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Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
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Parent Industries
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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
Current Industry
H01J3/00
Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
Sub Industries
H01J3/02
Electron guns
H01J3/021
Electron guns using a field emission, photo emission, or secondary emission electron source
H01J3/022
with micro-engineered cathode
H01J3/023
Electron guns using electron multiplication
H01J3/024
Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams
H01J3/025
Electron guns using a discharge in a gas or a vapour as electron source
H01J3/026
Eliminating deleterious effects due to thermal effects, electric or magnetic field
H01J3/027
Construction of the gun or parts thereof
H01J3/028
Replacing parts of the gun; Relative adjustment
H01J3/029
Schematic arrangements for beam forming
H01J3/04
Ion guns
H01J3/06
two or more guns being arranged in a single vacuum space
H01J3/07
Arrangements for controlling convergence of a plurality of beams
H01J3/08
Arrangements for controlling intensity of ray or beam
H01J3/10
Arrangements for centering ray or beam
H01J3/12
Arrangements for controlling cross-section of ray or beam Arrangements for correcting aberration of beam
H01J3/14
Arrangements for focusing or reflecting ray or beam
H01J3/16
Mirrors
H01J3/18
Electrostatic lenses
H01J3/20
Magnetic lenses
H01J3/22
using electromagnetic means only
H01J3/24
using permanent magnets only
H01J3/26
Arrangements for deflecting ray or beam
H01J3/28
along one straight line or along two perpendicular straight lines
H01J3/30
by electric fields only
H01J3/32
by magnetic fields only
H01J3/34
along a circle, spiral, or rotating radial line
H01J3/36
Arrangements for controlling the ray or beam after passing the main deflection system
H01J3/38
Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
H01J3/381
Dispersed generators
H01J3/383
the generators exploiting regenerative energy
H01J3/385
Solar energy
H01J3/386
Wind energy
H01J3/388
using fuel cells
H01J3/40
Traps for removing or diverting unwanted particles
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Patents Grants
last 30 patents
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Patent Grant
Plasma excitation with ion energy control
Patent number
11,967,483
Issue date
Apr 23, 2024
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for parts cleaning
Patent number
11,967,491
Issue date
Apr 23, 2024
Semes Co., Ltd.
Soon-Cheon Cho
B08 - CLEANING
Information
Patent Grant
Thin film manufacturing apparatus
Patent number
11,967,492
Issue date
Apr 23, 2024
AP SYSTEMS INC.
Byoung Il Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing thin film and method of manufacturing semicond...
Patent number
11,967,503
Issue date
Apr 23, 2024
Wonik IPS Co., Ltd.
Su In Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for detecting abnormality of thin-film deposition...
Patent number
11,965,237
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wen-Hao Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grid coatings for capture of proteins and other compounds
Patent number
11,965,851
Issue date
Apr 23, 2024
Purdue Research Foundation
David H. Thompson
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,967,485
Issue date
Apr 23, 2024
Tokyo Electron Limited
Eiki Kamata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system including dual ion filter for downstrea...
Patent number
11,967,486
Issue date
Apr 23, 2024
Lam Research Corporation
Andrew Stratton Bravo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing sputtering target, method for forming oxid...
Patent number
11,967,505
Issue date
Apr 23, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Liquid crystal polymer for mounting x-ray window
Patent number
11,967,481
Issue date
Apr 23, 2024
Moxtek, Inc.
Jared Sommer
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Charged particle beam device
Patent number
11,967,482
Issue date
Apr 23, 2024
HITACHI HIGH-TECH CORPORATION
Wen Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
Patent number
11,965,262
Issue date
Apr 23, 2024
ASM IP Holding B.V.
Yong Min Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming nickel silicide materials
Patent number
11,965,236
Issue date
Apr 23, 2024
Applied Materials, Inc.
Minrui Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support for chucking of mask for deposition processes
Patent number
11,967,516
Issue date
Apr 23, 2024
Applied Materials, Inc.
Jrjyan Jerry Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck with ceramic monolithic body
Patent number
11,967,517
Issue date
Apr 23, 2024
Lam Research Corporation
Feng Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion current droop compensation
Patent number
11,967,484
Issue date
Apr 23, 2024
Eagle Harbor Technologies, Inc.
Christopher Bowman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for treatment of deposition reactor
Patent number
11,967,488
Issue date
Apr 23, 2024
ASM IP Holding B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and techniques for angled etching using multielectrode ex...
Patent number
11,967,489
Issue date
Apr 23, 2024
Applied Materials, Inc.
Peter F. Kurunczi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
Patent number
11,967,490
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Akihiro Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cr—Si sintered body
Patent number
11,967,493
Issue date
Apr 23, 2024
Tosoh Corporation
Hiroyuki Hara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High resolution imaging apparatus and method
Patent number
11,967,496
Issue date
Apr 23, 2024
Standard BioTools Canada Inc.
Paul Corkum
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Voltage waveform generator for plasma processing apparatuses
Patent number
11,968,771
Issue date
Apr 23, 2024
PRODRIVE TECHNOLOGIES INNOVATION SERVICES B.V.
Antonius Wilhelmus Hendricus Johannes Driessen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image intensifier device with power supply disposed upstream of the...
Patent number
11,967,480
Issue date
Apr 23, 2024
Photonis France
Nicolas Laurent
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming method of component and plasma processing apparatus
Patent number
11,967,487
Issue date
Apr 23, 2024
Tokyo Electron Limited
Michishige Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,967,511
Issue date
Apr 23, 2024
Tokyo Electron Limited
Akira Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shunt door for magnets in plasma process chamber
Patent number
11,959,174
Issue date
Apr 16, 2024
Applied Materials, Inc.
Kallol Bera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate treating apparatus, ion implantation apparatus, and ion i...
Patent number
11,961,695
Issue date
Apr 16, 2024
Semes Co., Ltd.
Doyeon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,961,699
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Hideo Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and operation method therefor
Patent number
11,961,701
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Tomoharu Nagashima
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
Patent number
11,961,703
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FILM FORMING DEVICE AND FILM FORMING METHOD
Publication number
20240133031
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Jun YAMAWAKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EMITTER, FIELD EMISSION ASSEMBLY AND ELECTROMAGNETIC WAVE GENERATOR...
Publication number
20240136142
Publication date
Apr 25, 2024
AweXome Ray, Inc.
Hong Soo CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEMS USEFUL FOR PRODUCING ALUMINUM IONS
Publication number
20240136145
Publication date
Apr 25, 2024
Entegris, Inc.
Ying TANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
Publication number
20240136146
Publication date
Apr 25, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NANOSECOND PULSER ADC SYSTEM
Publication number
20240136152
Publication date
Apr 25, 2024
Eagle Harbor Technologies, Inc.
Kenneth Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LONG-LIFE EXTENDED TEMPERATURE RANGE EMBEDDED DIODE DESIGN FOR ELEC...
Publication number
20240136214
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Siyuan TIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
Publication number
20240136462
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Gianpaolo LORITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
Publication number
20240136162
Publication date
Apr 25, 2024
LG Display Co., Ltd.
Young Gon KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA CHAMBER FOR AN OPTICAL EMISSION SPECTROSCOPY INSTRUMENT
Publication number
20240136163
Publication date
Apr 25, 2024
Hitachi High-Tech Analytical Science GmbH
André PETERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNGSTEN SUBOXIDE CERAMIC TARGET
Publication number
20240133024
Publication date
Apr 25, 2024
SOLERAS ADVANCED COATINGS BV
Ignacio CARETTI GIANGASPRO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
Publication number
20240133025
Publication date
Apr 25, 2024
SOLERAS ADVANCED COATINGS BV
Wilmert DE BOSSCHER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion source structure of ion implanter and its operation method
Publication number
20240136144
Publication date
Apr 25, 2024
United Semiconductor (Xiamen) Co., Ltd.
Wen Shuo Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
Publication number
20240136148
Publication date
Apr 25, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240136150
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESONANT ANTENNA FOR PHYSICAL VAPOR DEPOSITION APPLICATIONS
Publication number
20240136151
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Barton LANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS
Publication number
20240136154
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Kazushi KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A Method for the Simulation of an Energy-Filtered Ion Implantation...
Publication number
20240135066
Publication date
Apr 25, 2024
mi2-factory GmbH
Florian KRIPPENDORF
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
Publication number
20240136161
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Karl Frederick LEESER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MICROCHANNEL PLATE AND METHOD OF MAKING THE MICROCHANNEL PLATE WITH...
Publication number
20240136141
Publication date
Apr 25, 2024
Elbit Systems of America, LLC
Stephen W. Carroll
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metallic Shield For Stable Tape-Frame Substrate Processing
Publication number
20240136159
Publication date
Apr 25, 2024
Harish Varma PENMETHSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD
Publication number
20240136147
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRONIC TWEEZERS
Publication number
20240136149
Publication date
Apr 25, 2024
Zhejiang University
He TIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
Publication number
20240136153
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Matthew Scott Weimer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240136157
Publication date
Apr 25, 2024
SEMES CO., LTD.
Je Ho KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
Publication number
20240136160
Publication date
Apr 25, 2024
Applied Materials, Inc.
Zheng John YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for OES Data Collection and Endpoint Detection
Publication number
20240136164
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Sergey Voronin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PLACEMENT TABLE
Publication number
20240136219
Publication date
Apr 25, 2024
NGK Insulators, Ltd.
Tatsuya KUNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEXTURED SURFACES FOR BREAST IMPLANTS
Publication number
20240130846
Publication date
Apr 25, 2024
Establishment Labs S.A.
Ardeshir BAYAT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL SEMICONDUCTOR COMPONENT AND METHOD FOR GENERATING AN ABRUP...
Publication number
20240136236
Publication date
Apr 25, 2024
ROBERT BOSCH GmbH
Christian Huber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-METAL PATTERNED ANODE FOR COMPUTED TOMOGRAPHY X-RAY SYSTEMS
Publication number
20240136143
Publication date
Apr 25, 2024
National Technology & Engineering Solutions of Sandia, LLC
Courtney Leigh Hummell Sovinec
H01 - BASIC ELECTRIC ELEMENTS