Patent Grant
10231324
Field
Various features relate to a staggered power distribution structure in a power distribution network (PDN).
Background
A power delivery structure is part of a power distribution network (PDN) that provides power to one or more dies and/or chips. However, power delivery is one of the more challenging problems in high speed signal chip design. When designing a power delivery structure, the power delivery structure needs to provide stable and balanced power support for the die and/or chip.
There is an ongoing trend to provide thinner dies, die packages and/or chips. As such, there is a trend to provide low profile packages (e.g., packages that are thinner and/or have lesser layers). However, low profile packages come with difficult design challenges. In particular, low profile packages are difficult to design because of parasitic problems due to the fact that that interconnects (e.g., metal layers in the package substrate) in the power delivery structure are so close to each other.
Therefore, there is a need for a power delivery structure for a power distribution network (PDN) in a low profile package that minimizes parasitic effects. Ideally, such a power delivery structure will provide stable and full area coverage (or near full area coverage) power delivery structure in a low profile package.
Various features, apparatus and methods described herein provide a staggered power distribution structure in a power distribution network (PDN).
A first example provides an integrated device that includes a first metal layer and a second metal layer. The first metal layer includes a first set of regions. The first set of regions includes a first netlist structure for a power distribution network (PDN) of the integrated device. The second metal layer includes a second set of regions. The second set of regions includes a second netlist structure of the PDN of the integrated device.
According to an aspect, the second metal layer further includes a third set of regions comprising the first netlist structure for the PDN of the integrated device.
According to one aspect, the second metal layer further comprises a third set of island regions comprising the first netlist structure for the PDN of the integrated device.
According to an aspect, the first metal layer further comprises a third set of regions includes a third netlist structure for the PDN of the integrated device. The third set of regions is non-overlapping with the first set of regions of the first metal layer.
According to one aspect, the integrated device further includes a set of vias configured to couple the first set of regions.
According to an aspect, the first set of regions includes a set of repeating pattern regions that defines a substantial portion of the first metal layer.
According to one aspect, the first set of regions includes a set of repeating pattern regions formed in one of at least a star formation, an offset formation, a staggered formation, and/or a hub and spoke formation.
According to an aspect, the first netlist structure comprises a first set of interconnects, and the second netlist structure comprising a second set of interconnects.
According to one aspect, the power distribution structure may be implemented in one of at least a printed circuit board (PCB), a redistribution portion of a die, a wafer level die, a wafer level package (WLP), an embedded wafer level package (eWLP), an embedded wafer level ball grid array (eWLB), and/or an integrated fan out (INFO) wafer level package.
According to an aspect, the integrated device is incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, and/or a laptop computer.
A second example provides a substrate that includes a first metal layer and a second metal layer. The first metal layer includes a first set of regions. The first set of regions includes a first netlist structure for a power distribution network (PDN) of the substrate. The second metal layer includes a second set of regions. The second set of regions includes a second netlist structure of the PDN of the substrate.
According to an aspect, second metal layer further comprises a third set of regions comprising the first netlist structure for the PDN of the substrate.
According to one aspect, the second metal layer further comprises a third set of island regions comprising the first netlist structure for the PDN of the substrate.
According to an aspect, the first metal layer further includes a third set of regions. The third set of regions includes a third netlist structure for the PDN of the substrate. The third set of regions is non-overlapping with the first set of regions of the first metal layer.
According to one aspect, the substrate includes a set of vias configured to couple the first set of regions.
According to an aspect, the first set of regions includes a set of repeating pattern regions that defines a substantial portion of the first metal layer.
According to one aspect, the first set of regions includes a set of repeating pattern regions formed in one of at least a star formation, an offset formation, a staggered formation, and/or a hub and spoke formation.
According to an aspect, the first netlist structure comprises a first set of interconnects, and the second netlist structure comprising a second set of interconnects.
According to one aspect, the substrate is incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, and/or a laptop computer.
A third example provides a method for fabricating an integrated device. The method forms a first metal layer, where forming the first metal layer includes forming a first netlist structure for a power distribution network (PDN) of the integrated device in a first set of regions of the first metal layer. The method forms a second metal layer, where forming the second metal layer includes forming a second netlist structure for the PDN of the integrated device in a second set of regions of the second metal layer.
According to an aspect, forming the first metal layer further includes forming a third netlist structure for the PDN of the integrated device in a third set of regions of the first metal layer, where the third set of regions is non-overlapping with the first set of regions of the first metal layer.
According to one aspect, the method further forms a set of vias configured to couple the first set of regions.
According to an aspect, the first set of regions includes a set of repeating pattern regions formed in one of at least a star formation, an offset formation, a staggered formation, and/or a hub and spoke formation.
According to one aspect, the power distribution structure may be implemented in one of at least a printed circuit board (PCB), a redistribution portion of a die, a wafer level die, a wafer level package (WLP), an embedded wafer level package (eWLP), an embedded wafer level ball grid array (eWLB), and/or an integrated fan out (INFO) wafer level package.
According to an aspect, the integrated device is incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, and/or a laptop computer.
A fourth example provides a method for fabricating a substrate. The method forms a first metal layer, where forming the first metal layer includes forming a first netlist structure for a power distribution network (PDN) of the substrate in a first set of regions of the first metal layer. The method forms a second metal layer, where forming the second metal layer includes forming a second netlist structure for the PDN of the substrate in a second set of regions of the second metal layer.
According to an aspect, forming the first metal layer further includes forming a third netlist structure for the PDN of the substrate in a third set of regions of the first metal layer, where the third set of regions is non-overlapping with the first set of regions of the first metal layer.
According to one aspect, the method forms a set of vias configured to couple the first set of regions.
According to an aspect, the first set of regions includes a set of repeating pattern regions formed in one of at least a star formation, an offset formation, a staggered formation, and/or a hub and spoke formation.
According to one aspect, the substrate is incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, and/or a laptop computer.
Various features, nature and advantages may become apparent from the detailed description set forth below when taken in conjunction with the drawings in which like reference characters identify correspondingly throughout.
In the following description, specific details are given to provide a thorough understanding of the various aspects of the disclosure. However, it will be understood by one of ordinary skill in the art that the aspects may be practiced without these specific details. For example, circuits may be shown in block diagrams in order to avoid obscuring the aspects in unnecessary detail. In other instances, well-known circuits, structures and techniques may not be shown in detail in order not to obscure the aspects of the disclosure.
Overview
Some novel features pertain to an integrated device that includes a first netlist structure in a first region of a first metal layer, a second netlist structure in a second region of a second metal layer, and a third netlist structure in a third region of the first metal layer and a fourth region of the second metal layer. The third region includes a first set of repeating pattern regions. The fourth region includes a second set of repeating pattern regions. The first netlist structure, the second netlist structure, and the third netlist structure are configured to operate as a power distribution structure in the integrated device. In some implementations, the first region, the second region, and the third region are defined in the first and second metal layers such that they at least substantially (e.g., at least 90%) utilize all of the surface area of the first and second metal layers. In some implementations, the integrated device further includes a set of vias configured to couple the third region to the fourth region. In some implementations, the first region is non-overlapping with the third region. In some implementations, the second region is non-overlapping with the fourth region. In some implementations, the first netlist structure includes a first set of interconnects. In some implementations, the second netlist structure includes a second set of interconnects. In some implementations, the third netlist structure includes a fourth set of interconnects regions. In some implementations, the integrated device includes a fourth netlist structure in a fifth region of the first metal layer and a sixth region of the second metal layer. The fifth region includes a third set of repeating pattern regions. The sixth region includes a fourth set of repeating pattern regions, where the first netlist structure, the second netlist structure, the third netlist structure, and the fourth netlist structure are configured to operate as the power distribution structure in the integrated device.
Exemplary Power Distribution Structure
In some implementations, the power distribution network includes a first netlist, a second netlist and a third netlist. In some implementations, a netlist is defined as a set of interconnects, a set of active elements (e.g., transistor) and/or a set of passive elements (e.g., resistor, capacitor) that form and/or define the connectivity of a circuit in an integrated device. In some implementations, an interconnect may include a trace, a via, a pad, and/or a redistribution metal layer. In some implementations, the first netlist is a first power signal netlist, the second netlist is a second power signal netlist, and the third netlist is a ground signal netlist. In some implementations, the power distribution structure 200 is configured to provide a first power signal, a second power signal, and a ground signal to/from an integrated device.
The power distribution structure 200 may be implemented in different parts of an integrated device. In some implementations, the power distribution structure 200 may be implemented in a printed circuit board (PCB), a package substrate, a redistribution portion (e.g., redistribution layers) of a die, a wafer level die, a wafer level package (WLP), an embedded wafer level package (eWLP), an embedded wafer level ball grid array (eWLB), and/or an integrated fan out (INFO) wafer level package.
In some implementations, the power distribution structure 200 provides several advantages to an integrated device. For example, when the power distribution structure 200 is coupled to several bumps and/or solder balls, the even distribution of the power distribution structure 200 across the entire metal layer(s) of the integrated device (1) provides lower inductance and lower resistance between a bump and a solder ball, and (2) more evenly spreads out bump to solder ball inductance and resistance (e.g., less variance in inductance and resistance between different combination of bumps to solder balls), which leads to better signal performance and thus better integrated device performance.
As shown in
In some implementations, the first netlist structure region 202 includes a first set of interconnects configured to provide a first power signal to an integrated device that includes the power distribution structure 200. In some implementations, the second netlist structure region 204 includes a second set of interconnects configured to provide a second power signal to an integrated device that includes the power distribution structure region 200. In some implementations, the set of third netlist structure regions 206 includes a third set of interconnects configured to provide a ground signal to an integrated device that includes the power distribution structure 200.
As shown in
The power distribution structure 200 is configured in such a way as to minimize parasitic effects on the power distribution network. In some implementations, this is achieved by reducing and/or minimizing the number of overlaps (e.g., vertical overlaps) between interconnects from different netlist structures. For example, a first interconnect from a first netlist may be placed on a first metal layer such that it does not overlap (e.g., vertically overlap) with a second interconnect from a second netlist on a second metal layer.
In some implementations, the first netlist structure region 202 defines a region of the first metal layer that includes one or more interconnects (e.g., traces) that are part of a first netlist. In some implementations, the first netlist structure region 202 defines a region (e.g., contiguous region) of the first metal layer that includes one or more interconnects (e.g., traces) that are only part of the first netlist. It should be noted that the first netlist structure region 202 does not necessarily represent how the interconnects (e.g., traces) are formed on the first metal layer of the integrated device.
In some implementations, the second netlist structure region 204 defines a region of the second metal layer that includes one or more interconnects (e.g., traces) that are part of a second netlist. In some implementations, the second netlist structure region 204 defines a region (e.g., contiguous region) of the second metal layer that includes one or more interconnects (e.g., traces) that are only part of the second netlist. It should be noted that the second netlist structure region 204 does not necessarily represent how the interconnects (e.g., traces) are formed on the second metal layer of the integrated device.
In some implementations, the set of third netlist structure regions 206 defines regions (e.g., island regions) of the first and second metal layers that include one or more interconnects (e.g., traces) that are part of a third netlist. In some implementations, the set of third netlist structure regions 206 defines regions of the first and second metal layers that include one or more interconnects (e.g., traces) that are only part of the third netlist. It should be noted that the third netlist structure region 206 does not necessarily represent how the interconnects (e.g., traces) are formed on the first and second metal layers of the integrated device. As shown in
In some implementations, the set of via regions 208 are located in the integrated device such that the set of via regions 208 overlaps (e.g., vertically overlaps) with a third netlist structure region 206 from a first layer and another third netlist structure region 206 from a second layer. Each of the set of via regions 208 may include one or more vias. It should be noted that the set of via regions 208 does not necessarily represent how the vias look between the first and second metal layers of the integrated device.
In some implementations, the first netlist structure region 202, the second netlist structure region 204, and the set of third netlist structure regions 206 are configured in the first and second metal layers such that they at least substantially (e.g., about 90% or higher) or completely utilize all of the surface area of the first and second metal layers of the integrated device, thereby maximizing the use of space available for a power distribution network, while at the same time, minimizing parasitic effects, impedance and/or resistance in the power distribution network.
In some implementations, the first netlist structure region 202, the second netlist structure region 204, and the third netlist structure regions 206 are separated by one or more non-conducting regions (e.g., dielectric layer). In some implementations, the boundaries of the first netlist structure region 202, the second netlist structure region 204, and the third netlist structure regions 206 are defined and/or surrounded by one or more non-conducting regions (e.g., dielectric region). This ensures that regions from different netlist structures within the same metal layers are not in contact with each other so as to create a short in the circuit.
Examples of netlists, netlist structures in a netlist structure region will be further described in
As shown in
It should be noted that the set of third netlist structure regions 206 is a representation of a region in an integrated device or substrate that includes a power distribution structure. Thus, in some implementations, the set of third netlist structure regions 206 is not an actual representation of a netlist structure, but rather is one or more regions that includes interconnects that define a netlist structure. However, in some implementations, the set of third netlist structure region 206 may represent the actual (or close to the actual representation of a) netlist structure of a power distribution network.
It should be noted that the first netlist structure region 202 is a representation of a region in an integrated device that includes a power distribution structure. Thus, in some implementations, the first netlist structure region 202 is not an actual representation of a netlist structure, but rather is one or more regions that includes interconnects that define a netlist structure. However, in some implementations, the first netlist structure region 202 may represent the actual (or close to the actual representation of a) netlist structure of a power distribution network.
It should be noted that the second netlist structure region 204 is a representation of a region in an integrated device that includes a power distribution structure. Thus, in some implementations, the second netlist structure region 204 is not an actual representation of a netlist structure, but rather is one or more regions that includes interconnects that define a netlist structure. However, in some implementations, the second netlist structure region 204 may represent the actual (or close to the actual representation of a) netlist structure of a power distribution network.
As mentioned above, in some implementations, a netlist structure region (e.g., netlist structure regions 202, 204 and/or 206) may represent a region that includes interconnects that define a netlist structure.
The first netlist structure region 602 includes a set of first interconnects 620 (e.g., traces), and a set of first vias 622. In some implementations, the set of first interconnects 620 and/or the set of first vias 622 define a netlist and/or netlist structure that provides a power signal to/from an integrated device. In some implementations, the first netlist structure region 602 is a contiguous region of a metal layer that surrounds the set of second netlist structure regions 604.
The set of second netlist structure regions 604 includes a set of second interconnects 640 (e.g., traces), and a set of second vias 642. In some implementations, the set of second interconnects 640 and/or the set of second vias 642 define a netlist and/or netlist structure that provides a ground signal to/from an integrated device. In some implementations, the set of second netlist structure regions 604 includes several regions (e.g., island regions) that are spaced apart (e.g., evenly apart) from each other in a staggered, offset, and/or island formation (e.g., star formation, offset formation, staggered formation, hub and spoke formation). In some implementations, the second netlist structure regions 604 may be coupled to each other through a set of interconnects 630 (which are shown as dashed interconnects) that are located on a different metal layer of the integrated device. In some implementations, one or more of the second netlist structure region 604 represents the actual shape and/or size of the interconnects of the netlist structure.
It should be noted that the one or more regions (e.g., island regions, contiguous regions) may have similar or different sizes and shapes, and is not limited to the sizes and/or shapes shown in
Exemplary Integrated Device
As described above, a power distribution structure may be formed in the metal layers of an integrated device and/or a substrate. The metal layers of the integrated device may be metal layers of a printed circuit board (PCB), a package substrate, a redistribution portion (e.g., redistribution layers) of a die, a wafer level die, a wafer level package (WLP), an embedded wafer level package (eWLP), an embedded wafer level ball grid array (eWLB), and/or an integrated fan out (INFO) wafer level package.
The substrate 700 includes a dielectric layer 701, a first set of pads 702, a first set of vias 703, a set of first metal layers 704, a second set of vias 705, a set of second metal layers 706, a third set of vias 707, and a second set of pads 708.
In some implementations, the dielectric layer 701 includes one dielectric layer 701, while in other implementations, the dielectric layer 701 may include several dielectric layers.
The first set of pads is coupled to the first set of vias 703. The first set of vias 703 is coupled to the set of first metal layers 704. The set of first metal layers 704 is coupled to the second set of vias 705. The second set of vias 705 is coupled to the set of second metal layers 706. The set of second metal layers 706 is coupled to the third set of vias 707. The third set of vias 707 is coupled to the second set of pads 708.
In some implementations, the set of first metal layers 704, the second set of vias 705, and/or the set of second metal layers 706 are configured to operate as a power distribution structure that is consistent with one or more of the power distribution structures described in the present disclosure.
Exemplary Power Distribution Structure
In some implementations, the power distribution network includes a first netlist, a second netlist and a third netlist. In some implementations, a netlist is defined as a set of interconnects, a set of active elements (e.g., transistor) and/or a set of passive elements (e.g., resistor, capacitor) that form and/or define the connectivity of a circuit in an integrated device. In some implementations, an interconnect may include a trace, a via, a pad, and/or a redistribution metal layer. In some implementations, the first netlist is a first power signal netlist, the second netlist is a second power signal netlist, and the third netlist is a ground signal netlist. In some implementations, the power distribution structure 900 is configured to provide a first power signal, a second power signal, and a ground signal to/from an integrated device.
The power distribution structure 900 may be implemented in different parts of an integrated device. In some implementations, the power distribution structure 900 may be implemented in a printed circuit board (PCB), a package substrate, a redistribution portion (e.g., redistribution layers) of a die, a wafer level die, a wafer level package (WLP), an embedded wafer level package (eWLP), an embedded wafer level ball grid array (eWLB), and/or an integrated fan out (INFO) wafer level package.
In some implementations, the power distribution structure 900 provides several advantages to an integrated device. For example, when the power distribution structure 900 is coupled to several bumps and/or solder balls, the even distribution of the power distribution structure 900 across the entire metal layer(s) of the integrated device (1) provides lower inductance and lower resistance between a bump and a solder ball, and (2) more evenly spreads out bump to solder ball inductance and resistance (e.g., less variance in inductance and resistance between different combination of bumps to solder balls), which leads to better signal performance and thus better integrated device performance.
As shown in
In some implementations, the first netlist structure region 902 includes a first set of interconnects configured to provide a first power signal to an integrated device that includes the power distribution structure 900. In some implementations, the second netlist structure region 904 includes a second set of interconnects configured to provide a second power signal to an integrated device that includes the power distribution structure region 900. In some implementations, the set of third netlist structure regions 906 includes a third set of interconnects configured to provide a ground signal to an integrated device that includes the power distribution structure 900.
As shown in
The power distribution structure 900 is configured in such a way as to minimize parasitic effects on the power distribution network. In some implementations, this is achieved by reducing and/or minimizing the number of overlaps (e.g., vertical overlaps) between interconnects from different netlist structures. For example, a first interconnect from a first netlist may be placed on a first metal layer such that it does not overlap (e.g., vertically overlap) with a second interconnect from a second netlist on a second metal layer.
In some implementations, the first netlist structure region 902 defines a region of the first and second metal layers that includes one or more interconnects (e.g., traces) that are part of a first netlist. In some implementations, the first netlist structure region 902 defines a contiguous region of the first and second metal layers that includes one or more interconnects (e.g., traces) that are only part of the first netlist. It should be noted that the first netlist structure region 902 does not necessarily represent how the interconnects (e.g., traces) are formed on the first metal layer of the integrated device.
In some implementations, the second netlist structure region 904 defines a region of the first and second metal layers that includes one or more interconnects (e.g., traces) that are part of a second netlist. In some implementations, the second netlist structure region 904 defines a region (e.g., contiguous region) of the first and second metal layers that includes one or more interconnects (e.g., traces) that are only part of the second netlist. It should be noted that the second netlist structure region 904 does not necessarily represent how the interconnects (e.g., traces) are formed on the second metal layer of the integrated device.
In some implementations, the set of third netlist structure region 906 defines regions of the first and second metal layers that include one or more interconnects (e.g., traces) that are part of a third netlist. In some implementations, the set of third netlist structure region 906 defines regions of the first and second metal layers that include one or more interconnects (e.g., traces) that are only part of the third netlist. It should be noted that the third netlist structure region 906 does not necessarily represent how the interconnects (e.g., traces) are formed on the first and second metal layers of the integrated device. As shown in
In some implementations, the set of via regions 908 are located in the integrated device such that the set of via regions overlaps (e.g., vertically overlaps) with a third netlist structure region 906 from a first layer and another third netlist structure region from a second layer. Each of the set of via regions 908 may include one or more vias. It should be noted that the set of via regions 908 does not necessarily represent how the vias look between the first and second metal layers of the integrated device.
In some implementations, the first netlist structure region 902, the second netlist structure region 904, and the set of third netlist structure region 906 are configured in the first and second metal layers such that they at least substantially (e.g., about 90% or higher) or completely utilize all of the surface area of the first and second metal layers of the integrated device, thereby maximizing the use of space available for a power distribution network, while at the same time, minimizing parasitic effects, impedance and/or resistance in the power distribution network.
In some implementations, the first netlist structure region 902, the second netlist structure region 904, and the third netlist structure region 906 are separated by one or more non-conducting regions (e.g., dielectric layer).
It should be noted that the first netlist structure region 902 is a representation of a region in an integrated device that includes a power distribution structure. Thus, in some implementations, the first netlist structure region 902 is not an actual representation of a netlist structure, but rather is one or more regions that includes interconnects that define a netlist structure. However, in some implementations, the first netlist structure region 902 may represent the actual (or close to the actual representation of a) netlist structure of a power distribution network.
It should be noted that the set of third netlist structure region 906 is a representation of a region in an integrated device that includes a power distribution structure. Thus, in some implementations, the set of third netlist structure region 906 is not an actual representation of a netlist structure, but rather is one or more regions that includes interconnects that define a netlist structure. However, in some implementations, the set of third netlist structure region 906 may represent the actual (or close to the actual representation of a) netlist structure of a power distribution network.
It should be noted that the second netlist structure region 904 is a representation of a region in an integrated device that includes a power distribution structure. Thus, in some implementations, the second netlist structure region 904 is not an actual representation of a netlist structure, but rather is one or more regions that includes interconnects that define a netlist structure. However, in some implementations, the second netlist structure region 904 may represent the actual (or close to the actual representation of a) netlist structure of a power distribution network.
It should be noted that the one or more regions (e.g., island regions, contiguous regions) may have similar or different sizes and shapes, and is not limited to the sizes and/or shapes shown in
Exemplary Power Distribution Structure
A power distribution structure of a power distribution network (PDN) may include more than three netlists.
In some implementations, the power distribution network includes a first netlist, a second netlist and a third netlist. In some implementations, a netlist is defined as a set of interconnects, a set of active elements (e.g., transistor) and/or a set of passive elements (e.g., resistor, capacitor) that form and/or define the connectivity of a circuit in an integrated device. In some implementations, an interconnect may include a trace, a via, a pad, and/or a redistribution metal layer. In some implementations, the first netlist is a first power signal netlist, the second netlist is a second power signal netlist, and the third netlist is a ground signal netlist. In some implementations, the power distribution structure is configured to provide a first power signal, a second power signal, a third power signal and a ground signal to/from an integrated device.
In some implementations, the first netlist structure region 1602 defines a region of the first metal layer that includes one or more interconnects (e.g., traces) that are part of a first netlist. In some implementations, the first netlist structure region 1602 defines a repeating region of the first metal layer that includes one or more interconnects (e.g., traces) that are only part of the first netlist. It should be noted that the first netlist structure region 202 does not necessarily represent how the interconnects (e.g., traces) are formed on the first metal layer of the integrated device.
In some implementations, the second netlist structure region 1604 defines a region of the first metal layer that includes one or more interconnects (e.g., traces) that are part of a second netlist. In some implementations, the second netlist structure region 1604 defines a repeating region of the first metal layer that includes one or more interconnects (e.g., traces) that are only part of the second netlist. It should be noted that the second netlist structure region 1604 does not necessarily represent how the interconnects (e.g., traces) are formed on the first metal layer of the integrated device.
In some implementations, the third netlist structure region 1606 defines a region of the first metal layer that includes one or more interconnects (e.g., traces) that are part of a third netlist. In some implementations, the third netlist structure region 1606 defines a repeating region of the first metal layer that includes one or more interconnects (e.g., traces) that are only part of the second netlist. It should be noted that the third netlist structure region 1606 does not necessarily represent how the interconnects (e.g., traces) are formed on the first metal layer of the integrated device.
In some implementations, the fourth netlist structure region 1702 defines a region of the second metal layer that includes one or more interconnects (e.g., traces) that are part of a fourth netlist. In some implementations, the fourth netlist structure region 1702 defines a repeating region of the second metal layer that includes one or more interconnects (e.g., traces) that are only part of the fourth netlist. It should be noted that the fourth netlist structure region 1702 does not necessarily represent how the interconnects (e.g., traces) are formed on the second metal layer of the integrated device.
In some implementations, the fifth netlist structure region 1704 defines a region of the second metal layer that includes one or more interconnects (e.g., traces) that are part of the second netlist. In some implementations, the fifth netlist structure region 1704 defines a repeating region of the second metal layer that includes one or more interconnects (e.g., traces) that are only part of the second netlist. It should be noted that the fifth netlist structure region 1704 does not necessarily represent how the interconnects (e.g., traces) are formed on the second metal layer of the integrated device.
In some implementations, the sixth netlist structure region 1706 defines a region of the second metal layer that includes one or more interconnects (e.g., traces) that are part of the third netlist. In some implementations, the sixth netlist structure region 1706 defines a repeating region of the second metal layer that includes one or more interconnects (e.g., traces) that are only part of the third netlist. It should be noted that the sixth netlist structure region 1706 does not necessarily represent how the interconnects (e.g., traces) are formed on the second metal layer of the integrated device.
In some implementations, the first metal layer 1600 and the second metal layer 1700 form a power distribution structure that may be implemented in different parts of an integrated device and/or substrate. In some implementations, the power distribution is configured to provide four (4) netlist structures in two metal layers. In some implementations, the power distribution structure may be implemented in a printed circuit board (PCB), a package substrate, a redistribution portion (e.g., redistribution layers) of a die, a wafer level die, a wafer level package (WLP), an embedded wafer level package (eWLP), an embedded wafer level ball grid array (eWLB), and/or an integrated fan out (INFO) wafer level package.
In some implementations, the power distribution structure provides several advantages to an integrated device. For example, when the power distribution structure is coupled to several bumps and/or solder balls, the even distribution of the power distribution structure across the entire metal layer(s) of the integrated device (1) provides lower inductance and lower resistance between a bump and a solder ball, and (2) more evenly spreads out bump to solder ball inductance and resistance (e.g., less variance in inductance and resistance between different combination of bumps to solder balls), which leads to better signal performance and thus better integrated device performance.
In some implementations, the power distribution structure is configured in such a way as to minimize parasitic effects on the power distribution network. In some implementations, this is achieved by reducing and/or minimizing the number of overlaps (e.g., vertical overlaps) between interconnects from different netlist structures. For example, a first interconnect from a first netlist may be placed on a first metal layer such that it does not overlap (e.g., vertically overlap) with a second interconnect from a second netlist on a second metal layer.
In some implementations, the first netlist structure region 1602, the second netlist structure region 1604, the third netlist structure region 1606, a fourth netlist structure region 1702, a fifth netlist structure region 1704, and/or the sixth netlist structure region 1706 are configured in the first and second metal layers such that they at least substantially (e.g., about 90% or higher) or completely utilize all of the surface area of the first and second metal layers of the integrated device, thereby maximizing the use of space available for a power distribution network, while at the same time, minimizing parasitic effects, impedance and/or resistance in the power distribution network.
It should be noted that in some implementations, a netlist structure region is a representation of a region in an integrated device and/or substrate that includes a power distribution structure. Thus, in some implementations, a netlist structure region is not an actual representation of a netlist structure, but rather is one or more regions that includes interconnects that define a netlist structure. However, in some implementations, the netlist structure region may represent the actual (or close to the actual representation of a) netlist structure of a power distribution network.
It should be noted that the one or more of the regions (e.g., island regions, contiguous regions) may have similar or different sizes and shapes, and is not limited to the size and/or shapes shown in
Exemplary Method For Providing a Power Distribution Network
The method provides (at 2205) a first netlist structure region in an integrated device. In some implementations, providing (e.g., forming) the first netlist structure region (e.g., netlist structure region 206) includes providing a first netlist structure region that includes a set of interconnects (e.g., traces) on at least one metal layer (e.g., first metal layer) of an integrated device and/or a substrate (e.g., package substrate). In some implementations, the first netlist structure region includes a set of repeating regions on a first metal layer of an integrated device and/or substrate. In some implementations, the first netlist structure region includes another set of repeating regions on a second metal layer of an integrated device and/or substrate. In some implementations, the first netlist structure region includes a first netlist structure that is configured to provide a power signal or ground signal to/from an integrated device.
The method further provides (at 2210) a second netlist structure region in an integrated device. In some implementations, providing (e.g., forming) the second netlist structure region (e.g., netlist structure region 202) includes providing a second netlist structure region that includes a set of interconnects (e.g., traces) on at least one metal layer (e.g., first metal layer) of an integrated device and/or a substrate (e.g., package substrate). In some implementations, the second netlist structure region includes a set of repeating regions on a first metal layer of an integrated device and/or substrate. In some implementations, the second netlist structure region includes another set of repeating regions on a second metal layer of an integrated device and/or substrate. In some implementations, the second netlist structure region includes a second netlist structure that is configured to provide a power signal or ground signal to/from an integrated device.
The method also provides (at 2215) a third netlist structure region in an integrated device. In some implementations, providing (e.g., forming) the third netlist structure region (e.g., netlist structure region 204) includes providing a third netlist structure region that includes a set of interconnects (e.g., traces) on at least one metal layer (e.g., first metal layer) of an integrated device and/or a substrate (e.g., package substrate). In some implementations, the third netlist structure region includes a set of repeating regions on a first metal layer of an integrated device and/or substrate. In some implementations, the third netlist structure region includes another set of repeating regions on a second metal layer of an integrated device and/or substrate. In some implementations, the third netlist structure region includes a first netlist structure that is configured to provide a power signal or ground signal to/from an integrated device.
The method may optionally provide (at 2220) a fourth netlist structure region in an integrated device. In some implementations, providing (e.g., forming) the fourth netlist structure region (e.g., netlist structure region 2100) includes providing a fourth netlist structure region that includes a set of interconnects (e.g., traces) on at least one metal layer (e.g., first metal layer) of an integrated device and/or a substrate (e.g., package substrate). In some implementations, the fourth netlist structure region includes a set of repeating regions on a first metal layer of an integrated device and/or substrate. In some implementations, the fourth netlist structure region includes another set of repeating regions on a second metal layer of an integrated device and/or substrate. In some implementations, the fourth netlist structure region includes a fourth netlist structure that is configured to provide a power signal or ground signal to/from an integrated device.
In some implementations, the first netlist structure region, the second netlist structure region, and the third netlist structure region, and/or the fourth netlist structure region are configured in the first and second metal layers such that they at least substantially (e.g., about 90% or higher) or completely utilize all of the surface area of the first and second metal layers of the integrated device, thereby maximizing the use of space available for a power distribution network, while at the same time, minimizing parasitic effects, impedance and/or resistance in the power distribution network.
It should be noted that the one or more regions (e.g., island regions, contiguous regions) may have similar or different sizes and shapes, and is not limited to the sizes and/or shapes shown in present disclosure. In addition, the use of regions for different netlists is not limited to two metal layers. In some implementations, more than two metal layers of an integrated device or substrate may be implemented with regions that are spaced apart from each other in a staggered, offset, and/or island formation.
Exemplary Electronic Devices
One or more of the components, steps, features, and/or functions illustrated in
The word “exemplary” is used herein to mean “serving as an example, instance, or illustration.” Any implementation or aspect described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other aspects of the disclosure. Likewise, the term “aspects” does not require that all aspects of the disclosure include the discussed feature, advantage or mode of operation. The term “coupled” is used herein to refer to the direct or indirect coupling between two objects. For example, if object A physically touches object B, and object B touches object C, then objects A and C may still be considered coupled to one another—even if they do not directly physically touch each other.
The terms “region”, “netlist region”, and “netlist structure region” are used throughout the present application. In some implementations, a “region”, “netlist region”, and/or “netlist structure region” is a region of the integrated device and/or substrate that is defined by actual physical boundaries (e.g., boundaries between metal layer and dielectric layer). In some implementations, a “region”, “netlist region”, and/or “netlist structure region” is a region of the integrated device and/or substrate that is defined by abstract or conceptual boundaries (e.g., boundaries as defined in an integrated circuit/device layout). These abstract or conceptual boundaries may be similar or aligned to actual physical boundaries and/or they may be arbitrarily defined in the integrated device and/or the substrate.
Also, it is noted that the embodiments may be described as a process that is depicted as a flowchart, a flow diagram, a structure diagram, or a block diagram. Although a flowchart may describe the operations as a sequential process, many of the operations can be performed in parallel or concurrently. In addition, the order of the operations may be re-arranged. A process is terminated when its operations are completed.
It should also be noted the inductors described in the present disclosure may be implemented in other portions of a device. For example, in some implementations, the inductors described in the present disclosure may be implemented (e.g., manufactured, provided) in a printed circuit board (PCB) and/or a die (e.g., in lower metal layers and dielectric layers of a die), using known manufacturing processes.
The various features of the disclosure described herein can be implemented in different systems without departing from the disclosure. It should be noted that the foregoing aspects of the disclosure are merely examples and are not to be construed as limiting the disclosure. The description of the aspects of the present disclosure is intended to be illustrative, and not to limit the scope of the claims. As such, the present teachings can be readily applied to other types of apparatuses and many alternatives, modifications, and variations will be apparent to those skilled in the art.
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