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3218205
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Information
Patent Grant
3218205
References
Source
Patent Number
3,218,205
Date Filed
Not available
Date Issued
Tuesday, November 16, 1965
59 years ago
CPC
C30B29/40 - AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
C30B25/02 - Epitaxial-layer growth
H01L21/0237 - Materials
H01L21/02392 - Phosphides
H01L21/02395 - Arsenides
H01L21/02543 - Phosphides
H01L21/02546 - Arsenides
H01L21/02549 - Antimonides
H01L21/02576 - N-type
H01L21/02579 - P-type
H01L21/0262 - Reduction or decomposition of gaseous compounds
Y10S148/005 - Antimonides of gallium or indium
Y10S148/017 - Clean surfaces
Y10S148/056 - Gallium arsenide
Y10S148/065 - Gp III-V generic compounds-processing
Y10S148/072 - Heterojunctions
Y10S148/11 - Metal-organic CVD, ruehrwein type
Y10S252/951 - for vapor transport
Y10S438/933 - Germanium or silicon or Ge-Si on III-V
US Classifications
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
023 - Chemistry: physical processes
148 - Metal treatment
252 - Compositions
257 - Active solid-state devices
423 - Chemistry of inorganic compounds
438 - Semiconductor device manufacturing: process
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