This application is a continuation-in-part of U.S. Ser. No. 09/165,248, entitled “A Silicon Carbide Deposition For Use As A Barrier Layer And An Etch Stop, filed Oct. 1, 1998, and claims priority thereto.
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Number | Date | Country | |
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Parent | 09/165248 | Oct 1998 | US |
Child | 09/219945 | US |