Method for setting capillary contact position data and wire bonding apparatus using the same

Abstract

In wire bonding, a clearance measurement between the capillary and reference member being performed by an image capturing device for capturing elevation images of the used and new (replaced) capillaries and the reference member and by a clearance measuring device that processes the elevation images of the capillaries and the reference member, obtained by the image capturing device, and then measures the distance in a vertical direction between the tip ends of the capillaries and the tip end of the reference member, thus setting post-replacement capillary contact position data based on pre-replacement capillary contact position data and the obtained clearance difference.

Description

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1-1 is an explanatory diagram showing the manner of setting capillary contact position data according to the present invention, and FIG. 1-2 illustrates a bonding apparatus according to the present invention;

FIG. 2-1 and FIG. 2-2 (continued from FIG. 2-1) show the capillary replacement procedures according to the present invention;

FIG. 3( a) and 3(b) illustrate a conventional wire bonding apparatus;

FIG. 4 is a top view of a work on which wire bonding is performed;

FIG. 5 shows the steps of wire bonding in a conventional wire bonding apparatus;

FIG. 6 illustrates the conditions of a used capillary;

FIGS. 7-1 and FIG. 7-2 (continued from FIG. 7-1) shows conventional capillary replacement procedures; and

FIG. 8 illustrates a capillary contact position and the distance of movement.

Claims

1. A method for setting capillary contact position data for a capillary set for a particular contact position, said setting being performed at a time of replacing capillaries in a wire bonding apparatus, said method comprising the steps of: obtaining a clearance difference between, in a vertical direction, a reference member and capillaries measured respectively before and after capillary replacement; andsetting post-replacement capillary contact position data based on pre-replacement capillary contact position data and said obtained clearance difference.

2. The method for setting capillary contact position data according to claim 1, wherein a measurement of said clearance difference between said capillary and said reference member is performed by: an image capturing device for capturing an elevation image including said capillaries and said reference member; anda clearance measuring means for processing said elevation images obtained by said image capturing device to measure a distance in a vertical direction between said tip ends of said capillaries and a tip end of said reference member.

3. The method for setting capillary contact position data according to claim 1, wherein said reference member is provided with one of an opposite surface and an opposite line, said one being parallel to tip end surfaces of said capillaries.

4. A wire bonding apparatus comprising: a replaceable capillary set for a particular contact position;a reference member provided in a predetermined position;an image capturing device for capturing an elevation image including capillaries and said reference member;a clearance measuring means for processing said elevation images obtained by said image capturing device to measure a distance in a vertical direction between said tip ends of said capillaries and a tip end of said reference member; anda capillary contact position data setting means for setting post-replacement capillary contact position data, based on pre-replacement capillary contact position data and a clearance difference between, in said vertical direction, said reference member and said capillaries measured by said clearance measuring means before and after capillary replacement.

5. The wire bonding apparatus according to claim 4, wherein said reference member is provided with one of an opposite surface and an opposite line, said one being parallel to tip end surfaces of said capillaries.