Semiconductor devices are commonly found in modern electronic products. Semiconductor devices vary in the number and density of electrical components. Semiconductor devices perform a wide range of functions such as analog and digital signal processing, sensors, transmitting and receiving electromagnetic signals, controlling electronic devices, power management, and audio/video signal processing. Discrete semiconductor devices generally contain one type of electrical component, e.g., light emitting diode (LED), small signal transistor, resistor, capacitor, inductor, diodes, rectifiers, thyristors, and power metal-oxide-semiconductor field-effect transistor (MOSFET). Integrated semiconductor devices typically contain hundreds to millions of electrical components. Examples of integrated semiconductor devices include microcontrollers, application specific integrated circuits (ASIC), power conversion, standard logic, amplifiers, clock management, memory, interface circuits, and other signal processing circuits.
Semiconductor devices perform a wide range of functions such as signal processing, high-speed calculations, transmitting and receiving electromagnetic signals, controlling electronic devices, transforming sunlight to electricity, and creating visual images for television displays. Semiconductor devices are found in the fields of entertainment, communications, power conversion, networks, computers, and consumer products. Semiconductor devices are also found in military applications, aviation, automotive, industrial controllers, and office equipment.
A semiconductor device contains active and passive electrical structures. Active structures, including bipolar and field effect transistors, control the flow of electrical current. By varying levels of doping and application of an electric field or base current, the transistor either promotes or restricts the flow of electrical current. Passive structures, including resistors, capacitors, and inductors, create a relationship between voltage and current necessary to perform a variety of electrical functions. The passive and active structures are electrically connected to form circuits, which enable the semiconductor device to perform high-speed operations and other useful functions.
Semiconductor devices are generally manufactured using two complex manufacturing processes, i.e., front-end manufacturing and back-end manufacturing, each involving potentially hundreds of steps. Front-end manufacturing involves the formation of a plurality of die on the surface of a semiconductor wafer. Each semiconductor die is typically identical and contains circuits formed by electrically connecting active and passive components. Back-end manufacturing involves singulating individual semiconductor die from the finished wafer and packaging the die to provide structural support, electrical interconnect, and environmental isolation. The term “semiconductor die” as used herein refers to both the singular and plural form of the words, and accordingly, can refer to both a single semiconductor device and multiple semiconductor devices.
One goal of semiconductor manufacturing is to produce smaller semiconductor devices. Smaller devices typically consume less power, have higher performance, and can be produced more efficiently. In addition, smaller semiconductor devices are desirable for enabling manufacture of smaller end products. A smaller semiconductor device size can be achieved by improvements in the front-end process resulting in semiconductor die with smaller, higher density active and passive components. Back-end processes may result in semiconductor device packages with a smaller footprint or height by improvements in electrical interconnection and packaging materials.
Leadless package 10 is mounted to a printed circuit board (PCB) or other substrate 20. Solder 50 is reflowed between leadframe contacts 26a and contact pads 22 on PCB 20 to form a metallurgical and electrical connection between leadless package 10 and the PCB. Leadless package 10 includes leads 26a for external interconnection, which are simply portions of a metal leadframe exposed from the final package. Leads 26a are used instead of leads that extend from the package laterally and/or vertically as in traditional semiconductor package types. The exposed wettable material of contacts 26a on the lateral surfaces of package 10 allows solder 50 to form filleted surfaces 52 after leadless package 10 is mounted onto PCB 20.
Fillets 52 are useful to manufacturers of electronic devices because proper interconnection between semiconductor die 24 and PCB 20 can be verified visually by a human or by an automatic visual inspection device 56 including a camera and a computer programmed to analyze the images. If a visual inspection shows that a proper fillet 52 was not formed for one of the connections of a lead 26a to a contact pad 22, an error in the specific PCB 20 is recorded. If visual inspection device 56 verifies that each connection between leadless package 10 and PCB 20 includes a proper fillet 52, the manufacturer can have confidence that the package is properly connected to the system as a whole.
Leadless package 10 reduces the footprint required on PCB 20 over many prior art packages by not having leads that extend from the package, and instead having leads 26a that remain within the footprint of the package body. Leadless packages have been further reduced in size by reducing a thickness of the leadframe. The substrate material of leadframe 26 must be thick enough to support semiconductor die 24 during the manufacturing process.
Leadframe 66 is not relied upon to provide physical support for semiconductor die 24 during formation of leadless package 60 because of support from the sacrificial substrate, so leadframe 66 can be plated as a relatively thin layer. The thinner leadframe 66 results in a final leadless package 60 that is thinner than leadless package 10. However, the reduced thickness of leadframe 66 also results in a concomitant reduction in adhesion between the leadframe and encapsulant 40. To increase adhesion, manufacturers form contacts 66a that do not extend fully to the lateral edges of package 60.
Encapsulant 40 fully surrounds contacts 66a in plated leadless packages to increase contact area and mold lock between the encapsulant and the leadless contacts. However, without contacts 66a exposed at the flanks of leadless package 60, solder 70 does not form a fillet easily visible when the leadless package is mounted on PCB 20. The sides of package 60 do not include wettable surfaces for solder 70 to reflow onto. While forming a leadless package with a plated leadframe results in a thinner semiconductor package for a potentially smaller end product, installation of the package does not form filleted solder connections. The resulting connection of solder 70 between leadless package 60 and PCB 20 is more difficult to verify with visual inspection device 56, and may require other technology, such as x-ray devices, to properly verify.
Therefore, a need exists for a method of forming a leadless package using a plated leadframe that also has wettable flanks to form a filleted solder connection.
The following describes one or more embodiments with reference to the figures, in which like numerals represent the same or similar elements. While the figures are described in terms of the best mode for achieving certain objectives, the description is intended to cover alternatives, modifications, and equivalents as may be included within the spirit and scope of the disclosure.
In
Each contact pad 104 extends across an inter-die area or saw street 106.
Contacts 104b in
In
In
In
Because each contact 104 extends across a saw street 106 between two adjacent semiconductor die 24 in panel 116, singulation into individual leadless packages 122 results in exposed wettable flanks 124 for each contact of the leadless packages. Removing substrate 100 exposes bottom surfaces 126 of each contact 104. In
Solder 130 is reflowed between contacts 104 of leadless package 122 and contact pads 22 of PCB 20 to electrically and mechanically connect semiconductor die 24 to PCB 20. Reflowing solder 130 creates a good connection of the solder to both contacts 104 and contact pads 22. When solder 130 is reflowed, the solder material wets onto flanks 124 of contacts 104 exposed at the lateral surfaces of leadless package 122. Fillets 132 of solder 130 extend outside a footprint of package 122, and are visible to visual inspection device 56. Visual inspection device 56 is used to verify solder 130 makes a good connection between package 122 and PCB 20 for each contact 104 by visually inspecting fillet 132. Package 122 allows a relatively thin package height by using a plated leadframe, while also providing a wettable flank 124 for a visually verifiable solder fillet.
A second side surface 154 of package 150 includes rectangular contacts 104b from
Side surface 158 of leadless package 150 includes a single larger plated lead 160. Lead 160 includes three necks 164 that each extend to side surface 158. Necks 164 allow encapsulant 40 to flow into the space between the necks to improve adhesion of the encapsulant to lead 160. Lead 160 includes shoulders 168 at each end of the lead, but necks 164 are formed at the ends of lead 160 in other embodiments. Contact 160 results in three filleted solder connections at side surface 158 of leadless package 150 for one electrical connection. Visual inspection device 56 is programmable to verify any number of solder fillets at any number of sides of package 150.
Contacts for the leadframe will be formed on ridge 210, so a ridge 210 is formed on each side of location where a die pad will be formed on substrate 200.
In
Using a ridged substrate 200 to provide for fillets 242 allows solder fillets to be formed on a plated leadframe while still having encapsulant 40 fully surround the edges of contacts 220 for added adhesion of the contacts to the package. However,
Other shapes of a ridged substrates are used in other embodiments.
In addition to being formed in a variety of possible shapes, ridged substrates may be formed in a variety of methods.
In other embodiments, the formation of ridge 302 includes an etching step on the bottom of substrate 300 to remove material under ridge 302, thus creating a substrate 300 having a more uniform distribution of material. Ridge 302 can be etched into any desired shape to customize the shape of a resulting wettable flank, e.g., round, rectangular, or sloped. Ridge 302 could also be formed only at the specific locations where package contacts are to be formed, rather than extending uniformly across substrate 300. Ridge 302 can be etched in any of the above-disclosed shapes, and any of the above-disclosed contact configurations are usable with leadframe 300.
While one or more embodiments have been illustrated and described in detail, the skilled artisan will appreciate that modifications and adaptations to those embodiments may be made without departing from the scope of the present disclosure.
This application is a divisional application of the earlier U.S. Utility patent application to Truhitte entitled “Methods of Forming Leadless Semiconductor Packages with Plated Leadframes and Wettable Flanks,” application Ser. No. 15/357,680, filed Nov. 21, 2016, now pending, the disclosure of which is hereby incorporated entirely herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
5327008 | Djennas et al. | Jul 1994 | A |
5835988 | Ishii | Nov 1998 | A |
5866939 | Shin et al. | Feb 1999 | A |
5900676 | Kweon et al. | May 1999 | A |
5969411 | Fukaya | Oct 1999 | A |
5976912 | Fukutomi et al. | Nov 1999 | A |
6001671 | Fjelstad | Dec 1999 | A |
6130473 | Mostafazadeh et al. | Oct 2000 | A |
6143981 | Glenn | Nov 2000 | A |
6193858 | Hradil et al. | Feb 2001 | B1 |
6229200 | McLellan et al. | May 2001 | B1 |
6242281 | McLellan et al. | Jun 2001 | B1 |
6255740 | Tsuji et al. | Jul 2001 | B1 |
6294100 | Fan et al. | Sep 2001 | B1 |
6338984 | Minamio et al. | Jan 2002 | B2 |
6498099 | McLellan et al. | Dec 2002 | B1 |
6545347 | McClellan | Apr 2003 | B2 |
6585905 | Fan et al. | Jul 2003 | B1 |
6593643 | Seki et al. | Jul 2003 | B1 |
6608366 | Fogelson et al. | Aug 2003 | B1 |
6638790 | Minamio et al. | Oct 2003 | B2 |
6664136 | Motonami et al. | Dec 2003 | B2 |
6734044 | Fan et al. | May 2004 | B1 |
6841414 | Hu et al. | Jan 2005 | B1 |
6872599 | Li et al. | Mar 2005 | B1 |
6940154 | Pedron et al. | Sep 2005 | B2 |
7023074 | Li | Apr 2006 | B2 |
7071545 | Patel et al. | Jul 2006 | B1 |
7091581 | McLellan et al. | Aug 2006 | B1 |
7183630 | Fogelson et al. | Feb 2007 | B1 |
7247526 | Fan et al. | Jul 2007 | B1 |
7262491 | Islam et al. | Aug 2007 | B2 |
7405468 | Masuda | Jul 2008 | B2 |
7410834 | Fukaya | Aug 2008 | B2 |
7443043 | Sakamoto | Oct 2008 | B2 |
7504722 | Ochiai | Mar 2009 | B2 |
7635910 | Sinaga et al. | Dec 2009 | B2 |
7786557 | Hsieh | Aug 2010 | B2 |
7846774 | Yee et al. | Dec 2010 | B2 |
7875963 | Kim et al. | Jan 2011 | B1 |
8071427 | Celaya et al. | Dec 2011 | B2 |
8089166 | Kim | Jan 2012 | B2 |
8318340 | Stimits | Nov 2012 | B2 |
8444840 | Stimits et al. | May 2013 | B2 |
8535982 | Abdo | Sep 2013 | B1 |
8648474 | Nondhasittichai et al. | Feb 2014 | B2 |
8994160 | Kimura | Mar 2015 | B2 |
9601415 | Makino | Mar 2017 | B2 |
10083866 | Bin Mohd Arshad | Sep 2018 | B2 |
20020067486 | Forney et al. | Jun 2002 | A1 |
20020144396 | Glenn | Oct 2002 | A1 |
20040142505 | Huang | Jul 2004 | A1 |
20050003586 | Shimanuki et al. | Jan 2005 | A1 |
20050093117 | Masuda | May 2005 | A1 |
20050116321 | Li et al. | Jun 2005 | A1 |
20050139982 | Fukaya et al. | Jun 2005 | A1 |
20050199987 | Danno | Sep 2005 | A1 |
20050206010 | Noquil et al. | Sep 2005 | A1 |
20070126092 | San Antonio et al. | Jun 2007 | A1 |
20070176267 | Abbott | Aug 2007 | A1 |
20080001263 | Dimaano et al. | Jan 2008 | A1 |
20080226976 | Stimits | Sep 2008 | A1 |
20080258273 | Liang et al. | Oct 2008 | A1 |
20080290484 | Low et al. | Nov 2008 | A1 |
20090160037 | Bayan et al. | Jun 2009 | A1 |
20090289335 | Camacho et al. | Nov 2009 | A1 |
20090302445 | Pagaila | Dec 2009 | A1 |
20110115061 | Krishnan et al. | May 2011 | A1 |
20110244629 | Gong et al. | Oct 2011 | A1 |
20120043660 | Poddar | Feb 2012 | A1 |
20120112333 | Liu et al. | May 2012 | A1 |
20120306065 | Bin Mohd Arshad | Dec 2012 | A1 |
20130320527 | Sunaga | Dec 2013 | A1 |
20140151865 | Koschmieder | Jun 2014 | A1 |
20160056097 | Bai | Feb 2016 | A1 |
20160254217 | Lu | Sep 2016 | A1 |
20170263537 | Suzuhara | Sep 2017 | A1 |
20180040545 | Williams | Feb 2018 | A1 |
Number | Date | Country |
---|---|---|
2003103038 | Dec 2003 | WO |
2006105733 | Oct 2006 | WO |
Entry |
---|
Technic Inc., Equipment Division, Vibratory Plating Units Combining Rack Plating Quality with Barrel Plating Production at Significant Savings, Bulletin 901, www.technic.com, Downloaded Jan. 15, 2014, 2 pages. |
Koschmieder, et al., Soldering the QFN Stacked Die Sensors to a PC Board, Freescale Semiconductor Application Note AN 3111, Rev 5, Apr. 2010, 9 pages. |
Number | Date | Country | |
---|---|---|---|
20190088579 A1 | Mar 2019 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 15357680 | Nov 2016 | US |
Child | 16194734 | US |