first conductive member includes: a plurality of first bonding parts each including a flat section bonded to the first semiconductor elements; and a second bonding part bonded to the second conductive part,

- the second conductive member includes a plurality of third bonding parts each including a flat section bonded to the second semiconductor elements, and
- positions of the flat sections of at least either the plurality of first bonding parts or the plurality of third bonding parts in the thickness direction are designed to conform to warping of the supporting substrate.

Clause Y3.

The semiconductor device according to Clause Y2, wherein the positions of the flat sections of the plurality of third bonding parts in the thickness direction are designed to conform to warping of the supporting substrate.

Clause Y4.

The semiconductor device according to Clause Y3, further comprising a second terminal protruding toward the first side in the first direction relative to the first conductive part, the second terminal being located on a second side in the second direction relative to the first terminal,

- wherein the second conductive member includes:
  - a first path part located between the plurality of third bonding parts and the first terminal;
  - a second path part located between the plurality of third bonding parts and the second terminal;
  - a plurality of third path parts each extending in the first direction; and
  - a fourth path part extending in the second direction and connected to ends of the plurality of third path parts on the first side in the first direction, the first path part, and the second path part, and
- the plurality of third bonding parts are connected to the plurality of third path parts.

Clause Y5.

The semiconductor device according to Clause Y4, wherein the plurality of third path parts are located at a same position in the thickness direction, and

- distances from the flat sections of the plurality of third bonding parts to the third path parts in the thickness direction are designed to conform to warping of the supporting substrate. Clause Y6.

The semiconductor device according to Clause Y5, wherein each of the third bonding parts includes a first inclined section located between one of the third path parts and one of the flat sections.

Clause Y7.

The semiconductor device according to Clause Y6, wherein a thickness of the first inclined sections is equal to or less than a thickness of the flat sections.

Clause Y8.

The semiconductor device according to Clause Y7, wherein the thickness of the first inclined sections is equal to or less than a thickness of the third path parts.

Clause Y9.

The semiconductor device according to Clause Y8, wherein the thickness of the flat sections is equal to the thickness of the third path parts.

Clause Y10.

The semiconductor device according to Clause Y6, wherein the first terminal and the second conductive member are integrally formed.

Clause Y11.

The semiconductor device according to Clause Y10, wherein the second terminal and the second conductive member are integrally formed.

Clause Y12.

The semiconductor device according to Clause Y11, wherein the second conductive member includes a first ramp part located between the first terminal and the first path part.

Clause Y13.

The semiconductor device according to Clause Y12, wherein the second conductive member includes a second ramp part located between the second terminal and the second path part.

Clause Y14.

The semiconductor device according to Clause Y11, wherein the first terminal and the first path part are located at a same position in the thickness direction.

Clause Y15.

The semiconductor device according to Clause Y14, wherein the second terminal and the second path part are located at a same position in the thickness direction.

Clause Y16.

The semiconductor device according to any one of Clauses X6 to X15, wherein each of the third bonding parts includes:

- two flat each sections bonded to the second semiconductor elements and aligned in the second direction; and
- two first inclined sections connected to outer ends of the two flat sections in the second direction.

Clause Y17.

The semiconductor device according to Clause Y16, wherein each of the first inclined sections extends from one of the third path parts in the second direction as viewed in the thickness direction.

Clause Y18.

The semiconductor device according to Clause Y17, wherein the two flat sections of each of the third bonding parts are spaced apart in the second direction.

Clause Y19.

A vehicle comprising:

- a drive source; and
- a semiconductor device according to any one of Clauses Y1 to Y18,
- wherein the semiconductor device is electrically connected to the drive source.

Number	Date	Country	Kind
2022-055494	Mar 2022	JP	national
2022-077301	May 2022	JP	national

	Number	Date	Country
Parent	PCT/JP2023/012188	Mar 2023	WO
Child	18825485		US

SEMICONDUCTOR DEVICE

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