Claims
- 1. A method of mounting one or more wire bond Integrated Circuit chips by creating an interface substrate overlying a metal substrate, comprising the steps of:
providing one or more wire bond chips said wire bond chips having been provided with pads for wire bond connections; providing a metal substrate said metal substrate having a first surface and a second surface; cleaning said first surface of said metal substrate; depositing a layer of dielectric over said first surface; depositing a interconnect layer over of said layer of dielectric thereby forming the first layer of an interconnect substrate; creating a Build Up Multilayer (BUM) layer over said interconnect layer thereby forming the second layer of an interconnect substrate; masking and etching said second surface of said metal substrate thereby creating one or more openings for the insertion of said one or more wire bond chips thereby furthermore exposing portions of said dielectric within said openings; selectively creating openings in said exposed dielectric thereby providing electrical access and heat removal to said interconnect substrate for said one or more wire bond chips; subdividing said metal substrate into individual wire bond substrates; coating said exposed dielectric of said individual wire bond substrates with a layer of adhesive; inserting said one or more wire bond chips into said one or more openings for the insertion of said wire bond chips in said individual wire bond substrates whereby said wire bond chips overlay said adhesive coating; wire bonding said wire bond chips to said selectively created openings in said dielectric; inserting a molding compound over said one or more wire bond chips within said one or more openings for the insertion of said wire bond chips; coating said BUM layer as a solder mask; exposing the metal pads within said BUM layer thereby creating openings for BGA solder connections; and inserting and attaching solder balls to said BGA solder connections.
- 2. The method of claim 1 wherein said depositing a layer of dielectric over said first surface is creating a layer of dielectric with a thickness between about 10 and 50 um. and creating vias in the dielectric for electrical connections between said overlying thin film layer and said wire bond IC chips.
- 3. The method of claim 1 wherein said depositing an interconnect layer is creating a thin film interconnect pattern, comprising the steps of:
depositing an interconnect plating base by consecutive sputtering of Cr, Au and Cr; masking and patterning for semi-additive plating of the interconnect pattern; etching off the thin Cr to expose the Au layer; depositing semi-additive plating of the interconnect pattern by depositing Au, Ni and Cu; removing of the mask for the semi-additive plating of the interconnect pattern; wet etching to remove the sputtered plating base from between the interconnect pattern; coating the created interconnect pattern with a dielectric; and creating vias in the dielectric for connections to the overlying layer.
- 4. The method of claim 1 wherein said depositing an interconnect layer is creating a thin film interconnect pattern, comprising the steps of:
depositing an interconnect plating base by consecutive sputtering of Cr/Cu/Cr; masking and patterning for semi-additive plating of the interconnect pattern; etching off the thin Cr to expose the Cu layer; depositing semi-additive plating of the interconnect pattern by depositing Cu only; removing of the mask for the semi-additive plating of the interconnect pattern; wet etching to remove the sputtered plating base from between the interconnect pattern; coating the created interconnect pattern with a dielectric; creating vias in the dielectric for connections to the overlying layer; and masking and etching said second surface of the metal substrate thereby creating openings in the dielectric layer; and performing an additional electroless step or an electrolytic plating step to deposit Ni and Au on the exposed copper pads thereby ensuring a reliable solder connection to the chip.
- 5. The method of claim 1 wherein said creating a Build Up Multilayer (BUM) layer is:
coating said interconnect layer with a dielectric layer; etching and swelling said dielectric layer to promote adhesion to the subsequent electroless plating of a copper layer; electrolytic plating of the panel surface with a layer of copper; masking and etching the deposited layer of copper to create the metal pattern in said BUM layer; growing oxide on the copper surface or micro etching the copper surface thereby promoting adhesion; coating said created metal pattern with a dielectric said coating to be applied to the BUM layer as an additional step; and forming a solder mask thereby creating vias in the dielectric for connections to the BGA solder balls.
- 6. The method of claim 1 with the additional electroless step of depositing a Ni and Au layer on top of the exposed copper in the openings for the metal pads within said BUM layer to ensure a reliable solder connection to the printed circuit board said additional step to be taken after said creating openings for BGA solder connections.
- 7. The method of claim 1 wherein said metal substrate contains an element selected from the group of copper or aluminum or stainless steel.
- 8. The method of claim 1 wherein said metal substrate is a steel panel of the material 400 series said steel panel having a Thermal Coefficient of Expansion (TCE) of about 6.1 ppm degrees C.
- 9. The method of claim 1 wherein said adhesive layer contains thermally conductive epoxy such as thermoset or thermoplastic epoxy that can withstand temperatures of above between about 250 and 300 degrees C.
- 10. The method of claim 1 wherein said metal substrate is less than 40 mills thick and has planar dimensions of about 18×24 inches that are large enough to provide for one or more individual wire bond metal substrates.
- 11. The method of claim 1 whereby the Thermal Coefficient of Expansion of at least one of said dielectrics exceeds the Thermal Coefficient of Expansion of said metal substrate by a measurable amount.
- 12. The method of claim 1 wherein said dielectric contains an element selected from the group of epoxy with or without thin glass reinforcement or polyimide or a composite dielectric and is deposited to a thickness between about 10 and 40 um using either lamination techniques or coating and curing techniques.
- 13. The method of claim 1 wherein said masking and etching said second surface of said metal panel creates an opening for the insertion of one wire bond chip.
- 14. The method of claim 1 wherein said masking and etching said second surface of said metal substrate creates an opening for the insertion of more than one wire bond chips.
- 15. The method of claim 1 wherein said masking and etching said second surface of said metal substrate creates one or more openings for the insertion of one or more wire bond chips.
- 16. The method of claim 1 wherein said interface substrate contains when proceeding from the side of the interface substrate that is closest to said metal substrate:
one or more thin film interconnect layers deposited over said dielectric layer; a coating of dielectric over the thin film layer that is furthest removed from said metal substrate; and a solder mask thereby creating vias in said coating of dielectric over said thin film layer for connections between said thin film layer and the BGA contact balls.
- 17. The method of claim 1 wherein said interface substrate contains when proceeding from the side of the interface substrate that is closest to said metal substrate:
one or more thin film interconnect layers deposited over said dielectric layer; one or more BUM layers deposited over said second interconnect layer; a coating of dielectric over the BUM layer that is furthest removed from said metal substrate; and a solder mask thereby creating vias in the dielectric for connections between said BUM layer and the BGA contact balls.
- 18. The method of claim 1 whereby said claim is extended to include creating a multiplicity of Build Up Multilayer structures and a multiplicity of thin film interconnect layers said BUM layers overlying said thin film interconnect layers said thin film interconnect layers to be deposited over said dielectric deposited on said first surface of said metal substrate.
- 19. A structure for mounting one or more wire bond Integrated Circuit chips by creating an interface substrate overlying a metal substrate, said structure containing:
a metal substrate said metal substrate having a first surface and a second surface; a layer of dielectric with a thickness between about 10 and 50 um. deposited over said first surface; a thin film interconnect layer deposited over of said layer of dielectric thereby forming the first layer of an interconnect substrate; a Build Up Multilayer (BUM) layer created over said interconnect layer thereby forming the second layer of an interconnect substrate; one or more openings for the insertion of said one or more wire bond chips created by masking and etching said second surface of said metal substrate thereby furthermore creating exposed portions of said dielectric within said openings; openings selectively created in said exposed dielectric thereby providing electrical access and heat transfer to said interconnect substrate for said one or more wire bond chips; individual wire bond substrates created by subdividing said metal substrate; a layer of adhesive containing thermally conductive epoxy such as thermoset or thermoplastic epoxy created by coating said exposed dielectric of said individual wire bond substrates; one or more wire bond chips inserted into said one or more openings for the insertion of said wire bond chips in said individual wire bond substrates whereby said wire bond chips overlay said adhesive coating; wire bonds for said wire bond chips to said selectively created openings in said dielectric; a molding compound inserted over said one or more wire bond chips and within said one or more openings for the insertion of said wire bond chips; a coating over said BUM layer as a solder mask; the metal pads within said BUM layer created be etching thereby creating openings for BGA solder connections; and solder balls inserted and attached to said BGA solder connections.
- 20. The structure of claim 19 wherein said interface substrate contains when proceeding from the side of the interface substrate that is closest to said metal substrate:
one or more thin film interconnect layers deposited over said dielectric layer; a coating of dielectric over the thin film layer that is furthest removed from said metal substrate; and a solder mask thereby creating vias in said coating of dielectric over said thin film layer for connections between said thin film layer and the BGA contact balls.
- 21. The structure of claim 19 wherein said interface substrate contains when proceeding from the side of the interface substrate that is closest to said metal substrate:
one or more thin film interconnect layers deposited over said dielectric layer; one or more BUM layers deposited over said second interconnect layer; a coating of dielectric over the BUM layer that is furthest removed from said metal substrate; and a solder mask thereby creating vias in the dielectric for connections between said BUM layer and the BGA contact balls.
- 22. The structure of claim 19 whereby said claim is extended to include creating a multiplicity of Build Up Multilayer structures and a multiplicity of thin film interconnect layers said BUM layers overlying said thin film interconnect layers said thin film interconnect layers to be deposited over said dielectric deposited on said first surface of said metal substrate.
Parent Case Info
[0001] This application is related to Attorney Docket #TFM99-002 filed on ______, Ser. No. ______, assigned to a common assignee.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09389634 |
Sep 1999 |
US |
Child |
09900558 |
Jul 2001 |
US |