This disclosure relates to the field of semiconductor packages. More particularly, but not exclusively, this disclosure relates to plated lead frames in semiconductor packages.
An important aspect of semiconductor packaging is integration of lead frames that serve as a bridge between internal semiconductor components and the external world, enabling the transfer of electrical signals and power. Lead frames are commonly manufactured using various methods, including stamping and etching processes of metal sheets or strips that form the foundation of the lead frames. The patterned metal sheets or strips, commonly made of materials like copper and copper alloys, are then bent and shaped to accommodate the specific requirements of the semiconductor package. However, the increasing demand for higher performance and miniaturization of semiconductor packages, coupled with the need for enhanced soldering reliability, has driven the development of novel techniques and materials for constructing lead frames. Electroplating is commonly used for producing lead frames with improved performance characteristics, particularly when it comes to soldering reliability. The quality of the solder joints is important for ensuring reliable electrical connections and long-term device functionality. Electroplated lead frames provide a means to address these requirements.
The present disclosure introduces a semiconductor package including a semiconductor component and a plurality of leads electrically connected to the semiconductor component. The leads extend through an encapsulation material to an exterior of the semiconductor package. Each of the leads has a first surface, and has a second surface opposite from the first surface, with a solderable metal on the first surface and the second surface. A portion of the first surface provides an area for a solder joint to a system substrate, such as a printed circuit board, when the semiconductor package is assembled into an electronic apparatus. The solderable metal has a first average thickness on the first surfaces, and has a second average thickness on the second surfaces. The second average thickness is 10 percent to 80 percent of the first average thickness. The semiconductor package is formed by concurrently electroplating the solderable metal on the first surfaces and on the second surfaces. The solderable metal is electroplated on the first surfaces with a first average current, and is electroplated on the second surfaces with a second average current. The second average current is 10 percent to 80 percent of the first average current.
The present disclosure is described with reference to the attached figures. The figures are not drawn to scale and they are provided merely to illustrate the disclosure. Several aspects of the disclosure are described below with reference to example applications for illustration. It should be understood that numerous specific details, relationships, and methods are set forth to provide an understanding of the disclosure. The present disclosure is not limited by the illustrated ordering of acts or events, as some acts may occur in different orders and/or concurrently with other acts or events. Furthermore, not all illustrated acts or events are required to implement a methodology in accordance with the present disclosure.
In addition, although some of the embodiments illustrated herein are shown in two dimensional views with various regions having depth and width, it should be clearly understood that these regions are illustrations of only a portion of a device that is actually a three dimensional structure. Accordingly, these regions will have three dimensions, including length, width, and depth, when fabricated on an actual device. Moreover, while the present invention is illustrated by embodiments directed to active devices, it is not intended that these illustrations be a limitation on the scope or applicability of the present invention. It is not intended that the active devices of the present invention be limited to the physical structures illustrated. These structures are included to demonstrate the utility and application of the present invention to presently preferred embodiments.
A semiconductor package includes a semiconductor component. The semiconductor package also includes leads of a lead frame. The semiconductor component is electrically connected to one or more of the leads. The leads each have a first surface and a second surface opposite from the first surface. A solderable metal, such as primarily tin, silver, nickel, gold, or palladium, or an alloy thereof, is electroplated on the first surface and the second surface. The solderable metal has a first average thickness on the first surfaces, and has a second average thickness on the second surfaces. The first and second average thicknesses are the thicknesses of the solderable metal in a direction perpendicular to an instant segment of the first and second surfaces of the leads, averaged over an area of the first and second surfaces, respectively. The second average thickness is 10 percent to 80 percent of the first average thickness. When the semiconductor package is assembled into an electronic apparatus by soldering the leads to a system substrate, such as a printed circuit board, a portion of the first surface provides an area for a solder joint. The first average thickness is sufficient to provide reliable solder joints, and may be 5 microns to 20 microns, by way of example. The second average thickness is sufficiently thick, that is, at least 10 percent of the first average thickness, to reduce oxidation or corrosion of the leads, thereby improving reliability of the semiconductor package. The second average thickness is sufficiently thin, that is, no more than 80 percent of the first average thickness, to attain a desired reduction in material costs of the solderable metal. A further advantage may be realized when forming two-dimensional barcodes on the second surface of lead frame before the solderable metal is electroplated. The barcodes may be formed in accordance with SEMI T9 specification and have an array of 100 micron diameter bumps that are on a 100 micron pitch. The thinner solderable metal on the barcodes may improve readability of the barcodes compared to barcodes having the thicker solderable metal. The semiconductor component has an encapsulation material contacting the semiconductor component and the leads. The leads extend through the encapsulation material to an exterior of the semiconductor package.
The semiconductor package is formed by concurrently electroplating the solderable metal on the first surfaces and on the second surfaces. The solderable metal is electroplated on the first surfaces with a first plating current, which may be direct current (DC). The solderable metal is electroplated on the second surfaces with a second plating current, which may be DC or modulated DC, that is, cyclically switched on and off, or cyclically switched between a first DC level and a second DC level. An average current of the second plating current is 10 percent to 80 percent of an average current of the first plating current, to attain a desired thickness ratio of the solderable metal on the first surfaces and on the second surfaces. Electroplating the solderable metal concurrently on the first surfaces and on the second surfaces may advantageously reduce cycle time, and thus reduce fabrication cost, compared to plating the solderable metal on the first surfaces and on the second surfaces in separate sequential operations. For the purposes of this disclosure, the term “concurrently electroplating” includes modulated DC or any other method of providing the first plating current and the second plating current in which the first plating current and the second plating current are flowing simultaneously during at least a portion of an electroplating process used to form the solderable metal on the leads.
For the purposes of this disclosure, a structure that is disclosed as including “primarily” a substance has more than 50 percent, by weight, of that substance. For example, a solderable metal that is disclosed to include primarily tin has more than 50 percent, by weight, of the element tin.
The semiconductor package 100 includes an encapsulation material 114 contacting the semiconductor component 102 and the leads 106. The encapsulation material 114 may surround the semiconductor component 102, the electrical connections 112, and the die pad 104, as depicted in
The leads 106 have first surfaces 116 at the exterior of the semiconductor package 100 which will be positioned on a system substrate in an electronic apparatus, not specifically shown, containing the semiconductor package 100. The leads 106 have second surfaces 118 located opposite from the first surfaces 116. The semiconductor package 100 includes a solderable metal 120, such as primarily tin, silver, nickel, gold, or palladium, or an alloy thereof, on the first surfaces 116 and the second surfaces 118 of the leads 106. The solderable metal 120 covers the leads 106 at the exterior of the semiconductor package 100 and, in this example, may extend partway into the encapsulation material 114, as depicted in
The semiconductor package 200 includes an encapsulation material 214 contacting the semiconductor component 202 and the leads 206. The encapsulation material 214 may surround the semiconductor component 202 and the electrical connections 212, as depicted in
The leads 206 have first surfaces 216 at the exterior of the semiconductor package 200, and have second surfaces 218 located opposite from the first surfaces 216. The semiconductor package 200 includes a solderable metal 220 on the first surfaces 216 and the second surfaces 218 of the leads 206. The solderable metal 220 covers the leads 206 at the exterior of the semiconductor package 200 and, in this example, covers the leads 206 in the encapsulation material 214, as depicted in
The lead frame 308 is immersed in a plating system 326. The plating system 326 includes a plating solution 328 having metal ions, such as tin ions, silver ions, nickel ions, gold ions, or palladium ions, of a solderable metal 320, such as tin, silver, nickel, gold, or palladium, or an alloy thereof, respectively, being electroplated onto the lead frame 308. The plating system 326 also includes a first anode 330 facing the first surfaces 316, and includes a second anode 332 facing the second surfaces 318. The first anode 330 and the second anode 332 may be implemented as anode bags containing metal plates or wires of the solderable metal 320. Other implementations of the first anode 330 and the second anode 332 are within the scope of this example.
The plating system 326 may include a first screen 334 positioned between the first surfaces 316 and the first anode 330. The first screen 334 is located so as not to significantly obstruct the metal ions drifting from the first anode 330 to the first surfaces 316. The first screen 334 is located below a center line 336 of the lead frame 308. In one version of this example, the first screen 334 may be located below a bottom of the lead frame 308, as depicted in
The plating system 326 includes a second screen 338 positioned between the second surfaces 318 and the second anode 332. The second screen 338 may be solid, that is, may be free of apertures. The second screen 338 is located above the center line 336 of the lead frame 308. In one version of this example, the second screen 338 may extend proximate to a top of the lead frame 308, as depicted in
The plating system 326 includes a first power supply 340 configured to supply current from the lead frame 308 to the first anode 330. The first power supply 340 may be implemented as a constant voltage source, as indicated schematically in
The plating system 326 includes a second power supply 342 configured to supply current from the lead frame 308 to the second anode 332. The second power supply 342 may be implemented as another constant voltage source. Alternatively, the second power supply 342 may be implemented as a modulated voltage source, a regulated current source, or a modulated current source.
During an electroplating process using the plating system 326, the first power supply 340 causes the metal ions in the plating solution 328 between the first anode 330 and the lead frame 308 to drift to the first surfaces 316 and to electroplate the solderable metal 320 onto the first surfaces 316 of the lead frame 308. In this example, the location of the first screen 334 below the center line 336 of the lead frame 308 enables a relatively unobstructed flow of the metal ions to the first surfaces 316.
The second power supply 342 causes the metal ions in the plating solution 328 between the second anode 332 and the lead frame 308 to drift over the second screen 338 to the second surfaces 318 and to electroplate the solderable metal 320 onto the second surfaces 318. In this example, the location of the second screen 338 above the center line 336 reduces the flow of the metal ions to the second surfaces 318 compared to the unobstructed flow of the metal ions to the first surfaces 316. The first power supply 340 and the second power supply 342 are operated concurrently.
The result is a first average current flowing from the first anode 330 to the first surfaces 316, and a second average current flowing from the second anode 332 to the second surfaces 318. The second average current is 10 percent to 80 percent of the first average current, resulting in the solderable metal 320 being electroplated at a lower rate on the second surfaces 318 compared to the first surfaces 316. The lower electroplating rate on the second surfaces 318 produces a lower thickness of the solderable metal 320 on the second surfaces 318, compared to the first surfaces 316, as disclosed in reference to
The plating system 426 may include a first screen 434 positioned between the first surfaces 416 and the first anode 430. The first screen 434 is located so as not to significantly obstruct the metal ions drifting from the first anode 430 to the first surfaces 416. The first screen 434 is positioned below a center line 436 of the lead frame 408, for example, below a bottom of the lead frame 408, as depicted in
The plating system 426 further includes a second screen 438 positioned between the second surfaces 418 and the second anode 432. In this example, the second screen 438 may be implemented as a perforated screen 438 having apertures 444 to allow reduced flow of the metal ions from the second anode 432 to the second surfaces 418. The second screen 438 is located above the center line 436 of the lead frame 408, and may extend proximate to a top of the lead frame 408, as depicted in
The plating system 426 includes a first power supply 440 configured to supply current from the lead frame 408 to the first anode 430, and a second power supply 442 configured to supply current from the lead frame 408 to the second anode 432. The first power supply 440 and the second power supply 442 may be implemented as constant voltage sources, as indicated schematically in
During an electroplating process using the plating system 426, the first power supply 440 and the second power supply 442 are operated concurrently, causing the metal ions in the plating solution 428 to drift to the first surfaces 416 unobstructed, and to drift to the second surfaces 418 at a slower rate, due to the second screen 438. A flow of the metal ions to the second surfaces 418 may advantageously be more uniform, due to the apertures 444 across the second screen 438, compared to a solid screen. The result is a first average current flowing from the first anode 430 to the first surfaces 416, and a second average current flowing from the second anode 432 to the second surfaces 418. The second average current is 10 percent to 80 percent of the first average current.
The solderable metal 420 is electroplated onto the first surfaces 416 at a first rate and is electroplated onto the second surfaces 418 at a second rate that is lower than the first rate. The lower electroplating rate on the second surfaces 418 produces a lower thickness of the solderable metal 420 on the second surfaces 418, compared to the first surfaces 416, as disclosed in reference to
In this example, the plating system 526 includes a first power supply 540 configured to supply a constant first average current from the lead frame 508 to the first anode 530, and a second power supply 542 configured to supply a constant second average current from the lead frame 508 to the second anode 532. The second average current is 10 percent to 80 percent of the first average current. The first power supply 540 and the second power supply 542 of this example are implemented as constant current sources, as indicated schematically in
During an electroplating process using the plating system 526, the first power supply 540 and the second power supply 542 are operated concurrently, causing the metal ions in the plating solution 528 to drift to the first surfaces 516 unobstructed, and to drift to the second surfaces 518 at a slower rate, due to the second average current being less than the first average current. The solderable metal 520 is electroplated onto the first surfaces 516 at a first rate and is electroplated onto the second surfaces 518 at a second rate that is lower than the first rate. The lower electroplating rate on the second surfaces 518 produces the lower thickness of the solderable metal 520 on the second surfaces 518, compared to the first surfaces 516, as disclosed in reference to
The plating system 726 includes a first power supply 740 configured to supply a constant first average current from the lead frame 708 to the first anode 730. In this example, the plating system 726 includes a second power supply 742 configured to supply a second current, modulated by a switch 746, from the lead frame 708 to the second anode 732. The switch 746 may be implemented as a solid state relay, by way of example. The switch 746 is configured to be modulated between an ON state and an OFF state. The second current alternates between essentially zero, when the switch 746 is in the OFF state, and a current magnitude comparable to the first average current, when the switch 746 is in the ON state. An average of the second current, that is, the second average current, is 10 percent to 80 percent of the first average current. A duty cycle of the switch 746, that is a ratio of a total time in the ON state to a sum of the total time in the ON state and a total time in the OFF state, may be adjusted to provide a desired value for the second average current. The first power supply 740 and the second power supply 742 of this example are implemented as constant current sources, as indicated schematically in
During an electroplating process using the plating system 726, the first power supply 740 and the second power supply 742, modulated by the switch 746, are operated concurrently, causing the metal ions in the plating solution 728 to drift to the first surfaces 716 unobstructed, and to drift to the second surfaces 718 at a slower rate, due to the second average current being less than the first average current. The solderable metal 720 is electroplated onto the first surfaces 716 at a first rate and is electroplated onto the second surfaces 718 at a second rate that is lower than the first rate. The lower electroplating rate on the second surfaces 718 produces the lower thickness of the solderable metal 720 on the second surfaces 718, compared to the first surfaces 716, as disclosed in reference to
Various features of the examples disclosed herein may be combined in other manifestations of example semiconductor packages. For example, any of the methods disclosed in reference to
While various embodiments of the present disclosure have been described above, it should be understood that they have been presented by way of example only and not limitation. Numerous changes to the disclosed embodiments can be made in accordance with the disclosure herein without departing from the spirit or scope of the disclosure. Thus, the breadth and scope of the present invention should not be limited by any of the above described embodiments. Rather, the scope of the disclosure should be defined in accordance with the following claims and their equivalents.