Embodiments of the present disclosure relate to semiconductor packaging arrangements, and in particular to a packaging arrangement that includes a high density interconnect bridge for interconnecting dies within the packaging arrangement.
Packaging arrangements for semiconductor devices often include numerous semiconductor devices within the package. Some of the semiconductor devices may need high density interconnects with respect to other semiconductor devices and components within the package. However, materials for creating and providing such high density interconnects can be expensive and/or complicated.
In various embodiments, the present disclosure provides a packaging arrangement comprising one or more redistribution layers and an interconnect bridge embedded within the one or more redistribution layers. A first die is coupled to (i) a first portion of the one or more redistribution layers and (ii) a first portion of the interconnect bridge. A second die coupled to a (ii) a second portion of the one or more redistribution layers and (ii) a second portion of the interconnect bridge to electrically couple the first die and the second die via at least the first interconnect bridge.
In various embodiments, the present disclosure also provides a method that comprises providing a carrier and coupling an interconnect bridge to the carrier. One or more redistribution layers are formed on the carrier around the interconnect bridge and copper posts are formed on the interconnect bridge and the one or more redistribution layers. A first die is coupled to a first set of copper posts on the interconnect bridge and a first set of copper posts on the one or more redistribution layers. A second die is coupled to a second set of copper posts on the interconnect bridge and a second set of copper posts on the one or more redistribution layers. The carrier is removed.
Embodiments of the present disclosure will be readily understood by the following detailed description in conjunction with the accompanying drawings. To facilitate this description, like reference numerals designate like structural elements. Various embodiments are illustrated by way of example and not by way of limitation in the figures of the accompanying drawings.
The first interconnect bridge 112 is generally configured to provide high density interconnection between the first die 106 and the second die 108. The second interconnect bridge 114 is generally configured to provide high density interconnection between the first die 106 and the third die 110. For example, the interconnect bridges 112, 114 may be configured to allow for interconnects having a size of two micrometers or less and spacing between the various interconnects of two micrometers or less. In embodiments, the interconnect bridges comprise silicon.
While not illustrated in
As can be seen in
In order to make or manufacture the package arrangements 100 and 200, the carrier 102 is provided. The carrier 102 includes a die attach tape or film. The first interconnect bridge 112 is placed on the carrier 102 along with the second interconnect bridge 114. One or more redistribution layers 104 are then formed/grown on the carrier 102 around the first interconnect bridge 112 and the second interconnect bridge 114. Thus, the interconnect bridges 112, 114 are embedded within the one or more redistribution layers 104. In embodiments, the one or more redistribution layers 104 are formed using a backend polymer/plating process with copper metal line width/spacing of two micrometers/two micrometers or more. Thus, generally, in embodiments, the line width and spacing of the interconnect spacing, e.g. spacing of the copper posts 116, is less than copper metal line width/spacing of the one or more redistribution layers 104. In embodiments, the redistribution layers 104 may be grown prior to placement of the first interconnect bridge 112 and the second interconnect bridge 114 on the carrier 102 and thus, the first interconnect bridge 112 and the second interconnect bridge 114 would be placed on the redistribution layers 104.
In embodiments, sides or edges of the redistribution layers 104 may be molded and ground for smoothing purposes. The copper posts 116, 120 are also formed/grown on the redistribution layers 104 and the interconnect bridges 112, 114 when the redistribution layers 104 are grown. The microbumps 118, 122 are then placed on the copper posts 116, 120, respectively, or on the first die 106, the second die 108, and the third die 110. The first die 106, the second die 108, and the third die 110 can then be flip chip attached to the copper posts 116, 120. A mold or encapsulant (not illustrated) can then be placed over the dies 106, 108, 110 and interconnect bridges 112, 114 to substantially encapsulate the components, including the one or more redistribution layers 104.
The carrier 102 is then detached from the packaging arrangements 100, 200. After detachment of the carrier 102, a backside 124 of the one or more redistribution layers 104 can be ground for smoothing purposes. Thus, the bottom of the packaging arrangement 100 will include the backside 124 of the one or more redistribution layers 104 as well as a backside of the interconnect bridges 112, 114 embedded within the redistribution layers 104. Bond pads (not illustrated) defined within the bottom of the redistribution layers 104 and/or the interconnect bridges 112, 114 can then receive copper balls or bumps and the packaging arrangement 100, 200 can be flip chip attached to a substrate (not illustrated).
Thus, in accordance with embodiments, the interconnect bridges 112, 114 allow for high density, e.g., two micrometer or less sizing interconnects and spacing between the dies 106, 108, 110 with only a small amount of silicon used for the interconnect bridges 112, 114. Other interconnects between the first die 106, the second die 108, the third die 110 via the one or more redistribution layers 104, as well as a substrate that receives the packaging arrangement 100, 200, can be provided with the copper posts 120 in a configuration where the density is not as high, for example, the density of the copper posts 120 can be more than two micrometers in size with spacing of more than two micrometers between the copper posts 120.
At 302, a carrier, e.g. carrier 102, is provided. At 304, an interconnect bridge, e.g., interconnect bridges 112, 114, is coupled to the carrier. At 306, one or more redistribution layers, e.g., redistribution layer 104, is formed on the carrier around the interconnect bridge. At 308, copper posts, e.g., copper posts 116, 120, are formed on the interconnect bridge and the one or more redistribution layers. At 310, a first die, e.g., die 106, is coupled to a first set of copper posts on the interconnect bridge and a first set of copper posts on the one or more redistribution layers. At 312, a second die, e.g., die 108, is coupled to a second set of copper posts on the interconnect bridge and a second set of copper posts on the one or more redistribution layers. At 314, the carrier is removed.
The description may use the phrases “in an embodiment,” or “in embodiments,” which may each refer to one or more of the same or different embodiments. The phrase “in some embodiments” is used repeatedly. The phrase generally does not refer to the same embodiments; however, it may. The terms “comprising,” “having,” and “including” are synonymous, unless the context dictates otherwise. The phrase “A and/or B” means (A), (B), or (A and B). The phrase “A/B” means (A), (B), or (A and B), similar to the phrase “A and/or B.” The phrase “at least one of A, B and C” means (A), (B), (C), (A and B), (A and C), (B and C) or (A, B and C). The phrase “(A) B” means (B) or (A and B), that is, A is optional.
Although certain embodiments have been illustrated and described herein, a wide variety of alternate and/or equivalent embodiments or implementations calculated to achieve the same purposes may be substituted for the embodiments illustrated and described without departing from the scope of the present invention. This application is intended to cover any adaptations or variations of the embodiments discussed herein. Therefore, it is manifestly intended that embodiments in accordance with the present invention be limited only by the claims and the equivalents thereof.
This claims priority to U.S. Provisional Patent Application No. 62/290,722, filed on Feb. 3, 2016 and U.S. Provisional Patent Application No. 62/247,864, filed on Oct. 29, 2015, which are incorporated herein by reference in their entireties.
Number | Name | Date | Kind |
---|---|---|---|
7649245 | Zingher | Jan 2010 | B2 |
9147663 | Liu | Sep 2015 | B2 |
9368450 | Gu | Jun 2016 | B1 |
9379090 | Syed | Jun 2016 | B1 |
9418966 | Kwon | Aug 2016 | B1 |
9508636 | Zhang | Nov 2016 | B2 |
9542522 | Qian | Jan 2017 | B2 |
20100327424 | Braunisch | Dec 2010 | A1 |
20130256000 | Terui | Oct 2013 | A1 |
20140117552 | Qian | May 2014 | A1 |
20140131854 | Hawk | May 2014 | A1 |
20140159228 | Teh | Jun 2014 | A1 |
20140252646 | Hung et al. | Sep 2014 | A1 |
20140264337 | Chen | Sep 2014 | A1 |
20140360759 | Kunieda et al. | Dec 2014 | A1 |
20150084210 | Chiu et al. | Mar 2015 | A1 |
20150235991 | Gu et al. | Aug 2015 | A1 |
20160071818 | Wang | Mar 2016 | A1 |
20160079196 | Teh | Mar 2016 | A1 |
20160141234 | We | May 2016 | A1 |
20180102311 | Shih | Apr 2018 | A1 |
20180182699 | Lai | Jun 2018 | A1 |
20190027431 | Feng | Jan 2019 | A1 |
Number | Date | Country | |
---|---|---|---|
20170125334 A1 | May 2017 | US |
Number | Date | Country | |
---|---|---|---|
62290722 | Feb 2016 | US | |
62247864 | Oct 2015 | US |