The present invention relates generally to semiconductor chip packages. More particularly, this invention relates to an advanced Quad Flat No Lead (aQFN) chip package having marking and corner lead features and manufacturing methods thereof.
Semiconductor chips have become progressively more complex, driven in large part by the need for increasing processing power in a smaller chip size. In response, packaging technologies have evolved, for example, to enable an increased lead density, which can reduce the footprint area of a package mounted on a printed circuit board (PCB). Some packaging technologies, such as Quad Flat No Lead (QFN), may enable this increased lead density by providing inner and outer rows of leads connected to a disposable portion of a leadframe. However, manufacturing processes for such leadframes may not be scalable beyond two rows of leads. As lead density requirements further increase, it may be desirable to use packaging technologies that are more scalable in terms of lead density.
Moreover, it may be desirable to further reduce package size in additional ways, such as by reducing package height. At the same time, it may be desirable to maintain sufficient mold locking of leads to a package body. In addition, it may be desirable to facilitate surface mounting of the package to a PCB. For example, it may be difficult to determine how to properly orient the package during surface mounting to the PCB. It may also be desirable to increase the reliability of surface mounting of the package to the PCB. For example, stress due to differential thermal expansion between the leads and the package body may be concentrated at the corners of the package, which can lead to cracking of solder connections to the PCB near the corners of the package, and thus to a decrease in the reliability of surface mounting. It may also be desirable to formulate a packaging process designed to meet these objectives. Current packaging solutions can meet some of these objectives but may not be able to meet most, or all, of these objectives.
It is against this background that a need arose to develop the chip package and associated manufacturing methods described herein.
In one innovative aspect, the invention relates to a semiconductor package. In one embodiment, the semiconductor package includes a die pad, a first plurality of leads, a second plurality of leads, a semiconductor chip, and a package body. The die pad includes an upper surface and a lower surface. The first plurality of leads is disposed in a lead placement area around the die pad, and each of the first plurality of leads includes: (1) an upper surface; (2) a lower surface with a first surface area; (3) an upper sloped portion disposed adjacent to the upper surface of each of the first plurality of leads; and (4) a lower sloped portion disposed adjacent to the lower surface of each of the first plurality of leads. The second plurality of leads is disposed in corner regions of the lead placement area, and each of the second plurality of leads includes: (1) an upper surface; (2) a lower surface with a second surface area, wherein an average of the second surface areas of the second plurality of leads is at least fifty percent greater than an average of the first surface areas of the first plurality of leads; (3) an upper sloped portion disposed adjacent to the upper surface of each of the second plurality of leads; and (4) a lower sloped portion disposed adjacent to the lower surface of each of the second plurality of leads. The semiconductor chip is disposed on the die pad and is electrically coupled to the first plurality of leads and to the second plurality of leads. The package body is formed over the semiconductor chip, the first plurality of leads, and the second plurality of leads so that the package body substantially covers the upper sloped portions of each of the first plurality of leads and the second plurality of leads. The package body is also formed over the semiconductor chip, the first plurality of leads, and the second plurality of leads so that the lower sloped portions of each of the first plurality of leads and the second plurality of leads at least partially extend outwardly from a lower surface of the package body.
In another innovative aspect, the invention relates to a method of making a semiconductor package. In one embodiment, the method includes providing a metal carrier plate including: (1) a lower surface; (2) an upper surface including a die receiving area; (3) a plurality of peripheral bulges, each being disposed in a lead placement area around the die receiving area and having an upper surface; (4) a marker bulge being disposed in the lead placement area, and having an upper surface; (5) a first metal coating formed on the upper surfaces of the marker bulge and the plurality of peripheral bulges; and (6) a second metal coating formed on the lower surface of the metal carrier plate below the die receiving area, the marker bulge, and the plurality of peripheral bulges. The method further includes attaching a first semiconductor chip to the die receiving area, electrically coupling the first semiconductor chip to the marker bulge and to the plurality of peripheral bulges, and forming a package body over the first semiconductor chip, the marker bulge, and the plurality of peripheral bulges. The method further includes etching areas on the lower surface of the metal carrier plate without the second metal coating formed thereon such that (1) the marker bulge, the plurality of peripheral bulges, and the die receiving area are separated from one another so as to form a marker lead, a plurality of leads, and a die pad; (2) each of the marker lead and the plurality of leads includes a sloped etched area disposed adjacent to a lower surface of the each of the marker lead and the plurality of leads, wherein the lower surface of each of the plurality of leads has a first surface area; (3) a second surface area of the lower surface of the marker lead is at least fifty percent greater than an average of the first surface areas of the plurality of leads; (4) the die pad includes a sloped etched area disposed adjacent to a tower surface of the die pad; and (5) the sloped etched areas of the die pad, the marker lead, and the plurality of leads at least partially extend outwardly from a lower surface of the package body.
In a further innovative aspect, the invention relates to a semiconductor package. In one embodiment, the semiconductor package includes a die pad, a plurality of leads, a marker lead, a semiconductor chip, and a package body. The die pad includes: (1) an upper surface; (2) a lower surface; (3) an upper sloped portion disposed adjacent to the upper surface of the die pad; and (4) a lower sloped portion disposed adjacent to the lower surface of the die pad. The plurality of leads is disposed around the die pad, and each of the plurality of leads includes: (1) an upper surface; (2) a lower surface with a first surface area; (3) an upper sloped portion disposed adjacent to the upper surface of each of the plurality of leads; and (4) a lower sloped portion disposed adjacent to the lower surface of each of the plurality of leads. The marker lead includes: (1) an upper surface; (2) a lower surface with a different shape from the lower surfaces of each of the plurality of leads; (3) an upper sloped portion disposed adjacent to the upper surface of the marker lead; and (4) a lower sloped portion disposed adjacent to the lower surface of the marker lead. The semiconductor chip is disposed on the die pad and is electrically coupled to the plurality of leads and to the marker lead. The package body is formed over the semiconductor chip, the plurality of leads, and the marker lead so that the package body substantially covers the upper sloped portions of each of the die pad, the plurality of leads, and the marker lead. The package body is also formed over the semiconductor chip, the plurality of leads, and the marker lead so that the lower sloped portions of each of the die pad, the first plurality of leads, and the marker lead at least partially extend outwardly from a lower surface of the package body.
Other aspects and embodiments of the invention are also contemplated. The foregoing summary and the following detailed description are not meant to restrict the invention to any particular embodiment but are merely meant to describe some embodiments of the invention.
For a better understanding of the nature and objects of some embodiments of the invention, reference should be made to the following detailed description taken in conjunction with the accompanying drawings, in which:
Referring back to
The sloping of the upper sloped portions 208c, 218, and 308c can significantly increase the area of contact, and thus the adhesion between the package body 108 and the die pad 101, and between the package body 108 and the leads 171. This can thereby enhance the mold locking of the die pad 101 and the leads 17I in the package body 108. This can also prolong the path and time for moisture diffusion into the package 100.
In the illustrated embodiment, the upper sloped portions 208c and 308c have substantially concave profiles. In this context, the term “substantially” is used to indicate that the upper sloped portions 208c and 308c are generally concave, i.e. rounded inwards toward the center of the die pad 101 and the leads 171, but that the upper sloped portions 208c and 308c may include surface non-uniformities or roughness in the form of small peaks, such as asperities, that may be rounded outwards from the center of the die pad 101 and the leads 171. For example,
It will be understood that the die pad 101 may be alternatively described. For example, in
It will also be understood that the package body 108 may be alternatively described. For example, in
The package 100 may further include a metal coating 116 disposed on the upper surface 151 of the peripheral edge region 114 as shown in
Referring to
For certain implementations, the standoff distance 148 is between about twenty and about fifty percent or between about twenty-five and about forty-five percent of a thickness 142 of the die pad 101 and/or at least one of the leads 171, although the standoff distance 148 is not constrained to this range and, for other implementations, may be between about five percent and about seventy-five percent of the thickness 142. The thickness 142 of the die pad 101 can be measured as the distance between the upper surface 151 of the peripheral edge region 114 and the lower surface 153 of the die pad 101. If metal coatings 116 and 117 are disposed on surfaces 151 and 153 of the die pad 101, as is typically the case, then the thickness 142 can be measured as the distance between the upper surface 150 of the metal coating 116 and the lower surface 152 of the metal coating 117. Similarly, for a lead 171, if metal coatings 126 and 127 are disposed on surfaces 155 and 157 of the lead 171, as is typically the case, then the thickness 142 can be measured as the distance between the upper surface 154 of the metal coating 126 and the lower surface 156 of the metal coating 127. As described herein, various distances can be measured relative to the surfaces of metal coatings 116, 117, 126, and 127. However, it will be understood that these distances can be similarly measured relative to the surfaces 151 and 153 of the die pad 101 or the surfaces 155 and 157 of the leads 171, if any or all of the metal coatings 116, 117, 126, and 127 are not present.
In one embodiment, the thickness 142 of the die pad 101 including metal coatings 116 and 117 is substantially equal to that of at least one lead 171 including metal coatings 126 and 127, and is about 0.125 millimeters. In this case, the standoff distance 148 by which the die pad 101 and the at least one lead 171 protrudes from the lower surface 160 of the package body 108 is between about 0.025 millimeters and about 0.0625 millimeters or between about 0.03 millimeters and about 0.05 millimeters. Also, the peak 208b of the side surface 208 of the die pad 101 is substantially level with the peak 308b of the side surface 308 of the at least one lead 171. In an alternative embodiment, the thickness 142 of the die pad 101 and/or the at least one lead 171 may be above or below 0.125 millimeters.
As the standoff distance 148 becomes a larger percentage of the thickness 142 within the range of about twenty to about fifty percent, the reliability of mold locking of the die pad 101 and or the leads 171 in the package body 108 typically tends to decrease, while the reliability of surface mounting of the package 100 on a PCB typically tends to increase. At the same time, the duration and cost of bottom side etching (see
A mold cap 140 can refer to the distance between an upper surface 164 of the package body 108 and the upper surface 150 of the metal coating 116. Similarly, for a lead 171, the mold cap 140 can be measured as the distance between the upper surface 164 of the package body 108 and the upper surface 154 of the metal coating 126. The mold cap 140 is typically large enough so that the chip 102 and the bonding wires 104 are enclosed within the package body 108. In one embodiment, the mold cap 140 is between about 0.4 millimeters and about 1 millimeter, such as about 0.675 millimeters, although the mold cap 140 can be smaller so long as the chip 102 and the bonding wires 104 remain sufficiently enclosed within the package body 108. The inclusion of the cavity 111 in the die pad 101 can enable the chip 102 to be disposed on the central portion 112a of the cavity bottom 112 as shown in
In
By disposing the chip 102 on the cavity bottom 112 (or upper surface 212 of the base 202), the top surface of the chip 102 is lower by the distance 206 relative to the upper surface 150 of the metal coating 116, and relative to the upper surfaces 154 of the metal coating 126 on each lead 171. As a result, the mold cap 140 can be reduced, which can make the package 100 thinner. In addition, the lower surface of the chip 102 is closer by distance 206 to the lower surface 152 of the metal coating 117. This can enhance heat dissipation from the chip 102 through the die pad 101.
Referring to
Distance 144 refers to the minimum distance from side surface 162 of the package body 108 to side surfaces 308 of any of the leads 171. In the embodiment of
Lead spacing 145, also referred to as terminal pitch, refers to the distance between the centers of a pair of adjacent leads 171. For certain implementations, the lead spacing 145 is between about 0.35 and about 0.55 millimeters, although the lead spacing 145 is not constrained to this range. The lead spacing 145 can be controlled by etching, such as through a top side etching process (see
In one embodiment, the protective layers 210 and 310 can include a metal coating. The metal coating may include at least one of a layer of tin, a layer of nickel, and a layer of gold. Alternatively, the metal coating may include a layer of an alloy of two or more of these metals. The metal coating may be attached to the lower sloped portions 208a and 308a using immersion, electrolytic plating, electroless plating, or any other suitable process.
In another embodiment, the protective layers 210 and 310 can include a solder material. The solder material may include a solder paste. The solder paste may be selectively disposed on the lower sloped portions 208a and 308a, while the protective metal coatings 117 and 127 (without the solder paste) substantially cover the lower surface 153 of the die pad 101 and the lower surface 157 of at least one lead 171. In this context, the term “substantially” indicates that the protective metal coatings 117 and 127 typically cover the lower surfaces 153 and 157 to sufficiently protect the underlying metal from oxidation, moisture, and other environmental conditions to meet packaging application requirements. The protective metal coatings 117 and 127 may also protect the underlying metal during etching, as described and illustrated in
In another embodiment, the protective layers 210 and 310 can include an organic solderability preservative (OSP) layer. The OSP layer may be attached to the lower sloped portions 208a and 308a using immersion or rinsing with a solution based on an organic material, or any other suitable process. The organic material may be an imidazole based material. The OSP layer may be selectively disposed on the lower sloped portions 208a and 308a, or alternatively may be disposed on the lower sloped portions 208a and 308a, the lower surface 153 of the die pad 101, and the lower surface 157 of at least one lead 171. If the OSP layer is disposed on the lower surfaces 153 and 157, an additional processing operation to remove the OSP layer may be omitted, as the OSP layer typically evaporates at temperatures encountered when soldering the die pad 101 and at least one lead 171 to a PCB.
The use of a solder material and or an organic material as part of protective layers 210 and 310 is desirable for at least two reasons. First, typical solder materials and organic materials are less costly than metals such as nickel, gold, and tin, Second, solder materials and organic materials can be applied to the die pad 101 and at least one lead 171 without using electrolytic or electroless plating processes, which can simplify the creation of the protective layers 210 and 310.
The hatched portions of the metal carrier plate 400 (404, 406, and 408) have not been etched, and therefore protrude from the other portions of the metal carrier plate 400 (including part of 402), which have been etched from the top side (see
In one embodiment, after bottom side etching (see
It will be understood that the portion of the metal carrier plate 400 shown in
A first metal coating 514 is then formed on the exposed portions 510, and a second metal coating 516 is formed on the exposed portions 512. The metal coatings 514 and 516 can have the same characteristics as previously described for metal coatings 116, 117, 126, and 127. The photoresist layers 506 and 508 are then stripped. Areas 518 of the upper surface 502 of the copper plate 501 without the protection of the metal coating 514 are then etched to form the metal carrier plate 500, including the previously described central region 212a, central protrusion 213, and peripheral protrusions 406. Alternatively, the etching may form the previously described die receiving area 402 and peripheral bulges 406 as part of the metal carrier plate 500. This etching operation may be referred to as top side etching.
The metal carrier plate 500 typically includes multiple interconnected portions, such as portions 500a and 500b. Each portion may include the previously described central region 212a, central protrusion 213, and peripheral protrusions 406.
An attachment layer 700 is then disposed on the upper surface of each first chip 102a. A second chip 102b is then coupled to the upper surface of each first chip 102a by the attachment layer 700. Each second chip 102b may then be electrically coupled to peripheral protrusions 406 through bonding wires 104b. In another embodiment, each second chip 102b may be electrically coupled to at least one portion of the central protrusion 213. Any peripheral protrusion 406 or portion of the central protrusion 213 to which a second Chip 102b is coupled can be electrically isolated from any peripheral protrusion 406 or portion of the central protrusion 213 to which a corresponding first chip 102a is coupled.
The package body 108 is then formed over each set of stacked chips 102a and 102b and each of the peripheral protrusions 406. Areas 620 of the lower surface of the metal carrier plate 500 without the protection of the metal coating 516 are then etched to separate the peripheral protrusions 406 and the central protrusion 213 to form the previously described leads 171 and die pad 101. The leads 171 and the die pad 101 may be formed in each of multiple connected packages sharing package body 108, such as connected packages 600a and 600b. Through singulation, the connected packages 600a and 600b may be separated into packages 100a and 100b.
In one embodiment, the attachment layer 700 includes an adhesive layer The adhesive layer may be a conductive or a nonconductive adhesive material, such as a non-conductive epoxy. The adhesive layer may be a liquid-type adhesive layer or a film-type adhesive layer, such as a double-sided tape. The adhesive layer may also be a film-on-wire adhesive layer, which has similar characteristics but is typically thicker than the film-type adhesive layer.
In one embodiment, chip 102b extends beyond the peripheral edge of chip 102a. One advantage of the film-on-wire adhesive layer is that this adhesive layer can be sufficiently thick so that when chip 102b is attached to this adhesive layer, there is still sufficient clearance for bonding wires 104a attached to chip 102a. If the film-on-wire adhesive layer is not used, then the attachment layer 700 may include a spacer in addition to the liquid-type and/or film-type adhesive layer. The purpose of the spacer is to space apart chips 102a and 102b so that there is sufficient clearance for bonding wires 104a attached to chip 102a.
As described previously, a resulting package 100 can be made thinner by disposing the chip 102 on the cavity bottom 112 (or upper surface 212 of the base 202). For a package 100 with stacked chips such as in
For surface mounting the package 100a the solder interfaces 800 and 802 may be reflowed to form liquefied solder masses 804 and 806. The liquefied solder masses 804 and 806 are then placed into contact with a PCB 808 and hardened. The solder interfaces 800 and 802 typically contain enough solder so that, upon reflow soldering and surface mounting of the package 100a, the solder acts as a protective layer for the sloped etched areas 208a and 308a by substantially covering these areas.
In addition to the use of the solder as a protective layer, another advantage of the surface mounting process of
As described previously, enough solder paste 900 can be applied on the PCB 908 so that upon surface mounting of the package 100 and reflow soldering, the solder acts as a protective layer for the sloped etched areas 208a and 308a by substantially covering those areas.
The hatched portions of the metal carrier plate 1000 (1004, 1006, 1008, and 1010) have not been etched, and therefore protrude from the other portions of the metal carrier plate 1000 (including part of 1002), which have been etched from the top side (see
In one embodiment, a surface area of a lower surface 1118 of the marker lead 1108 may be at least fifty percent greater than an average of surface areas of a lower surface 157 of the other leads 171, such as at least 1.5 times, 2 times, or 3 times larger. Also, an average of surface areas of lower surfaces 1120 of the enlarged leads 1110 may be at least fifty percent greater than the average of surface areas of the lower surface 157 of the other leads 171, such as at least 1.5 times, 2 times, or 3 times larger. The marker lead 1108 and the enlarged leads 1110 may be located in the corner regions of the lead placement area 1001, as shown in
In one embodiment, the lower surface 1118 of the marker lead 1108 may have a substantially circular shape, while the lower surfaces 1120 of each of the enlarged leads 1110 may have a substantially square shape. Alternatively, the lower surface 1118 of the marker lead 1108 may have a substantially square shape, while the lower surfaces 1120 of each of the enlarged leads 1110 may have a substantially circular shape. In this context, the term “substantially” is used to indicate that the lower surfaces 1118 and 1120 need not be perfectly square or circular. For example, the lower surfaces 1120 of each of the enlarged leads 1110 may be mostly square but may have a rounded corner rather than a sharp corner The lower surfaces 1118 and 1120 may also include surface non-uniformities or roughness in the form of small peaks, such as asperities, that may point outwards from the center of the leads 1108 and 1110, respectively.
It will be understood that the portion of the metal carrier plate 1000 shown in
While the methods disclosed herein have been described with reference to particular operations performed in a particular order, it will be understood that these operations may be combined, sub-divided, or re-ordered to form an equivalent method without departing from the teachings of the invention. Accordingly, unless specifically indicated herein, the order and grouping of the operations are not limitations of the invention.
The foregoing description, for purposes of explanation, used specific nomenclature to provide a thorough understanding of the invention. However, it will be apparent to one skilled in the art that specific details are not required in order to practice the invention. Thus, the foregoing descriptions of specific embodiments of the invention are presented for purposes of illustration and description. They are not intended to be exhaustive or to limit the invention to the precise forms disclosed; many modifications and variations are possible in view of the above teachings. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, they thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. It is intended that the following claims and their equivalents define the scope of the invention.
The present application claims the benefit of the following commonly owned U.S. provisional patent application, which is incorporated herein by reference in its entirety: U.S. Provisional Patent Application No. 61/036,470, US entitled “Chip Package Structure and Manufacturing Methods Thereof,” filed on Mar. 14, 2008.
Number | Name | Date | Kind |
---|---|---|---|
4948032 | Dunaway et al. | Aug 1990 | A |
5200025 | Toei et al. | Apr 1993 | A |
5389739 | Mills | Feb 1995 | A |
5800958 | Manteghi | Sep 1998 | A |
5804468 | Tsuji et al. | Sep 1998 | A |
5847458 | Nakamura et al. | Dec 1998 | A |
5900676 | Kweon et al. | May 1999 | A |
5969412 | Matsutomo | Oct 1999 | A |
6001671 | Fjelstad | Dec 1999 | A |
6025650 | Tsuji et al. | Feb 2000 | A |
6093584 | Fjelstad | Jul 2000 | A |
6097098 | Ball | Aug 2000 | A |
6132593 | Tan | Oct 2000 | A |
6201292 | Yagi et al. | Mar 2001 | B1 |
6238952 | Lin | May 2001 | B1 |
6242284 | Kang et al. | Jun 2001 | B1 |
6261864 | Jung et al. | Jul 2001 | B1 |
6291271 | Lee et al. | Sep 2001 | B1 |
6303985 | Larson et al. | Oct 2001 | B1 |
6306685 | Liu et al. | Oct 2001 | B1 |
6333252 | Jung et al. | Dec 2001 | B1 |
6342730 | Jung et al. | Jan 2002 | B1 |
6379996 | Suzuki | Apr 2002 | B1 |
6410987 | Kanemoto et al. | Jun 2002 | B1 |
6424047 | Chua et al. | Jul 2002 | B1 |
6429536 | Liu et al. | Aug 2002 | B1 |
6451627 | Coffman | Sep 2002 | B1 |
6495909 | Jung et al. | Dec 2002 | B2 |
6498099 | McLellan | Dec 2002 | B1 |
6501162 | Sakamoto et al. | Dec 2002 | B2 |
6525406 | Chung et al. | Feb 2003 | B1 |
6528877 | Ernst et al. | Mar 2003 | B2 |
6528879 | Sakamoto et al. | Mar 2003 | B2 |
6528893 | Jung et al. | Mar 2003 | B2 |
6545347 | McClellan | Apr 2003 | B2 |
6548328 | Sakamoto et al. | Apr 2003 | B1 |
6551859 | Lee et al. | Apr 2003 | B1 |
6562660 | Sakamoto et al. | May 2003 | B1 |
6585905 | Fan et al. | Jul 2003 | B1 |
6586677 | Glenn | Jul 2003 | B2 |
6635956 | Sakamoto et al. | Oct 2003 | B2 |
6635957 | Kwan et al. | Oct 2003 | B2 |
6683368 | Mostafazadeh | Jan 2004 | B1 |
6689640 | Mostafazadeh | Feb 2004 | B1 |
6700188 | Lin | Mar 2004 | B2 |
6706547 | Sakamoto et al. | Mar 2004 | B2 |
6713849 | Hasebe et al. | Mar 2004 | B2 |
6740961 | Mostafazadeh | May 2004 | B1 |
6759271 | Miyazaki | Jul 2004 | B2 |
6777788 | Wan et al. | Aug 2004 | B1 |
6812063 | Huang | Nov 2004 | B2 |
6812410 | Sakamoto et al. | Nov 2004 | B2 |
6812552 | Islam et al. | Nov 2004 | B2 |
6818973 | Foster | Nov 2004 | B1 |
6861295 | Jung et al. | Mar 2005 | B2 |
6861734 | Minamio et al. | Mar 2005 | B2 |
6906414 | Zhao et al. | Jun 2005 | B2 |
6927483 | Lee et al. | Aug 2005 | B1 |
6933594 | McLellan et al. | Aug 2005 | B2 |
6946324 | McLellan et al. | Sep 2005 | B1 |
6949816 | Brown et al. | Sep 2005 | B2 |
6975022 | Sakamoto et al. | Dec 2005 | B2 |
6975038 | Mostafazadeh | Dec 2005 | B1 |
6984880 | Minamio et al. | Jan 2006 | B2 |
6995459 | Lee et al. | Feb 2006 | B2 |
6995460 | McLellan et al. | Feb 2006 | B1 |
7026190 | Kobayashi et al. | Apr 2006 | B2 |
7049177 | Fan et al. | May 2006 | B1 |
7060535 | Sirinorakul et al. | Jun 2006 | B1 |
7091606 | Sakamoto et al. | Aug 2006 | B2 |
7095100 | Kasuya | Aug 2006 | B2 |
7125798 | Sakamoto et al. | Oct 2006 | B2 |
7129116 | Islam et al. | Oct 2006 | B2 |
7145292 | Gai | Dec 2006 | B2 |
7166495 | Ball | Jan 2007 | B2 |
7173336 | Sakamoto et al. | Feb 2007 | B2 |
7193302 | Tseng | Mar 2007 | B2 |
7196416 | Hochstenbach et al. | Mar 2007 | B2 |
7208826 | Sakamoto et al. | Apr 2007 | B2 |
7215009 | Leng et al. | May 2007 | B1 |
7226811 | McLellan et al. | Jun 2007 | B1 |
7235888 | Hosokawa et al. | Jun 2007 | B2 |
7247526 | Fan et al. | Jul 2007 | B1 |
7247938 | Groenhuis et al. | Jul 2007 | B2 |
7262491 | Islam et al. | Aug 2007 | B2 |
7271032 | McLellan et al. | Sep 2007 | B1 |
7301225 | Wong et al. | Nov 2007 | B2 |
7319266 | St. Germain et al. | Jan 2008 | B2 |
7344920 | Kirloskar et al. | Mar 2008 | B1 |
7348663 | Kirloskar et al. | Mar 2008 | B1 |
7351612 | Gai | Apr 2008 | B2 |
7382044 | Yilmaz et al. | Jun 2008 | B1 |
7407834 | Shimanuki et al. | Aug 2008 | B2 |
7410834 | Fukaya et al. | Aug 2008 | B2 |
7443012 | Yamaguchi | Oct 2008 | B2 |
7446397 | Gai | Nov 2008 | B2 |
7459347 | Shimanuki et al. | Dec 2008 | B2 |
7518156 | Hasebe et al. | Apr 2009 | B2 |
7545026 | Six | Jun 2009 | B2 |
7550322 | Kimura | Jun 2009 | B2 |
7563648 | Islam et al. | Jul 2009 | B2 |
7598606 | Chow et al. | Oct 2009 | B2 |
7608482 | Bayan | Oct 2009 | B1 |
7494557 | Peterson | Nov 2009 | B1 |
7622332 | Islam et al. | Nov 2009 | B2 |
7679172 | Huang et al. | Mar 2010 | B2 |
7683461 | Lau | Mar 2010 | B2 |
7786557 | Hsieh et al. | Aug 2010 | B2 |
7790500 | Ramos et al. | Sep 2010 | B2 |
7799611 | Ramos et al. | Sep 2010 | B2 |
7834431 | Hooper et al. | Nov 2010 | B2 |
7834469 | Chuang et al. | Nov 2010 | B2 |
7838974 | Poddar et al. | Nov 2010 | B2 |
7846775 | Lee et al. | Dec 2010 | B1 |
20010052600 | Sakamoto et al. | Dec 2001 | A1 |
20020084518 | Hasebe et al. | Jul 2002 | A1 |
20020096790 | Kasuya | Jul 2002 | A1 |
20020109214 | Minamio et al. | Aug 2002 | A1 |
20020160552 | Minamio et al. | Oct 2002 | A1 |
20020163015 | Lee et al. | Nov 2002 | A1 |
20030071333 | Matsuzawa | Apr 2003 | A1 |
20030092205 | Wu et al. | May 2003 | A1 |
20030127711 | Kawai et al. | Jul 2003 | A1 |
20030170922 | Sakamoto et al. | Sep 2003 | A1 |
20040046237 | Abe et al. | Mar 2004 | A1 |
20040094829 | Minamio et al. | May 2004 | A1 |
20040124505 | Mahle et al. | Jul 2004 | A1 |
20040217450 | Li et al. | Nov 2004 | A1 |
20040262718 | Ramakrishna | Dec 2004 | A1 |
20050023667 | Lin et al. | Feb 2005 | A1 |
20050146058 | Danno | Jul 2005 | A1 |
20060033184 | Park et al. | Feb 2006 | A1 |
20060055009 | Shim et al. | Mar 2006 | A1 |
20060240600 | Ito et al. | Oct 2006 | A1 |
20070018291 | Huang et al. | Jan 2007 | A1 |
20070052076 | Ramos et al. | Mar 2007 | A1 |
20070059863 | Li et al. | Mar 2007 | A1 |
20070075404 | Dimaano et al. | Apr 2007 | A1 |
20070085199 | Ong et al. | Apr 2007 | A1 |
20070141756 | Iitani et al. | Jun 2007 | A1 |
20070164403 | Huang et al. | Jul 2007 | A1 |
20070164411 | Huang et al. | Jul 2007 | A1 |
20070181983 | Takai et al. | Aug 2007 | A1 |
20070194417 | Yoshida et al. | Aug 2007 | A1 |
20080029855 | Chang | Feb 2008 | A1 |
20080029856 | Chou et al. | Feb 2008 | A1 |
20080061414 | Retuta et al. | Mar 2008 | A1 |
20080067649 | Matsunaga et al. | Mar 2008 | A1 |
20080079124 | Haga et al. | Apr 2008 | A1 |
20080079127 | Gerber | Apr 2008 | A1 |
20080093715 | Lange et al. | Apr 2008 | A1 |
20080179758 | Wong et al. | Jul 2008 | A1 |
20080191325 | Shirasaka | Aug 2008 | A1 |
20080258278 | Ramos et al. | Oct 2008 | A1 |
20080258279 | Lin et al. | Oct 2008 | A1 |
20080311705 | Kim | Dec 2008 | A1 |
20090001540 | Yang et al. | Jan 2009 | A1 |
20090065914 | Engl | Mar 2009 | A1 |
20090189260 | Hasebe et al. | Jul 2009 | A1 |
20090189261 | Lim et al. | Jul 2009 | A1 |
20090230523 | Chien et al. | Sep 2009 | A1 |
20090230524 | Chien et al. | Sep 2009 | A1 |
20090230526 | Chen et al. | Sep 2009 | A1 |
20090267210 | Chuang | Oct 2009 | A1 |
20090278243 | Chuang | Nov 2009 | A1 |
20090283882 | Hsieh et al. | Nov 2009 | A1 |
20090315159 | Abbott | Dec 2009 | A1 |
20100044843 | Chien et al. | Feb 2010 | A1 |
20100044850 | Lin et al. | Feb 2010 | A1 |
20100258920 | Chien et al. | Oct 2010 | A1 |
20100258921 | Chien et al. | Oct 2010 | A1 |
20100258934 | Chien et al. | Oct 2010 | A1 |
20110163430 | Lee et al. | Jul 2011 | A1 |
Number | Date | Country |
---|---|---|
1726591 | Jan 1996 | CN |
2726111 | Sep 2005 | CN |
1735963 | Feb 2006 | CN |
1985371 | Jun 2007 | CN |
101587868 | Nov 2009 | CN |
05166985 | Jul 1993 | JP |
11195733 | Jul 1999 | JP |
2001024135 | Jan 2001 | JP |
2005317998 | Nov 2005 | JP |
Number | Date | Country | |
---|---|---|---|
20090230525 A1 | Sep 2009 | US |
Number | Date | Country | |
---|---|---|---|
61036470 | Mar 2008 | US |