The present invention relates to aggregating integrated circuits and, in particular, to stacking integrated circuits in chip-scale packages.
A variety of techniques are used to stack packaged integrated circuits. Some methods require special packages, while other techniques stack conventional packages. In some stacks, the leads of the packaged integrated circuits are used to create a stack, while in other systems, added structures such as rails provide all or part of the interconnection between packages. In still other techniques, flexible conductors with certain characteristics are used to selectively interconnect packaged integrated circuits.
The predominant package configuration employed during the past decade has encapsulated an integrated circuit (IC) in a plastic surround typically having a rectangular configuration. The enveloped integrated circuit is connected to the application environment through leads emergent from the edge periphery of the plastic encapsulation. Such “leaded packages” have been the constituent elements most commonly employed by techniques for stacking packaged integrated circuits.
Leaded packages play an important role in electronics, but efforts to miniaturize electronic components and assemblies have driven development of technologies that preserve circuit board surface area. Because leaded packages have leads emergent from peripheral sides of the package, leaded packages occupy more than a minimal amount of circuit board surface area. Consequently, alternatives to leaded packages have recently gained market share.
One family of alternative packages is identified generally by the term “chip scale packaging” or CSP. CSP refers generally to packages that provide connection to an integrated circuit through a set of contacts (often embodied as “bumps” or “balls”) arrayed across a major surface of the package. Instead of leads emergent from a peripheral side of the package, contacts are placed on a major surface and typically emerge from the planar bottom surface of the package.
The goal of CSP is to occupy as little area as possible and, preferably, approximately the area of the encapsulated IC. Therefore, CSP leads or contacts do not typically extend beyond the outline perimeter of the package. The absence of “leads” on package sides renders most stacking techniques devised for leaded packages inapplicable for CSP stacking.
CSP has enabled reductions in size and weight parameters for many applications. For example, micro ball grid array (μBGA) for flash and SRAM and wirebond on tape or rigid laminate CSPs for SRAM or EEPROM have been employed in a variety of applications. CSP is a broad category including a variety of packages from near chip scale to die-sized packages such as the die sized ball grid array (DSBGA) recently described in proposed JEDEC standard 95-1 for DSBGA.
There are several known techniques for stacking packages articulated in chip scale technology. The assignee of the present invention has developed previous systems for aggregating μBGA packages in space saving topologies. The assignee of the present invention has systems for stacking BGA packages on a DIMM in a RAMBUS environment.
In U.S. Pat. No. 6,205,654 B1 owned by the assignee of the present invention, a system for stacking ball grid array packages that employs lead carriers to extend connectable points out from the packages is described. Other known techniques add structures to a stack of BGA-packaged ICs. Still others aggregate CSPs on a DIMM with angular placement of the packages. Such techniques provide alternatives, but require topologies of added cost and complexity.
The previous known methods for stacking CSPs apparently have various deficiencies including complex structural arrangements and thermal or high frequency performance issues.
Thermal performance is a characteristic of importance in CSP stacks. To increase dissipation of heat generated by constituent CSPs, the thermal gradient between the lower CSP and upper CSP in a CSP stack or module should be minimized. Prior art solutions to CSP stacking do not, however, address thermal gradient minimization in disclosed constructions.
What is needed, therefore, is a technique and system for stacking integrated circuits packaged in chip scale technology packaging that provides a thermally efficient, reliable structure that performs well at higher frequencies but does not add excessive height to the stack yet allows production at reasonable cost with readily understood and managed materials and methods.
The present invention stacks chip scale-packaged integrated circuits (CSPs) into modules that conserve PWB or other board surface area. In a two-high CSP stack or module devised in accordance with a preferred embodiment of the present invention, two CSPs are stacked, with one CSP disposed above the other. The two CSPs are connected with flex circuitry. A form standard is disposed between the flex circuitry and a CSP in the stack. The form standard can take many configurations and may be used where flex circuits are used to connect CSPs to one another in stacked modules having two or more constituent ICs. For example, in stacked modules that include four CSPs, three form standards are employed in preferred embodiments, although fewer may be used. The form standard provides a physical form that allows many of the varying package sizes found in the broad family of CSP packages to be used to advantage while employing a standard connective flex circuitry design. In a preferred embodiment, the form standard will be devised of heat transference (thermally conductive) material.
The invention is used with CSP packages of a variety of types and configurations such as, for example, those that are die-sized, as well those that are near chip-scale as well as the variety of ball grid array packages known in the art. Collectively, these will be known herein as chip scale packaged integrated circuits (CSPs) and preferred embodiments will be described in terms of CSPs, but the particular configurations used in the explanatory figures are not, however, to be construed as limiting. For example, the elevation views of
Typical CSPs, such as, for example, ball-grid-array (“BGA”), micro-ball-grid array (“μBGA”), and fine-pitch ball grid array (“FBGA”) packages have an array of connective contacts embodied, for example, as leads, bumps, solder balls, or balls that extend from lower surface 18 of a plastic casing in any of several patterns and pitches. An external portion of the connective contacts is often finished with a ball of solder. Shown in
In
Portions of flex circuits 30 and 32 are fixed to upper surface 16 of lower CSP 14 by adhesive 34 which is shown as a tape adhesive, but may be a liquid adhesive or may be placed in discrete locations across the package. Preferably, adhesive 34 is thermally conductive. Adhesives that include a flux are used to advantage in assembly of module 10. Layer 34 may also be a thermally conductive medium to encourage heat flow between the CSPs of module 10.
Flex circuits 30 and 32 are multi-layer flexible circuit structures that have at least two conductive layers. Preferably, the conductive layers are metal such as alloy 110. The use of plural conductive layers provides advantages as will be seen and the creation of a distributed capacitance across module 10 intended to reduce noise or bounce effects that can, particularly at higher frequencies, degrade signal integrity, as those of skill in the art will recognize. Module 10 of
With continuing reference to
Flex 30 is shown in
As depicted in
Respective ones of CSP contacts 24 of upper CSP 12 and lower CSP 14 are connected at the second conductive layer 58 level in flex circuits 30 and 32 to interconnect appropriate signal and voltage contacts of the two CSPs. Respective CSP contacts 24 of upper CSP 12 and lower CSP 14 that convey ground (VSS) signals are connected at the first conductive layer 54 level in flex circuits 30 and 32 by vias that pass through intermediate layer 56 to connect the levels as will subsequently be described in further detail. Thereby, CSPs 12 and 14 are connected. Consequently, when flex circuits 30 and 32 are in place about lower CSP 14, respective CSP contacts 24 of each of upper and lower CSPs 12 and 14 are in contact with upper and lower flex contacts 42 and 44, respectively. Selected ones of upper flex contacts 42 and lower flex contacts 44 are connected. Consequently, by being in contact with lower flex contacts 44, module contacts 36 are in contact with both upper and lower CSPs 12 and 14.
In a preferred embodiment, module contacts 36 pass through windows 62 opened in second outer layer 52 to contact lower CSP contacts 44. In some embodiments, as will be later shown, module 10 will exhibit a module contact array 38 that has a greater number of contacts than do the constituent CSPs of module 10. In such embodiments, some of module contacts 36 may contact lower flex contacts 44 that do not contact one of the CSP contacts 24 of lower CSP 14 but are connected to CSP contacts 24 of upper CSP 12. This allows module 10 to express a wider datapath than that expressed by the constituent CSPs 12 or 14. A module contact 36 may also be in contact with a lower flex contact 44 to provide a location through which different levels of CSPs in the module may be enabled when no unused CSP contacts are available or convenient for that purpose.
In a preferred embodiment, first conductive layer 54 is employed as a ground plane, while second conductive layer 58 provides the functions of being a signal conduction layer and a voltage conduction layer. Those of skill will note that roles of the first and second conductive layers may be reversed with attendant changes in windowing and use of commensurate interconnections.
As those of skill will recognize, interconnection of respective voltage CSP contacts 24 of upper and lower CSPs 12 and 14 will provide a thermal path between upper and lower CSPs to assist in moderation of thermal gradients through module 10. Such flattening of the thermal gradient curve across module 10 is further encouraged by connection of common ground CSP contacts 24 of upper and lower CSPs 12 and 14 through first conductive layer 54. Those of skill will notice that between first and second conductive layers 54 and 58 there is at least one intermediate layer 56 that, in a preferred embodiment, is a polyimide. Placement of such an intermediate layer between ground-conductive first conductive layer 54 and signal/voltage conductive second conductive layer 58 provides, in the combination, a distributed capacitance that assists in mitigation of ground bounce phenomena to improve high frequency performance of module 10.
In a preferred embodiment,
In a preferred embodiment,
Those of skill will recognize that as flex 30 is partially wrapped about lateral side 20 of lower CSP 14, first conductive layer 54 becomes, on the part of flex 30 disposed above upper surface 16 of lower CSP 14, the lower-most conductive layer of flex 30 from the perspective of upper CSP 12. In the depicted embodiment, those CSP contacts 24 of upper CSP 12 that provide ground (VSS) connections are connected to the first conductive layer 54. First conductive layer 54 lies beneath, however, second conductive layer 58 in that part of flex 30 that is wrapped above lower CSP 14. Consequently, some means must be provided for connection of the upper flex contact 42 to which ground-conveying CSP contacts 24 of upper CSP 12 are connected and first conductive layer 54. Consequently, in the depicted preferred embodiment, those upper flex contacts 42 that are in contact with ground-conveying CSP contacts 24 of upper CSP 12 have vias that route through intermediate layer 56 to reach first conductive layer 54. The sites where those vias meet first conductive layer 54 are identified in
Also shown in
In a wide datapath module 10, the data paths of the constituent upper CSP 12 and lower CSP 14 are combined to provide a module 10 that expresses a module datapath that is twice the width of the datapaths of the constituent CSPs in a two-high module 10. The preferred method of combination is concatenation, but other combinations may be employed to combine the datapaths of CSPs 12 and 14 on the array of module contacts 36 and 36E.
As an example,
In particular, in the embodiment depicted in
Form standard 35 is, in a preferred embodiment, devised from thermally conductive material such as, for example, copper to create, as shown in the depicted preferred embodiment of
Preferably, portions of flex circuits 30 and 32 are fixed to form standard 35 by adhesive 34 which is preferably a tape adhesive, but may be a liquid adhesive or may be placed in discrete locations across the package. Preferably, adhesive 34 is thermally conductive.
In a preferred embodiment, flex circuits 30 and 32 are multi-layer flexible circuit structures that have at least two conductive layers examples of which have been described earlier herein. Other embodiments may, however, employ flex circuitry, either as one circuit or two flex circuits to connect a pair of CSPs, that have only a single conductive layer.
Preferably, the conductive layers are metal such as alloy 110. The use of plural conductive layers provides advantages and the creation of a distributed capacitance across module 10 intended to reduce noise or bounce effects that can, particularly at higher frequencies, degrade signal integrity, as those of skill in the art will recognize. Module 10 of
Form standard 35 is shown attached to the body 27 of first level CSP 14 through an adhesive. In some embodiments, it may also be positioned to directly contact body 27 of the respective CSP. Form standard 35 may take many different configurations to allow a connective flex circuitry to be prepared exhibiting a single set of dimensions which may, when used in conjunction with form standard 35, be employed to create stacked modules 10 from CSPs of a variety of different dimensions. In a preferred embodiment, form standard 35 will present a lateral extent broader than the upper major surface of the CSP over which it is disposed. Thus, the CSPs from one manufacturer may be aggregated into a stacked module 10 with the same flex circuitry used to aggregate CSPs from another manufacturer into a different stacked module 10 despite the CSPs from the two different manufacturers having different dimensions.
Further, heat transference can be improved with use of a form standard 35 comprised of heat transference material such as a metal, for example, or preferably, copper or a copper compound or alloy to provide a significant sink for thermal energy. Such thermal enhancement of module 10 particularly presents opportunities for improvement of thermal performance where larger numbers of CSPs are aggregated in a single stacked module 10.
Although the present invention has been described in detail, it will be apparent to those skilled in the art that the invention may be embodied in a variety of specific forms and that various changes, substitutions and alterations can be made without departing from the spirit and scope of the invention. The described embodiments are only illustrative and not restrictive and the scope of the invention is, therefore, indicated by the following claims.
This application is a continuation-in-part of U.S. patent application Ser. No. 10/400,309, filed Mar. 27, 2003 now abandoned, which is a continuation of U.S. application Ser. No. 10/005,581, filed Oct. 26, 2001, now U.S. Pat. No. 6,576,992. This application is a continuation of U.S. patent application Ser. No. 10/814,530, filed Mar. 31, 2004 now abandoned, which is a continuation of U.S. patent application Ser. No. 10/453,398, filed Jun. 3, 2003, now U.S. Pat. No. 6,914,324 which is a continuation-in-part of U.S. patent application Ser. No. 10/005,581, filed Oct. 26, 2001, now U.S. Pat. No. 6,576,992.
Number | Name | Date | Kind |
---|---|---|---|
3411122 | Schiller et al. | Nov 1968 | A |
3436604 | Hyitin | Apr 1969 | A |
3654394 | Gordon | Apr 1972 | A |
3746934 | Stein | Jul 1973 | A |
3765439 | Isaacson | Oct 1973 | A |
3772776 | Weisenburger | Nov 1973 | A |
3806767 | Lehrfeld | Apr 1974 | A |
3983547 | Almasi | Sep 1976 | A |
4079511 | Grabbe | Mar 1978 | A |
4288841 | Gogal | Sep 1981 | A |
4381421 | Coats et al. | Apr 1983 | A |
4406508 | Sadigh-Behzadi | Sep 1983 | A |
4420794 | Anderson | Dec 1983 | A |
4437235 | McIver | Mar 1984 | A |
4513368 | Houseman | Apr 1985 | A |
4587596 | Bunnell | May 1986 | A |
4645944 | Uya | Feb 1987 | A |
4695525 | Coller et al. | Sep 1987 | A |
4712129 | Orcutt | Dec 1987 | A |
4722691 | Gladd et al. | Feb 1988 | A |
4733461 | Nakano | Mar 1988 | A |
4758875 | Fujisawa et al. | Jul 1988 | A |
4763188 | Johnson | Aug 1988 | A |
4821007 | Fields et al. | Apr 1989 | A |
4823234 | Konishi et al. | Apr 1989 | A |
4833568 | Berhold | May 1989 | A |
4839717 | Phy et al. | Jun 1989 | A |
4862249 | Carlson | Aug 1989 | A |
4884237 | Mueller et al. | Nov 1989 | A |
4891789 | Quattrini et al. | Jan 1990 | A |
4903169 | Kitagawa et al. | Feb 1990 | A |
4911643 | Perry et al. | Mar 1990 | A |
4953060 | Lauffer et al. | Aug 1990 | A |
4956694 | Eide | Sep 1990 | A |
4983533 | Go | Jan 1991 | A |
4985703 | Kaneyama | Jan 1991 | A |
5012323 | Farnworth | Apr 1991 | A |
5016138 | Woodman | May 1991 | A |
5034350 | Marchisi | Jul 1991 | A |
5041015 | Travis | Aug 1991 | A |
5041902 | McShane | Aug 1991 | A |
5050039 | Edfors | Sep 1991 | A |
5057903 | Olla | Oct 1991 | A |
5064782 | Nishiguchi | Nov 1991 | A |
5068708 | Newman | Nov 1991 | A |
5081067 | Shimizu et al. | Jan 1992 | A |
5099393 | Bentlage et al. | Mar 1992 | A |
5104820 | Go et al. | Apr 1992 | A |
5117282 | Salatino | May 1992 | A |
5122862 | Kajihara et al. | Jun 1992 | A |
5138430 | Gow, 3rd et al. | Aug 1992 | A |
5138434 | Wood et al. | Aug 1992 | A |
5158912 | Kellerman et al. | Oct 1992 | A |
5159434 | Kohno et al. | Oct 1992 | A |
5159535 | Desai et al. | Oct 1992 | A |
5168926 | Watson et al. | Dec 1992 | A |
5198888 | Sugano et al. | Mar 1993 | A |
5198965 | Curtis et al. | Mar 1993 | A |
5214307 | Davis | May 1993 | A |
5219794 | Satoh et al. | Jun 1993 | A |
5222014 | Lin | Jun 1993 | A |
5224023 | Smith et al. | Jun 1993 | A |
5229641 | Katayama | Jul 1993 | A |
5229916 | Frankeny et al. | Jul 1993 | A |
5239198 | Lin et al. | Aug 1993 | A |
5240588 | Uchida | Aug 1993 | A |
5241454 | Ameen et al. | Aug 1993 | A |
5243133 | Engle et al. | Sep 1993 | A |
5247423 | Lin et al. | Sep 1993 | A |
5252855 | Ogawa et al. | Oct 1993 | A |
5252857 | Kane et al. | Oct 1993 | A |
5259770 | Bates et al. | Nov 1993 | A |
5261068 | Gaskins et al. | Nov 1993 | A |
5262927 | Chia et al. | Nov 1993 | A |
5276418 | Klosowiak et al. | Jan 1994 | A |
5281852 | Normington | Jan 1994 | A |
5289062 | Wyland | Feb 1994 | A |
5289346 | Carey et al. | Feb 1994 | A |
5313097 | Haj-Ali-Ahmadi et al. | May 1994 | A |
5337388 | Jacobowitz et al. | Aug 1994 | A |
5343366 | Cipolla et al. | Aug 1994 | A |
5345205 | Kornrumpf | Sep 1994 | A |
5347159 | Khandros et al. | Sep 1994 | A |
5347428 | Carson et al. | Sep 1994 | A |
5357478 | Kikuda et al. | Oct 1994 | A |
5361228 | Adachi et al. | Nov 1994 | A |
5362656 | McMahon | Nov 1994 | A |
5375041 | McMahon | Dec 1994 | A |
5384690 | Davis et al. | Jan 1995 | A |
5386341 | Olson et al. | Jan 1995 | A |
5394303 | Yamaji | Feb 1995 | A |
5396573 | Ecker et al. | Mar 1995 | A |
5397916 | Normington | Mar 1995 | A |
5428190 | Stopperan | Jun 1995 | A |
5432630 | Lebby et al. | Jul 1995 | A |
5438224 | Papageorge et al. | Aug 1995 | A |
5448511 | Paurus et al. | Sep 1995 | A |
5477082 | Buckley, III et al. | Dec 1995 | A |
5484959 | Burns | Jan 1996 | A |
5502333 | Bertin et al. | Mar 1996 | A |
5509197 | Stone | Apr 1996 | A |
5516989 | Uedo et al. | May 1996 | A |
5523619 | McAllister et al. | Jun 1996 | A |
5523695 | Lin | Jun 1996 | A |
5572065 | Burns | Nov 1996 | A |
5588205 | Roane | Dec 1996 | A |
5594275 | Kwon et al. | Jan 1997 | A |
5610833 | Chang et al. | Mar 1997 | A |
5612570 | Eide et al. | Mar 1997 | A |
5620782 | Davis et al. | Apr 1997 | A |
5631193 | Burns | May 1997 | A |
5642055 | Difrancesco | Jun 1997 | A |
5644839 | Stone | Jul 1997 | A |
5646446 | Nicewarner, Jr. et al. | Jul 1997 | A |
5654877 | Burns | Aug 1997 | A |
5657537 | Saia et al. | Aug 1997 | A |
5677569 | Choi et al. | Oct 1997 | A |
5717556 | Yanagida | Feb 1998 | A |
5729894 | Rostoker et al. | Mar 1998 | A |
5744827 | Jeong et al. | Apr 1998 | A |
5751553 | Clayton | May 1998 | A |
5763296 | Casati et al. | Jun 1998 | A |
5764497 | Mizumo et al. | Jun 1998 | A |
5776797 | Nicewarner et al. | Jul 1998 | A |
5778522 | Burns | Jul 1998 | A |
5778552 | LeGuin | Jul 1998 | A |
5783464 | Burns | Jul 1998 | A |
5789815 | Tessier et al. | Aug 1998 | A |
5801439 | Fujisawa et al. | Sep 1998 | A |
5804870 | Burns | Sep 1998 | A |
5805422 | Otake et al. | Sep 1998 | A |
5835988 | Ishii | Nov 1998 | A |
5841721 | Kwon et al. | Nov 1998 | A |
5852326 | Khandros et al. | Dec 1998 | A |
5869353 | Levy et al. | Feb 1999 | A |
5895969 | Masuda et al. | Apr 1999 | A |
5895970 | Miyoshi et al. | Apr 1999 | A |
5899705 | Akram | May 1999 | A |
5917709 | Johnson et al. | Jun 1999 | A |
5922061 | Robinson | Jul 1999 | A |
5925934 | Lim | Jul 1999 | A |
5926369 | Ingraham et al. | Jul 1999 | A |
5933712 | Bernhardt et al. | Aug 1999 | A |
5949657 | Karabatsos | Sep 1999 | A |
5953215 | Karabatsos | Sep 1999 | A |
5959839 | Gates | Sep 1999 | A |
5963427 | Bollesen | Oct 1999 | A |
5973395 | Suzuki et al. | Oct 1999 | A |
5995370 | Nakamori | Nov 1999 | A |
6002167 | Hatano et al. | Dec 1999 | A |
6002589 | Perino et al. | Dec 1999 | A |
6013948 | Akram et al. | Jan 2000 | A |
6014316 | Eide | Jan 2000 | A |
6028352 | Eide | Feb 2000 | A |
6028365 | Akram et al. | Feb 2000 | A |
6034878 | Osaka et al. | Mar 2000 | A |
6040624 | Chambers et al. | Mar 2000 | A |
6072233 | Corisis et al. | Jun 2000 | A |
6084293 | Ohuchi | Jul 2000 | A |
6084294 | Tomita | Jul 2000 | A |
6084778 | Malhi | Jul 2000 | A |
6097087 | Farnworth et al. | Aug 2000 | A |
6102710 | Beilin et al. | Aug 2000 | A |
6111761 | Peana et al. | Aug 2000 | A |
6114763 | Smith | Sep 2000 | A |
6121676 | Solberg | Sep 2000 | A |
RE36916 | Moshayedi | Oct 2000 | E |
6130477 | Chen et al. | Oct 2000 | A |
6157541 | Hacke | Dec 2000 | A |
6165817 | Akram et al. | Dec 2000 | A |
6166443 | Inaba et al. | Dec 2000 | A |
6172874 | Bartilson | Jan 2001 | B1 |
6178093 | Bhatt et al. | Jan 2001 | B1 |
6186106 | Glovatsky | Feb 2001 | B1 |
6187652 | Chou et al. | Feb 2001 | B1 |
6205654 | Burns | Mar 2001 | B1 |
6208521 | Nakatsuka | Mar 2001 | B1 |
6218731 | Huang et al. | Apr 2001 | B1 |
6222737 | Ross | Apr 2001 | B1 |
6225688 | Kim et al. | May 2001 | B1 |
6233650 | Johnson et al. | May 2001 | B1 |
6234820 | Perino et al. | May 2001 | B1 |
6236565 | Gordon | May 2001 | B1 |
6262895 | Forthun | Jul 2001 | B1 |
6265660 | Tandy | Jul 2001 | B1 |
6265766 | Moden | Jul 2001 | B1 |
6266252 | Karabatsos | Jul 2001 | B1 |
6271058 | Yoshida | Aug 2001 | B1 |
6272741 | Kennedy et al. | Aug 2001 | B1 |
6281577 | Oppermann et al. | Aug 2001 | B1 |
6285560 | Lyne | Sep 2001 | B1 |
6288907 | Burns | Sep 2001 | B1 |
6300679 | Mukerji et al. | Oct 2001 | B1 |
6303981 | Moden | Oct 2001 | B1 |
6310392 | Burns | Oct 2001 | B1 |
6313998 | Kledzik | Nov 2001 | B1 |
6316825 | Park et al. | Nov 2001 | B1 |
6320137 | Bonser et al. | Nov 2001 | B1 |
6323060 | Isaak | Nov 2001 | B1 |
6329708 | Komiyama | Dec 2001 | B1 |
6336262 | Dalal et al. | Jan 2002 | B1 |
6351029 | Isaak | Feb 2002 | B1 |
6360433 | Ross | Mar 2002 | B1 |
6360935 | Flake | Mar 2002 | B1 |
6368896 | Farnworth et al. | Apr 2002 | B2 |
6376769 | Chung | Apr 2002 | B1 |
6384339 | Neuman | May 2002 | B1 |
6392162 | Karabatsos | May 2002 | B1 |
6410857 | Gonya | Jun 2002 | B1 |
6414384 | Lo et al. | Jul 2002 | B1 |
6423622 | Chen et al. | Jul 2002 | B1 |
6426240 | Isaak | Jul 2002 | B2 |
6426549 | Isaak | Jul 2002 | B1 |
6426560 | Kawamura et al. | Jul 2002 | B1 |
6433418 | Fujisawa et al. | Aug 2002 | B1 |
6437990 | Degani et al. | Aug 2002 | B1 |
6444490 | Bertin et al. | Sep 2002 | B2 |
6444921 | Wang et al. | Sep 2002 | B1 |
6446158 | Karabatsos | Sep 2002 | B1 |
6447321 | Perino et al. | Sep 2002 | B1 |
6449159 | Haba | Sep 2002 | B1 |
6452826 | Kim et al. | Sep 2002 | B1 |
6462408 | Wehrly, Jr. | Oct 2002 | B1 |
6462412 | Kamei et al. | Oct 2002 | B2 |
6462423 | Akram et al. | Oct 2002 | B1 |
6465877 | Farnworth et al. | Oct 2002 | B1 |
6465893 | Khandros et al. | Oct 2002 | B1 |
6473308 | Forthun | Oct 2002 | B2 |
6486544 | Hashimoto | Nov 2002 | B1 |
6487078 | Kledzik et al. | Nov 2002 | B2 |
6489178 | Coyle et al. | Dec 2002 | B2 |
6489687 | Hashimoto | Dec 2002 | B1 |
6492718 | Ohmori | Dec 2002 | B2 |
6500697 | Ahmad | Dec 2002 | B2 |
6504104 | Hacke et al. | Jan 2003 | B2 |
6509639 | Lin | Jan 2003 | B1 |
6514793 | Isaak | Feb 2003 | B2 |
6522018 | Tay et al. | Feb 2003 | B1 |
6528870 | Fukatsu et al. | Mar 2003 | B2 |
6532162 | Schoenborn | Mar 2003 | B2 |
6538895 | Worz et al. | Mar 2003 | B2 |
6549413 | Karnezos et al. | Apr 2003 | B2 |
6552910 | Moon et al. | Apr 2003 | B1 |
6559521 | Tuttle | May 2003 | B2 |
6560117 | Moon | May 2003 | B2 |
6572387 | Burns et al. | Jun 2003 | B2 |
6576992 | Cady et al. | Jun 2003 | B1 |
6588095 | Pan | Jul 2003 | B2 |
6590282 | Wang et al. | Jul 2003 | B1 |
6600222 | Levardo | Jul 2003 | B1 |
6608763 | Burns et al. | Aug 2003 | B1 |
6614664 | Lee | Sep 2003 | B2 |
6617510 | Schreiber et al. | Sep 2003 | B2 |
6620651 | He et al. | Sep 2003 | B2 |
6624507 | Nguyen et al. | Sep 2003 | B1 |
6627984 | Bruce et al. | Sep 2003 | B2 |
6646333 | Hogerl | Nov 2003 | B1 |
6657134 | Spielberger et al. | Dec 2003 | B2 |
6660561 | Forthun | Dec 2003 | B2 |
6670700 | Hashimoto | Dec 2003 | B1 |
6673651 | Ohuchi et al. | Jan 2004 | B2 |
6677670 | Kondo | Jan 2004 | B2 |
6683377 | Shim et al. | Jan 2004 | B1 |
6689634 | Lyne | Feb 2004 | B1 |
6690584 | Uzuka et al. | Feb 2004 | B2 |
6699730 | Kim et al. | Mar 2004 | B2 |
6707148 | Mostafazedeh et al. | Mar 2004 | B1 |
6707684 | Andric et al. | Mar 2004 | B1 |
6709893 | Moden et al. | Mar 2004 | B2 |
6724076 | Kahlisch et al. | Apr 2004 | B1 |
6746894 | Fee et al. | Jun 2004 | B2 |
6762495 | Reyes et al. | Jul 2004 | B1 |
6762769 | Guo et al. | Jul 2004 | B2 |
6765288 | Damberg | Jul 2004 | B2 |
6768660 | Kong et al. | Jul 2004 | B2 |
6773848 | Nortoft et al. | Aug 2004 | B1 |
6776797 | Blom | Aug 2004 | B1 |
6778404 | Bolken et al. | Aug 2004 | B1 |
6781240 | Choi et al. | Aug 2004 | B2 |
6803651 | Chiang | Oct 2004 | B1 |
6812567 | Kim et al. | Nov 2004 | B2 |
6821029 | Grung et al. | Nov 2004 | B1 |
6833984 | Belgacem | Dec 2004 | B1 |
6841855 | Jaeck et al. | Jan 2005 | B2 |
6849949 | Lyu et al. | Feb 2005 | B1 |
6867496 | Hashimoto | Mar 2005 | B1 |
6869825 | Chiu | Mar 2005 | B2 |
6876074 | Kim | Apr 2005 | B2 |
6879047 | Heo | Apr 2005 | B1 |
6884653 | Larson | Apr 2005 | B2 |
6891729 | Ko et al. | May 2005 | B2 |
6893897 | Sweterlitsch | May 2005 | B2 |
6908792 | Bruce et al. | Jun 2005 | B2 |
6914324 | Rapport et al. | Jul 2005 | B2 |
6919626 | Burns | Jul 2005 | B2 |
6965166 | Hikita et al. | Nov 2005 | B2 |
6998704 | Yamazaki et al. | Feb 2006 | B2 |
7023701 | Stocken et al. | Apr 2006 | B2 |
7081373 | Roeters et al. | Jul 2006 | B2 |
7104804 | Batinovich | Sep 2006 | B2 |
7129571 | Kang | Oct 2006 | B2 |
20010006252 | Kim et al. | Jul 2001 | A1 |
20010013423 | Dalal et al. | Aug 2001 | A1 |
20010015487 | Forthun | Aug 2001 | A1 |
20010035572 | Isaak | Nov 2001 | A1 |
20010040793 | Inaba | Nov 2001 | A1 |
20020006032 | Karabatsos | Jan 2002 | A1 |
20020030995 | Shoji | Mar 2002 | A1 |
20020044423 | Primavera et al. | Apr 2002 | A1 |
20020048849 | Isaak | Apr 2002 | A1 |
20020076919 | Peters et al. | Jun 2002 | A1 |
20020101261 | Karabatsos | Aug 2002 | A1 |
20020114143 | Morrison et al. | Aug 2002 | A1 |
20020126951 | Sutherland et al. | Sep 2002 | A1 |
20020139577 | Miller | Oct 2002 | A1 |
20020164838 | Moon et al. | Nov 2002 | A1 |
20020180022 | Emoto | Dec 2002 | A1 |
20030016710 | Kamoto | Jan 2003 | A1 |
20030045025 | Coyle et al. | Mar 2003 | A1 |
20030049886 | Salmon | Mar 2003 | A1 |
20030081392 | Cady et al. | May 2003 | A1 |
20030107118 | Pflughaupt et al. | Jun 2003 | A1 |
20030109078 | Takahashi et al. | Jun 2003 | A1 |
20030113998 | Ross | Jun 2003 | A1 |
20030164551 | Lee et al. | Sep 2003 | A1 |
20030168725 | Warner et al. | Sep 2003 | A1 |
20040000708 | Rapport et al. | Jan 2004 | A1 |
20040004281 | Bai et al. | Jan 2004 | A1 |
20040021211 | Damberg | Feb 2004 | A1 |
20040031972 | Pflughaupt et al. | Feb 2004 | A1 |
20040045159 | DiStefano et al. | Mar 2004 | A1 |
20040065963 | Karnezos | Apr 2004 | A1 |
20040075991 | Haba et al. | Apr 2004 | A1 |
20040099938 | Kang et al. | May 2004 | A1 |
20040104470 | Bang et al. | Jun 2004 | A1 |
20040115866 | Bang et al. | Jun 2004 | A1 |
20040150107 | Cha et al. | Aug 2004 | A1 |
20040157362 | Beroz et al. | Aug 2004 | A1 |
20040203190 | Pflughaupt et al. | Oct 2004 | A1 |
20040217461 | Damberg | Nov 2004 | A1 |
20040217471 | Haba | Nov 2004 | A1 |
20040238931 | Haba et al. | Dec 2004 | A1 |
20040245617 | Damberg et al. | Dec 2004 | A1 |
20040267409 | De Lorenzo et al. | Dec 2004 | A1 |
20050018495 | Bhakta et al. | Jan 2005 | A1 |
20050035440 | Mohammed | Feb 2005 | A1 |
20050040508 | Lee | Feb 2005 | A1 |
20050047250 | Ruckerbauer et al. | Mar 2005 | A1 |
20050133897 | Baek et al. | Jun 2005 | A1 |
Number | Date | Country |
---|---|---|
004215457 | Nov 1992 | DE |
004214102 | Dec 1992 | DE |
0426-303 | May 1991 | EP |
359088863 | May 1984 | JP |
60-254762 | Dec 1985 | JP |
60254762 | Dec 1985 | JP |
361047659 | Mar 1986 | JP |
62-230027 | Oct 1987 | JP |
4-209562 | Jul 1992 | JP |
4-4368167 | Dec 1992 | JP |
50-29534 | Feb 1993 | JP |
63-153849 | May 1998 | JP |
2000-88921 | Mar 2000 | JP |
2000307029 | Nov 2000 | JP |
2001077294 | Mar 2001 | JP |
2001085592 | Mar 2001 | JP |
2001332683 | Nov 2001 | JP |
2003037246 | Feb 2003 | JP |
2003086760 | Mar 2003 | JP |
2003086761 | Mar 2003 | JP |
2003309246 | Oct 2003 | JP |
2003309247 | Oct 2003 | JP |
2003347475 | Dec 2003 | JP |
2003347503 | Dec 2003 | JP |
WO9744824 | Nov 1997 | WO |
WO 03037053 | May 2003 | WO |
Number | Date | Country | |
---|---|---|---|
20050280135 A1 | Dec 2005 | US |
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Child | 11197267 | US | |
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Child | 10814530 | US | |
Parent | 10005581 | Oct 2001 | US |
Child | 10400309 | US |
Number | Date | Country | |
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Parent | 10005581 | Oct 2001 | US |
Child | 10453398 | US | |
Parent | 11197267 | Aug 2005 | US |
Child | 10453398 | US | |
Parent | 10400309 | Mar 2003 | US |
Child | 11197267 | US |