Semiconductor package

Information

  • Patent Grant
  • 6953988
  • Patent Number
    6,953,988
  • Date Filed
    Friday, September 17, 2004
    20 years ago
  • Date Issued
    Tuesday, October 11, 2005
    18 years ago
Abstract
A semiconductor package is disclosed that bonds a semiconductor chip to a leadframe using a flip chip technology. An exemplary semiconductor package includes a semiconductor chip having a plurality of input-output pads at an active surface thereof. A plurality of leads are superimposed by the bond pads and active surface of the semiconductor chip. The leads have at least one exposed surface at a bottom surface of the package body. A plurality of conductive connecting means electrically connect the input-output pads of the chip to the leads. A package body is formed over the semiconductor chip and the conductive connecting means. The bottom surface portions of the leads are exposed to the outside.
Description
BACKGROUND OF THE INVENTION

1. Field of the Invention


The present invention is in the field of semiconductor packaging.


2. Description of the Related Art


There are trends in semiconductor packaging towards packages that are highly functional, yet increasingly smaller in size so as to provide higher density in mounting. In keeping with these trends, semiconductor package 100 of FIG. 1 includes a semiconductor chip 2 which has a plurality of input-output pads 2a on a top, active surface 2b thereof. An opposite bottom, inactive surface 2c of chip 2 is bonded to a metal chip mounting substrate 4 by an adhesive 14.


Chip mounting substrate 4 has a top first side 4b bonded to chip 2 by adhesive 14, and an opposite second side 4c. Second side 4c includes an exposed bottom central surface 4d. Second side 4c of chip mounting substrate 4 has been partially etched around central surface 4d so as to form a recessed horizontal surface 4a that fully surrounds and is vertically recessed from central surface 4c.


A plurality of horizontal metal leads 6 are arranged radially adjacent to and in the horizontal plane of chip mounting substrate 4. Leads 6 extend horizontally from an inner end 6b that faces chip mounting substrate 4 to an opposite outer end 6c. Each lead includes an upper first side 6d and an opposite lower second side 6e. Lower second side 6e includes an exposed surface portion, denoted as land 6f, that functions as an input/output terminal of package 100. Between inner end 6b and land 6f, lower second side 6e of each lead 6 includes a horizontal surface 6a that is vertically recessed from land 6f. Recessed surface 6a is formed by partially etching vertically through leads 6 from second side 6e.


Input-output pads 2a of semiconductor chip 2 and upper side 6d of leads 6a are electrically connected to each other by conductive wires 8.


Semiconductor chip 2, conductive wires 8, chip mounting substrate 4, and leads 6 are covered by an encapsulant material that forms a package body 10. Recessed horizontal surface 4a of chip mounting substrate 4 and recessed horizontal surface 6a of leads 6 are covered by encapsulant material of package body 10. Central surface 4a of chip mounting substrate 4 and land 6f of each lead 6 are exposed at a lower horizontal surface 10a of package body 10. Package 100 is mounted by fusing lands 6f, and possibly central surface 4c, to a mother board.


Semiconductor package 100 has several drawbacks, including a relatively large mounting height, due in part to the need to cover the apex of wires 8 with the encapsulant material. In addition, package 100 has a relatively large footprint, because a predetermined lateral space between the semiconductor chip and the leads is needed to accommodate the wire bonds.


Further, semiconductor package 100 has limited avenues for heat dissipation. The primary path of heat dissipation is through exposed central surface 4d of chip mounting substrate 4. Heat is also transferred to leads 6 through conductive wires 8, but conductive wires 8 are too small to effectively transfer the heat. Further, semiconductor chip 2 is completely covered by the encapsulant material, thereby limiting heat dissipation.


Semiconductor package 100 has a further disadvantage in that the input-output pads for the ground or power inputs of the semiconductor chip are connected to the leads by conductive wires 8. Accordingly, those leads are unavailable to transfer signals for chip 2.


Moreover, semiconductor package 100 requires a relatively large lead frame in order to accommodate the semiconductor chip's fine pitched input-output pads, thereby drastically degrading the mounting density on a mother board upon which package 100 is mounted.


SUMMARY OF THE INVENTION

The present invention provides semiconductor packages that can be made smaller than the conventional packages described above, so as to have a lesser mounting height and footprint, while providing increased functionality and reliability and improved thermal performance.


As an example, one embodiment of a semiconductor package in accordance with the present invention includes a plurality of horizontal metal leads. Each lead has a first side, and an opposite second side having at least one horizontal first surface and at least one horizontal second surface recessed from the first surface. The package further includes a chip mounting substrate having a first side and an opposite second side. The second side of the chip mounting substrate has a horizontal central surface and a horizontal peripheral surface fully around and recessed from the central surface. A semiconductor chip is mounted in a flip chip style on the first side of chip mounting substrate and the first side of the leads such that input-output pads at a peripheral portion of an active surface of the chip, and optional central input-output pads at a central portion of the active surface, face and are electrically connected to the first side of a respective one of the leads and the first side of the chip mounting substrate, respectively. A package body formed of a hardened encapsulating material covers the semiconductor chip, the recessed peripheral surface of the second side of the chip mounting substrate, and the recessed second surface of the second side of the leads. The central surface of the second side of the chip mounting substrate and the at least one first surface of the second side of the leads are exposed at a horizontal first exterior surface of the package body.


Optionally, a plurality of insulative layers may be provided, with each insulative layer being applied on the first side of the one of the leads or the first side of the chip mounting substrate. The electrical connections of the chip to the lead or the chip mounting substrate may be made through an opening in the respective insulative layer.


In addition, a surface of the semiconductor chip may be exposed through the package body, further increasing heat dissipation.


These and other aspects and features of the present invention will be better understood upon a reading of the following description of the exemplary embodiments and the drawings thereof.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a cross-sectional side view of a conventional semiconductor package.



FIG. 2
a and FIG. 2b are cross-sectional side views of a semiconductor package according to a first embodiment of the present invention.



FIG. 3
a and FIG. 3b are cross-sectional side views of a semiconductor package according to a second embodiment of the present invention.



FIG. 4
a and FIG. 4b are cross-sectional side views of a semiconductor package according to a third embodiment of the present invention.



FIG. 5 is a top plan view of a portion of an embodiment of a leadframe for the packages of FIGS. 2a, 2b, 3a, 3b, 4a and 4b.





In the drawings, the same reference numbers are used for common features across the various drawings.


DETAILED DESCRIPTION

Various exemplary embodiments of the present invention will be described herein below with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail since to do so would obscure the invention in unnecessary detail.



FIGS. 2
a and 2b show a semiconductor package 101 according to a first embodiment of the present invention. Semiconductor package 101 includes many of the same features as package 100 of FIG. 1. Hence, our discussion focuses on differences between this embodiment (and those that follow) and the conventional package of FIG. 1.


Semiconductor package 101 includes a semiconductor chip 2, which has a plurality of peripheral input-output pads 2a along edges of active surface 2b. First side 4b of chip mounting substrate 4 is attached by an adhesive 14 to an open central portion of active surface 2b of chip 2 fully inside of peripheral input/output pads 2a. A plurality of leads 6 are placed about the peripheral line of chip mounting substrate 4, each spaced a selected lateral distance from the chip mounting substrate 4. In an alternative embodiment, chip mounting substrate 4 is omitted.


Chip mounting substrate 4 of FIG. 2a includes a recessed horizontal surface 4a that fully surrounds central surface 4d of bottom side 4c of chip mounting substrate 4. Lower second side 6e of each lead 6 includes a single recessed horizontal surface 6a that begins at inner end 6b of each lead 6 and extends only part of a distance toward outer second end 6c, thereby defining a land 6f at the lower side 6e of each lead 6.


Package 101 of FIG. 2b is similar to package 101 of FIG. 2a, except that the lower side 6e of each lead 24 includes at least two, laterally-spaced apart, recessed horizontal surfaces 6a, thereby defining two exposed lands 6f at lower side 6e of each lead 6. The exposed lands 6f are collectively arrayed in rows and columns at lower exterior surface 10a of package 101.


In FIGS. 2a and 2b, chip 2 is flipped relative to chip 2 of FIG. 1 such that active surface 2a of chip 2 faces chip mounting substrate 4 and leads 6. A heat conductive adhesive 14 is interposed between upper first surface 4b of chip mounting substrate 4 and active surface 2b of semiconductor chip 2, and thereby bonds semiconductor chip 2 to chip mounting substrate 4. The adhesive 14 is thermally conductive and electrically non-conductive, and transfers the heat of the semiconductor chip 2 to chip mounting substrate 4.


The peripheral input-output pads 2a of semiconductor chip 2 each face the upper side 6d of one of the leads 6 of package 101, and are electrically connected thereto by a conductive connecting means 8, such as a reflowed metal ball, e.g., of gold or solder, or an anisotropic conductive film, in a flip-chip style connection.


In the event that metal balls are used as the conductive connecting means 8, regions of upper side 6d around the area of connection with the respective conductive connecting means 8 may be coated with an optional insulating layer 16 of a prescribed thickness. Insulative layer 16 may be, for instance, a layer of solder mask, cover coat, or polyimide. Such an embodiment is described further below with respect to FIG. 5. With such an insulating layer, the respective conductive connecting means 8 is prevented from spreading outwardly during the reflow step, resulting in an easy fusing process.


In package 101 of FIGS. 2a and 2b, since the semiconductor chip 2 and the leads 6 are electrically and thermally connected with each other by the conductive connecting means 8, heat passes from chip 2 into the leads 6 through the conductive connecting means 8, and may be transferred to the air or to a mother board from the leads 6.


As mentioned, an anisotropic conductive film may be employed as the conductive connecting means 8, in place of a metal ball. Each anisotropic conductive film comprises an amalgamation of a conventional bonding film and conductive metal grains. A thickness of the bonding film is about 50 μm, and a diameter of each conductive metal grain is about 5 μm. A surface of the conductive metal grain is coated with a thin polymer layer. If heat or pressure is applied to a predetermined region of the anisotropic conductive film, the thin polymer layers of the conductive metal grains in the predetermined region are melted so that adjacent metal grains become connected, thereby providing electrical conductivity. The thin polymer layer of the remaining conductive metal grains, i.e., those not included in the predetermined region, are maintained in an insulated status. Therefore, a position setting operation between two component elements to be electrically connected can be implemented in an easy manner.


In a case where gold balls or solder balls (or other metal balls) are used as the conductive connection means 8, after the gold balls or solder balls are fused to predetermined regions of the semiconductor chip or the leads, a reflow process must be performed after a position setting operation in order to make an electrical connection. On the other hand, where the anisotropic conductive films are used as the conductive connection means 8, after the anisotropic conductive films are applied over relatively wide areas of the semiconductor chip or the leads, and the semiconductor chip and the leads are properly positioned with respect to each other, then the semiconductor chip and the leads can be electrically connected with each other by simply exerting a heating and/or pressing force of a desired level.


Accordingly, while it is illustrated in FIGS. 2a and 2b and the other drawings that metal balls are used as the conductive connection means 8, practitioners should understand that the metal balls can be replaced with anisotropic conductive films in all of the embodiments herein.


Using a flip chip style connection for electrically connecting semiconductor chip 2 to the superimposed upper surface 6d of leads 6 through a conductive connection means 8 eliminates the need for conductive wires, as in FIG. 1, thereby eliminating the need for package body 10 to cover the apex of the wire loops, and subsequently reducing the height of the semiconductor package.


Package body 10 of FIGS. 2a and 2b is formed by encapsulating the semiconductor chip 2, conductive connecting means 8, chip mounting substrate 4, optional insulating layer 16, and the leads 6 in an insulative encapsulating material. Package body 10 may be formed by molding and curing a resin material. The encapsulation is performed so that central surface 4d of lower side 4c of chip mounting substrate 4 and each land 6f of the leads 6 are exposed in the horizontal plane of exterior surface 10a of package body 10. On the other hand, recessed horizontal surfaces 4a and 6a are underfilled so as to be covered with the encapsulating material of package body 10, thereby improving the connection of chip mounting substrate 4 and leads 6 to package body 10 and preventing chip mounting substrate 4 and leads 6 from being vertically or horizontally from package body 10.


Semiconductor package 101 of FIG. 2a may be mounted on mother board by fusing solder between the land 6f of each lead 6 and metal terminals of the mother board. In the alternative embodiment of FIG. 2b, semiconductor package 101 may be mounted on the mother board after pre-fusing solder balls or other conductive balls 12 on exposed lands 6f. In such a configuration, a conductive paste or plurality of conductive balls may be provided on exposed central surface 4d of lower second side 4c of chip mounting substrate 4.



FIG. 3
a and FIG. 3b show a semiconductor package 102 according a second embodiment of the present invention, which differs only slightly from semiconductor package 101 of FIGS. 2a and 2b. Accordingly, our discussion will focus on the differences between the packages.


In FIGS. 3a and 3b, semiconductor chip 2 includes a plurality of peripheral bond pads 2a along the edges of active surface 2b, and in addition includes at least one or a plurality of central bond pads 2a at a central portion of active surface 2a inward of the peripheral bond pads 2a. The central input-output pads 2a of chip 2 each face a portion of upper first side 4b of chip mounting substrate 4, and may be used for ground/power inputs to chip 2. The central input-output pads 2a are each electrically connected in a flip-chip style to the upper first side 4b of chip mounting substrate 4 by a conductive connecting means 8. First side 4b of chip mounting substrate 4 may be coated with an insulating layer 16 through which the conductive connecting means 8 extends, especially where means 8 is a metal ball, so that an electrical connection can be easily achieved. As described above, anisotropic films also can be used as the conductive connecting means 8 in package 102.


As stated above, since the input-output pads 2a for ground/power input are electrically connected in a flip-chip connection to the chip mounting substrate 4, more leads 6 of package 102 are available to carry signals to and from chip 2 without increasing the footprint of the package.


As with package 101, a conductive paste or a plurality of conductive balls may be provided on the exposed central surface 4d of lower side 4c of chip mounting substrate 4 of package 102 to improve heat transfer to the mother board.



FIGS. 4
a and 4b show a semiconductor package 103 according to a third embodiment of the present invention. Package 103 of FIGS. 4a and 4b is the same as package 102 of FIGS. 3a and 3b, except that inactive surface 2c of semiconductor chip 2 is exposed to the outside in the horizontal plane of upper exterior surface 10b of package body 10. Thus, heat generated in semiconductor chip 2 can be rapidly emitted to the outside through exposed inactive surface 2c, thereby enhancing the thermal performance of the package.



FIG. 5 is a plan view of a central portion of a leadframe 18 that may be used to make exemplary semiconductor packages 101, 102, and 103, typically where conductive connection means 8 is a metal ball. Leadframe 18 includes a chip mounting substrate 4, on which semiconductor chip 2 is to be mounted, and tie bars 20 that extend diagonally from respective comers of chip mounting substrate 4. Leads 6 are radially formed about the peripheral line of the chip mounting substrate 4. Practitioners will appreciate that the leads 6 typically will be provided adjacent to two or all four sides of chip mounting substrate 4.


Upper surface 4b of chip mounting substrate 4 is coated with an insulating layer 16. A plurality of openings 16a are formed through insulating layer 16 to expose portions of upper surface 4b of chip mounting substrate 4. A portion of upper first side 6d of each of the respective leads 6 is also coated with an insulating layer 16 beginning at inner end 66. An opening 16a exposes a portion of the upper side 6d of the respective lead 6. It is desirable that openings 16a are roughly formed in a flat and circular shape and are about the same diameter as the conductive connecting mean 8 (see FIG. 2a). The portions of upper surface 4b of chip mounting substrate 4 and upper first side 6d of leads 6 that are exposed through the openings 16a may be plated with gold (Au), silver (Ag), nickel (Ni), or palladium (Pd) for the purpose of facilitating a good bond with the conductive connecting means 8.


Conductive connecting means 8 are provided through the openings 16a, so that bond pads 2a of the semiconductor chip 2 can be electrically connected to leads 6, and in FIGS. 3a, 3b, 4a, and 4b to chip mounting substrate 4, in a flip-chip style. The conductive connecting means 8 extend through the respective opening 16a. Since the conductive connecting means 8 temporarily exists in a viscious state when connecting the semiconductor chip 2 and the chip mounting substrate 4 or the leads 6, the openings 16a act as a well protect the conductive connecting means in liquid form (e.g., reflowed metal) from being leaked to the outside.


Therefore, the semiconductor packages described herein eliminate the conductive wires of FIG. 1 by connecting the semiconductor chip and the leads in a flip-chip electrical connection through a conductive connecting means. Accordingly, the package is thinner and has a lower mounting height than package 100 of FIG. 1.


The semiconductor packages described herein can have another advantage of allowing a larger-sized semiconductor chip to be mounted on the same sized leadframe as in the prior art by obviating the need to design in space for conventional wire bonding.


The semiconductor packages described herein can have a further advantage of achieving enhancement in heat radiation by extending the effective heat radiation passageways to include the leads. In some embodiments, further enhancement in heat radiation is achieved by directly exposing the inactive surface of the semiconductor chip to the outside through the package body.


The semiconductor packages described herein can have still another advantage of securing the maximum number of leads for signal transfer by electrically connecting input-output pads of the chip to the chip mounting substrate by means of a conductive connecting means. The input-ouput pads so connected may be used as ground or power inputs.


The semiconductor packages described herein can have yet another advantage of protecting the conductive connecting means from being leaked to the outside and ensuring easy bonding when fusing the conductive connecting means to the chip mounting substrate or the leads by providing a layer of an insulating material between the active surface of the chip and either the chip mounting substrate or the leads, and having the respective conductive connecting means extend through an opening in the respective insulating layer.


While the invention has been shown and described with reference to certain embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims
  • 1. A semiconductor package comprising: a plurality of leads, each lead having a first side, and an opposite second side having at least one first surface and at least one second surface recessed from the first surface; a chip mounting substrate having a first side and an opposite second side, the second side having a central surface and a peripheral surface recessed from the central surface; a semiconductor chip having an active surface facing the first side of the leads and the first side of the chip mounting substrate, and peripheral input-output pads at a peripheral portion of the active surface, wherein each of the peripheral input-output pads faces and is electrically connected to the first side of a respective one of the leads; and a package body formed of a hardened encapsulating material, wherein the encapsulating material covers the semiconductor chip, the recessed peripheral surface of the second side of the chip mounting substrate, and the at least one recessed second surface of the second side of each of the leads, while the central surface of the second side of the chip mounting substrate and the at least one first surface of the second side of each of the leads are exposed at a first exterior surface of the package body.
  • 2. The semiconductor package of claim 1, wherein the second side of each of the leads includes a plurality of the first surfaces and second surfaces, and the first surfaces of the leads collectively form rows and columns at the first exterior surface of the package body.
  • 3. The semiconductor package of claim 1, wherein a surface of the semiconductor chip is exposed at an exterior surface of the package body.
  • 4. The semiconductor package of claim 1, wherein the active surface of the semiconductor chip includes at least one central input-output pad inward of the peripheral input-output pads, and the at least one central input-output pad faces and is electrically connected to the first side of the chip mounting substrate.
  • 5. The semiconductor package of claim 4, wherein each of the peripheral input-output pads is electrically connected to the first side of a respective one of the leads by at least one of a plurality of reflowed metal balls, and the at least one central input-output pad is electrically connected to the first side of the chip mounting substrate by at least one of the plurality of reflowed metal balls.
  • 6. The semiconductor package of claim 5, further comprising a discrete insulative layer on the first side of each of the leads and the first side of the chip mounting substrate, wherein each of the insulative layers is covered by the encapsulating material and each of the reflowed metal balls extends through an opening in a respective one of the insulative layers.
  • 7. The semiconductor package of claim 4, wherein each of the peripheral input-output pads is electrically connected to the first side of a respective one of the leads by at least one of a plurality of anisotropic conductive films, and the at least one central input-output pad is electrically connected to the first side of the chip mounting substrate by at least one of a plurality of anisotropic conductive films.
  • 8. The semiconductor package of claim 1, wherein each of the peripheral input-output pads is electrically connected to the first side of a respective one of the leads by a reflowed metal ball.
  • 9. The semiconductor package of claim 8, further comprising a discrete insulative layer on the first side of each of the leads, wherein each of the insulative layers is covered by the encapsulating material and each of the reflowed metal balls extends through an opening in a respective one of the insulative layers.
  • 10. The semiconductor package of claim 1, wherein each of the peripheral input-output pads is electrically connected to the first side of a respective one of the leads by an anisotropic conductive film.
  • 11. The semiconductor package of claim 1, further comprising a conductive ball fused to each exposed first surface of the second side of each of the leads.
  • 12. The semiconductor package of claim 2, comprising a conductive ball fused to each exposed first surface of the second side of each of the leads.
  • 13. The semiconductor package of claim 11, wherein one of a conductive paste and a plurality of conductive balls are on the central surface of the second side of the chip mounting substrate.
  • 14. A semiconductor package comprising: a plurality of leads, each lead having a first side, and an opposite second side having at least one first surface and at least one second surface recessed from the first surface; a chip mounting substrate having a first side and an opposite second side, the second side having a central surface and a peripheral surface recessed from the central surface; a semiconductor chip in a flip chip electrical connection with the first side of at least some of the leads and the first side of the chip mounting substrate; and a package body formed a hardened encapsulating material, wherein the encapsulating material covers the semiconductor chip, the recessed peripheral surface of the second side of the chip mounting substrate, and the recessed second surface of the second side of each of the leads, while the central surface of the second side of the chip mounting substrate and the at least one first surface of the second side of each of the leads are exposed at a first exterior surface of the package body.
  • 15. The semiconductor package of claim 14, further comprising a discrete insulative layer on the first side of each of the leads and the first side of the chip mounting substrate, wherein each of the insulative layers is covered by the encapsulating material, and the semiconductor chip is electrically connected to the first side of each of the leads and the first side of the chip mounting substrate through openings in respective ones of the insulating layers.
  • 16. A semiconductor package comprising: a plurality of leads, each lead having a first side, and an opposite second side having at least one first surface and at least one second surface recessed from the first surface; a chip mounting substrate having a first side and an opposite second side, the second side having a central surface and a peripheral surface recessed from the central surface; a plurality of insulative layers on respective ones of the first sides of the leads and the first side of the chip mounting substrate; a semiconductor chip in a flip chip electrical connection with the first side of at least some of the leads and the first side of the chip mounting substrate through respective ones of the insulative layers; and a package body formed of a hardened encapsulating material, wherein the encapsulating material covers the semiconductor chip and the insulative layers, the recessed peripheral surface of the second side of the chip mounting substrate, and the recessed second surface of the second side of each of the leads, while the central surface of the second side of the chip mounting substrate and the at least one first surface of the second side of the leads are exposed at a first exterior surface of the package body.
Priority Claims (1)
Number Date Country Kind
2000-15304 Mar 2000 KR national
CROSS REFERENCE TO RELATED APPLICATION

The present application is a continuation of U.S. application Ser. No. 09/816,852 entitled SEMICONDUCTOR PACKAGE filed Mar. 23, 2001 now U.S. Pat. No. 6,858,919.

US Referenced Citations (302)
Number Name Date Kind
2596993 Gookin May 1952 A
3435815 Forcier Apr 1969 A
3734660 Davies et al. May 1973 A
3838984 Crane et al. Oct 1974 A
4054238 Lloyd et al. Oct 1977 A
4189342 Kock Feb 1980 A
4258381 Inaba Mar 1981 A
4289922 Devlin Sep 1981 A
4301464 Otsuki et al. Nov 1981 A
4332537 Slepcevic Jun 1982 A
4417266 Grabbe Nov 1983 A
4451224 Harding May 1984 A
4530152 Roche et al. Jul 1985 A
4541003 Otsuka et al. Sep 1985 A
4646710 Schmid et al. Mar 1987 A
4707724 Suzuki et al. Nov 1987 A
4727633 Herrick Mar 1988 A
4737839 Burt Apr 1988 A
4756080 Thorp, Jr. et al. Jul 1988 A
4812896 Rothgery et al. Mar 1989 A
4862245 Pashby et al. Aug 1989 A
4862246 Masuda et al. Aug 1989 A
4907067 Derryberry Mar 1990 A
4920074 Shimizu et al. Apr 1990 A
4935803 Kalfus et al. Jun 1990 A
4942454 Mori et al. Jul 1990 A
4987475 Schlesinger et al. Jan 1991 A
5018003 Yasunaga et al. May 1991 A
5029386 Chao et al. Jul 1991 A
5041902 McShane Aug 1991 A
5057900 Yamazaki Oct 1991 A
5059379 Tsutsumi et al. Oct 1991 A
5065223 Matsuki et al. Nov 1991 A
5070039 Johnson et al. Dec 1991 A
5087961 Long et al. Feb 1992 A
5091341 Asada et al. Feb 1992 A
5096852 Hobson Mar 1992 A
5118298 Murphy Jun 1992 A
5122860 Kichuchi et al. Jun 1992 A
5134773 LeMaire et al. Aug 1992 A
5151039 Murphy Sep 1992 A
5157475 Yamaguchi Oct 1992 A
5157480 McShane et al. Oct 1992 A
5168368 Gow, 3rd et al. Dec 1992 A
5172213 Zimmerman Dec 1992 A
5172214 Casto Dec 1992 A
5175060 Enomoto et al. Dec 1992 A
5200362 Lin et al. Apr 1993 A
5200809 Kwon Apr 1993 A
5214845 King et al. Jun 1993 A
5216278 Lin et al. Jun 1993 A
5218231 Kudo Jun 1993 A
5221642 Burns Jun 1993 A
5250841 Sloan et al. Oct 1993 A
5252853 Michii Oct 1993 A
5258094 Furui et al. Nov 1993 A
5266834 Nishi et al. Nov 1993 A
5273938 Lin et al. Dec 1993 A
5277972 Sakumoto et al. Jan 1994 A
5278446 Nagaraj et al. Jan 1994 A
5279029 Burns Jan 1994 A
5281849 Singh Deo et al. Jan 1994 A
5294897 Notani et al. Mar 1994 A
5327008 Djennas et al. Jul 1994 A
5332864 Liang et al. Jul 1994 A
5335771 Murphy Aug 1994 A
5336931 Juskey et al. Aug 1994 A
5343076 Katayama et al. Aug 1994 A
5358905 Chiu Oct 1994 A
5365106 Watanabe Nov 1994 A
5381042 Lerner et al. Jan 1995 A
5391439 Tomita et al. Feb 1995 A
5406124 Morita et al. Apr 1995 A
5410180 Fujii et al. Apr 1995 A
5414299 Wang et al. May 1995 A
5417905 LeMaire et al. May 1995 A
5424576 Djennas et al. Jun 1995 A
5428248 Cha Jun 1995 A
5435057 Bindra et al. Jul 1995 A
5444301 Song et al. Aug 1995 A
5452511 Chang Sep 1995 A
5454905 Fogelson Oct 1995 A
5474958 Djennas et al. Dec 1995 A
5484274 Neu Jan 1996 A
5493151 Asada et al. Feb 1996 A
5508556 Lin Apr 1996 A
5517056 Bigler et al. May 1996 A
5521429 Aono et al. May 1996 A
5528076 Pavio Jun 1996 A
5534467 Rostoker Jul 1996 A
5539251 Iverson et al. Jul 1996 A
5543657 Diffenderfer et al. Aug 1996 A
5544412 Romero et al. Aug 1996 A
5545923 Barber Aug 1996 A
5581122 Chao et al. Dec 1996 A
5592019 Ueda et al. Jan 1997 A
5592025 Clark et al. Jan 1997 A
5594274 Suetaki Jan 1997 A
5595934 Kim Jan 1997 A
5604376 Hamburgen et al. Feb 1997 A
5608265 Kitano et al. Mar 1997 A
5608267 Mahulikar et al. Mar 1997 A
5625222 Yoneda et al. Apr 1997 A
5633528 Abbott et al. May 1997 A
5639990 Nishihara et al. Jun 1997 A
5640047 Nakashima Jun 1997 A
5641997 Ohta et al. Jun 1997 A
5643433 Fukase et al. Jul 1997 A
5644169 Chun Jul 1997 A
5646831 Manteghi Jul 1997 A
5650663 Parthasaranthi Jul 1997 A
5661088 Tessier et al. Aug 1997 A
5665996 Williams et al. Sep 1997 A
5673479 Hawthorne Oct 1997 A
5683806 Sakumoto et al. Nov 1997 A
5689135 Ball Nov 1997 A
5696666 Miles et al. Dec 1997 A
5701034 Marrs Dec 1997 A
5703407 Hori Dec 1997 A
5710064 Song et al. Jan 1998 A
5723899 Shin Mar 1998 A
5724233 Honda et al. Mar 1998 A
5726493 Yamashita Mar 1998 A
5736432 Mackessy Apr 1998 A
5745984 Cole, Jr. et al. May 1998 A
5753532 Sim May 1998 A
5753977 Kusaka et al. May 1998 A
5766972 Takahashi et al. Jun 1998 A
5770888 Song et al. Jun 1998 A
5776798 Quan et al. Jul 1998 A
5783861 Son Jul 1998 A
5801440 Chu et al. Sep 1998 A
5814877 Diffenderfer et al. Sep 1998 A
5814881 Alagaratnam et al. Sep 1998 A
5814883 Sawai et al. Sep 1998 A
5814884 Davis et al. Sep 1998 A
5817540 Wark Oct 1998 A
5818105 Kouda Oct 1998 A
5821457 Mosley et al. Oct 1998 A
5821615 Lee Oct 1998 A
5834830 Cho Nov 1998 A
5835988 Ishii Nov 1998 A
5844306 Fujita et al. Dec 1998 A
5856911 Riley Jan 1999 A
5859471 Kuraishi et al. Jan 1999 A
5866939 Shin et al. Feb 1999 A
5871782 Choi Feb 1999 A
5874784 Aoki et al. Feb 1999 A
5877043 Alcoe et al. Mar 1999 A
5886397 Ewer Mar 1999 A
5886398 Low et al. Mar 1999 A
5894108 Mostafazadeh et al. Apr 1999 A
5897339 Song et al. Apr 1999 A
5900676 Kweon et al. May 1999 A
5903049 Mori May 1999 A
5903050 Thurairajaratnam et al. May 1999 A
5909053 Fukase et al. Jun 1999 A
5915998 Stidham et al. Jun 1999 A
5917242 Ball Jun 1999 A
5939779 Kim Aug 1999 A
5942794 Okumura et al. Aug 1999 A
5951305 Haba Sep 1999 A
5959356 Oh Sep 1999 A
5969426 Baba et al. Oct 1999 A
5973388 Chew et al. Oct 1999 A
5976912 Fukutomi et al. Nov 1999 A
5977613 Takata et al. Nov 1999 A
5977615 Yamaguchi et al. Nov 1999 A
5977630 Woodworth et al. Nov 1999 A
5981314 Glenn et al. Nov 1999 A
5986333 Nakamura Nov 1999 A
5986885 Wyland Nov 1999 A
6001671 Fjelstad Dec 1999 A
6013947 Lim Jan 2000 A
6018189 Mizuno Jan 2000 A
6020625 Qin et al. Feb 2000 A
6025640 Yagi et al. Feb 2000 A
6031279 Lenz Feb 2000 A
RE36613 Ball Mar 2000 E
6034423 Mostafazadeh et al. Mar 2000 A
6040626 Cheah et al. Mar 2000 A
6043430 Chun Mar 2000 A
6060768 Hayashida et al. May 2000 A
6060769 Wark May 2000 A
6072228 Hinkle et al. Jun 2000 A
6075284 Choi et al. Jun 2000 A
6081029 Yamaguchi Jun 2000 A
6084310 Mizuno et al. Jul 2000 A
6087715 Sawada et al. Jul 2000 A
6087722 Lee et al. Jul 2000 A
6100594 Fukui et al. Aug 2000 A
6113473 Costantini et al. Sep 2000 A
6114752 Huang et al. Sep 2000 A
6118174 Kim Sep 2000 A
6118184 Ishio et al. Sep 2000 A
RE36907 Templeton, Jr. et al. Oct 2000 E
6130115 Okumura et al. Oct 2000 A
6130473 Mostafazadeh et al. Oct 2000 A
6133623 Otsuki et al. Oct 2000 A
6140154 Hinkle et al. Oct 2000 A
6143981 Glenn Nov 2000 A
6169329 Farnworth et al. Jan 2001 B1
6177718 Kozono Jan 2001 B1
6181002 Juso et al. Jan 2001 B1
6184465 Corisis Feb 2001 B1
6184573 Pu Feb 2001 B1
6194777 Abbott et al. Feb 2001 B1
6197615 Song et al. Mar 2001 B1
6198171 Huang et al. Mar 2001 B1
6201186 Daniels et al. Mar 2001 B1
6201292 Yagi et al. Mar 2001 B1
6204554 Ewer et al. Mar 2001 B1
6208020 Minamio et al. Mar 2001 B1
6208021 Ohuchi et al. Mar 2001 B1
6208023 Nakayama et al. Mar 2001 B1
6211462 Carter, Jr. et al. Apr 2001 B1
6218731 Huang et al. Apr 2001 B1
6222258 Asano et al. Apr 2001 B1
6222259 Park et al. Apr 2001 B1
6225146 Yamaguchi et al. May 2001 B1
6229200 Mclellan et al. May 2001 B1
6229205 Jeong et al. May 2001 B1
6239367 Hsuan et al. May 2001 B1
6239384 Smith et al. May 2001 B1
6242281 Mclellan et al. Jun 2001 B1
6256200 Lam et al. Jul 2001 B1
6258629 Niones et al. Jul 2001 B1
6281566 Magni Aug 2001 B1
6281568 Glenn et al. Aug 2001 B1
6282095 Houghton et al. Aug 2001 B1
6285075 Combs et al. Sep 2001 B1
6291271 Lee et al. Sep 2001 B1
6291273 Miyaki et al. Sep 2001 B1
6294100 Fan et al. Sep 2001 B1
6294830 Fjelstad Sep 2001 B1
6295977 Ripper et al. Oct 2001 B1
6297548 Moden et al. Oct 2001 B1
6303984 Corisis Oct 2001 B1
6303997 Lee Oct 2001 B1
6307272 Takahashi et al. Oct 2001 B1
6309909 Ohgiyama Oct 2001 B1
6316822 Venkateshwaran et al. Nov 2001 B1
6316838 Ozawa et al. Nov 2001 B1
6323550 Martin et al. Nov 2001 B1
6326243 Suzuya et al. Dec 2001 B1
6326244 Brooks et al. Dec 2001 B1
6326678 Karmezos et al. Dec 2001 B1
6335564 Pour Jan 2002 B1
6337510 Chun-Jen et al. Jan 2002 B1
6339255 Shin Jan 2002 B1
6348726 Bayan et al. Feb 2002 B1
6355502 Kang et al. Mar 2002 B1
6369447 Mori Apr 2002 B2
6369454 Chung Apr 2002 B1
6373127 Baudouin et al. Apr 2002 B1
6380048 Boon et al. Apr 2002 B1
6384472 Huang May 2002 B1
6388336 Venkateshwaran et al. May 2002 B1
6395578 Shin et al. May 2002 B1
6400004 Fan et al. Jun 2002 B1
6410979 Abe Jun 2002 B2
6414385 Huang et al. Jul 2002 B1
6420779 Sharma et al. Jul 2002 B1
6429508 Gang Aug 2002 B1
6437429 Su et al. Aug 2002 B1
6444499 Swiss et al. Sep 2002 B1
6448633 Yee et al. Sep 2002 B1
6452279 Shimoda Sep 2002 B2
6459148 Chun-Jen et al. Oct 2002 B1
6464121 Reijnders Oct 2002 B2
6476469 Huang et al. Nov 2002 B2
6476474 Hung Nov 2002 B1
6482680 Khor et al. Nov 2002 B1
6498099 McLellan et al. Dec 2002 B1
6498392 Azuma Dec 2002 B2
6507096 Gang Jan 2003 B2
6507120 Lo et al. Jan 2003 B2
6534849 Gang Mar 2003 B1
6545332 Huang Apr 2003 B2
6545345 Glenn et al. Apr 2003 B1
6559525 Huang May 2003 B2
6566168 Gang May 2003 B2
6583503 Akram et al. Jun 2003 B2
6603196 Lee et al. Aug 2003 B2
6624005 Di Caprio et al. Sep 2003 B1
6667546 Huang et al. Dec 2003 B2
20010008305 McLellan et al. Jul 2001 A1
20010011654 Kimura Aug 2001 A1
20010014538 Kwan et al. Aug 2001 A1
20020024122 Jung et al. Feb 2002 A1
20020027297 Ikenaga et al. Mar 2002 A1
20020140061 Lee Oct 2002 A1
20020140068 Lee et al. Oct 2002 A1
20020163015 Lee et al. Nov 2002 A1
20030030131 Lee et al. Feb 2003 A1
20030073265 Hu et al. Apr 2003 A1
20040056277 Karnezos Mar 2004 A1
20040061212 Karnezos Apr 2004 A1
20040061213 Karnezos Apr 2004 A1
20040063242 Karnezos Apr 2004 A1
20040063246 Karnezos Apr 2004 A1
20040065963 Karnezos Apr 2004 A1
Foreign Referenced Citations (71)
Number Date Country
19734794 Aug 1997 DE
0393997 Oct 1990 EP
0459493 Dec 1991 EP
0720225 Mar 1996 EP
0720234 Mar 1996 EP
0794572 Oct 1997 EP
0844665 May 1998 EP
0936671 Aug 1999 EP
098968 Mar 2000 EP
1032037 Aug 2000 EP
55163868 Dec 1980 JP
5745959 Mar 1982 JP
58160096 Aug 1983 JP
59208756 Nov 1984 JP
59227143 Dec 1984 JP
60010756 Jan 1985 JP
60116239 Aug 1985 JP
60195957 Oct 1985 JP
60231349 Nov 1985 JP
6139555 Feb 1986 JP
629639 Jan 1987 JP
6333854 Feb 1988 JP
63067762 Mar 1988 JP
63188964 Aug 1988 JP
63205935 Aug 1988 JP
63233555 Sep 1988 JP
63249345 Oct 1988 JP
63289951 Nov 1988 JP
63316470 Dec 1988 JP
64054749 Mar 1989 JP
1106456 Apr 1989 JP
1175250 Jul 1989 JP
1205544 Aug 1989 JP
1251747 Oct 1989 JP
2129948 May 1990 JP
369248 Jul 1991 JP
3177060 Aug 1991 JP
4098864 Sep 1992 JP
5129473 May 1993 JP
5166992 Jul 1993 JP
5283460 Oct 1993 JP
692076 Apr 1994 JP
6140563 May 1994 JP
6260532 Sep 1994 JP
7297344 Nov 1995 JP
7312405 Nov 1995 JP
864634 Mar 1996 JP
8083877 Mar 1996 JP
8125066 May 1996 JP
96-4284 Jun 1996 JP
8222682 Aug 1996 JP
8306853 Nov 1996 JP
98205 Jan 1997 JP
98206 Jan 1997 JP
98207 Jan 1997 JP
992775 Apr 1997 JP
9293822 Nov 1997 JP
10022447 Jan 1998 JP
10163401 Jun 1998 JP
10199934 Jul 1998 JP
10256240 Sep 1998 JP
00150765 May 2000 JP
556398 Oct 2000 JP
2001060648 Mar 2001 JP
200204397 Aug 2002 JP
941979 Jan 1994 KR
9772358 Nov 1997 KR
100220154 Jun 1999 KR
0049944 Jun 2002 KR
9956316 Nov 1999 WO
9967821 Dec 1999 WO
Related Publications (1)
Number Date Country
20050062148 A1 Mar 2005 US
Continuations (1)
Number Date Country
Parent 09816852 Mar 2001 US
Child 10944241 US