Number | Date | Country | Kind |
---|---|---|---|
4-191067 | Jul 1992 | JPX | |
5-099971 | Apr 1993 | JPX | |
5-164831 | Jul 1993 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5215787 | Homma | Jun 1993 | |
5288518 | Homma | Feb 1994 |
Number | Date | Country |
---|---|---|
59-30130 | Jul 1984 | JPX |
62-293619 | Dec 1987 | JPX |
62-062238 | Mar 1988 | JPX |
1-255664 | Oct 1989 | JPX |
3-268429 | Nov 1991 | JPX |
Entry |
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Van de Ven et al., 1990 VMIC. Conference, Jun. 12-13 1990, pp. 194-201. |
IEEE IEDM, 1991, pp. 289-292, T. Homa, et al., "A Room Temperature CVD Technology for Interlayer in Deep-Submicron Multilevel Interconnection". |
Proc. 2nd International ULSI Science and Technology Symp. ECS Proc., 1989, pp. 571-585, D. A. Webb, et al., "Silicon Dioxide Films Produced by PECVD of TEOS and TMCTS". |