Semiconductor device and method of manufacturing the same

Abstract

In a semiconductor device 10, an electrode terminal 18 of a semiconductor element 14 embedded in an insulating layer 12 formed by a resin forming a substrate and a land portion 20 forming an external connecting terminal are electrically connected to each other through a wiring pattern 22 formed on the insulating layer 12. The wiring pattern 22 including the land portion 20 is formed by a plating metal 26. A metallic wire 24 having one of ends connected to the electrode terminal 18 is provided in the plating metal 26 along the wiring pattern 22.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a rear view showing a back state of a semiconductor device according to an exemplary embodiment of the present invention,

FIG. 1B is a front view showing a surface state of an insulating layer from which a solder resist of the surface is removed,

FIG. 2 is an enlarged cross-sectional view showing the semiconductor device illustrated in FIG. 1A from which solder balls ere removed,

FIGS. 3A to 3C are views for explaining a part of a process for manufacturing the semiconductor device illustrated in FIG. 2,

FIGS. 4A to 4D are views for explaining a part of the process for manufacturing the semiconductor device illustrated in FIG. 2,

FIGS. 5A, 5B are views for explaining a part of the process for manufacturing the semiconductor device illustrated in FIG. 2,

FIGS. 6A, 6B are views for explaining a part of a process for manufacturing a semiconductor device according to another exemplary embodiment of a method of manufacturing a semiconductor device according to the present invention,

FIG. 7 is an enlarged cross-sectional view showing a semiconductor device obtained in the manufacturing process illustrated in FIG. 6,

FIG. 8 is an enlarged cross-sectional view showing a semiconductor device according to a further exemplary embodiment of the present invention,

FIGS. 9A to 9C are views for explaining a part of a process for manufacturing the semiconductor device illustrated in FIG. 8, and

FIGS. 10A to 10E are views for explaining a part of the process for manufacturing the semiconductor device illustrated in FIG. 8.

Claims

1. A semiconductor device comprising: an insulating layer formed by a resin forming a substrate;a semiconductor element embedded in the insulating layer;a wiring pattern formed on the insulating layer and electrically connecting an electrode terminal of the semiconductor element and a land portion forming an external connecting terminal,wherein the wiring pattern including the land portion is formed of a plating metal,wherein at least one of a metallic wire having one of ends connected to the electrode terminal or the land portion and a plurality of metallic bumps erected on the insulating layer or the electrode terminal is provided in the plating metal along the wiring pattern.

2. The semiconductor device according to claim 1, wherein the wiring pattern is formed of a plating metal having a lower specific resistance than metals forming the wire and the bump.

3. The semiconductor device according to claim 1, wherein the wire is connected to the electrode terminal of the semiconductor element and the land portion forming the external connecting terminal.

4. The semiconductor device according to claim 1, wherein the bump is formed by using a metallic wire.

5. The semiconductor device according to claim 1, wherein the land portion forming the external connecting terminal is also formed on an opposite surface side to an electrode terminal formation surface on which the electrode terminal of the semiconductor element is formed.

6. The semiconductor device according to claim 1, wherein an area of the electrode terminal formation surface on which the electrode terminal of the semiconductor element is formed is smaller than an area of an external connecting terminal formation surface of the substrate on which the external connecting terminal is formed.

7. A method of manufacturing a semiconductor device comprising steps of: mounting a semiconductor element on one surface side of a support plate, embedding the semiconductor element in an insulating layer formed by a resin forming a substrate, and then carrying out patterning over the insulating layer to expose an electrode terminal of the semiconductor element;forming a metallic thin film on a whole surface of the insulating layer including an exposed surface of the electrode terminal, and then disposing at least one of a metallic wire having one of ends connected to the electrode terminal or a portion in which a land portion forming an external connecting terminal is to be formed and a plurality of metallic bumps erected on the insulating layer or the electrode terminal along a shape of a wiring pattern to be formed; andforming the wiring pattern formed of a plating metal in which at least one of the wire and the bump is disposed through electrolytic plating using the metallic thin film as a power feeding layer so that the electrode terminal and the land portion are electrically connected to each other through the wiring pattern.

8. The method of manufacturing a semiconductor device according to claim 7, wherein the wiring pattern is formed of a plating metal having a lower specific resistance than the metals forming the wire and the bump.

9. The method of manufacturing a semiconductor device according to claim 7, wherein the wire has one of ends connected to the electrode terminal of the semiconductor element, and the other end of the wire is extended to a portion in which the land portion for the external connecting terminal is to be formed.

10. The method of manufacturing a semiconductor device according to claim 7, wherein the bump is formed by using the metallic wire.

11. The method of manufacturing a semiconductor device according to claim 7, wherein the land portion forming the external connecting terminal is also formed on an opposite surface side to an electrode terminal formation surface on which the electrode terminal of the semiconductor element is formed.

12. The method of manufacturing a semiconductor device according to claim 7, wherein a semiconductor element having a smaller area of the electrode terminal formation surface on which the electrode terminal is formed than an area of an external connecting terminal formation surface of the substrate forming the external connecting terminal is used as the semiconductor element.