Embodiments of the present invention generally relate to methods of self-assembly and apparatus for accomplishing the same.
Self-assembly is a promising technique to overcome limitations, for example, with integrating, packaging, and/or handling individual electronic components that have critical dimensions of about 300 microns or below. Methods of self-assembly may include gravitational, capillary, or magnetic forces, each of which has limitations related to assembling one or more electronic components on a substrate, for example, such as aligning one or more electronic components with a binding site on the substrate.
The inventor has provided improved methods and apparatus for self-assembly.
Embodiments of the present invention include methods and apparatus for self-assembling a part on a substrate. In some embodiments, a method of self-assembling a part on a substrate includes placing a substrate into a first fluid, the substrate including a first binding site capable of generating a first electromagnetic field and having a first shaped surface with a first droplet conformably disposed on the first shaped surface, wherein the first droplet is immiscible in the first fluid; placing a part into the first fluid, the part having a second binding site capable of generating a second electromagnetic field and having a second shaped surface with a second droplet conformably disposed on the second shaped surface, wherein the second droplet is immiscible in the first fluid; and attracting the part towards the first binding site using the first and second electromagnetic fields such that the first and second droplets solubilize with each other forming an equilibrium between an attractive force between the first and second electromagnetic fields and a repulsive force between the solubilized first and second droplets and the first fluid such that the part is free to rotate about the first binding site to minimize the repulsive force by minimizing an exposed surface area of the solubilized first and second droplets with respect to the first fluid when the first and second shaped surfaces rotate into an alignment causing the part to aligned with the first binding site.
In some embodiments, an apparatus includes a substrate having a first binding site having a first shaped surface and a first electromagnetic field generating element; and a part having a second binding opposing the first binding site, wherein the second binding site has a second shaped surface and a second electromagnetic field generating element and wherein the first shaped surface is aligned with the second shaped surface.
Other and further embodiments of the present invention are discussed below.
So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.
Embodiments of the present invention comprise methods and apparatus for self-assembling a part on a substrate. The inventive methods and apparatus advantageously facilitate the self-assembly of the part onto the substrate such that the part and the substrate are aligned during the self-assembly process.
The first binding site 104 may include a first electromagnetic field generating element 106 and a first layer 108. For example, the first magnetic field generating element 106 may include one or more of a polarized permanent magnet, a hard magnet, a polarized permanent electrostatic material, an electrode providing an electro static field, or an electromagnet. The first magnetic field generating element 106 may be covered by the first layer 108, for example, to provide a surface suitable for attachment of a self-assembled monolayer, as described below. The first layer 108 may be formed of one or more of gold (Au), copper (Cu), silicon dioxide (SiO2), or the like. The first layer 108 may include a first shaped surface 110, where the first shaped surface 110 may be utilized to promote alignment of the part 101 with the substrate 102 as discussed below. For example, the first shaped surface 110 may include any suitable shape not having the same radial distance in every direction from a central axis passing through the surface 110. For example, as illustrated in
The part 101 may comprise one or more of transistors, optoelectronic devices, sensors, or other suitable devices or the like. The part 101 may include a second binding, site 112 opposing the first binding site 104. The second binding site 112 may include a second electromagnetic field generating element 114 and a second layer 116. The second binding site 112 may be substantially similar to the first binding site 104 as described above. For example, the second magnetic field generating element 114 may include one or more of a polarized permanent magnet, a hard magnet, a polarized permanent electrostatic material, or a material which is highly permeable to the electromagnetic field lines emanating from the first electromagnetic field generator, such as permalloy, nickel-iron (Ni—Fe), or the like. The second magnetic field generating element 114 may be covered by the second layer 116, for example, to provide a surface suitable for attachment of a self-assembled monolayer, as described below. The second layer 116 may be formed of one or more of gold (Au), copper (Cu), silicon dioxide (SiO2), or the like. The second layer 116 may include a second shaped surface 118, where the second shaped surface 118 may be utilized to promote alignment of the part 101 with the substrate 102 as discussed below. For example, as discussed above with respect to the first shaped surface 110, the second shaped surface 118 may include any suitable shape not having the same radial distance in every direction from a central axis passing through the surface 110. For example, as illustrated in
As illustrated in
The article 100 may include a plurality of electrical connections 120 disposed about the first and second binding sites 104, 112, wherein each electrical connection 120 provides an electrical pathway between the substrate 102 and the part 101. For example, each electrical connection 120 may include a first metal layer 122 contacting the substrate 102, for example via the electrically conductive layer 105, as shown, or alternatively directly to the substrate 102 (not shown). Each electrical connection 120 may include a second metal layer 124 contacting the part 101 and a solder layer 126 disposed between the first and second metal layers 122, 124. For example, the first and second metal layers may be formed from one or more of gold (Au), copper (Cu), nickel (Ni), or other suitable conducting materials. For example, the solder layer 126 may be formed from one or more of tin-lead (Sn—Pb), tin-bismuth (Sn—Bi), tin (Sn), or other suitable solder materials.
The method 200 begins at 202, by placing the substrate 102 in a first fluid 300. For example, as illustrated in
In some embodiments, to form the first droplet 302, the substrate 102 may be placed into the second fluid prior to placing the substrate into the first fluid 300. For example, the second fluid may wet the first shaped surface 110 while not wetting other surfaces of the substrate 102. Alternatively, the second fluid 304 may be disposed above the first fluid 300 and the substrate 102 may passed through the second fluid 304 to enter the first fluid 300 as illustrated in
At 204, the part 101 may be placed into the first fluid as illustrated in
At 206, the part 101 may be attracted towards the first binding site 114 as illustrated in
Once the part 101 is aligned with the substrate 102, the part 101 may be contacted with the substrate 102 such that the plurality of first metal layers 124 contact the corresponding plurality of solder layers 126. For example, to contact the part 101 with the substrate 102, the solubilized first and second droplets 302, 312 may be removed such that the attractive force between the first and second electromagnetic field generating elements 106, 114 pulls the first metal layers 124 and corresponding solder layers 126 together.
In some embodiments, the solubilized first and second droplets 302, 312 may be removed by adding a third fluid (not shown) to the first fluid 300, where the third fluid may be soluble in both the first and second fluids. Exemplary third fluids may include one or more of ethanol (CH3CH2OH), acetone ((CH3)2CO). methanol (CH3OH), or the like. For example, the third fluid may dissolve the solubilized first and second droplets 302, 312 as illustrated in
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof.
This application is a divisional application of and claims priority to U.S. patent application Ser. No. 13/366,436, entitled “Electromagnetic Field Assisted Self-Assembly With Formation of Electrical Contacts,” by Christopher Morris filed Feb. 6, 2012, herein incorporated by reference in its entirety.
Governmental Interest—The invention described herein may be manufactured, to used and licensed by or for the U.S. Government.
Number | Name | Date | Kind |
---|---|---|---|
2991347 | Weinstein | Jul 1961 | A |
3397278 | Pomerantz | Aug 1968 | A |
3855693 | Umbaugh | Dec 1974 | A |
3887997 | Hartleroad et al. | Jun 1975 | A |
5005757 | Kornely et al. | Apr 1991 | A |
5346775 | Jin et al. | Sep 1994 | A |
5355577 | Cohn | Oct 1994 | A |
5478778 | Tanisawa | Dec 1995 | A |
5539153 | Schwiebert et al. | Jul 1996 | A |
5545291 | Smith et al. | Aug 1996 | A |
5824186 | Smith et al. | Oct 1998 | A |
5986348 | Fukano | Nov 1999 | A |
6011307 | Jiang et al. | Jan 2000 | A |
6186392 | Ball | Feb 2001 | B1 |
6239385 | Schwiebert et al. | May 2001 | B1 |
6251765 | Fukano et al. | Jun 2001 | B1 |
6527964 | Smith et al. | Mar 2003 | B1 |
6536106 | Jackson et al. | Mar 2003 | B1 |
6599465 | Reppel et al. | Jul 2003 | B1 |
6605453 | Ozkan et al. | Aug 2003 | B2 |
6687987 | Mayer et al. | Feb 2004 | B2 |
6709966 | Hisatsune et al. | Mar 2004 | B1 |
6780696 | Schatz | Aug 2004 | B1 |
6864570 | Smith | Mar 2005 | B2 |
6909185 | Kondo et al. | Jun 2005 | B1 |
6974604 | Hunter et al. | Dec 2005 | B2 |
7018575 | Brewer et al. | Mar 2006 | B2 |
7223635 | Brewer | May 2007 | B1 |
7232704 | Singh | Jun 2007 | B2 |
7253091 | Brewer et al. | Aug 2007 | B2 |
7584533 | Smeys et al. | Sep 2009 | B2 |
8850695 | Call et al. | Oct 2014 | B1 |
9015930 | Maeda et al. | Apr 2015 | B2 |
20050230827 | Naito et al. | Oct 2005 | A1 |
20050239261 | Tai et al. | Oct 2005 | A1 |
20060022784 | Kopp | Feb 2006 | A1 |
20060030071 | Mizukoshi et al. | Feb 2006 | A1 |
20060048384 | Ricks et al. | Mar 2006 | A1 |
20060051517 | Haas et al. | Mar 2006 | A1 |
20060172126 | Long et al. | Aug 2006 | A1 |
20060197213 | Lian et al. | Sep 2006 | A1 |
20060223205 | Jacobs et al. | Oct 2006 | A1 |
20060234405 | Best | Oct 2006 | A1 |
20070001313 | Fujimoto et al. | Jan 2007 | A1 |
20070037379 | Enquist et al. | Feb 2007 | A1 |
20070231826 | Huber et al. | Oct 2007 | A1 |
20070231961 | Teshirogi et al. | Oct 2007 | A1 |
20080068816 | Han et al. | Mar 2008 | A1 |
20080131670 | Sun | Jun 2008 | A1 |
20080218299 | Arnold | Sep 2008 | A1 |
20080308953 | Autumn et al. | Dec 2008 | A1 |
20100165590 | Ishizaki | Jul 2010 | A1 |
20100170086 | Ramadan et al. | Jul 2010 | A1 |
20100214747 | Jacobs et al. | Aug 2010 | A1 |
20100225434 | Wang et al. | Sep 2010 | A1 |
20100232220 | Meade et al. | Sep 2010 | A1 |
20110115078 | Jeong et al. | May 2011 | A1 |
20110179640 | Arnold et al. | Jul 2011 | A1 |
20110223776 | Ferber, Jr. | Sep 2011 | A1 |
20110266030 | Swaminathan et al. | Nov 2011 | A1 |
20110278044 | Aleksov et al. | Nov 2011 | A1 |
20110278351 | Aleksov et al. | Nov 2011 | A1 |
20110281375 | Swaminathan et al. | Nov 2011 | A1 |
20110284262 | Chappell et al. | Nov 2011 | A1 |
20120228752 | Huang | Sep 2012 | A1 |
20120313236 | Wakiyama et al. | Dec 2012 | A1 |
20130020716 | Kuczynski et al. | Jan 2013 | A1 |
20130153645 | Owens et al. | Jun 2013 | A1 |
20130199831 | Morris | Aug 2013 | A1 |
20130228916 | Mawatari | Sep 2013 | A1 |
20130252375 | Yi et al. | Sep 2013 | A1 |
20130277831 | Yoon et al. | Oct 2013 | A1 |
20140065847 | Salmon et al. | Mar 2014 | A1 |
20140070393 | Bartley et al. | Mar 2014 | A1 |
20150050761 | Karlicek et al. | Feb 2015 | A1 |
Number | Date | Country |
---|---|---|
58171233 | Oct 1983 | JP |
Entry |
---|
Tien, J., et al., “Crystallization of Millimeter-Scale Objects with Use of Capillary Forces”, Journal of the American Chemical Society, 120(48), 1998, pp. 12670-12671. |
Srinivasan, U., et al., “Microstructure to Substrate Self-Assembly Using Capillary Forces”, Journal of Microelectromechanical Systems, vol. 10, No. 1, Mar. 2001, pp. 17-24. |
Clark, Thomas D., et al., “Self-Assembly of 10 μm-Sized Objects into Ordered Three-Dimensional Arrays”, J. Am. Chem. Soc. 2001, 123, pp. 7677-7682. |
Srinivasan, Uthara, et al., “Fluidic Self-Assembly of Micromirrors Onto Microactuators Using Capillary Forces”, IEEE Journal on Selected Topics in Quantum Electronics, vol. 8, No. 1, Jan./Feb. 2002, pp. 4-11. |
Jacobs, H. O., et al., “Fabrication of a Cylindrical Display by Patterned Assembly”, Science, vol. 296, Apr. 12, 2002, pp. 323-325. |
Xiong, Xiaorong, et al., “Controlled Multibatch Self-Assembly of Microdevices”, Journal of Microelectromechanical Systems, vol. 12, No. 2, Apr. 2003, pp. 117-127. |
Scott, Karen L., et al., “High-Performance Inductors Using Capillary Based Fluidic Self-Assembly”, Journal of Microelectromechanical Systems, vol. 13, No. 2, Apr. 2004, pp. 300-309. |
Zheng, W., et al., “Sequential Shape-and-Solder-Directed Self-Assembly of Functional Microsystems”, Proceedings of of the National Academy of Sciences of the United Sates of America, vol. 101, No. 35, pp. 12814-12817. |
Fang, J., et al., “Wafer-Level Packaging Based on Uniquely Orienting Self-Assembly(The DUO-SPASS Processes)”, Journal of Microelectromechanical Systems, vol. 15, No. 3, Jun. 2006, pp. 531-540. |
Chung, Jaehoon, et al., “Programmably Reconfigurable Self-Assembly: Parallel Heterogeneous Integration of Chip-Scale Components on Planar and Nonplanar Surfaces”, Journal of Microelectromechanical Systems, vol. 15, No. 3, Jun. 2006, pp. 457-464. |
Zheng, Wei, et al., “Fluidic Heterogenous Microsystems Assembly and Packaging”, Journal of Microelectromechanical Systems, vol. 15, No. 4, Aug. 2006, pp. 864-870. |
Strauth, Sean A., et al., “Self-Assembled Single-Crystal Silicon Circuits on Plastic”, Proceedings of the National Academy of Sciences of the United States of America, vol. 103, No. 38, Sep. 19, 2006, pp. 13922-13927. |
Ramadan, Qasem, et al., “Large Scale Microcomponents Assembly Using an External Magnetic Array”, Applied Physics Letters, vol. 90, No. 17, pp. 172502-172503. |
Shetye, Sheetal B., et al., “Investigation of Microscale Magnetic Forces for Magnet Array Self-Assembly”, IEEE Transactions on Magnetics, vol. 43, No. 6, Jun. 2007, pp. 2713-2715. |
Morris, Christopher J., et al., “Micro-scale Metal Contacts for Capillary Force-Driven Self-Assembly”, Journal of Micromechanics and Microengineering, vol. 18, No. 1, pp. 015022 (10 pp.). |
Shetye, Sheetal B., et al., “Self-Assembly of Millimeter-Scale Components Using Integrated Micromagnets”, IEEE Transactions on Magnetics, vol. 44, No. 11, Nov. 2008, pp. 4293-4296. |
Morris, Christopher J., et al., “Microscale Self-Assembly Using Molten Alloys with Different Melting Points”, Journal of Vacuum Science & Technology, vol. B26, No. 6, Nov./Dec. 2008, pp. 2534-2538. |
Chapius, Y. A., et al., “Alternative Approach in 3D MEMS-IC Integration Using Fluidic Self-Assembly Techniques”, Journal of Micromechanics and Microengineering, vol. 19, No. 10, pp. 105002 (9 pp). |
Morris, Christopher J., et al., “Self-Assembly of Microscale Parts Through Magnetic and Capillary Interactions”, Micromachines 2011, 2, pp. 69-81. |
Number | Date | Country | |
---|---|---|---|
20150048148 A1 | Feb 2015 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 13366436 | Feb 2012 | US |
Child | 14497377 | US |