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3751310
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Information
Patent Grant
3751310
References
Source
Patent Number
3,751,310
Date Filed
Not available
Date Issued
Tuesday, August 7, 1973
51 years ago
CPC
C30B23/02 - Epitaxial-layer growth
C30B29/40 - AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
H01L21/02395 - Arsenides
H01L21/02546 - Arsenides
H01L21/02576 - N-type
H01L21/02579 - P-type
H01L21/02631 - Physical deposition at reduced pressure
H01L33/0062 - for devices with an active region comprising only III-V compounds
Y10S148/002 - Amphoteric doping
Y10S148/018 - Compensation doping
Y10S148/02 - Contacts, special
Y10S148/065 - Gp III-V generic compounds-processing
Y10S148/072 - Heterojunctions
Y10S148/169 - Vacuum deposition
Y10S252/951 - for vapor transport
Y10S438/915 - Amphoteric doping
Y10S438/925 - Fluid growth doping control
US Classifications
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
148 - Metal treatment
252 - Compositions
257 - Active solid-state devices
423 - Chemistry of inorganic compounds
438 - Semiconductor device manufacturing: process
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