1. Field of the Invention
The invention relates in general to a semiconductor package and a manufacturing method thereof, and more particularly to a semiconductor package with an antenna and a manufacturing method thereof.
2. Description of the Related Art
Wireless communication devices, such as cell phones, require antennas for transmitting and receiving radio frequency (RF) signals. Conventionally, a wireless communication device includes therein an antenna and a communication module (e.g., a semiconductor package with RF communication capability), each disposed on different parts of a circuit board. Under the conventional approach, the antenna and the communication module are separately manufactured and electrically connected after being placed on the circuit board. Accordingly, higher manufacturing costs are incurred and a compact product design as well as reduced device size are difficult to achieve. In addition, a RF signal transmission path between the antenna and the communication module is long, and the quality of a signal transmitted between the antenna and the communication module is reduced.
One aspect of the disclosure relates to a semiconductor package. In one embodiment, the semiconductor package includes a first substrate including a ground layer; an interposer disposed on an upper surface of the first substrate and having at least one opening; a first die disposed in the at least one opening and coupled to the first substrate; a second substrate coupled to the interposer, disposed over the first substrate and having an area less than an area of the first substrate; a second die disposed on a lower surface of the second substrate; a third die embedded within the second substrate; an inductor disposed on an upper surface of the second substrate wherein the inductor is electrically connected to the second die and the third die; a package body encapsulating portions of the first substrate, the interposer, the second substrate, the first die and the second die, the package body having a lateral surface and an upper surface; and a metal layer disposed on the lateral surface and upper surface of the package body wherein the metal layer is electrically connected to the first substrate and wherein the metal layer has voids that overlie the inductor that determine a radiation distribution pattern. The lateral surface of the package body can be substantially aligned with a lateral surface of the first substrate. In an embodiment, a dielectric layer covers the upper surface of the metal layer; and a patterned metal layer is formed on the dielectric layer. In an embodiment, the embedded third die has an active surface facing towards the first substrate and includes bond pads which are exposed from the second substrate, a conductive path connects the exposed bond pads with the inductor. In this embodiment, the inductor is separated from the metal layer by the package body. In an embodiment, an electrical frame electrically is connected to the ground layer and the metal layer.
Another aspect of the disclosure relates to manufacturing methods. In one embodiment, a manufacturing method is described as follows. The method includes forming a first substrate having a grounding segment. The method includes forming a second substrate, on which a semiconductor chip is disposed. The method includes disposing an interposer substrate between the first substrate and the second substrate, wherein the interposer substrate is electrically connected to the first substrate and the second substrate. A package body encapsulating portions of the second substrate, the semiconductor chip and the interposer substrate is formed. A singulation passing through the package body and the first substrate is formed, such that each of the package body and the first substrate forms a lateral surface. A first antenna layer disposed on the lateral surface and an upper surface of the package body is formed, wherein the first antenna layer is electrically connected to the grounding segment of the first substrate.
Another aspect of the disclosure relates to manufacturing methods. In one embodiment, a manufacturing method is described as follows. The method includes forming a first substrate having a grounding segment. The method includes forming a second substrate, on which a semiconductor chip is disposed. The method includes disposing an interposer substrate between a first substrate and the second substrate, wherein the interposer substrate is electrically connected to the first substrate and the second substrate. A package body encapsulating portions of the second substrate, the semiconductor chip and the interposer substrate is formed. A first singulation passing through the package body is formed, such that the package body forms a lateral surface. A first antenna layer disposed on the lateral surface and an upper surface of the package body is formed, wherein the first antenna layer is electrically connected to the grounding segment of the first substrate. A second singulation passing through the first substrate is then formed.
Common reference numerals are used throughout the drawings and the detailed description to indicate the same elements. The present invention will be more apparent from the following detailed description taken in conjunction with the accompanying drawings.
Referring to
The first substrate 110 has an upper surface 110u and a lower surface 110b opposite to the upper surface 110u, and includes a grounding segment 111. The first substrate 110 can be a multi-layered organic substrate or a ceramic substrate, for example. In addition, at least a semiconductor chip 112 and a passive component 143 are further disposed on the upper surface 110u of the first substrate 110 and electrically connected to the first substrate 110. For example, the semiconductor chip 112 disposed on the first substrate 110 may include a baseband chip.
In the present embodiment, the grounding segment 111 is a conductive pillar which extends from the upper surface 110u of the first substrate 110 to the lower surface 110b of the first substrate 110 (that is, the grounding segment 111 penetrates the first substrate 110). In another embodiment, the grounding segment 111 may not penetrate the first substrate 110. The grounding segment 111 can be made from a conductive material, including copper.
The interposer substrate 120 is disposed between the first substrate 110 and the second substrate 130 allowing a space in which the passive component 143, the semiconductor chips 140 are accommodated. In addition, the interposer substrate 120 can be placed in such a way to support a periphery portion and a middle portion of the second substrate 130 to reduce any warpage of the second substrate 130.
The interposer substrate 120 includes several conductive components 122 which electrically connect the first substrate 110 and the second substrate 130, such that a signal may be transmitted between the first substrate 110 and the second substrate 130 through the interposer substrate 120. Moreover, an adhesive 123 may be formed in a corner between the second substrate 130 and the interposer substrate 120 lest the interposer substrate 120 drops when the second substrate 130 is inverted.
The second substrate 130 may be a multi-layered organic substrate or a ceramic substrate, for example. The second substrate 130 includes a microstrip line 131, an embedded phase shifter 132, a patterned conductive layer 133, a feeding network 134 and a plurality of vias 135. The microstrip line 131 is disposed on the surface of the second substrate 130 and separated from the first antenna layer 160 by the package body 150. Consequently, an electrical current is generated in the first antenna layer 160 or the microstrip line 131 through electromagnetic induction.
The embedded phase shifter 132 is embedded in the second substrate 130 and electrically connects the microstrip line 131 and the feeding network 134 by the via 135 and the patterned conductive layer 133. In addition, the embedded phase shifter 132 electrically connects the feeding network 134 by the via 135 and the patterned conductive layer 133. The embedded phase shifter 132, such as a diode, can adjust a phase of a radio frequency signal emitted or received by the first antenna layer 160. In another embodiment, the embedded phase shifter 132 can be a power amplifier to modulate amplitude of the radio frequency signal. The feeding network 134 can transmit the signal from the semiconductor chips 140 to the first antenna layer 160.
The semiconductor chips 140 are disposed on the second substrate 130 and located between the first substrate 110 and the second substrate 130. For example, the semiconductor chip 140 disposed on the second substrate 130 may be a high-frequency chip. When one of the semiconductor chips 140 is electrically connected to the second substrate 130 via a plurality of bond wires 141, an active surface of the semiconductor chips 140 faces the first substrate 110. When one of the semiconductor chips 140 is electrically connected to the second substrate 130 via a solder ball 142, an active surface the semiconductor chips 140 faces the second substrate 130.
In the present embodiment, the package body 150 encapsulates the second substrate 130, the semiconductor chip 140 and the interposer substrate 120, and has a lateral surface 150s and an upper surface 150u. The lateral surface 150s of the package body 150 is substantially flush or coplanar with a lateral surface 111s of the grounding segment 111, when the lateral surface 150s of the package body 150 and the lateral surface 111s of grounding segment 111 are formed in the same singulation process.
The package body 150 is made from a material including a dielectric material, such that an electric field can be generated between the first antenna layer 160 and the microstrip line 131. In one embodiment, the package body 150 may include material such as novolac-based resin, epoxy-based resin, silicone-based resin or other suitable encapsulant. The package body 150 may also include suitable fillers such as powdered silicon dioxide. The package body 150 can be formed by various packaging technologies, such as, for example, compression molding, injection molding or transfer molding.
The first antenna layer 160 is formed on the lateral surface 150s and the upper surface 150u of the package body 150, and is extended to the lateral surface 111s of grounding segment 111 to electrically connect the grounding segment 111. The first antenna layer 160 can minimize electromagnetic interference (EMI) radiation from the semiconductor package 100 and prevent RF radiation from external sources from interfering with operation of the semiconductor package 100.
The first antenna layer 160 may include aluminum, copper, chromium, tin, gold, silver, nickel, stainless steel or any other suitable metal or alloy. The first antenna layer 160 may be a single-layered or multi-layered structure. In one embodiment, the first antenna layer 160 is a triple-layered structure, the inner layer is a stainless steel layer, the middle layer is a copper layer, and the outer layer is a stainless steel layer. In another embodiment, the first antenna layer 160 is a double-layered structure, wherein the inner layer is a copper layer, and the outer layer is a stainless steel layer.
The first antenna layer 160 includes a grounding layer 161 and an irradiation layer 162 connected to the grounding layer 161. The grounding layer 161 is formed on the lateral surface 150s of the package body 150 and the lateral surface 111s of the grounding segment 111. The irradiation layer 162 is formed on the upper surface 150u of the package body 150 and has a plurality of slots 160a from which a part of the package body 150 is exposed. When the first antenna layer 160 is driven by a driving frequency, the slots 160a radiate electromagnetic waves. Therefore, the shape and size of the slots 160a, as well as the driving frequency determine the radiation distribution pattern.
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The first substrate 110 includes a grounding segment 111 such as a patterned conductive layer, wherein the grounding segment 111 is electrically connected to the corresponding electrical contact 280. In another embodiment, the grounding segment 111 can be achieved by a trace, a solder or a conductive pillar. In the present embodiment, the grounding segment 111 is not exposed from a lateral surface 110s of the first substrate 110, but such embodiment is not meant to be limiting. The lateral surface 110s of the first substrate 110 is substantially flush or coplanar with a first lateral surface 150s1 of the package body 150 due to the first lateral surface 150s1 of the package body 150 and the lateral surface 110s of the first substrate 110 being formed in the same singulation process.
In the present embodiment, the package body 150 encapsulates the second substrate 130, the semiconductor chips 140 and the interposer substrate 120. The package body 150 has a second lateral surface 150s2 and an upper surface 150u, wherein the second lateral surface 150s2 of the package body 150 is substantially flush or coplanar with the a lateral surface 270s of the electrical frame 270 due to the second lateral surface 150s2 of the package body 150 and the lateral surface 270s of the electrical frame 270 being formed in the same singulation process.
The electrical frame 270 is electrically connected to the grounding segment 111, and is exposed form the first lateral surface 150s1 of the package body 150, such that the first antenna layer 160 can be formed on the exposed electrical frame 270 and electrically connects to the grounding segment 111 through the electrical frame 270.
Referring to
The dielectric layer 385 covers an upper surface 160u and a lateral surface 160s of the first antenna layer 160; that is, the dielectric layer 385 covers the grounding layer 161 and the irradiation layer 162 of the first antenna layer 160. The dielectric layer 385 can be formed by a material such as a package body, a dielectric material (e.g., epoxy), or a prepreg lamination.
The second antenna layer 390 is formed on an upper surface 385u of the dielectric layer 385, and separated from the first antenna layer 160, that is, the second antenna layer 390 is not electrically connected to the grounding segment 111. In the present embodiment, the second antenna layer 390 is an aperture coupled antenna. The region of the second antenna layer 390 corresponds to the slots 160a of first antenna layer 160 to shorten a transmission path for signal between the second antenna layer 390 and the first antenna layer 160.
Referring
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The first substrate 110 includes a grounding segment 111 such as a patterned conductive layer, wherein the grounding segment 111 is electrically connected the corresponding electrical contact 280. In another embodiment, the grounding segment 111 can be achieved by a trace, a solder or a conductive pillar. In the present embodiment, the grounding segment 111 is not exposed from a lateral surface 110s of the first substrate 110, and such embodiment is not meant to be limiting.
The lateral surface 110s of the first substrate 110 is substantially flush or coplanar with a first lateral surface 150s1 of the package body 150 due to the lateral surface 110s of the first substrate 110 and the first lateral surface 150s1 of the package body 150 being formed in the same singulation process.
The package body 150 encapsulates the second substrate 130, the semiconductor chips 140 and the interposer substrate 120, and has a second lateral surface 150s2 and an upper surface 150u. The second lateral surface 150s2 of the package body 150 is substantially flush or coplanar with a lateral surface 270s of the electrical frame 270 due to the second lateral surface 150s2 of the package body 150 and the lateral surface 270s of the electrical frame 270 being formed in the same singulation process.
The first antenna layer 160 is formed on the second lateral surface 150s2, the upper surface 150u of the package body 150 and the exposed electrical frame 270. The first antenna layer 160 is electrically connected to the grounding segment 111 through the electrical frame 270 and provides EMI protection.
The electrical frame 270 is electrically connected to the grounding segment 111, and is exposed form the second lateral surface 150s2 of the package body 150, such that the first antenna layer 160 can be formed on the exposed electrical frame 270 and electrically connected to the grounding segment 111 through the electrical frame 270.
The dielectric layer 385 covers the grounding layer 161 and the irradiation layer 162 of the first antenna layer 160. The second antenna layer 390 is disposed on the dielectric layer 385.
Referring to
The second substrate 130 has a lateral surface 130s which is substantially flush or coplanar with a lateral surface 150s of the package body 150. The second substrate 130 includes a microstrip line 131, an embedded phase shifter 132, a patterned conductive layer 133, a feeding network 134, a plurality of via 135 and a shielding layer 136. The patterned conductive layer 133 receives a high-frequency signal transmitted by the semiconductor chip 140 through the feeding network 134 and via 135, and then transforms the high-frequency signal into a base frequency signal. The base frequency signal is transmitted to the microstrip line 131 through the via 135, so that the irradiation layer 162 radiates a wireless signal by electromagnetic induction. In addition, the embedded phase shifter 132 can change a radiation power pattern of the wireless signal.
The shielding layer 136 is exposed from a lateral surface 130s of the second substrate 130 to be connected to the grounding layer 161. The combination of the second substrate 130 and the grounding layer 161 serves as an electromagnetic interference shield to protect the semiconductor chips 140 from EMI negatively affecting the operation of the semiconductor chips 140.
The lateral surface 130s of the second substrate 130, a lateral surface 150s of the package body 150 and a lateral surface 111s of the grounding segment 111 are substantially flush or coplanar with each other due to the lateral surface 130s, the lateral surface 150s and the lateral surface 111s being formed in the same singulation process.
The first antenna layer 560 includes a grounding layer 161 and an irradiation layer 162 separated from the grounding segment 161. The grounding layer 161 is formed on the lateral surface 150s of the package body 150 and the exposed grounding segment 111, and the irradiation layer 162 is formed on the upper surface 150u of the package body 150.
Referring to
The first substrate 110 includes a grounding segment 111 such as a patterned conductive layer, wherein the grounding segment 111 is electrically connected the corresponding electrical contact 280. In the present embodiment, the grounding segment 111 is not exposed from a lateral surface 110s of the first substrate 110, but such embodiment is not meant to be limiting.
The lateral surface 110s of the first substrate 110 is substantially flush or coplanar with a first lateral surface 150s1 of the package body 150 due to the first lateral surface 150s1 of the package body 150 and the lateral surface 110s of the first substrate 110 being formed in the same singulation process.
The package body 150 encapsulates the second substrate 130, the semiconductor chips 140 and the interposer substrate 120, and has a second lateral surface 150s2 and an upper surface 150u, wherein the second lateral surface 150s2 of the package body 150 is substantially flush or coplanar with the a lateral surface 270s of the electrical frame 270 due to the second lateral surface 150s2 of the package body 150 and the lateral surface 270s of the electrical frame 270 being formed in the same singulation process.
The first antenna layer 560 includes a grounding layer 161 and an irradiation layer 162 separated from the grounding segment 161, wherein the grounding layer 161 is formed on the second lateral surface 150s2 of the package body 150 and the exposed grounding segment 111, and the irradiation layer 162 is formed on the upper surface 150u of the package body 150. In the present embodiment, the irradiation layer 162 is an aperture coupled antenna.
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The package body 150 encapsulates the first substrate 110 as well as the semiconductor chips 140, and has a lateral surface 150s and an upper surface 150u, wherein the lateral surface 150s of the package body 150 is substantially flush or coplanar with the lateral surface 110s of the first substrate 110. The through mold via 720 formed in the package body 150 and filled with conductive material is electrically connected to the grounding segment 111.
The dielectric layers 730 are formed on the upper surface 150u of the package body 150. In another embodiment, the dielectric layers 730 may be formed on the upper surface 150u of the package body 150, a lateral surface 730s of the dielectric layers 730, a lateral surface 150s of the package body 150 and a lateral surface 150s of the substrate 110. The microstrip line 131, the embedded phase shifter 132, the patterned conductive layer 133, the feeding network 134 and the via 135 are formed in the dielectric layers 730. In another embodiment, the passive component, including a resistor, a capacitor or an inductor, is formed in the dielectric layers 730. In addition, the dielectric layers 730 can be formed by a material such as a package body, a dielectric material (e.g., epoxy), or a prepreg lamination.
The first antenna layer 760 having a plurality of slot 760a is formed on the upper surface 730u of the dielectric layers 730 and electrically connected to the grounding segment 111 through the through mold via 720 and via 135 (not illustrated). In addition, the material of first antenna layer 760 is similar to that of the first antenna layer 160, and the similarities are not repeated here for the sake of brevity.
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While the invention has been described and illustrated with reference to specific embodiments thereof, these descriptions and illustrations do not limit the invention. It should be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the true spirit and scope of the invention as defined by the appended claims. The illustrations may not necessarily be drawn to scale. There may be distinctions between the artistic renditions in the present disclosure and the actual apparatus due to manufacturing processes and tolerances. There may be other embodiments of the present invention which are not specifically illustrated. The specification and the drawings are to be regarded as illustrative rather than restrictive. Modifications may be made to adapt a particular situation, material, composition of matter, method, or process to the objective, spirit and scope of the invention. All such modifications are intended to be within the scope of the claims appended hereto. While the methods disclosed herein have been described with reference to particular operations performed in a particular order, it will be understood that these operations may be combined, sub-divided, or re-ordered to form an equivalent method without departing from the teachings of the invention. Accordingly, unless specifically indicated herein, the order and grouping of the operations are not limitations of the invention.
Number | Name | Date | Kind |
---|---|---|---|
3761782 | Youmans | Sep 1973 | A |
4394712 | Anthony | Jul 1983 | A |
4499655 | Anthony | Feb 1985 | A |
4569786 | Deguchi | Feb 1986 | A |
4807021 | Okumura | Feb 1989 | A |
4814205 | Arcilesi et al. | Mar 1989 | A |
4842699 | Hua et al. | Jun 1989 | A |
4897708 | Clements | Jan 1990 | A |
4982265 | Watanabe et al. | Jan 1991 | A |
5166097 | Tanielian | Nov 1992 | A |
5166772 | Soldner et al. | Nov 1992 | A |
5191405 | Tomita et al. | Mar 1993 | A |
5229647 | Gnadinger | Jul 1993 | A |
5239448 | Perkins et al. | Aug 1993 | A |
5308443 | Sugihara | May 1994 | A |
5353498 | Fillion et al. | Oct 1994 | A |
5355016 | Swirbel et al. | Oct 1994 | A |
5404044 | Booth et al. | Apr 1995 | A |
5557142 | Gilmore et al. | Sep 1996 | A |
5615477 | Sweitzer | Apr 1997 | A |
5639989 | Higgins, III | Jun 1997 | A |
5643831 | Ochiai et al. | Jul 1997 | A |
5677511 | Taylor et al. | Oct 1997 | A |
5694300 | Mattei et al. | Dec 1997 | A |
5776798 | Quan et al. | Jul 1998 | A |
5886876 | Yamaguchi | Mar 1999 | A |
5895229 | Carney et al. | Apr 1999 | A |
5998292 | Black et al. | Dec 1999 | A |
5998867 | Jensen et al. | Dec 1999 | A |
6093972 | Carney et al. | Jul 2000 | A |
6150193 | Glenn | Nov 2000 | A |
6225694 | Terui | May 2001 | B1 |
6276599 | Ogawa | Aug 2001 | B1 |
6329631 | Yueh | Dec 2001 | B1 |
6376769 | Chung | Apr 2002 | B1 |
6406934 | Glenn et al. | Jun 2002 | B1 |
6448506 | Glenn et al. | Sep 2002 | B1 |
6457633 | Takashima et al. | Oct 2002 | B1 |
6577013 | Glenn et al. | Jun 2003 | B1 |
6586822 | Vu et al. | Jul 2003 | B1 |
6614102 | Hoffman et al. | Sep 2003 | B1 |
6670269 | Mashino | Dec 2003 | B2 |
6686649 | Mathews et al. | Feb 2004 | B1 |
6699787 | Mashino | Mar 2004 | B2 |
6740546 | Corisis et al. | May 2004 | B2 |
6740950 | Paek | May 2004 | B2 |
6740959 | Alcoe et al. | May 2004 | B2 |
6757181 | Villanueva | Jun 2004 | B1 |
6781231 | Minervini | Aug 2004 | B2 |
6812549 | Umetsu et al. | Nov 2004 | B2 |
6815348 | Mashino | Nov 2004 | B2 |
6828656 | Forbes et al. | Dec 2004 | B2 |
6838776 | Leal et al. | Jan 2005 | B2 |
6865084 | Lin et al. | Mar 2005 | B2 |
6881896 | Ebihara | Apr 2005 | B2 |
6917526 | Ajioka et al. | Jul 2005 | B2 |
6962829 | Glenn et al. | Nov 2005 | B2 |
6962869 | Bao et al. | Nov 2005 | B1 |
6998532 | Kawamoto et al. | Feb 2006 | B2 |
7030469 | Mahadevan et al. | Apr 2006 | B2 |
7045385 | Kim et al. | May 2006 | B2 |
7078269 | Yamasaki et al. | Jul 2006 | B2 |
7081661 | Takehara et al. | Jul 2006 | B2 |
7109410 | Arnold et al. | Sep 2006 | B2 |
7125744 | Takehara et al. | Oct 2006 | B2 |
7129422 | Arnold | Oct 2006 | B2 |
7134198 | Nakatani et al. | Nov 2006 | B2 |
7157372 | Trezza | Jan 2007 | B1 |
7161252 | Tsuneoka et al. | Jan 2007 | B2 |
7180012 | Tsuneoka et al. | Feb 2007 | B2 |
7186928 | Kikuchi et al. | Mar 2007 | B2 |
7187060 | Usui | Mar 2007 | B2 |
7214889 | Mazurkiewicz | May 2007 | B2 |
7215032 | Trezza | May 2007 | B2 |
7222420 | Moriizumi | May 2007 | B2 |
7238590 | Yang et al. | Jul 2007 | B2 |
7262475 | Kwon et al. | Aug 2007 | B2 |
7276787 | Edelstein et al. | Oct 2007 | B2 |
7285434 | Yee et al. | Oct 2007 | B2 |
7298030 | McWilliams et al. | Nov 2007 | B2 |
7327015 | Yang et al. | Feb 2008 | B2 |
7334326 | Huemoeller et al. | Feb 2008 | B1 |
7342303 | Berry et al. | Mar 2008 | B1 |
7365436 | Yamano | Apr 2008 | B2 |
7371602 | Yee | May 2008 | B2 |
7388293 | Fukase et al. | Jun 2008 | B2 |
7415762 | Fukase et al. | Aug 2008 | B2 |
7451539 | Morris et al. | Nov 2008 | B2 |
7478474 | Koga | Jan 2009 | B2 |
7482272 | Trezza | Jan 2009 | B2 |
7488903 | Kawagishi et al. | Feb 2009 | B2 |
7508057 | Shiraishi et al. | Mar 2009 | B2 |
7508079 | Higashi | Mar 2009 | B2 |
7528053 | Huang et al. | May 2009 | B2 |
7538033 | Trezza | May 2009 | B2 |
7553752 | Kuan et al. | Jun 2009 | B2 |
7560744 | Hsiao et al. | Jul 2009 | B2 |
7576415 | Cha et al. | Aug 2009 | B2 |
7598163 | Callahan et al. | Oct 2009 | B2 |
7605463 | Sunohara et al. | Oct 2009 | B2 |
7615856 | Sakai et al. | Nov 2009 | B2 |
7625818 | Wang | Dec 2009 | B2 |
7629674 | Foster | Dec 2009 | B1 |
7633170 | Yang et al. | Dec 2009 | B2 |
7633765 | Scanlan et al. | Dec 2009 | B1 |
7642132 | Huang et al. | Jan 2010 | B2 |
7643311 | Coffy | Jan 2010 | B2 |
7656023 | Sunohara et al. | Feb 2010 | B2 |
7656047 | Yang et al. | Feb 2010 | B2 |
7659202 | Trezza | Feb 2010 | B2 |
7666711 | Pagaila et al. | Feb 2010 | B2 |
7678685 | Sunohara et al. | Mar 2010 | B2 |
7681779 | Yang | Mar 2010 | B2 |
7687397 | Trezza | Mar 2010 | B2 |
7691747 | Lin et al. | Apr 2010 | B2 |
7700411 | Yang et al. | Apr 2010 | B2 |
7733661 | Kossives et al. | Jun 2010 | B2 |
7741148 | Marimuthu et al. | Jun 2010 | B1 |
7741152 | Huang et al. | Jun 2010 | B2 |
7741156 | Pagaila et al. | Jun 2010 | B2 |
7745910 | Olson et al. | Jun 2010 | B1 |
7772081 | Lin et al. | Aug 2010 | B2 |
7772118 | Yamano | Aug 2010 | B2 |
7786008 | Do et al. | Aug 2010 | B2 |
7786592 | Trezza | Aug 2010 | B2 |
7795140 | Taguchi et al. | Sep 2010 | B2 |
7808060 | Hsiao | Oct 2010 | B2 |
7808111 | Trezza | Oct 2010 | B2 |
7811858 | Wang et al. | Oct 2010 | B2 |
7816265 | Wang | Oct 2010 | B2 |
7829981 | Hsu | Nov 2010 | B2 |
7842597 | Tsai | Nov 2010 | B2 |
7851893 | Kim et al. | Dec 2010 | B2 |
7872343 | Berry | Jan 2011 | B1 |
7944038 | Chiu et al. | May 2011 | B2 |
7989928 | Liao et al. | Aug 2011 | B2 |
8018033 | Moriya | Sep 2011 | B2 |
8022511 | Chiu et al. | Sep 2011 | B2 |
8030750 | Kim et al. | Oct 2011 | B2 |
8058714 | Noll et al. | Nov 2011 | B2 |
8061012 | Carey et al. | Nov 2011 | B2 |
8093690 | Ko et al. | Jan 2012 | B2 |
8110902 | Eun et al. | Feb 2012 | B2 |
8186048 | Leahy et al. | May 2012 | B2 |
8212339 | Liao et al. | Jul 2012 | B2 |
20020017855 | Cooper et al. | Feb 2002 | A1 |
20020094605 | Pai et al. | Jul 2002 | A1 |
20040020673 | Mazurkiewicz | Feb 2004 | A1 |
20040124518 | Karnezos | Jul 2004 | A1 |
20040150097 | Gaynes et al. | Aug 2004 | A1 |
20040160752 | Yamashita et al. | Aug 2004 | A1 |
20040178500 | Usui | Sep 2004 | A1 |
20040231872 | Arnold et al. | Nov 2004 | A1 |
20040252475 | Tsuneoka et al. | Dec 2004 | A1 |
20040259292 | Beyne et al. | Dec 2004 | A1 |
20050013082 | Kawamoto et al. | Jan 2005 | A1 |
20050029673 | Naka et al. | Feb 2005 | A1 |
20050039946 | Nakao | Feb 2005 | A1 |
20050045358 | Arnold | Mar 2005 | A1 |
20050189635 | Humpston et al. | Sep 2005 | A1 |
20050208702 | Kim | Sep 2005 | A1 |
20050258545 | Kwon | Nov 2005 | A1 |
20060001174 | Matsui et al. | Jan 2006 | A1 |
20060027632 | Akram | Feb 2006 | A1 |
20060145361 | Yang et al. | Jul 2006 | A1 |
20060197216 | Yee | Sep 2006 | A1 |
20060266547 | Koga | Nov 2006 | A1 |
20070048896 | Andry et al. | Mar 2007 | A1 |
20070138562 | Trezza | Jun 2007 | A1 |
20070187711 | Hsiao et al. | Aug 2007 | A1 |
20070290319 | Kim | Dec 2007 | A1 |
20080042301 | Yang et al. | Feb 2008 | A1 |
20080061407 | Yang et al. | Mar 2008 | A1 |
20080174013 | Yang et al. | Jul 2008 | A1 |
20080272486 | Wang et al. | Nov 2008 | A1 |
20090000114 | Rao et al. | Jan 2009 | A1 |
20090000815 | Hiner et al. | Jan 2009 | A1 |
20090000816 | Hiner et al. | Jan 2009 | A1 |
20090002969 | Madsen et al. | Jan 2009 | A1 |
20090002970 | Leahy et al. | Jan 2009 | A1 |
20090002971 | Carey et al. | Jan 2009 | A1 |
20090002972 | Carey et al. | Jan 2009 | A1 |
20090025211 | Hiner et al. | Jan 2009 | A1 |
20090032928 | Chiang et al. | Feb 2009 | A1 |
20090035895 | Lee et al. | Feb 2009 | A1 |
20090039527 | Chan et al. | Feb 2009 | A1 |
20090102003 | Vogt et al. | Apr 2009 | A1 |
20090102033 | Raben | Apr 2009 | A1 |
20090140436 | Wang | Jun 2009 | A1 |
20090146297 | Badakere et al. | Jun 2009 | A1 |
20090166785 | Camacho et al. | Jul 2009 | A1 |
20090194851 | Chiu et al. | Aug 2009 | A1 |
20090194852 | Chiu et al. | Aug 2009 | A1 |
20090230487 | Saitoh et al. | Sep 2009 | A1 |
20090230523 | Chien et al. | Sep 2009 | A1 |
20090230524 | Chien et al. | Sep 2009 | A1 |
20090230525 | Chien et al. | Sep 2009 | A1 |
20090230526 | Chen et al. | Sep 2009 | A1 |
20090236700 | Moriya | Sep 2009 | A1 |
20090243045 | Pagaila et al. | Oct 2009 | A1 |
20090256244 | Liao et al. | Oct 2009 | A1 |
20090294959 | Chiang et al. | Dec 2009 | A1 |
20090302435 | Pagaila et al. | Dec 2009 | A1 |
20090302437 | Kim et al. | Dec 2009 | A1 |
20090309235 | Suthiwongsunthorn et al. | Dec 2009 | A1 |
20090321916 | Wang et al. | Dec 2009 | A1 |
20100006330 | Fu et al. | Jan 2010 | A1 |
20100013064 | Hsu | Jan 2010 | A1 |
20100032815 | An et al. | Feb 2010 | A1 |
20100059855 | Lin et al. | Mar 2010 | A1 |
20100065948 | Bae et al. | Mar 2010 | A1 |
20100109132 | Ko et al. | May 2010 | A1 |
20100110656 | Ko et al. | May 2010 | A1 |
20100133704 | Marimuthu et al. | Jun 2010 | A1 |
20100140737 | Lin et al. | Jun 2010 | A1 |
20100140751 | Tay et al. | Jun 2010 | A1 |
20100140752 | Marimuthu et al. | Jun 2010 | A1 |
20100140776 | Trezza | Jun 2010 | A1 |
20100148316 | Kim et al. | Jun 2010 | A1 |
20100187681 | Chen et al. | Jul 2010 | A1 |
20100197134 | Trezza | Aug 2010 | A1 |
20100199492 | Hiner et al. | Aug 2010 | A1 |
20100207257 | Lee | Aug 2010 | A1 |
20100207258 | Eun et al. | Aug 2010 | A1 |
20100207259 | Liao et al. | Aug 2010 | A1 |
20100230759 | Yang et al. | Sep 2010 | A1 |
20100230760 | Hung | Sep 2010 | A1 |
20100230788 | Peng | Sep 2010 | A1 |
20100244244 | Yang | Sep 2010 | A1 |
20100276690 | Chen | Nov 2010 | A1 |
20100327465 | Shen et al. | Dec 2010 | A1 |
20110048788 | Wang et al. | Mar 2011 | A1 |
20110068437 | Chiu et al. | Mar 2011 | A1 |
20110095435 | Volant et al. | Apr 2011 | A1 |
20110115060 | Chiu et al. | May 2011 | A1 |
20110139497 | Li et al. | Jun 2011 | A1 |
20110254155 | Lin et al. | Oct 2011 | A1 |
20120062439 | Liao et al. | Mar 2012 | A1 |
Number | Date | Country |
---|---|---|
8288686 | Jan 1996 | JP |
2002246540 | Aug 2002 | JP |
2004228135 | Aug 2004 | JP |
2008166527 | Jul 2008 | JP |
200612539 | Apr 2006 | TW |
WO2004060034 | Jul 2004 | WO |
2010151375 | Dec 2010 | WO |
Entry |
---|
Wang et al., “TSV Technology for 2.5D Solution”, 2012 Electronic Components and Technology Conference, San Diego, California, May 29-Jun. 1, 2012. |
TIPO Office Action with translation of search report, dated Feb. 11, 2015, for Taiwan Patent Application No. 102126548. |
Number | Date | Country | |
---|---|---|---|
20140035097 A1 | Feb 2014 | US |