Patent Grant
9761549
This application claims the priority of Chinese patent application No. 201210444358.4, filed on Nov. 8, 2012, and Chinese patent application No. 201210444357.X, filed on Nov. 8, 2012, the entire contents of all of which are incorporated herein by reference.
The present disclosure generally relates to semiconductor technologies and, more particularly, relates to methods and structures for semiconductor IC packaging.
Traditionally, integrated circuit (IC) chips are connected to external circuits by metal wires (e.g., wire bonding). However, as critical dimension of the IC chips reduces and as scale of the ICs increases, such wire bonding technique is no longer applicable.
Chip scale package (CSP) is considered as the latest generation of chip packaging technology. CSP packaging products have small size, good electrical properties, and good thermal properties. Wafer-chip-scale package (WCSP) is one of the chip scale packages and includes a process of first packaging the whole wafer and then, after testing, dicing the wafer into individual CSP circuits.
The solder ball in conventional semiconductor devices, however, may be easily detached from the columnar electrode. The disclosed methods and devices are directed to solve one or more problems set forth above and/or other problems.
One aspect of the present disclosure includes a semiconductor device. The semiconductor device can include a semiconductor substrate, a plurality of solder pads disposed on the semiconductor substrate, a first insulating layer disposed over the semiconductor substrate, a columnar electrode disposed over the solder pad, and a solder ball disposed on the columnar electrode. The first insulating layer can include a first opening to expose a solder pad of the plurality of solder pads. The columnar electrode can include a bulk material and a through hole in the bulk material. The through hole can expose at least a surface portion of the solder pad. The solder ball can include a convex metal head on a top surface of the bulk material of the columnar electrode, and a filling part filled in the through hole.
Another aspect of the present disclosure includes a method for forming a semiconductor device by providing a semiconductor substrate including a plurality of solder pads on the semiconductor substrate. A first insulating layer can be formed on the semiconductor substrate, the first insulating layer including a first opening to expose a solder pad of the plurality of solder pads. A columnar electrode can be formed over the solder pad, the columnar electrode including a bulk material and a through hole in the bulk material, and the through hole exposing at least a surface portion of the solder pad. A solder ball can be formed on the columnar electrode, the solder ball including a convex metal head on a top surface of the bulk material of the columnar electrode and a filling part filled in the through hole.
Another aspect of the present disclosure includes a semiconductor device. The semiconductor device can include a semiconductor substrate, a plurality of solder pads disposed on the semiconductor substrate, a columnar electrode disposed on a solder pad of the plurality of solder pads, and a solder ball disposed on the columnar electrode. The columnar electrode can include a bulk material and a plurality of protruded parts disposed on a perimeter sidewall of the bulk material. The solder ball can include a convex metal head disposed on a top surface of the columnar electrode, and a skirt-shaped part on an outer sidewall of the bulk material.
Other aspects of the present disclosure can be understood by those skilled in the art in light of the description, the claims, and the drawings of the present disclosure.
Reference will now be made in detail to exemplary embodiments of the invention, which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.
In a wafer level CSP structure of a semiconductor device, since the solder ball is only in contact with the top surface of the columnar electrode, the contact area there-between is small and the adhesion/binding there-between is poor. When subjected to external forces, the solder ball is easily detached from the top surface of the columnar electrode or cracks are formed at the contact area with the columnar electrode. This may adversely affect subsequent packaging processes and the resultant packaged device is likely to fail.
As disclosed, an exemplary semiconductor device can include a columnar electrode and a solder ball disposed on the columnar electrode. The columnar electrode can further include through-hole(s) in the bulk material of the columnar electrode. The solder ball can include a convex metal head disposed on a top surface of the columnar electrode, and a filling part connected to the convex metal head and used to fill the through-hole(s) in the columnar electrode. In this manner, the solder ball and the columnar electrode can constitute a bolt-like structure, and the filling part of the solder ball can be used as a pin of the bolt-like structure inserted in the columnar electrode. As such, the solder ball can be in contact with the top surface of the columnar electrode, and can also be in contact with the inside of the columnar electrode. The contact area along with adhesion/binding between the solder ball and the column electrode therefore significantly increase, such that the solder ball can bear greatly-enhanced external forces, and stay on the columnar electrode without falling off.
Referring to
The solder pad 201 can be made of aluminum, copper, gold, silver, and/or other suitable material(s). Note that although one solder pad 201 is shown in
A passivation layer 202 is formed over the semiconductor substrate 200. The passivation layer 202 has an opening to expose an entire surface or a surface portion of the solder pad 201. The passivation layer 202 is formed to protect the IC chips (not shown) formed on/in the semiconductor substrate 200. The passivation layer 202 can be made of a material including silicon nitride, borosilicate glass, phosphorosilicate glass, boron-phosphorosilicate glass, polyimide, or combinations thereof.
A first insulating layer 203 is formed on surface of the passivation layer 202. A first opening 204 is formed through the first insulating layer 203 and the passivation layer 202 to expose at least a surface portion of the solder pad 201 (Step S22).
The first insulating layer 203 can be used as an electrical isolation layer and/or a sealing layer. The first insulating layer 203 can be made of polybenzoxazole (PBO), polyimide, and/or other suitable organic resins. In one embodiment, the first insulating layer 203 can be formed before forming a columnar electrode. This is different from a process of forming an insulating layer after formation of the columnar electrode, where materials of the first insulating layer may fill in the through hole of the columnar electrode, and removal of such materials from the through hole may be difficult and may damage the bulk material of the columnar electrode.
In other embodiments, however, the first insulating layer can be formed on the columnar electrode after the formation of the columnar electrode in a certain process. For example, a columnar electrode can be formed on the exposed surface of the solder pad, followed by forming a first insulating layer on the passivation layer. The first insulating layer can have a top surface flushed with a top surface of the columnar electrode. A portion of the first insulating layer that fills the through hole of the columnar electrode can be removed. In some cases, when removing such portion of the first insulating layer from the through hole of the columnar electrode, other portion of the first insulating layer that surrounds the columnar electrode can also be removed. A solder ball can be formed on the columnar electrode.
Referring to
The seed layer 205 can be used as a power supply layer when subsequently forming the columnar electrode by, e.g., electroplating. The seed layer 205 can be formed of a layer of chromium, titanium, tantalum, copper, silver, gold, or combinations thereof. For example, the seed layer 205 can include a single layer structure having a metal layer of chromium or titanium or tantalum. Alternatively, the seed layer 205 can include a multilayer-stacked structure including a metal layer of chromium or titanium or tantalum stacked with a metal layer of copper or silver or gold. The seed layer 205 can be formed by a sputtering process. In various embodiments, the seed layer 205 can be used as a diffusion barrier layer to prevent metal of the subsequently-formed columnar electrode from diffusing into the first insulating layer 203 and to enhance adhesion/binding between the subsequently-formed columnar electrode and the insulating layer 203. It should be noted that, the term “first opening” hereinafter refers to the opening after formation of the seed layer 205 as shown in
The first photoresist layer column 211 can be more than one, although
It should be noted that a diameter of a groove (or a bulk element) refers to the longest distance from one end of the outer sidewall of the groove (or the bulk element) to another end of the outer sidewall of the groove (or the bulk element). A width of a groove (or a bulk element) refers to a straight distance from the outer sidewall of the groove (or the bulk element) to the inner sidewall of the groove (or the bulk element), e.g., in a direction of the diameter.
The groove 207 can be formed by exposure and development processes. The groove 207 can be subsequently filled with metal to form a bulk material of the columnar electrode. The first photoresist layer column 211 can be subsequently removed to form through-hole(s) in the columnar electrode. It should be noted that the groove can have at least one first photoresist layer column and the at least one first photoresist layer column does not contact the outer sidewall of the groove.
In one embodiment, a number of one first photoresist layer column 211 is disposed in the opening. As shown in
In another embodiment, one first photoresist layer column can be included; the sidewall cross-section of the first opening can be square or any other polygonal shape; the outer sidewall of the groove can have a same cross-sectional shape as the sidewall cross-section of the first opening; and the sidewall cross-section of the first photoresist layer column can be round, square, or polygonal.
In still another embodiment, one first photoresist layer column can be included; the groove can include a plurality independent sub-grooves (and thus subsequently including sub-bulk materials as a part of the bulk material of the columnar electrode) distributed with equal angular distribution based on a center of the first photoresist layer column as the center of a circle. The first photoresist layer can be filled between adjacent sub-grooves. After subsequently forming a columnar electrode and a solder ball, contact area between the solder ball and the columnar electrode can be sufficiently large to facilitate improvement of the adhesion/binding between the solder ball and the columnar electrode. In a specific embodiment, the cross-section of the sub-groove can be a portion of an annular ring.
In still another embodiment, more than one first photoresist layer column can be included; and the first photoresist layer column can be independently distributed in the groove. In an example as shown in
In still another embodiment, when more than one first photoresist layer column is included, the first photoresist layer columns can be arranged to be distributed along a straight line, along a plurality of parallel lines, along intersecting lines, along concentric circles, along a concentric annular ring, along a polygonal shape, along a star shape, along a number of rays from the groove as a center, and/or distributed irregularly. When subsequently removing the first photoresist layer columns, through holes formed in the bulk material of a columnar electrode can have a position corresponding to the position of the first photoresist layer columns. Accordingly, the through holes formed in the bulk material of the columnar electrode can thus be distributed along a straight line, along a plurality of parallel lines, along intersecting lines, along concentric circles, along a concentric annular ring, along a polygonal shape, along a star shape, along a number of rays from the groove as a center, and/or distributed irregularly. Note that the description (e.g., distributed along a straight line, a plurality of parallel lines, etc.) of such arrangements of the first photoresist layer columns (and thus the through holes and the filling parts) is based on a top view of the first photoresist layer columns on the semiconductor substrate, e.g., by using a line to trace a center of each of the first photoresist layer columns.
Referring to
The metal to fill the groove 207 can include, e.g., copper, by a process of electroplating. For example, a height of the formed columnar electrode 210 can be controlled by controlling the time for electroplating.
The columnar electrode 210 can then be used as a mask to remove a first portion of the seed layer 205 from the first insulating layer. Prior to the removal, a photoresist mask layer can be formed on the columnar electrode 210 to protect a second portion of the seed layer 205 at the bottom of the bulk material and the through hole(s) 209 of the columnar electrode 210 during the removal. After the first portion of the seed layer 205 is removed from the first insulating layer, the photoresist mask layer can be removed.
In one embodiment, when one first photoresist layer column 211 is included, after removal, one through hole 209 can be formed in the middle of the bulk material of the columnar electrode and can be subsequently filled with, e.g., tin solder to form the filling part of the solder ball. The radius of the through hole 209 and the width b of the bulk material of the columnar electrode 210 can range from about 1/10 to about 10/1, for example, from about 1:3 to about 3:1, such that the columnar electrode 210 has a desired width to ensure a mechanical strength and to provide sufficient contact area between the bottom surface of the columnar electrode and the underlying solder pad to maintain sufficient adhesion/binding there-between, while preventing gap formation between the bulk material of the columnar electrode and solder pad to avoid increased contact resistance or to avoid generation of disconnection.
In other embodiments, when more than one first photoresist layer column is included, the removal of the first photoresist layer column can form more than one corresponding through hole. The through holes can be arranged to be distributed along a straight line, along a plurality of parallel lines, along intersecting lines, along concentric circles, along a concentric annular ring, along a polygonal shape, along a star shape, along a number of rays from the bulk material of the first photoresist layer column as a center, and/or distributed irregularly.
For example, referring to
Referring to
In one embodiment, formation of the metal barrier layer 212 between a solder ball and the bulk material 208 of the columnar electrode can prevent direct contact between the bulk material of the columnar electrode 210 and the solder ball and prevent generation of brittle copper-tin intermetallic compound at the contact surface between the solder ball and the columnar electrode. This can increase reliability of solder joints. Unlike conventional methods where the solder ball and the columnar electrode are in direct contact, in a high temperature environment, copper in a columnar electrode may rapidly diffuse into a tin solder ball to form copper-tin intermetallic compound at the contact surface between the solder ball and the columnar electrode. The brittle copper-tin intermetallic compound may reduce the mechanical strength at the contact interface, cause damage or crack at the solder joint between the intermetallic compound and the solder, and adversely affect soldering reliability.
The metal barrier layer 212 can include a double layer structure of nickel tin and/or nickel silver, and/or having a layer of tin, silver, gold, or a tin alloy on surface of a nickel layer to prevent oxidation of the nickel. In one embodiment, the metal barrier layer 212 can be a double-layer structure of nickel tin, and nickel can prevent copper from diffusing outward. In some cases, even if some of the copper and tin are diffused into the metal barrier layer 212, a nickel-copper compound with high mechanical strength and good thermal resistance can be formed at the interface of the metal barrier layer 212 and the columnar electrode. Likewise, a nickel-tin compound with high mechanical strength, high mechanical hardness, and uniform surface can be formed at the interface of the metal barrier layer 212 and the solder ball, without causing problems including reduced mechanical strength and welding damage at the contact interface as occurred in conventional devices.
The metal barrier layer 212 can have a thickness less than a radius of the through hole 209 to prevent the metal barrier layer from blocking the through hole 209. The metal barrier layer 212 can be formed by, e.g., an electroless plating, to selectively form the metal barrier layer 212 on the metal surface of the columnar electrode 210.
During an exemplary electroless plating process, ultrasonic vibration can be used to prevent the electroless plating solution from forming bubbles in the through-hole without affecting formation of the metal barrier layer 212, when the electroless plating solution entering into the through hole 209. The ultrasonic vibration uses a frequency of about 20 KHz or greater.
During the exemplary electroless plating process, a pressure greater than 1 atm can be applied within an electroless plating chamber to render the electroless plating solution a pressure to facilitate an easy entering of the electroless plating solution into the through hole 209 without generating bubbles in the through hole.
Referring to
The solder paste 217 can be formed by a screen-printing process and/or can be formed by a material including tin or tin alloy.
Referring to
Referring to
In one embodiment, one through-hole can be included and, accordingly, one filling part 213 of the solder ball 215 can be formed. The solder ball and the columnar electrode constitute a bolt-like structure, which allows the contact between the solder ball and the columnar electrode from a conventional single plane surface contact into a multi-plane surface contact. When the solder ball is subjected to external forces, the increased contact area between the solder ball and the columnar electrode can share the exerted external forces, thereby enhancing the degree of adhesion/binding between the solder ball and the columnar electrode. The solder ball may bear greatly-enhanced external forces.
In other embodiments, when more than one through hole is included, more than one corresponding filling part of the solder ball can be formed. The filling part(s) of the solder ball can be inserted into through hole(s) in the bulk material of the columnar electrode to increase contact area between the solder ball and the columnar electrode. The solder ball and the columnar electrode can form a bolt-like structure having one or more bolt pins (e.g., filling parts) to improve adhesion/binding between the solder ball and the columnar electrode.
In addition, the filling parts in the through-holes can be distributed along a straight line, along a plurality of parallel lines, along intersecting lines, along concentric circles, along a concentric annular ring, along a polygonal shape, along a star shape, along a number of rays from the groove as a center, and/or distributed irregularly, such that the adhesion/binding between the solder ball and the columnar electrode can be uniform in all directions. The solder ball can bear greatly-enhanced external forces without falling off from the columnar electrode. In other embodiments, the solder ball 215 can be formed by a bump and reflow process.
An exemplary semiconductor device is provided as shown in
One or more through-holes can be included. When one through-hole is included, one corresponding filling part 213 can be formed. The solder ball and the columnar electrode constitute a bolt-like structure to enhance degree of adhesion/binding between the solder ball and the columnar electrode. The solder ball may bear greatly-enhanced external forces.
The radius of the through hole and the width b of the bulk material of the columnar electrode 210 can range from about 1/10 to about 10/1, for example, from about 1:3 to about 3:1, such that the bulk material of the columnar electrode 210 has a desired width to ensure a mechanical strength and to provide sufficient contact area between the bottom surface of the columnar electrode and the underlying solder pad 201 and to maintain sufficient adhesion/binding there-between, while preventing gap formation between the bulk material of the columnar electrode and solder pad to avoid increased contact resistance or generation of disconnection. Conventional solder ball may have a fracture surface, which may be affected by the columnar electrode and may have multiple turnings with increased capability to absorbing destructive energy.
When more than one through-hole is included, more than one corresponding filling part 213 can be formed. The filling parts can be distributed along a straight line, along a plurality of parallel lines, along intersecting lines, along concentric circles, along a concentric annular ring, along a polygonal shape, along a star shape, along a number of rays from the groove as a center, and/or distributed irregularly. The filling parts of the solder ball can be inserted in the bulk material of the columnar electrode to increase contact area between the solder ball and the columnar electrode. In addition, the through-holes and the filling parts in the through holes can be orderly arranged such that the adhesion/binding between the solder ball and the columnar electrode is uniform in all directions. The solder ball can bear greatly-enhanced external forces without falling off from the columnar electrode.
Referring to
Referring to
In one embodiment, the groove 307 has a diameter smaller than the width of the first opening 304, such that the outer sidewall of the groove 307 is within the first opening 304 and distanced from the sidewall of the first opening 304 (formed by the seed layer 303) by a portion of first photoresist layer 306. In this manner, a bulk material of a columnar electrode that is subsequently formed in the groove 307, after removing the first photoresist layer 306, can have an outer sidewall. Between the outer sidewall of the bulk material of the columnar electrode and the sidewall of the first opening 304 can form an annular groove. When forming a solder ball, an L-type skirt-shaped part of the solder ball can thus be formed.
One or more first photoresist layer columns 306a can be included in the groove 307. Arrangements of the first photoresist layer columns 306a can be the same or similar to the arrangement of the first photoresist layer columns as described in
Referring to
Referring to
In other embodiments, a portion of the seed layer on the sidewall of the first opening can be retained or partially on the surface of the first insulating layer 303. When subsequently the metal barrier layer is selectively formed, the metal barrier layer formed in the annular groove can have a “U” shape. On surface the “U” shaped metal barrier layer, solder paste can be filled in. During a reflow process, the solder paste and the “U” shaped metal barrier layer can be in contact with each other, e.g., at three surfaces. Absorption forces at the interface between the solder paste and the metal barrier layer (e.g., mainly the metal barrier layer on sidewall of the first opening) can at least partially offset surface tension forces of the solder paste. During the reflow process, an L-type skirt shape part can be formed on the outer sidewall of the bulk material.
Referring to
Referring to
Referring to
The skirt-shaped part 315 can have an upper portion connected to the bottom portion of the convex metal head 312. The skirt-shaped part 312 can have a lower portion electrically connected to the solder pad 301 on both sides of columnar electrode 310 (or connected to the metal barrier layer 311 on the solder pad 301 on both sides of columnar electrode 310) and also in contact with the sidewall of the first opening. The lower portion of the skirt-shaped part 315 can have a width greater than the upper portion of the skirt-shaped part 315. The lower portion of the skirt-shaped part 315 can have a surface higher than, lower than, or leveled (flushed) with a top surface of the first insulating layer 303. The convex metal head 312, the filling parts 313, and the skirt-shaped part 315 constitute a solder ball 316 as shown in
During the reflow process, the convex metal head 312 is formed by the solder paste under the surface tension on top surface of the columnar electrode. The top surface of the columnar electrode is higher than the top surface of the first insulating layer 303. The solder paste on the middle part of the outer sidewall of the bulk material 308 is in contact with the sidewall of the bulk material 308 with only one surface and part of the solder paste may flow in a direction toward the convex metal head under the surface tension action. The solder paste within the annular groove at the lower part of the outer sidewall of the bulk material 308 can be respectively in contact with three surfaces including a surface of sidewall of the first opening, the metal barrier layer 311 on the upper portion of the outer sidewall the bulk material 308, and the metal barrier layer 311 on surface of the lower portion of the solder pad 301. During a reflow process, absorption forces at the contact area between the sidewall of the first opening and the solder paste within the annular groove can offset some surface tension of the solder paste within the annular groove in a direction pointing to the bulk material of the columnar electrode.
Absorption forces at the contact area between a portion of the metal barrier layer 311 over the solder pad 301 and the solder paste within the annular groove can offset some tension of the solder paste within the annular groove in a direction pointing to the convex metal head 312, such that the L-type skirt-shaped part 315 is formed on the outer sidewall of the bulk material 308. The L-type skirt-shaped part 315 can have a lower portion with a thickness from the underlying seed layer 305 corresponding to a thickness of the first insulating layer 303. For example, the lower portion of the skirt-shaped part 315 can have a thickness less than or equal to or the thickness of the first insulating layer 303.
Compared with the solder ball 215 in
The L-type skirt-shaped part 315 can be in contact with the sidewall of the first opening, a portion of the metal barrier layer 311 on sidewall of the bulk material 308, and a portion of the metal barrier layer 311 over the solder pad 301. The L-type skirt-shaped part 315 can have the lower portion wider than the upper portion, which can be considered as a support frame. The L-type skirt-shaped part can allow the solder ball to bear greatly-enhanced lateral external forces to have a highly acceptable external force. The solder ball is then more difficult to be detached from the columnar electrode.
Referring to
The second insulating layer 317 can be used for sealing and insulation to prevent water vapor and oxygen from entering into the solder pad 301 and the columnar electrode, and from causing corrosion. The second insulating layer 317 can be made of, e.g., polybenzoxazole (PBO), polyimide, and/or other suitable organic resins.
In various embodiments, a semiconductor device can be formed to include, e.g., a semiconductor substrate 300, a plurality of solder pads 301 formed on the semiconductor substrate 300, a stacked structure on the semiconductor substrate 300, the stacked structure including a first insulating layer 303 disposed on a passivation layer 302, and the stacked structure including a first opening to expose one of the solder pads 201; and a columnar electrode 210 disposed in the first opening, the columnar electrode including a bulk material and through hole(s) disposed through the bulk material, and the columnar electrode having a diameter less than a width of the first opening and a top surface above a top surface of the first insulating layer 203. A solder ball 316 can be formed on the columnar electrode, the solder ball 316, can include: a convex metal head 312 on top surface of the columnar electrode, filling part(s) 313 filled in the through hole, and a skirt-shaped part 315 on outer sidewall of the bulk material 308 of the columnar electrode.
The skirt-shaped part 315 can have an upper portion connected to the bottom portion of the convex metal head 312. The skirt-shaped part 312 can have a lower portion electrically connected to the solder pad 301 on both sides of columnar electrode 310 (or connected to the metal barrier layer 311 on the solder pad 301 on both sides of columnar electrode 310) and also in contact with the sidewall of the first opening. The lower portion of the skirt-shaped part 315 can have a width greater than the upper portion of the skirt-shaped part 315. The lower portion of the skirt-shaped part 315 can have a surface higher than, lower than, or leveled (flushed) with a top surface of the first insulating layer 303.
The semiconductor device can include: a metal barrier layer 311 located between the solder ball 316 and the bulk material of the columnar electrode; and a seed layer located between the columnar electrode and the solder pad 301.
Referring to
The re-wiring layer 406 can be formed by an electroplating process. A columnar electrode is subsequently formed on surface of the re-wiring layer 406 (Step S44). Compared with directly forming the columnar electrode on the surface of the solder pad, formation of the re-wiring layer 406 can facilitate improvement of packaging density.
Referring to
Referring to
Referring to
In one embodiment, the columnar electrode 410 is formed before forming the second insulating layer and after forming the seed layer, followed by forming the re-wiring layer and the columnar electrode. The seed layer can be used as a power supply line for forming the re-wiring layer and the columnar electrode, followed by the removal of the portion of the seed layer.
Referring to
When the second insulating layer 411 has a top surface lower than the top surface of the columnar electrode 410, a portion of the second insulating layer 411 outside of the bulk material of the columnar electrode is subsequently removed to form an annular groove. An L-type skirt-shaped part can be formed on the outer sidewall of the bulk material. A solder ball including a convex metal head, a filling part and a skirt-shaped part can then be formed.
In other embodiments, the second insulating layer can have a surface flushed with or slightly below a top surface of the columnar electrode to subsequently form a filling part, and a skirt-shaped part of the solder ball.
Referring to
In other embodiments, when forming the second insulating layer having a surface flushed with the top surface of the columnar electrode, the second insulating layer is formed on the re-wiring layer and a surface portion of the first insulating layer and having a surface flushed with the top surface of the columnar electrode. A fourth photoresist layer can be formed on surface of the second insulating layer. The fourth photoresist layer can have a fifth opening to expose the columnar electrode. The fourth photoresist layer and the bulk material of the columnar electrode can be used as an etch mask to remove a portion of the second insulating layer from the through hole.
The fourth photoresist layer can be removed. A printing screen plate or a stainless steel plate can be disposed on surface of the first insulating layer. The printing screen plate or the stainless steel plate can include an eighth opening to expose the bulk material of the columnar electrode and the through hole. Solder paste can be filled in the eighth opening and the through-hole, followed by removal of the printing screen plate or the stainless steel plate. The solder paste can then undergo a reflow process to form a convex metal head on top of the columnar electrode and to form a filling part in the through hole. The convex metal head and the filling part constitute a solder ball.
Referring to
Referring to
Referring to
The L-type skirt-shaped part 417 can have an upper portion connected to a lower portion of the convex metal head 415. The L-type skirt-shaped part 417 can have a lower portion connected to a portion of the re-wiring layer 406 on both sides of the columnar electrode and connected to the sidewall of the annular groove. The L-type skirt-shaped part 417 can have the lower portion with a width greater than a width of the upper portion. The L-type skirt-shaped part 417 can have the lower portion with a surface above, below, or flushed with a surface of the second insulating layer 411. A solder ball 418 can be formed to include the convex metal head 415, the filling part 416, and the L-type skirt-shaped part 417 (Step S50).
Referring to
A re-wiring layer 406 is formed on surface of the seed layer 405 and fills up the first opening. A second insulating layer 411 is disposed on the re-wiring layer 406 and on a surface portion of the first insulating layer 403. The second insulating layer 411 has a second opening to expose a surface portion of the first wiring layer 406 outside of the first opening. A columnar electrode is formed within the second opening and on the re-wiring layer 406. The columnar electrode includes a bulk material 408 and through holes through the bulk material 408. The columnar electrode has a diameter less than a width of the second opening. An annular groove is formed between the columnar electrode and the sidewall of the second opening. The columnar electrode has a top surface above the top surface of the second insulating layer 411. A solder ball 418 is located on the columnar electrode and includes: a convex metal head 415 on top of the columnar electrode, a filling part 416 filled in the through hole, and a skirt-shaped part 417 formed on the outer sidewall of the bulk material 408 of the columnar electrode. The skirt-shaped part 417 can have an upper portion connected to the convex metal head 415. The skirt-shaped part 417 can have a lower portion connected to a portion of the re-wiring layer 406 on both sides of the columnar electrode and contacted with the sidewall of the second opening. The skirt-shaped part 417 can have the lower portion with a width greater than a width of the upper portion. The skirt-shaped part 417 can have a lower portion with a surface below, above, or flushed with a surface of the second insulating layer 411. A metal barrier layer 414 can be formed between the solder ball 418 and the bulk material 408 of the columnar electrode.
In this manner, a semiconductor device can be formed by forming a columnar electrode. The columnar electrode can include a bulk material and through-holes through the bulk material. The solder ball can include a convex metal head on the top surface of the columnar electrode and a filling part filled in the through hole. The solder ball and the columnar electrode can form a bolt-like structure. The solder ball can be in contact with not only the top surface of the columnar electrode and also inner surfaces of the columnar electrode. Contact between the solder ball and the columnar electrode can be improved from a single plane surface to multiple plane surfaces.
When subjected to external forces, the external forces exerted on such solder ball can be further distributed due to the increased contact area (e.g., between the solder ball and the top surface of the columnar electrode; and between the solder ball and the inner/outer sidewalls the bulk material of the columnar electrode) to improve the degree of adhesion/binding between the solder ball and the columnar electrode. The solder ball can thus bear greatly-enhanced lateral external forces compared with conventional solder ball structure. The disclosed solder ball is then more difficult to be detached from the columnar electrode.
In various embodiments, the bulk material of the columnar electrode can include a plurality of engraved seams for dividing the bulk material to include a plurality of sub-bulk materials distributed with equal angular distribution. And the filing parts can further fill the plurality of engraved seams between adjacent sub-bulk materials.
As disclosed herein, each element of the exemplary semiconductor devices can have desired dimensions, shapes, configurations, etc. In an exemplary semiconductor device, a columnar electrode on a solder ball can include a bulk material and a plurality of protruded parts disposed on perimeter sidewall of the bulk material to greatly enhance surface area of the columnar electrode. In one embodiment, the protruded parts can be sub-bulk materials or can include independent parts other than the bulk material. The solder ball on the columnar electrode includes a convex metal head located on top of the columnar electrode and a skirt-shaped part located on surface of the protruded parts, such that contact area between the solder ball and the columnar electrode is increased and thus adhesion/binding there-between is enhanced. The solder ball may bear greatly-enhanced external forces and may not be detached from the columnar electrode. In various embodiments, the columnar electrode may include through holes to be filled by filling parts from the solder ball.
A plurality of IC devices (not shown) can be configured on/in the semiconductor substrate 600, and the solder pad 601 can be connected with a corresponding IC device. The solder pad 601 can be made of aluminum and/or copper.
The bulk material 608 and the protruded parts 603 of the columnar electrode 610 can be connected together. At least more than one protruded part 603 can be included. When more than one protruded part 603 is included, adjacent protruded parts 603 may or may not be in direct contact with each other. The multiple protruded parts 603 can be distributed with equal angular distribution along a circle using a center of the bulk material 608 as the center of such circle, such that the adhesion/binding force at the contact area between the solder ball 616 and the columnar electrode 610 is uniform in all directions.
The bulk material 608 has a cross-sectional shape including a circle, polygon, and/or other suitable shapes. Each of the protruded part 603 has a cross-sectional shape including a triangular, rectangular, semicircular, irregular, and/or other suitable shapes. When the bulk material 608 has a cross-sectional shape of polygon, the polygon can be a regular polygon including such as an equilateral triangle, a square, a pentagon, a hexagon type, etc. When the protruded parts 603 have a cross-sectional shape of a triangular shape or a quadrangular shape, the triangular shape can be an isosceles triangle and a bottom side of the isosceles triangle is in contact with the sidewall of the bulk material. The quadrilateral shape can include a rectangular shape, a square shape, or an isosceles trapezoid shape, such that the adhesion/binding force at the contact area between the solder ball 616 and the columnar electrode 610 is uniform in all directions. Great details regarding the shapes of the bulk material 608 of the columnar electrode 610 and the protruded parts 603 are described as follows.
The columnar electrode 610 can be made of copper and formed by an electroplating process. During the electroplating process, a seed layer can be formed over the semiconductor substrate 600. The seed layer can be used as a conductive layer. A photoresist mask layer can be formed on the seed layer. The photoresist mask layer can include a groove to expose a surface portion of the seed layer. The groove can include a first etched hole corresponding to the bulk material 608 and a plurality of second etched holes corresponding to the protruded parts 603. The second etched holes are located surrounding the first etched hole. Sidewalls of the first and the second etched holes may be partially overlapped. Metal can be filled in the first and second etched holes by an electroplating process. The bulk material 608 and the plurality of protruded parts 603 located on perimeter sidewall of the bulk material 608 can be formed. The bulk material 608 and the protruded parts 603 can constitute the columnar electrode 610.
Due to the presence of the protruded parts 603, sidewall surface area of the columnar electrode 610 can be significantly increased. The contact area between the solder ball 616 and the columnar electrode 610 is greatly increased and such contact area is changed from a single plane contact surface into a multi-plane contact surface. The degree of adhesion/binding between the solder ball 616 and the columnar electrode 610 can be greatly enhanced. The solder ball 616 may bear greatly-enhanced external forces. Note that, the exemplary cross-sectional views of the semiconductor device showing in
The convex metal head 612 of the solder ball 616 can be located on the top surface of the columnar electrode 610. The convex metal head 612 can have a diameter greater than a diameter of the columnar electrode 610 (or a perpendicular distance between two sides of the columnar electrode). The skirt-shaped part 615 can have an upper portion connected to the lower portion of the convex metal head 612. The skirt-shaped part 615 of the solder ball 616 can cover a surface of the protruded parts 603. In the case when adjacent protruded parts 603 on outer sidewall of the bulk material 608 are not in contact with each other, the skirt-shaped part 615 can also cover a sidewall portion of the columnar electrode 610 exposed between adjacent protruded parts 603. The skirt-shaped part 615 can have an outer sidewall with a cross-sectional shape of an inwardly recessed arc.
In one embodiment, the columnar electrode 610 can have a dimension smaller than a dimension of the solder pad 601. The skirt-shaped part 615 can have a lower portion in contact with the solder ball 612. The skirt-shaped part 615 can have the lower portion with a width greater than a width of the upper portion of the skirt-shaped part 615 to form an L-type structure. The L-type skirt-shaped part 615 can contact the bottom of the solder pad 601. The L-shape skirt-shaped part can be considered as a support frame having a broader bottom to provide enhanced distribution of external forces exerted thereon. The L-type skirt-shaped part can allow the solder ball to bear greatly-enhanced lateral external forces.
The solder ball 616 can be formed by a screen printing process and a reflow process. For example, a solder paste layer can be formed on top surface and sidewall surface of the columnar electrode 610, followed by a reflow process of the solder paste to form a solder ball. The solder ball 616 can also be formed by a bump and reflow process.
A metal barrier layer (not shown) can be formed between the solder ball 616 and the columnar electrode 610. The metal barrier layer can be used to prevent direct contact between the columnar electrode and the solder ball and prevent generation of brittle copper-tin intermetallic compound at the contact surface between the solder ball and the columnar electrode. The brittle copper-tin intermetallic compound can affect stability of solder joints and can directly weaken the bonding strength between the solder ball and the columnar electrode. The metal barrier layer can be formed of a material including nickel, nickel-tin, and/or nickel-gold.
An insulating layer 602 can be formed on the semiconductor substrate 600. The insulating layer 602 can be used for sealing and insulation. The insulating layer 602 can have an opening with a sidewall in contact with the sidewall of the skirt-shaped part 602. The insulating layer 602 can have a single-layer structure or a multi-layer structure. The insulating layer 602 can be made of, e.g., polybenzoxazole (PBO), polyimide, other suitable organic resins, and/or other suitable materials.
In other embodiments, the skirt-shaped part can cover only a surface of the upper portion of the protruded parts 603. In other embodiments, a re-wiring layer can be formed over the semiconductor substrate. The re-wiring layer can be connected to the solder ball, and can be used as a part of the solder ball. The columnar electrode can be disposed over the re-wiring layer.
In one embodiment, referring to
In another embodiment, referring to
In another embodiment, referring to
In various embodiments, two or four quadrilateral protruded parts 603 can be included and can be distributed with equal angular distribution on a circle centered by a center of the bulk material 608. Note that,
In another embodiment, referring to
As shown in
In another embodiment, referring to
In this manner, a columnar electrode on a solder ball includes a bulk material and a plurality of protruded parts disposed on perimeter sidewall of the bulk material to greatly enhance surface area of the columnar electrode. The solder ball on the columnar electrode includes a convex metal head located on top of the columnar electrode and a skirt-shaped part located on surface of the protruded parts. Due to presence of the protruded parts, sidewall surface area of the columnar electrode is greatly increased. Contact area between the solder ball and the columnar electrode is greatly increased, e.g., increased from a single plane surface to a multi-plane surface, and thus adhesion/binding there-between is significantly enhanced. When subjected to external forces, the external forces exerted on the solder ball can be distributed on the multi-plane surface between the solder ball and the columnar electrode. Acceptable external forces (e.g., a force to detach the solder ball from the columnar electrode) of the solder ball can be increased.
Further, the plurality of protruded parts can be distributed with equal angular distribution along a circle centered by the center of the bulk material. The bulk material can have a circular or a regular polygonal cross-section. The protruded parts can have an isosceles triangle, rectangle, square, isosceles trapezoid or semicircle cross-section such that centers of the protruded parts in all directions are distanced the same from the center of the bulk material, and sidewalls on both sides of the protruded parts are symmetrical. The skirt-shaped part of the solder ball covers the protruded parts, such that adhesion/binding force at the contact area between the solder ball and the columnar electrode is uniform in all directions.
Thus, the disclosed methods and structures may provide many advantageous IC packaging applications. Other applications and advantages are obvious to those skilled in the art. The embodiments disclosed herein are exemplary only. Other applications, advantages, alternations, modifications, or equivalents to the disclosed embodiments are obvious to those skilled in the art and are intended to be encompassed within the scope of the present disclosure.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2012 1 0444357 | Nov 2012 | CN | national |
| 2012 1 0444358 | Nov 2012 | CN | national |
| Number | Name | Date | Kind |
|---|---|---|---|
| 5872399 | Lee | Feb 1999 | A |
| 6384343 | Furusawa | May 2002 | B1 |
| 6387734 | Inaba et al. | May 2002 | B1 |
| 6841872 | Ha et al. | Jan 2005 | B1 |
| 7319265 | Wang | Jan 2008 | B1 |
| 20020064930 | Ishikawa | May 2002 | A1 |
| 20020167085 | Ohuchi et al. | Nov 2002 | A1 |
| 20030214036 | Sarihan et al. | Nov 2003 | A1 |
| 20030234277 | Dias et al. | Dec 2003 | A1 |
| 20040134974 | Oh et al. | Jul 2004 | A1 |
| 20050090090 | Kim et al. | Apr 2005 | A1 |
| 20050167832 | Kainou | Aug 2005 | A1 |
| 20050277283 | Lin | Dec 2005 | A1 |
| 20060131365 | Shigihara et al. | Jun 2006 | A1 |
| 20060292851 | Lin | Dec 2006 | A1 |
| 20070020906 | Chiu et al. | Jan 2007 | A1 |
| 20070020916 | Farnworth | Jan 2007 | A1 |
| 20070069394 | Bachman et al. | Mar 2007 | A1 |
| 20070085182 | Yamaguchi | Apr 2007 | A1 |
| 20080150134 | Shinkai | Jun 2008 | A1 |
| 20090014871 | Meyer et al. | Jan 2009 | A1 |
| 20090098723 | Yu | Apr 2009 | A1 |
| 20100163292 | Tsai et al. | Jul 2010 | A1 |
| 20110266670 | England et al. | Nov 2011 | A1 |
| 20120043654 | Lu | Feb 2012 | A1 |
| 20120067635 | Nang | Mar 2012 | A1 |
| 20120326296 | Choi | Dec 2012 | A1 |
| Number | Date | Country |
|---|---|---|
| 1630029 | Jun 2005 | CN |
| 1893051 | Jan 2007 | CN |
| 101315915 | Dec 2008 | CN |
| 101728347 | Jun 2010 | CN |
| 102157477 | Aug 2011 | CN |
| 102915982 | Feb 2013 | CN |
| 202917473 | May 2013 | CN |
| 202917473 | May 2013 | CN |
| 202917477 | May 2013 | CN |
| 2012054297 | Mar 2012 | JP |
| Number | Date | Country | |
|---|---|---|---|
| 20140124929 A1 | May 2014 | US |
