Number | Name | Date | Kind |
---|---|---|---|
4394712 | Anthony | Jul 1983 | |
5229549 | Yamakawa et al. | Jul 1993 |
Number | Date | Country |
---|---|---|
55-44747 | Mar 1980 | JPX |
72663 | Apr 1985 | JPX |
1-101699 | Apr 1989 | JPX |
5-75253 | Mar 1993 | JPX |
Entry |
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Anthony, T. R. "Forming Electrical Interconnections Through Semiconductor Wafers", J. Appl. Phys 52(8) Aug. 1981, pp. 5340-5349. |