The present invention is directed to a method and apparatus for achieving a compliant, solderless or soldered interconnect between a flexible circuit member and one or more other circuit members.
The current trend in connector design for those connectors utilized in the computer field is to provide both high density and high reliability connectors between various circuit devices. High reliability for such connections is essential due to potential system failure caused by misconnection of devices. Further, to assure effective repair, upgrade, testing and/or replacement of various components, such as connectors, cards, chips, boards, and modules, it is highly desirable that such connections be separable and reconnectable in the final product.
Pin-type connectors soldered into plated through holes or vias are among the most commonly used in the industry today. Pins on the connector body are inserted through plated holes or vias on a printed circuit board and soldered in place using conventional means. Another connector or a packaged semiconductor device is then inserted and retained by the connector body by mechanical interference or friction. The tin lead alloy solder and associated chemicals used throughout the process of soldering these connectors to the printed circuit board have come under increased scrutiny due to their environmental impact. Additionally, the plastic housings of these connectors undergo a significant amount of thermal activity during the soldering process, which stresses the component and threatens reliability.
The soldered contacts on the connector body are typically the means of supporting the device being interfaced by the connector and are subject to fatigue, stress deformation, solder bridging, and co-planarity errors, potentially causing premature failure or loss of continuity. In particular, as the mating connector or semiconductor device is inserted and removed from the present connector, the elastic limit on the contacts soldered to the circuit board may be exceeded causing a loss of continuity. These connectors are typically not reliable for more than a few insertions and removals of devices. These devices also have a relatively long electrical length that can degrade system performance, especially for high frequency or low power components. The pitch or separation between adjacent device leads that can be produced using these connectors is also limited due to the risk of shorting.
Another electrical interconnection method is known as wire bonding, which involves the mechanical or thermal compression of a soft metal wire, such as gold, from one circuit to another. Such bonding, however, does not lend itself readily to high-density connections because of possible wire breakage and accompanying mechanical difficulties in wire handling.
An alternate electrical interconnection technique involves placement of solder balls or the like between respective circuit elements. The solder is reflown to form the electrical interconnection. While this technique has proven successful in providing high-density interconnections for various structures, this technique does not facilitate separation and subsequent reconnection of the circuit members.
An elastomeric material having a plurality of conductive paths has also been used as an interconnection device. The conductive elements embedded in the elastomeric sheet provide an electrical connection between two opposing terminals brought into contact with the elastomeric sheet. The elastomeric material must be compressed to achieve and maintain an electrical connection, requiring a relatively high force per contact to achieve adequate electrical connection, exacerbating non-planarity between mating surfaces. Location of the conductive elements is generally not controllable. Elastomeric connectors may also exhibit a relatively high electrical resistance through the interconnection between the associated circuit elements. The interconnection with the circuit elements can be sensitive to dust, debris, oxidation, temperature fluctuations, vibration, and other environmental elements that may adversely affect the connection.
The problems associated with connector design are multiplied when multiple integrated circuit devices are packaged together in functional groups. The traditional way is to solder the components to a printed circuit board, flex circuit, or ceramic substrate in either a bare die silicon integrated circuit form or packaged form. Multiship modules, ball grids, array packaging, and chip scale packaging have evolved to allow multiple integrated circuit devices to be interconnected in a group.
One of the major issues regarding these technologies is the difficulty in soldering the components, while ensuring that reject conditions do not exist. Many of these devices rely on balls of solder attached to the underside of the integrated circuit device which is then reflown to connect with surface mount pads of the printed circuit board, flex circuit, or ceramic substrate. In some circumstances, these joints are generally not very reliable or easy to inspect for defects. The process to remove and repair a damaged or defective device is costly and many times results in unusable electronic components and damage to other components in the functional group.
Many of the problems encountered with connecting integrated circuit devices to larger circuit assemblies are compounded in multi-chip modules. Multi-chip modules have had slow acceptance in the industry due to the lack of large scale known good die for integrated circuits that have been tested and burned-in at the silicon level. These dies are then mounted to a substrate, which interconnect several components. As the number of devices increases, the probability of failure increases dramatically. With the chance of one device failing in some way and effective means of repairing or replacing currently unavailable, yield rates have been low and the manufacturing costs high.
The present invention is directed to a method and apparatus for achieving a fine pitch interconnect between a flexible circuit member and one or more circuit members with co-planar electrical contacts that have a large range of compliance. The connection with the circuit members can be soldered or solderless. The circuit member can be a printed circuit board, another flexible circuit, a bare-die device, an integrated circuit device, an organic or inorganic substrate, a rigid circuit and virtually any other type of electrical component. The present invention is also directed to an electrical interconnect assembly comprising one or more flexible circuit members electrically coupled to a plurality of circuit members.
In one embodiment, the compliant interconnect assembly comprises a substrate and at least one flexible circuit member having a first surface with a plurality of first contact pads and a second surface. A compliant material is interposed between the substrate and the second surface of the flexible circuit member. The compliant material is aligned with one or more of the first contact pads to bias first contact pads away from the substrate when the first surface of the flexible circuit member is compressed against the substrate.
The substrate can be one of a printed circuit board, a flexible circuit, a bare die device, an integrated circuit device, a carrier, organic or inorganic substrates, a compliant material, or a rigid circuit. The compliant material can optionally be attached to the substrate or the flexible circuit member. In one embodiment, the compliant material comprises a first modulus of elasticity and the substrate comprises a compliant material having a second modulus of elasticity different from the first modulus of elasticity.
A first circuit member having contact pads can be aligned with the first contact pads on the first surface of the flexible circuit member and compressively engaged with the compliant interconnect assembly so that the compliant material bias the first contact pads against corresponding contact pads on the first circuit member. One or more of the first contact pads on the flexible circuit member can be singulated contact pads. One or more locations of weakness can be formed in one or more of the first contact pads. In one embodiment, a second circuit member comprising a ball grid array is snap-fit with the first contact pads on the flexible circuit member. In another embodiment, the compliant material comprises a spring member. The flexible circuit member typically includes second contact pads located on the second surface.
In some embodiments, a portion of the flexible circuit member extends beyond the compliant interconnect assembly. A bare die device can be bonded to the portion of the flexible circuit member extending beyond the compliant interconnect assembly. Alternatively, a second compliant interconnect assembly can electrically couple that portion of the flexible circuit member with a second circuit member. In one embodiment, the flexible circuit member electrically couples with a second circuit member so that the first circuit member, the second circuit member and the substrate comprise a stacked configuration.
The first contact pads can optionally have conductive structures adapted to electrically couple with contact pads on a first circuit member. The structures can have a shape complementary to a shape of the contact pads on the first circuit member. The contact pads on the flexible circuit member can be adapted to engage with a connector member selected from the group consisting of a flexible circuit, a ribbon connector, a cable, a printed circuit board, a ball grid array (BGA), a land grid array (LGA), a plastic leaded chip carrier (PLCC), a pin grid array (PGA), a small outline integrated circuit (SOIC), a dual in-line package (DIP), a quad flat package (QFP), a leadless chip carrier (LCC), a chip scale package (CSP), or packaged or unpackaged integrated circuits.
In another embodiment, the compliant interconnect assembly includes a substrate having first and second surfaces, and a plurality of holes. One or more regions of raised compliant material are located on the substrate. A first flexible circuit member having a first surface with a plurality of first contact pads and a second surface with a plurality of second contact pads is provided. The first surface of the substrate is located along a second surface of the first flexible circuit member with the raised compliant material aligned with the first contact pads and the holes in the substrate aligned with the second contact pads. A second flexible circuit member having a first surface with a plurality of first contact pads and a second surface with a plurality of second contact pads is optionally provided. The first surface of the second flexible circuit member is located along the second surface of the substrate so that the first contact pads of the second flexible circuit member are aligned with the holes in the substrate. The second contact pads on the first flexible circuit member and the first contact pads on the second flexible circuit members are preferably electrically coupled through the holes in the substrate.
The present invention is also directed to an electrical assembly comprising one or more circuit members compressively engaged with the compliant interconnect assembly so that the raised compliant material biases the contact pads on the flexible circuit member with corresponding contact pads on the circuit members.
The present invention is also directed to an electrical assembly comprising a plurality of compliant raised portions located on a first circuit member. A flexible circuit member having a first surface with a plurality of contact pads and a second surface with a plurality of contact pads is provided. The contact pads on the first surface are bonded to contact pads on the first circuit member and the raised compliant material is aligned with the contact pads on the second surface of the flexible circuit member.
The present invention is also directed to a method of making a compliant interconnect. In one embodiment, a substrate is prepared with a first array of through holes. A masking material is applied to the substrate. A second array of through holes is created through the masking material and substrate. A compliant material is applied to the second array of through holes. The masking material is removed to expose an array of compliant raised portions.
In another embodiment, a masking material is applied to the substrate. An array of through holes is created through the masking material and substrate. A compliant material is applied to the an-ay of through holes. The masking material is removed to expose an array of compliant raised portions.
The present invention is also directed to a method of making a compliant interconnect assembly comprising the steps of aligning contact pads on a circuit member with the contact pads on the first surface of the flexible circuit member and compressing the circuit member with the compliant interconnect assembly.
As illustrated in
The holes 32 are then filled with a compliant material 38, as shown in FIG. 4. The thickness of the compliant material 38 is typically determined by the thickness of the masking material 26. Suitable compliant materials include elastomeric materials such as Sylgard™ available from Dow Corning Silicone of Midland, Mich. and MasterSyl '713, available from Master Bond Silicone of Hackensack, N.J.
The compliant interconnect 22 of
Once the compliant encapsulant 38 is cured, the masking material 26 is removed to yield the compliant interconnect 22 illustrated in FIG. 5. The compliant interconnection 22 illustrated in
The region of the polymeric sheet 52 adjacent to the contact pad 56 includes singulation 58. The singulation 58 is a partial separation of the terminal from the sheet 52 that does not disrupt the electrical integrity of the conductive trace 54. In the illustrated embodiment, the singulation 58 is a slit surrounding a portion of the contact pad 56. The slit may be located adjacent to the perimeter of the contact pad 56 or offset therefrom. The singulated flexible circuit members 50, 70 control the amount of force, the range of motion, and assist with creating a more evenly distributed force vs. deflection profile across the array.
As used herein, a singulation can be a complete or partial separation or a perforation in the polymeric sheet. Alternatively, singulation may include a thinning or location of weakness of the polymeric sheet along the edge of, or directly behind, the contact pad. The singulation releases or separates the contact pad from the polymeric sheet, while maintaining the interconnecting circuit traces.
The singulations can be formed at the time of manufacture or the polymeric sheet can be subsequently patterned by stamping, cutting or a variety of other techniques. In one embodiment, a laser system, such as Excimer, CO2, or YAG, creates the singulation. This structure is advantageous in several ways, where the force of movement is greatly reduced since the flexible circuit member is no longer a continuous membrane, but a series of flaps or bond sites with a living hinge and bonded contact (see for example FIG. 10).
The second flexible circuit member 70 is likewise positioned on the opposite side of the compliant interconnect 22. Electrical trace 72 is electrically coupled to contact pad 74 positioned to engage with a contact pad 76 on a second circuit member 78. Solder ball 80 is located on the opposite end of the electrical trace 72. Polymeric sheet 82 of the second flexible circuit member 70 also includes a singulation 84 adjacent to the contact pad 74.
The contact pads 56, 74 can be part of the base laminate of the flexible circuit members 50, 70, respectively. Alternatively, discrete contact pads 56, 74 can be formed separate from the flexible circuit members 50, 70 and subsequently laminated or bonded in place. For example, an array of contact pads 56, 74 can be formed on a separate sheet and laminate to the flexible circuit members 50, 70. The laminated contact pads 56, 74 can be subsequently processed to add structures (see
The contact pads 60, 76 may be a variety of structures such as, for example, a ball grid array, a land grid array, a pin grid array, contact points on a bare die device, etc. The contact pads 60, 76 can be electrically coupled with the compliant interconnect assembly 34 by compressing the components 62, 78, 34 together (solderless), by reflowing solder or solder paste at the electrical interface, by conductive adhesive at the electrical interface, or a combination thereof.
As illustrated in
The singulations 58, 84 permit the raised portions 40 to push the contact pads 56, 74 above the surface of the substrate 20, without damaging the first and second flexible circuit members 50, 70, respectively. The raised portion 40 also deforms outward due to being compressed. The contact pads 56, 74 may optionally be bonded to the raised compliant material 40. The raised compliant material 40 supports the flexible circuit members 50, 70, and provides a contact force that presses the contact pads 56, 74 against the contact pads 60, 76 as the first and second circuit members 62, 78, respectively are compressed against the compliant interconnect assembly 34. The movement of the contact pads 56, 74 is controlled by the raised portion 40 of the compliant material 38 and the resiliency of the flexible circuit members 50, 70. These components are engineered to provide a desired level of compliance. The raised portions 40 provide a relatively large range of compliance of the contact pads 56, 74. The nature of the flexible circuit members 50, 70 allow fine pitch interconnect and signal escape routing, but also inherently provides a mechanism for compliance.
In some embodiments, the terminals 126A include one or more locations of weakness 130A. As used herein, “locations of weakness” include cuts, slits, perforations or frangible portions, typically formed in the polymeric sheet 124A and/or a portion of the electrical trace 122A forming the terminal 126A. The locations of weakness facilitate interengagement of an electrical contact, such as a ball contact on a BGA device, with the terminal 126A (see FIG. 19). The terminals 126A can optionally include an aperture 132A to further facilitate engagement with an electrical contact. In another embodiment, a portion 134A of the trace 122A protrudes into the aperture 132A to enhance electrical engagement with the electrical contact
In other embodiments, a compliant raise portion is attached to the rear of the flexible circuit member 120A opposite the terminal 126A (see FIG. 11). When the flexible circuit member 120A is pressed against a surface (such as a printed circuit board), the raised compliant material lifts the singulated terminal 126A away from the surface.
Flexible circuit member 146 includes a solder ball 148 that is typically reflown to electrically couple bonding pad 150 to the contact pad 152 on the circuit board 144. Alternatively, solder paste can be applied to both the bonding pad 150 and the contact pad 152. Electrical trace 154 electrically couples the solder bonding pad 150 to contact pad 156. Contact pad 156 may optionally include a rough surface to enhance the electrical coupling with the contact pad 160 on the first circuit member 162. The flexible circuit member 146 is singulated so that the raised compliant material 142 lifts the contact pad 156 away from the circuit member 144. When the circuit member 162 is compressed against the compliant interconnect assembly 140, the raised compliant material 142 biases the contact pad 156 against the first circuit member 162. In the compressed state, the compliant interconnect assembly 140 can have a height of about 0.3 millimeters or less. Alternatively, the contact pad 160 can be electrically coupled with the contact pad 156 by reflowing solder or solder paste at the electrical interface, by conductive adhesive at the electrical interface, or either of the above in combination with compression.
The raised compliant material 142 can optionally be doped or filled with rigid or semi-rigid materials to enhance the integrity of the electrical contact created with the contact pad 160 on the first circuit member 162. Bonding layer 164 is optionally provided to retain the contact pad 156 to the raised compliant material 142.
Flexible circuit member 184 is electrically coupled to the contact pad 186 on second circuit member 178 by solder ball or solder paste 188. When the first circuit member 176 is compressively engaged with the compliant interconnect assembly 170, raised compliant material 172 biases contact pad 190 on the flexible circuit member 184 against contact pad 192 on the first circuit member 176. In an embodiment where the carrier 174 has compliant properties, the combined compliant properties of the carrier 174 and raised compliant material 172 provides the bias force.
In another embodiment, the flexible circuit member 184 extends to a second interconnect assembly 170A. Any of the interconnect assemblies disclosed herein can be used as the interconnect assembly 170A. In the illustrated embodiment, raised compliant material 172A is attached to a carrier 174A that is interposed between first circuit members 176 and a third circuit member 194. The carrier 174A can be rigid or flexible. An additional support layer 182A can optionally be added to the carrier 174A to increase rigidity and/or compliance. The third circuit member 194 can be an integrated circuit device, such as the LGA device illustrated in
Contact pads 220, 222 on the respective flexible circuit members 210, 212 are singulated. Adhesive 221 can optionally be used to bond contact pads 220, 222 to the raised compliant material 202, 204. The flexible circuit members 210, 212 can optionally be bonded to the carrier 206. The resulting compliant interconnect assembly 200 is interposed between first and second circuit members 226, 228 in a compressive relationship so that contact pads 220, 222 are compressively engaged with respective contact pads 230, 232.
In an alternate embodiment,
In one application, the embodiment of
In one embodiment, the replaceable chip module 440 illustrated in
In another embodiment, the second circuit member 451 is an extension of the flexible circuit member 454. Stiffener 443 is optionally provided behind the flexible circuit member 451.
The housing 442 includes a device site 444 for receiving a microprocessor device. Along one edge of the housing 442 are a series of device sites 446 configured to receive flash memory integrated circuit devices. Device sites 448, 450 are provided along the other edges of the housing 442 for receiving other circuit members supportive of the microprocessor. Each of the device sites 444, 446, 448, 450 optionally include appropriate covers 456a-456c. The covers 456a-456c have beveled edges 449 for sliding engagement with a corresponding lips 453 on the housing 442.
The flexible circuit member 454 extends beyond the housing 442, permitting it to perform more functions than simple providing an interconnect between the first and second circuit members. For example, the flexible circuit member 454 can include integrated ground planes; buried passive functions such as capacitance; redistribution of terminal routing or pitch; and/or leads to bring in other signals or power from external sources to the device being connected without having to come in through the PCB 451. Using the flexible circuit member to perform other functions reduces the number of terminals need to be connected to the main PCB 451 since all of the ground pins from the first circuit members can be coupled to the flex circuit and/or the substrate. Another advantage of this embodiment is that it is possible to alter the signals or power coming in through the flexible circuit member 454, such as filtering, amplifying, decoupling etc.
In one embodiment, the flexible circuit member 512 extends to a third circuit member 522. The third circuit member 522 can be electrically coupled using any of the techniques disclosed herein, including the connectorized approach illustrated in FIG. 15B. In the illustrated embodiment, terminals 524 on the flexible circuit 512 include an aperture 526 and a plurality of locations of weakness 528 (see FIG. 10A). The locations of weakness 528 permit solder ball 530 to snap-fit into aperture 526 to form a strong mechanical interconnect. The solder ball 530 can optionally be reflowed to further bind with the terminal 524. If the solder ball 530 is reflowed, the segmented portions of the terminal 524 will flex into the molten solder. When the solder solidifies, the terminal 524 will be at least partially embedded in the solder ball 530. The third circuit member 522 can be an integrated circuit device, such as an LGA device, BGA device, CSP device, flip chip, a PCB or a variety of other devices.
The embodiments disclosed herein are basic guidelines, and are not to be considered exhaustive or indicative of the only methods of practicing the present invention. There are many styles and combinations of properties possible, with only a few illustrated. Each connector application must be defined with respect to deflection, use, cost, force, assembly, & tooling considered.
Patents and patent applications disclosed herein, including those cited in the background of the invention, are hereby incorporated by reference. Other embodiments of the invention are possible. It is to be understood that the above description is intended to be illustrative, and not restrictive. Many other embodiments will be apparent to those of skill in the art upon reviewing the above description. The scope of the invention should, therefore, be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.
This application claims the benefit of Prov. appl. No. 60/177,112 filed on Jan. 20, 2000.
| Filing Document | Filing Date | Country | Kind | 371c Date |
|---|---|---|---|---|
| PCT/US01/00872 | 1/11/2001 | WO | 00 | 6/26/2002 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO01/54232 | 7/26/2001 | WO | A |
| Number | Name | Date | Kind |
|---|---|---|---|
| 2958064 | Swengel | Oct 1960 | A |
| 3880486 | Avakian | Apr 1975 | A |
| 3904934 | Martin | Sep 1975 | A |
| 3964813 | Pizzeck | Jun 1976 | A |
| 4118090 | Del Mei | Oct 1978 | A |
| 4161346 | Cherian et al. | Jul 1979 | A |
| 4165909 | Yeager et al. | Aug 1979 | A |
| 4189200 | Yeager et al. | Feb 1980 | A |
| 4445735 | Bonnefoy | May 1984 | A |
| 4468074 | Gordon | Aug 1984 | A |
| 4498722 | Fedder et al. | Feb 1985 | A |
| 4509099 | Takamatsu et al. | Apr 1985 | A |
| 4528500 | Lightbody et al. | Jul 1985 | A |
| 4548451 | Benarr et al. | Oct 1985 | A |
| 4575170 | Gurley | Mar 1986 | A |
| 4579411 | Cobaugh et al. | Apr 1986 | A |
| 4593961 | Cosmo | Jun 1986 | A |
| 4603928 | Evans | Aug 1986 | A |
| 4610495 | Landi | Sep 1986 | A |
| 4629270 | Andrews, Jr. et al. | Dec 1986 | A |
| 4648668 | Sinisi | Mar 1987 | A |
| 4655524 | Etzel | Apr 1987 | A |
| 4691972 | Gordon | Sep 1987 | A |
| 4700132 | Yarbrough et al. | Oct 1987 | A |
| 4758176 | Abe et al. | Jul 1988 | A |
| 4768971 | Simpson | Sep 1988 | A |
| 4789345 | Carter | Dec 1988 | A |
| 4793814 | Zifcak et al. | Dec 1988 | A |
| 4872853 | Webster | Oct 1989 | A |
| 4904197 | Cabourne | Feb 1990 | A |
| 4913656 | Gordon et al. | Apr 1990 | A |
| 4927369 | Grabbe et al. | May 1990 | A |
| 4954878 | Fox et al. | Sep 1990 | A |
| 4976626 | Dibble et al. | Dec 1990 | A |
| 5007842 | Deak et al. | Apr 1991 | A |
| 5049084 | Bakke | Sep 1991 | A |
| 5061192 | Chapin et al. | Oct 1991 | A |
| 5071359 | Arnio et al. | Dec 1991 | A |
| 5096426 | Simpson et al. | Mar 1992 | A |
| 5099393 | Bentlage et al. | Mar 1992 | A |
| 5152695 | Grabbe et al. | Oct 1992 | A |
| 5156553 | Katsumata et al. | Oct 1992 | A |
| 5163834 | Chapin et al. | Nov 1992 | A |
| 5167512 | Walkup | Dec 1992 | A |
| 5173055 | Grabbe | Dec 1992 | A |
| 5199889 | McDevitt, Jr. | Apr 1993 | A |
| 5203075 | Angulas et al. | Apr 1993 | A |
| 5207585 | Byrnes et al. | May 1993 | A |
| 5227959 | Rubinstein et al. | Jul 1993 | A |
| 5252916 | Swart | Oct 1993 | A |
| 5299090 | Brady et al. | Mar 1994 | A |
| 5321884 | Ameen et al. | Jun 1994 | A |
| 5324205 | Ahmad et al. | Jun 1994 | A |
| 5338207 | Lineberry et al. | Aug 1994 | A |
| 5342205 | Hashiguchi | Aug 1994 | A |
| 5358412 | Maurinus et al. | Oct 1994 | A |
| 5388998 | Grange et al. | Feb 1995 | A |
| 5395252 | White | Mar 1995 | A |
| 5410260 | Kazama | Apr 1995 | A |
| 5412329 | Iino et al. | May 1995 | A |
| 5427535 | Sinclair | Jun 1995 | A |
| 5437556 | Bargain et al. | Aug 1995 | A |
| 5519331 | Cowart et al. | May 1996 | A |
| 5521519 | Faure et al. | May 1996 | A |
| 5548488 | Hansen | Aug 1996 | A |
| 5637539 | Hofmann et al. | Jun 1997 | A |
| 5645433 | Johnson | Jul 1997 | A |
| 5652608 | Watanabe et al. | Jul 1997 | A |
| 5653598 | Grabbe | Aug 1997 | A |
| 5706174 | Distefano et al. | Jan 1998 | A |
| 5723347 | Hirano et al. | Mar 1998 | A |
| 5772451 | Dozier, II et al. | Jun 1998 | A |
| 5795172 | Shahriari et al. | Aug 1998 | A |
| 5829988 | McMillan et al. | Nov 1998 | A |
| 5913687 | Rathburn | Jun 1999 | A |
| 5920765 | Naum et al. | Jul 1999 | A |
| 5923178 | Higgins et al. | Jul 1999 | A |
| 5938451 | Rathburn | Aug 1999 | A |
| 5947749 | Rathburn | Sep 1999 | A |
| 5984691 | Brodsky et al. | Nov 1999 | A |
| 6079987 | Matsunaga et al. | Jun 2000 | A |
| 6094115 | Nguyen et al. | Jul 2000 | A |
| 6135783 | Rathburn | Oct 2000 | A |
| 6174174 | Suzuki et al. | Jan 2001 | B1 |
| 6178629 | Rathburn | Jan 2001 | B1 |
| 6210173 | Matsunaga | Apr 2001 | B1 |
| 6231353 | Rathburn | May 2001 | B1 |
| 6247938 | Rathburn | Jun 2001 | B1 |
| 6294920 | Pfaff | Sep 2001 | B1 |
| 6312266 | Fan et al. | Nov 2001 | B1 |
| 6379176 | Ohsawa et al. | Apr 2002 | B1 |
| 6384475 | Beroz et al. | May 2002 | B1 |
| 6409521 | Rathburn | Jun 2002 | B1 |
| 6450821 | Otsuki et al. | Sep 2002 | B2 |
| 6663399 | Ali et al. | Dec 2003 | B2 |
| 695623 | Brodsky | Feb 2004 | A1 |
| Number | Date | Country |
|---|---|---|
| 0 351 851 | Jan 1990 | EP |
| 0 351 851 | Jan 1990 | EP |
| 0 405 333 | Jan 1991 | EP |
| 0 431 566 | Jun 1991 | EP |
| 0 571 879 | Dec 1993 | EP |
| 0 574 793 | Dec 1993 | EP |
| 0 310 302 | Oct 1994 | EP |
| 0 310 302 | Oct 1994 | EP |
| 0 817 319 | Jan 1998 | EP |
| 1 488 328 | Oct 1977 | GB |
| 2 027 560 | Feb 1980 | GB |
| 2274212 | Jul 1994 | GB |
| 9813695 | Apr 1998 | WO |
| 9850985 | Nov 1998 | WO |
| 0046885 | Aug 2000 | WO |
| 0109980 | Feb 2001 | WO |
| 0109980 | Feb 2001 | WO |
| 0154232 | Jul 2001 | WO |
| Number | Date | Country | |
|---|---|---|---|
| 20030003779 A1 | Jan 2003 | US |
| Number | Date | Country | |
|---|---|---|---|
| 60177112 | Jan 2000 | US |