1. Field of the Invention
The present invention generally relates to a method for fabricating semiconductor devices, and more specifically, to a method for fabricating a semiconductor device installed with passive components.
2. Description of Related Art
In order to improve electricity quality of traditional semiconductor devices, passive components, such as capacitor, inductors, and resistor, are commonly disposed inside packages; this feature has been disclosed according to claims of U. S. Pat. Nos. 5,311,405, 6,521,997, 6,700,204, and others, wherein if capacitor is used as passive components in prior art, it makes a bridge connection between power end and ground end on substrate, therefore, capacitor's filter function can be used for the purposes of stabilizing voltage and eliminating contaminants.
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However, in the plasma clean process for eliminating contaminants on the chip and the substrate, ionized electron current is often used to bombard surfaces of the chip and substrate for eliminating contaminants, thereby causing the capacitor to be charged; and at the time when corresponding bonding pads 710 on the chip 71 are electrically connected to the ground bonding finger 721 and the power bonding finger 722 via bonding wires, sudden electricity discharge will happen due to loop circuit formed between the passive component 72 and the chip 71, thereby correspondingly and suddenly generating a current pulse, and consequently damaging or burning the chip.
Hence, it is a highly urgent issue in the industry for how to provide a technique, capable of effectively solving the drawbacks of semiconductor devices of prior art as mentioned above, and a fabrication method capable of preventing chip from being damaged due to electricity charging/discharging of a passive component.
In view of the disadvantages of the prior art mentioned above, it is a primary objective of the present invention to provide a method for fabricating a semiconductor device installed with passive components, and the method is capable of prevent chip from being damaged due to electricity discharge caused by charged passive component.
It is another objective of the present invention to provide a method for fabricating a semiconductor device installed with passive components, and the method is capable of avoiding happening of sudden current impulse in wire bonding process.
To achieve the aforementioned and other objectives, a method for fabricating a semiconductor device installed with a passive component is provided according to the present invention. The method comprises: providing a substrate modular board with a plurality of substrate units, each of the substrate units is demarcated by cutting paths, and each substrate unit has a chip-bonding zone, a ground circuit, and a power circuit, and a conductive circuit is disposed on the cutting path for each substrate unit, and electrically connecting the conductive circuit to the ground circuit and the power circuit to form a short circuit loop; disposing at least a passive component on the substrate unit, and electrically connecting the passive component to the ground circuit and the power circuit; disposing a chip with a plurality of bonding pads on the chip-bonding zone of the substrate unit; electrically connecting corresponding bonding pads on the chip separately to the ground circuit and the power circuit via bonding wires; electrically connecting the bonding pads not connected to either the ground circuit or the power circuit on the chip to the substrate unit via bonding wires; and then proceeding to packaging process and cutting each of the substrate units apart from one another, and consequently removing the conductive circuits on the cutting paths.
The ground circuit comprises a ground pad and a ground bonding finger connected to each other, and the power circuit comprises a power pad and a power bonding finger connected to each other; the pair of the ground pad and the ground bonding finger and the pair of the power pad and the power bonding finger are separately extending to electrically connect to the conductive circuit on the cutting paths; the passive component is electrically connected to the ground pad and the power pad, and the chip is electrically connected to the ground bonding finger and the power bonding finger via bonding wires; the ground circuit can also be a ground ring, and the power circuit can also be a power ring.
Another preferable embodiment of method for fabricating a semiconductor device installed with passive components of the present invention comprises: providing a substrate modular board with a plurality of substrate units, each of the substrate units is demarcated by cutting paths, the substrate unit having a chip-bonding zone, a ground circuit, and a power circuit, and a conductive circuit is disposed on the cutting paths for each substrate unit; disposing at least a passive component on the substrate unit, and electrically connecting the passive component to the ground circuit and the power circuit of the substrate unit; disposing a chip with a plurality of bonding pads on the chip-bonding zone; electrically connecting the conductive circuit to the ground circuit and the power circuit via bonding wires to form a short circuit loop; electrically connecting corresponding bonding pads on the chip to the ground circuit and the power circuit via bonding wires; electrically connecting the bonding pads not connected to either the ground circuit or the power circuit on the chip to the substrate unit via bonding wires; and then proceeding to packaging process and cutting each of the substrate units apart from one another, and consequently removing the conductive circuits on the cutting path.
The ground circuit comprises a ground bonding pad and a ground pad and a ground bonding finger connected to one another, and the power circuit comprises a power bonding pad and a power pad and a power bonding finger connected to one another, therefore, the passive component makes a bridge connection between the ground pad and the power pad, and the conductive circuit is electrically connected to the ground bonding pad and the power bonding pad via bonding wires, and consequently the passive component forms the short circuit loop; and the chip is electrically connected to the ground bonding finger and the power bonding finger via bonding wires; the ground circuit can also be a ground ring, and the power circuit can be a power ring.
A further preferable embodiment of method for fabricating a semiconductor device installed with passive components of the present invention comprises: providing a substrate unit, the substrate unit has a chip-bonding zone, a ground circuit, and a power circuit; disposing at least a passive component on the substrate unit, and electrically connecting the passive component to the ground circuit and the power circuit, and then disposing a chip with a plurality of bonding pads on the chip-bonding zone; applying a wire bonding machine to form a stud bump on the power circuit, and consequently having the power circuit contact with ground loop of the wire bonding machine to form a discharging loop; electrically connecting corresponding bonding pads of the chip to the power circuit and the ground circuit via bonding wires; electrically connecting the bonding pads not connected to either the ground circuit or the power circuit on the chip to the substrate unit via bonding wires; subsequently proceeding to a packaging process, and forming an encapsulant to encapsulate the passive component and the chip.
The ground circuit comprises a ground pad and a ground bonding finger connected to each other, and the power circuit comprises a power pad and a power bonding finger and a power bonding pad connected to one another; therefore, the passive component makes a bridge connection between the ground pad and the power pad; and using bonding wire grounding function of a wire bonding machine, the wire bonding machine forms the stud bump on the power bonding pad, and consequently the short circuit (discharging) loop is formed; the corresponding bonding pads of the chip are electrically connected to the ground bonding finger and the power bonding finger via bonding wires; the ground circuit can also be a ground ring, and the power circuit can be a power ring.
In short, compared with the prior art, the method for fabricating a semiconductor device installed with passive components of the present invention mainly has the following features: having a passive component make a bridge connection between the ground circuit and the power circuit; and then directly electrically connecting the ground circuit and the power circuit to a preset conductive circuit located on cutting paths between substrate units to form a short circuit loop; or electrically connecting the ground circuit and the power circuit to the preset conductive circuit on cutting paths between substrate units via bonding wires to form a short circuit loop; or applying a wire bonding machine to form a stud bump on the power circuit, and consequently having the power circuit contact with ground loop of the wire bonding machine, thereby forming a discharging loop; by means of that the passive component is capable of forming a short circuit (discharging) loop, thus electricity filled up inside the passive component due to plasma clean or other factors can be released; subsequently proceeding to an electricity connection process between the chip and the ground, power, and signal of the substrate unit; therefore, at the time when the chip and the passive component are electrically connected to each other, chip damage due to sudden current impulse caused by electricity discharging of the passive component can be avoided.
The present invention can be more fully understood by reading the following detailed description of the preferred embodiments, with reference made to the accompanying drawings, wherein:
The following illustrative embodiments are provided to illustrate the disclosure of the present invention, these and other advantages and effects can be apparently understood by those in the art after reading the disclosure of this specification. The present invention can also be performed or applied by other different embodiments. The details of the specification may be on the basis of different points and applications, and numerous modifications and variations can be devised without departing from the spirit of the present invention.
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The ground circuit and the power circuit can also be a ground ring and a power ring (not shown in the drawing) respectively. In addition, the substrate unit 100 comprises a plurality of signal bonding fingers 81 disposed thereon.
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Eliminating contaminants on surfaces of the chip 60 and the substrate unit 100 by means of plasma clean.
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Compared with the prior art, the method for fabricating a semiconductor device installed with passive components according to the present invention has the following features: disposing a ground circuit and a power circuit on each substrate unit, and disposing a conductive circuit on cutting path between substrate units for each substrate unit; electrically connecting the conductive circuit to a passive component and making a bridge connection between power pad of the power circuit and ground pad of the ground circuit, and consequently forming a short circuit loop, thereby making the passive component incapable of charging electricity; subsequently, at the time when the chip is electrically connected to ground bonding finger of the ground circuit and the power bonding finger of the power circuit via bonding wires, since the passive component is incapable of discharging electricity, the passive component will not generate sudden current impulse to damage the chip.
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The ground circuit and the power circuit can also be a ground ring and a power ring (not shown in the drawing) respectively; and each of the substrate units further comprises a plurality of signal bonding fingers 81 disposed thereon.
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Next, eliminating contaminants on the surfaces of the chips 60 and the substrate units 100 by means of plasma clean.
Compared with the first embodiment, wherein the ground circuit and the power circuit of the substrate unit are initially electrically connected to the conductive circuit on the cutting paths, therefore, after the passive component is soldered to the ground pad of the ground circuit and the power pad of the power circuit to form a short circuit loop by means of surface mounting technology (SMT), it is impossible to do electricity test for determining soldering status of the passive component; in the present embodiment, since the ground circuit and the power circuit of the substrate unit are not initially electrically connected to the conductive circuit on the cutting paths, after the passive component is solder to the ground pad of the ground circuit and the power pad of the power circuit, it is possible to do electricity test for determining soldering status of the passive component.
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In short, the method for fabricating a semiconductor device installed with passive components according to the present invention has the following features: first having a passive component, such as a capacitor, make a bridge connection between ground pad of a ground circuit and power pad of a power circuit; and then electrically connecting power bonding pad of the power circuit and ground bonding pad of the ground circuit to a conductive circuit preset on cutting paths via bonding wires to form a short circuit loop, consequently having the passive component release electricity charged in previous plasma clean process; later on, at the time when chip is electrically connected to the ground circuit and the power circuit via bonding wires, since the passive component is incapable of discharging electricity, the passive component will not generate sudden current impulse to damage the chip.
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The ground circuit and the power circuit can also be a ground ring and a power ring (not shown in the drawing) respectively; the substrate unit 100 further comprises a plurality of signal bonding fingers 81 disposed thereon.
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Next, using bonding wire grounding function of a wire bonding machine (as indicated by label G in
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Subsequently proceeding to a packaging process, forming an encapsulant (not shown in the drawing) to encapsulate the passive component and the chip.
In the present embodiment, the method for fabricating a semiconductor device installed with passive components according to the present invention has the following features: forming a stud bump on the power bonding pad of the power circuit of the substrate unit via ground loop of a wire bonding machine, and consequently forming a short circuit (discharging) loop being for releasing electricity charged by the passive component during plasma clean process, namely, at the time when bonding wire of the wire bonding machine contacts the power bonding pad, consequently having the passive component under a short circuit situation, and then the passive component is capable of discharging electricity; later on, at the time when the chip is electrically connected to the ground circuit and the power circuit, the passive component will not generate sudden current impulse to damage the chip.
In addition, it is feasible to apply the wire bonding machine directly on the power bonding finger instead to form a stud bump, therefore there is no need of disposing power bonding pads.
The foregoing descriptions of the detailed embodiments are intended to disclose the features and functions of the present invention only but are not restrictive of the scope of the present invention. It should be comprehensible to those skilled in the art that any modifications and variations made according to the spirit and principle of the disclosure of the present invention should fall within the scope of the appended claims.
Number | Date | Country | Kind |
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096120046 | Jun 2007 | TW | national |