Number | Name | Date | Kind |
---|---|---|---|
4554613 | Kaufman | Nov 1985 | |
4922378 | Malhi et al. | May 1990 | |
5070936 | Carroll et al. | Dec 1991 |
Entry |
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Hazen et al, "Thin Film Protective Coatings for Processing Aluminum Nitride Substrates", ISHM Advanced Technology Workshop-Aluminum Nitride Technology, Mar. 14, 1991. |