The present invention relates to aggregating integrated circuits and, in particular, to stacking integrated circuits in chip-scale packages.
A variety of techniques are used to stack packaged integrated circuits. Some methods require special packages, while other techniques stack conventional packages. In some stacks, the leads of the packaged integrated circuits are used to create a stack, while in other systems, added structures such as rails provide all or part of the interconnection between packages. In still other techniques, flexible conductors with certain characteristics are used to selectively interconnect packaged integrated circuits.
The predominant package configuration employed during the past decade has encapsulated an integrated circuit (IC) in a plastic surround typically having a rectangular configuration. The enveloped integrated circuit is connected to the application environment through leads emergent from the edge periphery of the plastic encapsulation. Such “leaded packages” have been the constituent elements most commonly employed by techniques for stacking packaged integrated circuits.
Leaded packages play an important role in electronics, but efforts to miniaturize electronic components and assemblies have driven development of technologies that preserve circuit board surface area. Because leaded packages have leads emergent from peripheral sides of the package, leaded packages occupy more than a minimal amount of circuit board surface area. Consequently, alternatives to leaded packages known as chip scale packaging or “CSP” have recently gained market share.
CSP refers generally to packages that provide connection to an integrated circuit through a set of contacts arrayed across a major surface of the package. Instead of leads emergent from a peripheral side of the package, contacts are placed on a major surface and typically are located along the planar bottom surface of the package. The absence of “leads” on package sides renders most stacking techniques devised for leaded packages inapplicable for CSP stacking.
What is needed, therefore, is a technique and system for stacking CSPs that provides a thermally efficient, reliable structure that performs well at higher frequencies but does not add excessive height to the stack yet allows production at reasonable cost with readily understood and managed materials and methods.
The present invention stacks chip scale-packaged integrated circuits (CSPs) into low profile modules that conserve PWB or other board surface area. Although the present invention is applied most frequently to CSPs that contain one die, it may be employed with CSPs that include more than one integrated circuit die.
Preferred embodiments employ low profile contact structures to provide connection between CSPs of the stacked module and between and to the flex circuitry. Low profile contacts are created by any of a variety of methods and materials including, for example, screen paste techniques and use of high temperature solders, although other application techniques and traditional solders may be employed for creating low profile contacts that may be employed in the present invention. A consolidated low profile contact structure and technique is provided for use in alternative embodiments of the present invention.
Multiple numbers of CSPs may be stacked in accordance with the present invention. The CSPs employed in stacked modules devised in accordance with the present invention are connected with flex circuitry. That flex circuitry may exhibit one or two or more conductive layers with preferred embodiments having two conductive layers.
In some preferred embodiments, a form standard provides a physical form that allows many of the varying package sizes found in the broad family of CSP packages to be used to advantage while employing a standard connective flex circuitry design. In other embodiments, a heat spreader is disposed between the CSP and the flex circuitry thus providing an improved heat transference function without the standardization of the form standard, while still other embodiments lack either a form standard or a heat spreader and may employ, for example, the flex circuitry as a heat transference material.
The invention is used with CSP packages of a variety of types and configurations such as, for example, those that are die-sized, as well those that are near chip-scale as well as the variety of ball grid array packages known in the art. It may also be used with those CSP-like packages that exhibit bare die connectives on one major surface. Thus, the term CSP should be broadly considered in the context of this application. The invention may be employed to advantage in the wide range of CSP configurations available in the art where an array of connective elements is available from at least one major surface. Collectively, these will be known herein as chip scale packaged integrated circuits (CSPs) and preferred embodiments will be described in terms of CSPs, but the particular configurations used in the explanatory figures are not, however, to be construed as limiting. For example, the elevation views of
Shown in
CSPs often exhibit an array of balls along lower surface 22. Such ball contacts are typically solder ball-like structures appended to contact pads arrayed along lower surface 22. In many preferred embodiments of the present invention, CSPs that exhibit balls along lower surface 22 are processed to strip the balls from lower surface 22 or, alternatively, CSPs that do not have ball contacts or other contacts of appreciable height are employed. Only as a further example of the variety of contacts that may be employed in alternative preferred embodiments of the present invention, an embodiment is later disclosed in
Embodiments of the invention may also be devised that employ both standard ball contacts and low profile contacts or consolidated contacts. For example, in the place of low profile inter-flex contacts 42 or, in the place of low profile contacts 28, or in various combinations of those structures, standard ball contacts may be employed at some levels of module 10, while low profile contacts and/or low profile inter-flex contacts or consolidated contacts are used at other levels.
A typical eutectic ball found on a typical CSP memory device is approximately 15 mils in height. After solder reflow, such a ball contact will typically have a height of about 10 mils. In preferred modes of the present invention, low profile contacts 28 and/or low profile inter-flex contacts 42 have a height of approximately 7 mils or less and, more preferably, less than 5 mils.
Where present, the contact sites of a CSP that are typically found under or within the ball contacts typically provided on a CSP, participate in the creation of low profile contacts 28. One set of methods by which high-temperature types of low profile contacts 28 suitable for use in embodiments of the present invention are created is disclosed in co-pending and incorporated U.S. patent application Ser. No. 10/457,608 filed Jun. 9, 2003. In other embodiments, more typical solders, in paste form for example, may be applied either to the exposed contact sites or pads along lower surface 22 of a CSP and/or to the appropriate flex contact sites of the designated flex circuit to be employed with that CSP.
In
Form standard 34 is shown disposed adjacent to upper surface 20 of each of the CSPs below level four CSP 12. Form standard 34 may be fixed to upper surface 20 of the respective CSP with an adhesive 36 which preferably is thermally conductive. Form standard 34 may also, in alternative embodiments, merely lay on upper surface 20 or be separated from upper surface 20 by an air gap or medium such as a thermal slug or non-thermal layer.
In other embodiments, a heat spreader may act as a heat transference media and reside between the flex circuitry and the package body 27 or may be used in place of form standard 34. Such a heat spreader is shown in
With continuing reference to
Further, as those of skill will recognize, mixed sizes of CSPs may be implemented into the same module 10, such as would be useful to implement embodiments of a system-on-a-stack such as those disclosed in co-pending application U.S. patent application Ser. No. 10/136,890, filed May 2, 2002, which is hereby incorporated by reference and commonly owned by the assignee of the present application.
Preferably, portions of flex circuits 30 and 32 are fixed to form standard 34 by adhesive 35 which is preferably a tape adhesive, but may be a liquid adhesive or may be placed in discrete locations across the package. Preferably, adhesive 35 is thermally conductive.
In a preferred embodiment, flex circuits 30 and 32 are multi-layer flexible circuit structures that have at least two conductive layers examples of which are those described in U.S. application Ser. No. 10/005,581, now U.S. Pat. No. 6,576,992, which has been incorporated by reference herein. Other embodiments may, however, employ flex circuitry, either as one circuit or two flex circuits to connect a pair of CSPs, that have only a single conductive layer.
Preferably, the conductive layers employed in flex circuitry of module 10 are metal such as alloy 110. The use of plural conductive layers provides advantages and the creation of a distributed capacitance across module 10 intended to reduce noise or bounce effects that can, particularly at higher frequencies, degrade signal integrity, as those of skill in the art will recognize.
Module 10 of
Form standard 34, as employed in one preferred embodiment, is approximately 5 mils in thickness, while flex circuits 30 and 32 are typically thinner than 5 mils. Thus, the depiction of
Flex 32 is shown in
Flex 32 has a first outer surface 50 and a second outer surface 52. Preferred flex circuit 32 has at least two conductive layers interior to first and second outer surfaces 50 and 52. There may be more than two conductive layers in flex 30 and flex 32 and other types of flex circuitry may employ only one conductive layer. In the depicted preferred embodiment, first conductive layer 54 and second conductive layer 58 are interior to first and second outer surfaces 50 and 52. Intermediate layer 56 lies between first conductive layer 54 and second conductive layer 58. There may be more than one intermediate layer, but one intermediate layer of polyimide is preferred. The designation “F” as shown in
As depicted in
The consolidated contact 61 shown in
Thus, in the depicted embodiment, module 10 is constructed with a level one CSP 18 that exhibits balls as contacts, but those ball contacts are re-melted during the construction of module 10 to allow the solder constituting the ball to pass through orifice 59 of the respective flex contact 44 to create a consolidated contact 61 that serves to connect CSP 18 and flex circuitry 32, yet preserve a low profile aspect to module 10 while providing a contact for module 10. Those of skill will recognize that this alternative connection strategy may be employed with any one or more of the CSPs of module 10.
As those skilled will note, a consolidated contact 61 may be employed to take the place of a low profile contact 28 and module contact 38 in the alternative embodiments. Further, either alternatively, or in addition, a consolidated contact 61 may also be employed in the place of a low profile contact 28 and/or an inter-flex contact 42 in alternative embodiments where the conductive layer design of the flex circuitry will allow the penetration of the flex circuitry implicated by the strategy.
There are a variety of methods of creating low profile contacts 28. One method that is effective is the screen application of solder paste to the exposed CSP contact pad areas of the CSP and/or to the contact sites of the flex circuitry. For screened solder paste, the reflowed joint height of contact 28 will typically be between 0.002″ and 0.006″ (2 to 6 mils). The stencil design, the amount of solder remaining on ‘ball-removed’ CSPs, and flex planarity will be factors that could have a significant effect on this value. Low profile contact 28 has a height “C” which, in a preferred embodiment, is between 2 and 7 mils. Flex circuitry 32, with one or two or more conductive layers, has a thickness “F” of about 4 mils or less in a preferred embodiment. Adhesive layer 35 has a thickness “A1” of between 1 and 1.5 mils in a preferred embodiment. Form standard 34 has a thickness “FS” of between 4 and 6 mils in a preferred embodiment and, adhesive layer 36 has a thickness “A2” of between 1 and 2 mils. Thus, the total distance between lower surface 22 of CSP 16 and upper surface 20 of CSP 18 passing through one of low profile contacts 28 of CSP 16 is approximated by the formula:
(C+F+A1+FS+A2)−distance low profile contact 28 penetrates into flex 32 (1)
In practice, this should be approximately between 9 and 20 mils in a preferred embodiment. A similar calculation can be applied to identify the preferred distances between, for example, CSP 14 and CSP 16 in a four-high module 10. In such cases, the height of inter-flex contact 42 and thickness of another layer of flex circuit 32 will be added to the sum to result in a preferred range of between 13 and 31 mils. It should be noted that in some embodiments, not all of these elements will be present, and in others, added elements will be found. For example, some of the adhesives may be deleted, and form standard 34 may be replaced or added to with a heat spreader 37 and, in still other versions, neither a form standard 34 nor a heat spreader 37 will be found. As an example, where there is no use of a heat spreader 37 or form standard 34, the distance between lower surface 22 of CSP 16 and upper surface 20 of CSP 18 in a two-element module 10 will be preferably between 4.5 and 12.5 mils and more preferably less than 11 mils.
It is often desirable, but not required, to create low profile contacts 28 and low profile inter-flex contacts 42 using HT joints as described in co-pending application U.S. patent application Ser. No. 10/457,608 which is incorporated by reference herein and is commonly-owned by the assignee of the present invention.
Heat spreader 37 is shown attached to the body 27 of first level CSP 18 through adhesive 36. In some embodiments, a heat spreader 37 or a form standard 34 may also be positioned to directly contact body 27 of the respective CSP.
Heat transference from module can be improved with use of a form standard 34 or a heat spreader 37 comprised of heat transference material such as a metal and preferably, copper or a copper compound or alloy, to provide a significant sink for thermal energy. Although the flex circuitry operates as a heat transference material, such thermal enhancement of module 10 particularly presents opportunities for improvement of thermal performance where larger numbers of CSPs are aggregated in a single stacked module 10.
Although the present invention has been described in detail, it will be apparent to those skilled in the art that the invention may be embodied in a variety of specific forms and that various changes, substitutions and alterations can be made without departing from the spirit and scope of the invention. The described embodiments are only illustrative and not restrictive and the scope of the invention is, therefore, indicated by the following claims.
This application is a continuation-in-part of U.S. patent application Ser. No. 10/453,398, filed Jun. 3, 2003 now U.S. Pat. No. 6,914,324, which is a continuation-in-part of U.S. patent application Ser. No. 10/005,581, filed Oct. 26, 2001, now U.S. Pat. No. 6,576,992 B2, issued Jun. 10, 2003, both of which applications are hereby incorporated by reference in their entirety, and this application is a continuation-in-part of U.S. patent application Ser. No. 10/457,608 filed Jun. 9, 2003, pending, which is incorporated by reference in its entirety and which application is a continuation-in-part of U.S. patent application Ser. No. 10/005,581, filed Oct. 26, 2001, now U.S. patent application Ser. No. 6,576,992 B2.
Number | Name | Date | Kind |
---|---|---|---|
3411122 | Schiller et al. | Nov 1968 | A |
3436604 | Hyltin | Apr 1969 | A |
3654394 | Gordon | Apr 1972 | A |
3727064 | Bottini | Apr 1973 | A |
3746934 | Stein | Jul 1973 | A |
3766439 | Isaacson | Oct 1973 | A |
3772776 | Weisenburger | Nov 1973 | A |
3983547 | Almasi | Sep 1976 | A |
4079511 | Grabbe | Mar 1978 | A |
4103318 | Schwede | Jul 1978 | A |
4288841 | Gogal | Sep 1981 | A |
4398235 | Lutz et al. | Aug 1983 | A |
4406508 | Sadigh-Behzadi | Sep 1983 | A |
4437235 | McIver | Mar 1984 | A |
4513368 | Houseman | Apr 1985 | A |
4587596 | Bunnell | May 1986 | A |
4645944 | Uya | Feb 1987 | A |
4696525 | Coller et al. | Sep 1987 | A |
4712129 | Orcutt | Dec 1987 | A |
4722691 | Gladd et al. | Feb 1988 | A |
4733461 | Nakano | Mar 1988 | A |
4758875 | Fujisawa et al. | Jul 1988 | A |
4763188 | Johnson | Aug 1988 | A |
4821007 | Fields et al. | Apr 1989 | A |
4823234 | Konishi et al. | Apr 1989 | A |
4833568 | Berhold | May 1989 | A |
4839717 | Phy et al. | Jun 1989 | A |
4862249 | Carlson | Aug 1989 | A |
4884237 | Mueller et al. | Nov 1989 | A |
4891789 | Quattrini et al. | Jan 1990 | A |
4911643 | Perry et al. | Mar 1990 | A |
4953060 | Lauffer et al. | Aug 1990 | A |
4956694 | Eide | Sep 1990 | A |
4983533 | Go | Jan 1991 | A |
4985703 | Kaneyama | Jan 1991 | A |
5012323 | Farnworth | Apr 1991 | A |
5016138 | Woodman | May 1991 | A |
5034350 | Marchisi | Jul 1991 | A |
5041015 | Travis | Aug 1991 | A |
5041902 | McShane | Aug 1991 | A |
5057903 | Olla | Oct 1991 | A |
5064782 | Nishiguchi | Nov 1991 | A |
5068708 | Newman | Nov 1991 | A |
5081067 | Shimizu et al. | Jan 1992 | A |
5099393 | Bentlage et al. | Mar 1992 | A |
5104820 | Go et al. | Apr 1992 | A |
5117282 | Salatino | May 1992 | A |
5122862 | Kajihara et al. | Jun 1992 | A |
5138430 | Gow, 3rd et al. | Aug 1992 | A |
5138434 | Wood et al. | Aug 1992 | A |
5158912 | Kellerman et al. | Oct 1992 | A |
5159434 | Kohno et al. | Oct 1992 | A |
5159535 | Desai et al. | Oct 1992 | A |
5168926 | Watson et al. | Dec 1992 | A |
5198888 | Sugano et al. | Mar 1993 | A |
5198965 | Curtis et al. | Mar 1993 | A |
5214307 | Davis | May 1993 | A |
5219794 | Satoh et al. | Jun 1993 | A |
5222014 | Lin | Jun 1993 | A |
5224023 | Smith et al. | Jun 1993 | A |
5229916 | Frankeny et al. | Jul 1993 | A |
5239198 | Lin et al. | Aug 1993 | A |
5240588 | Uchida | Aug 1993 | A |
5241454 | Ameen et al. | Aug 1993 | A |
5243133 | Engle et al. | Sep 1993 | A |
5247423 | Lin et al. | Sep 1993 | A |
5252855 | Ogawa et al. | Oct 1993 | A |
5252857 | Kane et al. | Oct 1993 | A |
5259770 | Bates et al. | Nov 1993 | A |
5261068 | Gaskins et al. | Nov 1993 | A |
5262927 | Chia et al. | Nov 1993 | A |
5276418 | Klosowiak et al. | Jan 1994 | A |
5279029 | Burns | Jan 1994 | A |
5281852 | Normington | Jan 1994 | A |
5289062 | Wyland | Feb 1994 | A |
5311401 | Gates, Jr. et al. | May 1994 | A |
5313097 | Haj-Ali-Ahmadi et al. | May 1994 | A |
5343075 | Nishino | Aug 1994 | A |
5347428 | Carson et al. | Sep 1994 | A |
5357478 | Kikuda et al. | Oct 1994 | A |
5361228 | Adachi et al. | Nov 1994 | A |
5375041 | McMahon | Dec 1994 | A |
5377077 | Burns | Dec 1994 | A |
5386341 | Olson et al. | Jan 1995 | A |
5394010 | Tazawa et al. | Feb 1995 | A |
5394303 | Yamaji | Feb 1995 | A |
5397916 | Normington | Mar 1995 | A |
5402006 | O'Donley | Mar 1995 | A |
5420751 | Burns | May 1995 | A |
5428190 | Stopperan | Jun 1995 | A |
5438224 | Papageorge et al. | Aug 1995 | A |
5446620 | Burns et al. | Aug 1995 | A |
5448511 | Paurus et al. | Sep 1995 | A |
5455740 | Burns | Oct 1995 | A |
5475920 | Burns et al. | Dec 1995 | A |
5477082 | Buckley, III et al. | Dec 1995 | A |
5479318 | Burns | Dec 1995 | A |
5484959 | Burns | Jan 1996 | A |
5493476 | Burns | Feb 1996 | A |
5499160 | Burns | Mar 1996 | A |
5502333 | Bertin et al. | Mar 1996 | A |
5514907 | Moshayedi | May 1996 | A |
5523619 | McAllister et al. | Jun 1996 | A |
5523695 | Lin | Jun 1996 | A |
5541812 | Burns | Jul 1996 | A |
5543664 | Burns | Aug 1996 | A |
5572065 | Burns | Nov 1996 | A |
5588205 | Roane | Dec 1996 | A |
5592364 | Roane | Jan 1997 | A |
5594275 | Kwon et al. | Jan 1997 | A |
5612570 | Eide et al. | Mar 1997 | A |
5631193 | Burns | May 1997 | A |
5642055 | Difrancesco | Jun 1997 | A |
5644161 | Burns | Jul 1997 | A |
5646446 | Nicewarner, Jr. et al. | Jul 1997 | A |
5654877 | Burns | Aug 1997 | A |
5657537 | Saia et al. | Aug 1997 | A |
5677569 | Choi et al. | Oct 1997 | A |
5729894 | Rostoker et al. | Mar 1998 | A |
5744827 | Jeong et al. | Apr 1998 | A |
5751553 | Clayton | May 1998 | A |
5763296 | Casati et al. | Jun 1998 | A |
5764497 | Mizumo et al. | Jun 1998 | A |
5776797 | Nicewarner, Jr. et al. | Jul 1998 | A |
5778522 | Burns | Jul 1998 | A |
5783464 | Burns | Jul 1998 | A |
5789815 | Tessier et al. | Aug 1998 | A |
5801437 | Burns | Sep 1998 | A |
5801439 | Fujisawa et al. | Sep 1998 | A |
5804870 | Burns | Sep 1998 | A |
5805422 | Otake et al. | Sep 1998 | A |
5835988 | Ishii | Nov 1998 | A |
5841721 | Kwon et al. | Nov 1998 | A |
5869353 | Levy et al. | Feb 1999 | A |
5895970 | Miyoshi et al. | Apr 1999 | A |
5899705 | Akram | May 1999 | A |
5917709 | Johnson et al. | Jun 1999 | A |
5922061 | Robinson | Jul 1999 | A |
5925934 | Lim | Jul 1999 | A |
5926369 | Ingraham et al. | Jul 1999 | A |
5949657 | Karabatsos | Sep 1999 | A |
5953215 | Karabatsos | Sep 1999 | A |
5959839 | Gates | Sep 1999 | A |
5963427 | Bolleson | Oct 1999 | A |
5973395 | Suzuki et al. | Oct 1999 | A |
5995370 | Nakamori | Nov 1999 | A |
6002167 | Hatano et al. | Dec 1999 | A |
6002589 | Perino et al. | Dec 1999 | A |
6014316 | Eide | Jan 2000 | A |
6028352 | Eide | Feb 2000 | A |
6028365 | Akram et al. | Feb 2000 | A |
6034878 | Osaka et al. | Mar 2000 | A |
6040624 | Chambers et al. | Mar 2000 | A |
6072233 | Corisis et al. | Jun 2000 | A |
6084293 | Ohuchi | Jul 2000 | A |
6084294 | Tomita | Jul 2000 | A |
6097087 | Farnworth et al. | Aug 2000 | A |
6121676 | Solberg | Sep 2000 | A |
RE36916 | Moshayedi | Oct 2000 | E |
6157541 | Hacke | Dec 2000 | A |
6165817 | Akram | Dec 2000 | A |
6172874 | Bartilson | Jan 2001 | B1 |
6178093 | Bhatt et al. | Jan 2001 | B1 |
6187652 | Chou et al. | Feb 2001 | B1 |
6205654 | Burns | Mar 2001 | B1 |
6208521 | Nakatsuka | Mar 2001 | B1 |
6222737 | Ross | Apr 2001 | B1 |
6225688 | Kim et al. | May 2001 | B1 |
6233650 | Johnson et al. | May 2001 | B1 |
6234820 | Perino et al. | May 2001 | B1 |
6262895 | Forthun | Jul 2001 | B1 |
6265660 | Tandy | Jul 2001 | B1 |
6266252 | Karabatsos | Jul 2001 | B1 |
6281577 | Oppermann et al. | Aug 2001 | B1 |
6285560 | Lyne | Sep 2001 | B1 |
6288907 | Burns | Sep 2001 | B1 |
6300679 | Mukerji et al. | Oct 2001 | B1 |
6303981 | Moden | Oct 2001 | B1 |
6310392 | Burns | Oct 2001 | B1 |
6313998 | Kledzik | Nov 2001 | B1 |
6316825 | Park et al. | Nov 2001 | B1 |
6323060 | Isaak | Nov 2001 | B1 |
6329708 | Komiyama | Dec 2001 | B1 |
6336262 | Dalal et al. | Jan 2002 | B1 |
6351029 | Isaak | Feb 2002 | B1 |
6360433 | Ross | Mar 2002 | B1 |
6368896 | Farnworth et al. | Apr 2002 | B1 |
6376769 | Chung | Apr 2002 | B1 |
6392162 | Karabatsos | May 2002 | B1 |
6410857 | Gonya | Jun 2002 | B1 |
6426240 | Isaak | Jul 2002 | B1 |
6426549 | Isaak | Jul 2002 | B1 |
6426560 | Kawamura et al. | Jul 2002 | B1 |
6433418 | Fujisawa et al. | Aug 2002 | B1 |
6444490 | Bertin et al. | Sep 2002 | B1 |
6444921 | Wang et al. | Sep 2002 | B1 |
6446158 | Karabatsos | Sep 2002 | B1 |
6449159 | Haba | Sep 2002 | B1 |
6452826 | Kim et al. | Sep 2002 | B1 |
6462412 | Kamei et al. | Oct 2002 | B1 |
6465877 | Farnworth et al. | Oct 2002 | B1 |
6465893 | Khandros et al. | Oct 2002 | B1 |
6473308 | Forthun | Oct 2002 | B1 |
6486544 | Hashimoto | Nov 2002 | B1 |
6489178 | Coyle et al. | Dec 2002 | B1 |
6489687 | Hashimoto | Dec 2002 | B1 |
6492718 | Ohmori | Dec 2002 | B1 |
6509639 | Lin | Jan 2003 | B1 |
6514793 | Isaak | Feb 2003 | B1 |
6528870 | Fukatsu et al. | Mar 2003 | B1 |
6552910 | Moon et al. | Apr 2003 | B1 |
6560117 | Moon | May 2003 | B1 |
6572387 | Burns et al. | Jun 2003 | B1 |
6576992 | Cady et al. | Jun 2003 | B1 |
6588095 | Pan | Jul 2003 | B1 |
6590282 | Wang et al. | Jul 2003 | B1 |
6600222 | Levardo | Jul 2003 | B1 |
6614664 | Lee | Sep 2003 | B1 |
6620651 | He et al. | Sep 2003 | B1 |
6627984 | Bruce et al. | Sep 2003 | B1 |
6657134 | Spielberger et al. | Dec 2003 | B1 |
6660561 | Forthun | Dec 2003 | B1 |
6677670 | Kondo | Jan 2004 | B1 |
6683377 | Shim et al. | Jan 2004 | B1 |
6690584 | Uzuka et al. | Feb 2004 | B1 |
6699730 | Kim et al. | Mar 2004 | B1 |
6707684 | Andric et al. | Mar 2004 | B1 |
6709893 | Moden et al. | Mar 2004 | B1 |
6765288 | Damberg | Jul 2004 | B1 |
6768660 | Kong et al. | Jul 2004 | B1 |
6781240 | Choi et al. | Aug 2004 | B1 |
6803651 | Chiang | Oct 2004 | B1 |
6812567 | Kim et al. | Nov 2004 | B1 |
6833984 | Belgacem | Dec 2004 | B1 |
6849949 | Lyu et al. | Feb 2005 | B1 |
6876074 | Kim | Apr 2005 | B1 |
6884653 | Larson | Apr 2005 | B1 |
6891729 | Ko et al. | May 2005 | B1 |
6908792 | Bruce et al. | Jun 2005 | B1 |
6914324 | Rapport et al. | Jul 2005 | B1 |
6919626 | Burns | Jul 2005 | B1 |
20010006252 | Kim et al. | Jul 2001 | A1 |
20010013423 | Dalal et al. | Aug 2001 | A1 |
20010015487 | Forthun | Aug 2001 | A1 |
20010035572 | Isaak | Nov 2001 | A1 |
20010040793 | Inaba | Nov 2001 | A1 |
20020006032 | Karabatsos | Jan 2002 | A1 |
20020030995 | Shoji | Mar 2002 | A1 |
20020048849 | Isaak | Apr 2002 | A1 |
20020076919 | Peters et al. | Jun 2002 | A1 |
20020101261 | Karabatsos | Aug 2002 | A1 |
20020139577 | Miller | Oct 2002 | A1 |
20020164838 | Moon et al. | Nov 2002 | A1 |
20020180022 | Emoto | Dec 2002 | A1 |
20030016710 | Kamoto | Jan 2003 | A1 |
20030045025 | Coyle et al. | Mar 2003 | A1 |
20030049886 | Salmon | Mar 2003 | A1 |
20030081392 | Cady et al. | May 2003 | A1 |
20030107118 | Pflughaupt et al. | Jun 2003 | A1 |
20030109078 | Takahashi et al. | Jun 2003 | A1 |
20030168725 | Warner et al. | Sep 2003 | A1 |
20040000708 | Rapport et al. | Jan 2004 | A1 |
20040021211 | Damberg | Feb 2004 | A1 |
20040031972 | Pflughaupt et al. | Feb 2004 | A1 |
20040045159 | DiStefano et al. | Mar 2004 | A1 |
20040065963 | Karnezos | Apr 2004 | A1 |
20040075991 | Haba et al. | Apr 2004 | A1 |
20040099938 | Kang et al. | May 2004 | A1 |
20040104470 | Bang et al. | Jun 2004 | A1 |
20040115866 | Bang et al. | Jun 2004 | A1 |
20040150107 | Cha et al. | Aug 2004 | A1 |
20040157352 | Beroz et al. | Aug 2004 | A1 |
20040203190 | Pflughaupt et al. | Oct 2004 | A1 |
20040217461 | Damberg | Nov 2004 | A1 |
20040217471 | Haba | Nov 2004 | A1 |
20040238931 | Haba et al. | Dec 2004 | A1 |
20040245617 | Damberg et al. | Dec 2004 | A1 |
20050018495 | Bhakta et al. | Jan 2005 | A1 |
20050035440 | Mohammed | Feb 2005 | A1 |
20050040508 | Lee | Feb 2005 | A1 |
20050133897 | Baek et al. | Jun 2005 | A1 |
Number | Date | Country |
---|---|---|
004215467 | Nov 1992 | DE |
004214102 | Dec 1992 | DE |
122-687 | Oct 1984 | EP |
0 298 211 | Jan 1989 | EP |
0426-303 (A2) | Oct 1990 | EP |
461-639 | Dec 1991 | EP |
57-31166(A) | Feb 1982 | JP |
58-96756(A) | Jun 1983 | JP |
58-112348(A) | Jul 1983 | JP |
59088863 (A) | May 1984 | JP |
60-254762 | Dec 1985 | JP |
60-254762 (A) | Dec 1985 | JP |
1047659 (A) | Mar 1986 | JP |
62-230027(A) | Aug 1987 | JP |
62-230027(A) | Oct 1987 | JP |
63-153849(A) | Jun 1988 | JP |
4-209562 (A) | Jul 1992 | JP |
04368167 (A) | Dec 1992 | JP |
5-21697(A) | Jan 1993 | JP |
5029534 (A) | Feb 1993 | JP |
63-153849 (A) | Jun 1998 | JP |
2000307029 (A) | Nov 2000 | JP |
2001077294(A) | Mar 2001 | JP |
2001085592(A) | Mar 2001 | JP |
2001332683(A) | Nov 2001 | JP |
2003037246(A) | Feb 2003 | JP |
2003086760(A) | Mar 2003 | JP |
2003086761(A) | Mar 2003 | JP |
2003309247 (A) | Oct 2003 | JP |
2003309246(A) | Oct 2003 | JP |
2003347475 (A) | Dec 2003 | JP |
2003347503 (A) | Dec 2003 | JP |
834-957 | May 1981 | SU |
WO 03037053 | May 2003 | WO |
Number | Date | Country | |
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20040052060 A1 | Mar 2004 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 10457608 | Jun 2003 | US |
Child | 10631886 | US | |
Parent | 10453398 | Jun 2003 | US |
Child | 10457608 | US | |
Parent | 10005581 | Oct 2001 | US |
Child | 10453398 | US |