Number | Date | Country | Kind |
---|---|---|---|
90-21056 | Dec 1990 | KRX |
Number | Name | Date | Kind |
---|---|---|---|
4492717 | Pliskin et al. | Jan 1985 | |
4546016 | Kern | Oct 1985 | |
4903117 | Okamoto et al. | Feb 1990 | |
4948743 | Ozaki | Aug 1990 | |
5004704 | Maeda et al. | Apr 1991 | |
5094984 | Liu et al. | Mar 1992 | |
5166101 | Lee et al. | Nov 1992 |
Entry |
---|
Susa et al., "Borophosphosilicate glass flow in a PH.sub.3 -O.sub.2 ambient", J. Electrochem. Soc., Solid State Science and Technology, vol. 133, No. 7, Jul. 1986, pp. 1517-1518. |