The present invention relates to semiconductors and, more particularly, to stacking of device-bearing semiconductors.
For some time now, there has been a desire to increase the number of devices that can occupy a particular area on a circuit board in order to reduce the overall circuit board size. One of the ways that entities have approached doing so is by stacking packaged chips on top of one another. This is typically accomplished by use of an ancillary element, for example, a mini “circuit board” or “interposer” that two or more chips can connect to, or through use of flexible circuitry on a ribbon-like material that can wrap over or around one or more chips to affect the same result. These approaches connect to the chips from the top surfaces (i.e., at the points of connection) so the connecting material or interposer is parallel to the chips themselves. These two approaches achieve a smaller footprint, but do so at the expense of, for example added parasitic capacitance, noise or both. Moreover, such elements are always passive elements in that they cannot themselves include integrated circuit devices.
Thus, there is a need in the art for a better way of stacked packaging that does not require the use of such ancillary elements, is not restricted by the geometries and limited connectivity of the above approaches, or both.
We have devised a way of creating denser packages of stacked integrated circuits (“ICs”) (whether chips or dies) (hereafter “ICs”) that avoids the requirement of using purely passive ancillary elements like mini circuit boards, interposers or flexible circuits.
Advantageously, although the approaches herein avoid the above requirement, they are fully compatible with the techniques described above and thus provide benefits and advantages over and above such techniques, even where an ancillary element approach is used.
One aspect involves a module that has at least two ICs electrically and physically connected to each other such that they lie in different planes and are arranged as a first stack of ICs, a third IC electrically and physically connected to at least one of the at least two ICs, wherein the third IC is off plane from both of the at least two ICs, and at least one electrical connection exists between the third IC and the at least one of the at least two ICs. This electrical connection can be a post an penetration connection or some other form of connection.
The advantages and features described herein are a few of the many advantages and features available from representative embodiments and are presented only to assist in understanding the invention. It should be understood that they are not to be considered limitations on the invention as defined by the claims, or limitations on equivalents to the claims. For instance, some of these advantages are mutually contradictory, in that they cannot be simultaneously present in a single embodiment. Similarly, some advantages are applicable to one aspect of the invention, and inapplicable to others. Thus, this summary of features and advantages should not be considered dispositive in determining equivalence. Additional features and advantages of the invention will become apparent in the following description, from the drawings, and from the claims.
U.S. patent application Ser. Nos. 11,688,088, 11/329,481, 11/329,506, 11/329,539, 11/329,540, 11/329,556, 11/329,557, 11/329,558, 11/329,574, 11/329,575, 11/329,576, 11/329,873, 11/329,874, 11/329,875, 11/329,883, 11/329,885, 11/329,886, 11/329,887, 11/329,952, 11/329,953, 11/329,955, 11/330,011 and 11/422,551, incorporated herein by reference, describe various techniques for forming small, deep vias in, and electrical contacts for, semiconductor wafers. Our techniques allow for via densities and placement that was previously unachievable and can be performed on a chip, die or wafer scale. Moreover, our techniques allow for more flexible approaches stacking of chips to reduce the footprint occupied by chips relative to a simply coplanar arrangement of the same chips.
Specifically, our approach can leverage a solder connection or a post and penetration type connection as well as the various attachment approaches in the above-incorporated applications, like a well or reverse well approach, to facilitate attaching of one element to another element, irrespective of whether each is a chip, die, or passive element such as a re-direction layered (“RDL”) element or even an interposer or flexible circuitry on a ribbon-like material.
Moreover, our approach removes an orientation limit present in the conventional approach of vertically stacking chips in parallel planes. With our approach, the stacking can occur in substantially perpendicular as well as parallel planes.
The approach is described by way of a few examples wherein those examples generically illustrate a much broader scope due to the limitless number of variations that can be created.
The contacts 112 on the IC are then brought into contact forming the connection between the IC 200 and the stack 100. If post and penetration connections are used, then the connections 112 would be posts which connect, under the appropriate pressure, with the corresponding malleable contacts 302 thereby forming the post and penetration connection between the IC 200 and the stack 100, as shown in
Depending upon the particular implementation, the off plane element can, itself, be an integrated circuit bearing chip (or a portion thereof) or can be a passive element (whether rigid or flexible) or some other element, for example, a packaging element that contains RDLs but no circuitry. Thus, in the examples that follow, although the off plane pieces are described as ICs, it should be understood that the term “ICs” herein are not restricted to integrated circuits but could instead be (and are intended to encompass) any of the above passive elements as well.
At this point it should be appreciated that, with some implementations, the post and penetration connection can optionally be augmented by use of our tack and fuse process, which is described in detail in the above-incorporated U.S. patent applications. With this approach, a tack connection can be used to initially join the chips in a non-permanent connection. At some point thereafter, the chips can undergo a fuse process to make the connections “permanent.” In an alternative optional approach, a fuse process can be used without the tack process, although this will directly make the connections permanent.
Furthermore, with this off plane stacking approach, in some implementation situations, a reflowable material like a solder could be substituted for the malleable material if a barrier is used to confine the molten solder and prevent it from causing an undesirable short with another connection. Depending upon the implementation, this “barrier” approach can involve use of a well, such as described in the above-incorporated applications, or some other physical wall that is part of, applied to or formed on the IC. Alternatively, for example, if the connection components 110, 112 were a pure metal like copper or pure oxide, a metal-to-metal, in this example, copper-to-copper fusion or covalent bonding process, respectively, could be used to similar effect—the former being used if an electrically conductive bond is required. However, since these processes do not have any penetration, they are less amenable to off plane connections where exact connection surfaces of the pieces to be joined deviate from parallel.
Based upon the foregoing, it should now be understood that this approach can occur on more than one side of a chip stack. Thus, it is possible to connect two or more perpendicular chips to a stack, thereby allowing for mixing of different speed technology chips and shortening connections between chips.
Depending upon the particular implementation, it should be understood that the formation of the stack of ICs can occur before, or concurrent with, the attachment of the perpendicular IC. Moreover, it should be understood that, while the above example located all of the malleable contacts in the stack of ICs and the rigid posts on the perpendicular IC for purposes of illustration and simplicity, different implementations can place the malleable or other type of contacts 302 on a perpendicular IC and the posts 112 on the mating ICs. Of course, still other implementations can have any one or more of the ICs each include a mixture of different contact types such as, for example, rigid posts 112 and malleable contacts 302 such as shown in the stack 500 of
Bearing the above in mind, additional aspects can advantageously be incorporated into the approach. For example, as shown in
Alternatively and/or optionally, a “standoff” can be created directly under a malleable or solder contact to create a minimum and reproducible spacing between adjacent pieces in a stack or between an off plane IC and a stack.
At this point it should be mentioned that, although the above examples have used a single off plane IC, the off plane IC could equally be part of an IC stack itself As a result, it should be appreciated that chip modules can be formed in geometries that go far beyond simple vertical stacking. Moreover, because the above approach provides a way to bring connections closer together by allowing them to reside on different ICs than they otherwise would in a simple coplanar or vertically stacked arrangement, connections can be shortened, different speed ICs can be mixed, and problems like noise and parasitics can be addressed in entirely new ways. Still further, through use of the approach, ICs having shapes (in plan view) other than square or rectangular, such as those representative examples shown in
Still further, it is to be understood that the off plane IC can be used to bridge ICs so as to provide a more direct connection between them while bypassing one or more ICs that are located in between them. This approach is illustrated, in overly simplified form, in
For example, as shown in the module 1400
As shown in the module 1500 of
As shown in
As shown in the module 1700 of
From the modules of
As shown in
As shown in
Finally, in some implementations, the passive elements 1802, 1910 of
It should thus be understood that this description (including the figures) is only representative of some illustrative embodiments. For the convenience of the reader, the above description has focused on a representative sample of all possible embodiments, a sample that teaches the principles of the invention. The description has not attempted to exhaustively enumerate all possible variations. That alternate embodiments may not have been presented for a specific portion of the invention, or that further undescribed alternate embodiments may be available for a portion, is not to be considered a disclaimer of those alternate embodiments. One of ordinary skill will appreciate that many of those undescribed embodiments incorporate the same principles of the invention and others are equivalent.
This application is a Continuation of U.S. patent application Ser. No. 11/688,088, filed Mar. 19, 2007, which is a Continuation-in-Part of the following patent applications which each claim priority to U.S. Provisional Patent Application No. 60/690,759 (filed Jun. 14, 2005): U.S. patent application Ser. Nos. 11/329,481, 11/329,506, 11/329,539, 11/329,540, 11/329,556, 11/329,557, 11/329,558 (now U.S. Pat. No. 7,560,813), Ser. No. 11/329,574 (now U.S. Pat. No. 7,534,722), Ser. Nos. 11/329,575, 11/329,576, 11/329,873 (now U.S. Pat. No. 7,538,033), Ser. Nos. 11/329,874, 11/329,875, 11/329,883, 11/329,885, 11/329,886 (now U.S. Pat. No. 7,521,806), Ser. No. 11/329,887 (now U.S. Pat. No. 7,215,032), Ser. Nos. 11/329,952, 11/329,953 (now U.S. Pat. No. 7,157,372), Ser. Nos. 11/329,955, 11/330,011 (each filed Jan. 10, 2006) and U.S. patent application Ser. No. 11/422,551 (filed Jun. 6, 2006). Each of the applications listed in this paragraph is incorporated herein by reference as if fully set forth herein.
Number | Name | Date | Kind |
---|---|---|---|
3312878 | Poch et al. | Apr 1967 | A |
3591839 | Evans | Jul 1971 | A |
3720309 | Weir | Mar 1973 | A |
4200272 | Godding | Apr 1980 | A |
4452557 | Bouwknegt et al. | Jun 1984 | A |
4818728 | Rai et al. | Apr 1989 | A |
4873205 | Critchlow et al. | Oct 1989 | A |
4878611 | LoVasco et al. | Nov 1989 | A |
4893174 | Yamada et al. | Jan 1990 | A |
4915494 | Shipley et al. | Apr 1990 | A |
4967248 | Shimizu | Oct 1990 | A |
4999077 | Drake et al. | Mar 1991 | A |
5089055 | Nakamura | Feb 1992 | A |
5089880 | Meyer et al. | Feb 1992 | A |
5090119 | Tsuda et al. | Feb 1992 | A |
5100480 | Hayafuji | Mar 1992 | A |
5120597 | Takimoto et al. | Jun 1992 | A |
5134460 | Brady et al. | Jul 1992 | A |
5179043 | Weichold et al. | Jan 1993 | A |
5220530 | Itoh | Jun 1993 | A |
5229315 | Jun et al. | Jul 1993 | A |
5234149 | Katz | Aug 1993 | A |
5236854 | Higaki | Aug 1993 | A |
5266912 | Kledzik | Nov 1993 | A |
5308784 | Kim et al. | May 1994 | A |
5399898 | Rostoker | Mar 1995 | A |
5427834 | Sodetz | Jun 1995 | A |
5468655 | Greer | Nov 1995 | A |
5470787 | Greer | Nov 1995 | A |
5510655 | Tanielian | Apr 1996 | A |
5523628 | Williams et al. | Jun 1996 | A |
5561594 | Wakefield | Oct 1996 | A |
5563084 | Ramm et al. | Oct 1996 | A |
5587119 | White | Dec 1996 | A |
5589029 | Matsui et al. | Dec 1996 | A |
5598965 | Scheu | Feb 1997 | A |
5608264 | Gaul | Mar 1997 | A |
5635014 | Taylor | Jun 1997 | A |
5708569 | Howard et al. | Jan 1998 | A |
5737186 | Fuesser et al. | Apr 1998 | A |
5773889 | Love et al. | Jun 1998 | A |
5780776 | Noda | Jul 1998 | A |
5796591 | Dalal et al. | Aug 1998 | A |
5814889 | Gaul | Sep 1998 | A |
5846464 | Hoffman | Dec 1998 | A |
5872338 | Lan et al. | Feb 1999 | A |
5874780 | Murakami | Feb 1999 | A |
5897337 | Kata et al. | Apr 1999 | A |
5912510 | Hwang et al. | Jun 1999 | A |
5929524 | Drynan et al. | Jul 1999 | A |
5962922 | Wang | Oct 1999 | A |
5963793 | Rinne et al. | Oct 1999 | A |
5973396 | Farnworth | Oct 1999 | A |
6030894 | Hada et al. | Feb 2000 | A |
6037665 | Miyazaki | Mar 2000 | A |
6075710 | Lau | Jun 2000 | A |
6084301 | Chang et al. | Jul 2000 | A |
6087719 | Tsunashima | Jul 2000 | A |
6118181 | Merchant et al. | Sep 2000 | A |
6133631 | Belady | Oct 2000 | A |
6135054 | Inoue | Oct 2000 | A |
6135635 | Miller et al. | Oct 2000 | A |
6137184 | Ikegami | Oct 2000 | A |
6184066 | Chino et al. | Feb 2001 | B1 |
6188118 | Severn | Feb 2001 | B1 |
6207475 | Lin et al. | Mar 2001 | B1 |
6215114 | Yagi et al. | Apr 2001 | B1 |
6232668 | Hikita et al. | May 2001 | B1 |
6277711 | Wu | Aug 2001 | B1 |
6283693 | Acello et al. | Sep 2001 | B1 |
6297072 | Tilmans et al. | Oct 2001 | B1 |
6314013 | Ahn et al. | Nov 2001 | B1 |
6316737 | Evans et al. | Nov 2001 | B1 |
6316786 | Mueller et al. | Nov 2001 | B1 |
6326115 | Nakanishi et al. | Dec 2001 | B1 |
6335571 | Capote et al. | Jan 2002 | B1 |
6351384 | Daikoku et al. | Feb 2002 | B1 |
6393638 | MacColl | May 2002 | B1 |
6395630 | Ahn et al. | May 2002 | B2 |
6395633 | Cheng et al. | May 2002 | B1 |
6399426 | Capote | Jun 2002 | B1 |
6410415 | Estes | Jun 2002 | B1 |
6410431 | Bertin et al. | Jun 2002 | B2 |
6429045 | Furukawa et al. | Aug 2002 | B1 |
6451626 | Lin | Sep 2002 | B1 |
6484776 | Meilunas et al. | Nov 2002 | B1 |
6492255 | Enomoto et al. | Dec 2002 | B2 |
6498089 | Komada | Dec 2002 | B2 |
6498503 | Akram et al. | Dec 2002 | B2 |
6501185 | Chow | Dec 2002 | B1 |
6503779 | Miyazaki | Jan 2003 | B2 |
6509256 | Medlen et al. | Jan 2003 | B2 |
6513236 | Tsukamoto | Feb 2003 | B2 |
6531022 | Tsukahara | Mar 2003 | B1 |
6544371 | Senoo et al. | Apr 2003 | B2 |
6551858 | Kawata et al. | Apr 2003 | B2 |
6555418 | Kurosawa et al. | Apr 2003 | B2 |
6557192 | Zheng | May 2003 | B2 |
6559540 | Kawashima | May 2003 | B2 |
6576830 | Nagao et al. | Jun 2003 | B2 |
6577013 | Glenn et al. | Jun 2003 | B1 |
6583517 | Jimarez | Jun 2003 | B1 |
6586090 | Nakagawa et al. | Jul 2003 | B2 |
6590278 | Behun et al. | Jul 2003 | B1 |
6596640 | Fishcer et al. | Jul 2003 | B1 |
6599778 | Pogge et al. | Jul 2003 | B2 |
6611057 | Mikubo et al. | Aug 2003 | B2 |
6617507 | Mapes et al. | Sep 2003 | B2 |
6617688 | Ikegami et al. | Sep 2003 | B2 |
6627477 | Hakey et al. | Sep 2003 | B1 |
6633079 | Cheever et al. | Oct 2003 | B2 |
6635960 | Farrar et al. | Oct 2003 | B2 |
6635970 | Lasky et al. | Oct 2003 | B2 |
6649941 | Uemura | Nov 2003 | B2 |
6674647 | Pierson et al. | Jan 2004 | B2 |
6680540 | Nakano | Jan 2004 | B2 |
6686654 | Farrar et al. | Feb 2004 | B2 |
6689627 | Mottura et al. | Feb 2004 | B2 |
6689949 | Ortabasi | Feb 2004 | B2 |
6703555 | Takabayashi et al. | Mar 2004 | B2 |
6704953 | Fishman | Mar 2004 | B2 |
6706554 | Ogura | Mar 2004 | B2 |
6717045 | Chen | Apr 2004 | B2 |
6717071 | Chang et al. | Apr 2004 | B2 |
6720245 | Stucchi et al. | Apr 2004 | B2 |
6727582 | Shibata | Apr 2004 | B2 |
6730840 | Sasaoka et al. | May 2004 | B2 |
6731003 | Joshi et al. | May 2004 | B2 |
6733685 | Beilin et al. | May 2004 | B2 |
6740576 | Lin et al. | May 2004 | B1 |
6756594 | George et al. | Jun 2004 | B2 |
6756680 | Jimarez et al. | Jun 2004 | B2 |
6765287 | Lin | Jul 2004 | B1 |
6768210 | Zuniga-Ortiz et al. | Jul 2004 | B2 |
6770509 | Halope et al. | Aug 2004 | B2 |
6770555 | Yamazaki | Aug 2004 | B2 |
6770822 | Pasternak et al. | Aug 2004 | B2 |
6780280 | Halterbeck et al. | Aug 2004 | B2 |
6790663 | Kerr et al. | Sep 2004 | B2 |
6798030 | Izumi et al. | Sep 2004 | B1 |
6809020 | Sakurai et al. | Oct 2004 | B2 |
6815252 | Pendse | Nov 2004 | B2 |
6818818 | Bareis | Nov 2004 | B2 |
6824643 | Yoshimoto et al. | Nov 2004 | B2 |
6838362 | Mastromatteo et al. | Jan 2005 | B2 |
6841883 | Farnworth et al. | Jan 2005 | B1 |
6844259 | Cheong | Jan 2005 | B2 |
6846725 | Nagarajan et al. | Jan 2005 | B2 |
6861336 | Hampton | Mar 2005 | B1 |
6869856 | Combi et al. | Mar 2005 | B2 |
6872635 | Hayashi et al. | Mar 2005 | B2 |
6881609 | Salmon | Apr 2005 | B2 |
6889427 | Yee et al. | May 2005 | B2 |
6903442 | Wood et al. | Jun 2005 | B2 |
6903443 | Farnworth et al. | Jun 2005 | B2 |
6909180 | Ono et al. | Jun 2005 | B2 |
6919642 | Hsieh et al. | Jul 2005 | B2 |
6920051 | Figueroa et al. | Jul 2005 | B2 |
6929974 | Ding et al. | Aug 2005 | B2 |
6938783 | Chung | Sep 2005 | B2 |
6939789 | Huang et al. | Sep 2005 | B2 |
6967307 | Hembree et al. | Nov 2005 | B2 |
6975027 | Farrar et al. | Dec 2005 | B2 |
6986377 | Johnson et al. | Jan 2006 | B2 |
6992824 | Motamedi et al. | Jan 2006 | B1 |
6995469 | Hatakeyama | Feb 2006 | B2 |
7013509 | Hickman | Mar 2006 | B2 |
7015590 | Jeong et al. | Mar 2006 | B2 |
7023347 | Arneson et al. | Apr 2006 | B2 |
7033859 | Pendse | Apr 2006 | B2 |
7052941 | Lee | May 2006 | B2 |
7053456 | Matsuo | May 2006 | B2 |
7056813 | Morrow et al. | Jun 2006 | B2 |
7061104 | Kenny et al. | Jun 2006 | B2 |
7107666 | Hiatt et al. | Sep 2006 | B2 |
7115505 | Hartwell | Oct 2006 | B2 |
7115984 | Poo et al. | Oct 2006 | B2 |
7135777 | Bakir et al. | Nov 2006 | B2 |
7138706 | Arai et al. | Nov 2006 | B2 |
7141869 | Kim et al. | Nov 2006 | B2 |
7144759 | Hilton et al. | Dec 2006 | B1 |
7145236 | Miura et al. | Dec 2006 | B2 |
7157310 | Benson et al. | Jan 2007 | B2 |
7157372 | Trezza | Jan 2007 | B1 |
7170183 | Kim et al. | Jan 2007 | B1 |
7193308 | Matsui | Mar 2007 | B2 |
7218349 | Kimura | May 2007 | B2 |
7227213 | Mastromatteo et al. | Jun 2007 | B2 |
7230318 | Kripesh et al. | Jun 2007 | B2 |
7233028 | Weeks et al. | Jun 2007 | B2 |
7242099 | Lin et al. | Jul 2007 | B2 |
7249992 | Kalenian et al. | Jul 2007 | B2 |
7253519 | Huang et al. | Aug 2007 | B2 |
7262082 | Lin et al. | Aug 2007 | B1 |
7264984 | Garabedian et al. | Sep 2007 | B2 |
7271491 | Akram | Sep 2007 | B1 |
7276787 | Edelstein et al. | Oct 2007 | B2 |
7294531 | Hwang et al. | Nov 2007 | B2 |
7300857 | Akram et al. | Nov 2007 | B2 |
7300865 | Hsieh et al. | Nov 2007 | B2 |
7303976 | Sand | Dec 2007 | B2 |
7326629 | Nagarajan et al. | Feb 2008 | B2 |
7371676 | Hembree | May 2008 | B2 |
7384863 | Shibata | Jun 2008 | B2 |
7390735 | Mehrotra | Jun 2008 | B2 |
7399652 | Sassolini et al. | Jul 2008 | B2 |
7456089 | Aiba et al. | Nov 2008 | B2 |
7456497 | Higashi | Nov 2008 | B2 |
7479659 | Cognetti et al. | Jan 2009 | B2 |
7482272 | Trezza | Jan 2009 | B2 |
7488680 | Andry et al. | Feb 2009 | B2 |
7495316 | Kirby et al. | Feb 2009 | B2 |
7528494 | Furukawa et al. | May 2009 | B2 |
7534722 | Trezza | May 2009 | B2 |
20010001292 | Bertin | May 2001 | A1 |
20020004299 | Schuele et al. | Jan 2002 | A1 |
20020019099 | Williams et al. | Feb 2002 | A1 |
20020048847 | Tsunoi et al. | Apr 2002 | A1 |
20020081773 | Inoue et al. | Jun 2002 | A1 |
20020104873 | Lee et al. | Aug 2002 | A1 |
20020109236 | Kim et al. | Aug 2002 | A1 |
20030030367 | Mitsutake et al. | Feb 2003 | A1 |
20030085471 | Iijima et al. | May 2003 | A1 |
20030094700 | Aiba et al. | May 2003 | A1 |
20030145939 | Ahn et al. | Aug 2003 | A1 |
20030183947 | Ohuchi | Oct 2003 | A1 |
20030193076 | Patti | Oct 2003 | A1 |
20030206680 | Bakir et al. | Nov 2003 | A1 |
20030214036 | Sarihan et al. | Nov 2003 | A1 |
20030216030 | Kim et al. | Nov 2003 | A1 |
20030222354 | Mastromatteo et al. | Dec 2003 | A1 |
20040029304 | Naydenkov et al. | Feb 2004 | A1 |
20040031973 | Cognetti et al. | Feb 2004 | A1 |
20040041260 | Wood et al. | Mar 2004 | A1 |
20040104791 | Satoh et al. | Jun 2004 | A1 |
20040169275 | Danvir et al. | Sep 2004 | A1 |
20040177774 | Naitoh et al. | Sep 2004 | A1 |
20040192029 | Hartwell | Sep 2004 | A1 |
20040199998 | Shinner | Oct 2004 | A1 |
20040227256 | Seko | Nov 2004 | A1 |
20040238115 | Matsuno et al. | Dec 2004 | A1 |
20050042838 | Garyainov et al. | Feb 2005 | A1 |
20050046034 | Farrar | Mar 2005 | A1 |
20050048766 | Wu et al. | Mar 2005 | A1 |
20050104027 | Lazarev | May 2005 | A1 |
20050104219 | Matsui | May 2005 | A1 |
20050163982 | Ono et al. | Jul 2005 | A1 |
20050167830 | Chang et al. | Aug 2005 | A1 |
20050184377 | Takeuchi et al. | Aug 2005 | A1 |
20050230804 | Tanida et al. | Oct 2005 | A1 |
20050233504 | Doi et al. | Oct 2005 | A1 |
20050245059 | Yuan et al. | Nov 2005 | A1 |
20050258526 | Noguchi | Nov 2005 | A1 |
20050262634 | Gottlieb | Dec 2005 | A1 |
20050263869 | Tanaka et al. | Dec 2005 | A1 |
20050266670 | Lin et al. | Dec 2005 | A1 |
20060001174 | Matsui | Jan 2006 | A1 |
20060046468 | Akram et al. | Mar 2006 | A1 |
20060070704 | Sinclair et al. | Apr 2006 | A1 |
20060073701 | Koizumi et al. | Apr 2006 | A1 |
20060125084 | Fazzio et al. | Jun 2006 | A1 |
20060128061 | Ravi et al. | Jun 2006 | A1 |
20060170089 | Mizukoshi | Aug 2006 | A1 |
20060208326 | Nasiri et al. | Sep 2006 | A1 |
20060223301 | Vanhaelemeersch et al. | Oct 2006 | A1 |
20060252262 | Kazemi | Nov 2006 | A1 |
20060264029 | Heck et al. | Nov 2006 | A1 |
20060275946 | MacNamara et al. | Dec 2006 | A1 |
20060278980 | Trezza et al. | Dec 2006 | A1 |
20060278988 | Trezza | Dec 2006 | A1 |
20060278992 | Trezza et al. | Dec 2006 | A1 |
20060281303 | Trezza et al. | Dec 2006 | A1 |
20060281363 | Trezza | Dec 2006 | A1 |
20060289990 | Farrar | Dec 2006 | A1 |
20060292824 | Beyne et al. | Dec 2006 | A1 |
20070020926 | Kalvesten et al. | Jan 2007 | A1 |
20070184653 | Blanchard | Aug 2007 | A1 |
20070228576 | Trezza | Oct 2007 | A1 |
20070278641 | Trezza | Dec 2007 | A1 |
20080003817 | Morimoto | Jan 2008 | A1 |
20080017407 | Kawano | Jan 2008 | A1 |
20080111582 | Matsui et al. | May 2008 | A1 |
20080116567 | Amin et al. | May 2008 | A1 |
20080203556 | Huang | Aug 2008 | A1 |
20080213941 | Pendse | Sep 2008 | A1 |
20080254618 | Umemoto et al. | Oct 2008 | A1 |
20090149033 | Vaartstra et al. | Jun 2009 | A1 |
20090181497 | Mizukoshi et al. | Jul 2009 | A1 |
20090215976 | Amoroso et al. | Aug 2009 | A1 |
20090267165 | Okudo | Oct 2009 | A1 |
20090322698 | Hirakata et al. | Dec 2009 | A1 |
20100117236 | Lin et al. | May 2010 | A1 |
Number | Date | Country |
---|---|---|
0 516 866 | Dec 1992 | EP |
0 620 701 | Oct 1994 | EP |
0 757 386 | Feb 1997 | EP |
1 415 950 | May 2004 | EP |
1 643 819 | Apr 2006 | EP |
61-012047 | Jan 1986 | JP |
63-141356 | Jun 1988 | JP |
01-187948 | Jul 1989 | JP |
03-159152 | Jul 1991 | JP |
05-136143 | Jun 1993 | JP |
05-335313 | Dec 1993 | JP |
06-177135 | Jun 1994 | JP |
07-022461 | Jan 1995 | JP |
08-031835 | Feb 1996 | JP |
10-189661 | Jul 1998 | JP |
10-223832 | Aug 1998 | JP |
2000-114206 | Apr 2000 | JP |
2000-323510 | Nov 2000 | JP |
2000-323645 | Nov 2000 | JP |
2001-129800 | May 2001 | JP |
2001-217381 | Aug 2001 | JP |
2001-223321 | Aug 2001 | JP |
2001-332643 | Nov 2001 | JP |
2002-050721 | Feb 2002 | JP |
2002-164498 | Jun 2002 | JP |
2002-280407 | Sep 2002 | JP |
2003-234367 | Aug 2003 | JP |
2004-071998 | Mar 2004 | JP |
2004-102331 | Apr 2004 | JP |
2004-119773 | Apr 2004 | JP |
2004-214423 | Jul 2004 | JP |
2004-247668 | Sep 2004 | JP |
2004-273596 | Sep 2004 | JP |
2004-281793 | Oct 2004 | JP |
2005-123325 | May 2005 | JP |
2005-277059 | Oct 2005 | JP |
2006-019455 | Jan 2006 | JP |
2006-135277 | May 2006 | JP |
10200651448 | May 2006 | KR |
WO 2004084300 | Sep 2004 | WO |
Number | Date | Country | |
---|---|---|---|
20100148343 A1 | Jun 2010 | US |
Number | Date | Country | |
---|---|---|---|
60690759 | Jun 2005 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 11688088 | Mar 2007 | US |
Child | 12710811 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 11422551 | Jun 2006 | US |
Child | 11688088 | US | |
Parent | 11329955 | Jan 2006 | US |
Child | 11422551 | US | |
Parent | 11329576 | Jan 2006 | US |
Child | 11329955 | US | |
Parent | 11329539 | Jan 2006 | US |
Child | 11329576 | US | |
Parent | 11329575 | Jan 2006 | US |
Child | 11329539 | US | |
Parent | 11329557 | Jan 2006 | US |
Child | 11329575 | US | |
Parent | 11329875 | Jan 2006 | US |
Child | 11329557 | US | |
Parent | 11330011 | Jan 2006 | US |
Child | 11329875 | US | |
Parent | 11329883 | Jan 2006 | US |
Child | 11330011 | US | |
Parent | 11329574 | Jan 2006 | US |
Child | 11329883 | US | |
Parent | 11329556 | Jan 2006 | US |
Child | 11329574 | US | |
Parent | 11329953 | Jan 2006 | US |
Child | 11329556 | US | |
Parent | 11329886 | Jan 2006 | US |
Child | 11329953 | US | |
Parent | 11329887 | Jan 2006 | US |
Child | 11329886 | US | |
Parent | 11329481 | Jan 2006 | US |
Child | 11329887 | US | |
Parent | 11329874 | Jan 2006 | US |
Child | 11329481 | US | |
Parent | 11329506 | Jan 2006 | US |
Child | 11329874 | US | |
Parent | 11329540 | Jan 2006 | US |
Child | 11329506 | US | |
Parent | 11329558 | Jan 2006 | US |
Child | 11329540 | US | |
Parent | 11329952 | Jan 2006 | US |
Child | 11329558 | US | |
Parent | 11329873 | Jan 2006 | US |
Child | 11329952 | US | |
Parent | 11329885 | Jan 2006 | US |
Child | 11329873 | US |