The present invention relates to aggregating integrated circuits and, in particular, to stacking integrated circuits.
A variety of techniques are used to stack integrated circuits. Some methods require special packages, while other techniques stack conventional packages and still others stack multiple die within a single package. In some stacks, the leads of the packaged integrated circuits are used to create a stack, while in other systems, added structures such as rails provide all or part of the interconnection between packages. In still other techniques, flexible conductors with certain characteristics are used to selectively interconnect packaged integrated circuits. In yet other methods, one IC is connected to another within a single plastic body from which leads or contacts emerge.
The predominant package configuration employed during the past decade has encapsulated an integrated circuit (IC) in a plastic surround typically having a rectangular configuration. The enveloped integrated circuit is connected to the application environment through leads emergent from the edge periphery of the plastic encapsulation. Such “leaded packages” have been the constituent elements most commonly employed by techniques for stacking packaged integrated circuits.
Leaded packages play an important role in electronics, but efforts to miniaturize electronic components and assemblies have driven development of technologies that preserve circuit board surface area. Because leaded packages have leads emergent from peripheral sides of the package, leaded packages occupy more than a minimal amount of circuit board surface area. Consequently, alternatives to leaded packages have recently gained market share.
One family of alternative packages is identified generally by the term “chip scale packaging” or CSP. CSP refers generally to packages that provide connection to an integrated circuit through a set of contacts (often embodied as “bumps” or “balls”) arrayed across a major surface of the package. Instead of leads emergent from a peripheral side of the package, contacts are placed on a major surface and typically emerge from the planar bottom surface of the package.
The goal of CSP is to occupy as little area as possible and, preferably, approximately the area of the encapsulated IC. Therefore, CSP leads or contacts do not typically extend beyond the outline perimeter of the package. The absence of “leads” on package sides renders most stacking techniques devised for leaded packages inapplicable for CSP stacking.
CSP has enabled reductions in size and weight parameters for many applications. For example, micro ball grid array for flash and SRAM and wirebond on tape or rigid laminate CSPs for SRAM or EEPROM have been employed in a variety of applications. CSP is a broad category including a variety of packages from near chip scale to die-sized packages such as the die sized ball grid array (DSBGA) recently described in proposed JEDEC standard 95-1 for DSBGA. To meet the continuing demands for cost and form factor reduction with increasing memory capacities, CSP technologies that aggregate integrated circuits in CSP technology have recently been developed. For example, Sharp, Hitachi, Mitsubishi and Intel support what are called the S-CSP specifications for flash and SRAM applications. Those S-CSP specifications describe, however, stacking multiple die within a single chip scale package and do not describe stacking integrated circuits that are individually modularized in plastic, either as BGA's or other common CSP packages. Stacking integrated circuits within a single package requires specialized technology that includes reformulation of package internals and significant expense with possible supply chain vulnerabilities.
There are several known techniques for stacking packages articulated in chip scale technology. For example, the assignee of the present invention has developed previous systems for aggregating micro-BGA packages in space saving topologies. The assignee of the present invention has systems for stacking BGA packages on a DIMM in a RAMBUS environment.
In U.S. Pat. No. 6,205,654 B1 owned by the assignee of the present invention, a system for stacking ball grid array packages that employs lead carriers to extend connectable points out from the packages is described. Other known techniques add structures to a stack of BGA-packaged ICs. Still others aggregate CSPs on a DIMM with angular placement of the packages. Such techniques provide alternatives, but require topologies of added cost and complexity.
U.S. Pat. No. 6,262,895 B1 to Forthun (the “Forthun patent”) purports to disclose a technique for stacking chip scale packaged ICs. The Forthun patent discloses a “package” that exhibits a flex circuit wrapped partially about a CSP. The flex circuit is said to have pad arrays on upper and lower surfaces of the flex.
The flex circuit of the Forthun “package” has a pad array on its upper surface and a pad array centrally located upon its lower surface. On the lower surface of the flex there are third and fourth arrays on opposite sides from the central lower surface pad array. To create the package of Forthun, a CSP contacts the pad array located on the upper surface of the flex circuit. As described in the Forthun patent, the contacts on the lower surface of the CSP are pushed through “slits” in the upper surface pads and advanced through the flex to protrude from the pads of the lower surface array and, therefore, the bottom surface of the package. Thus, the contacts of the CSP serve as the contacts for the package. The sides of the flex are partially wrapped about the CSP to adjacently place the third and fourth pad arrays above the upper major surface of the CSP to create from the combination of the third and fourth pad arrays, a fifth pad array for connection to another such package. Thus, as described in the Forthun disclosure, a stacked module of CSPs created with the described packages will exhibit a flex circuit wrapped about each CSP in the module.
The previous known methods for stacking CSPs apparently have various deficiencies including complex structural arrangements and thermal or high frequency performance issues. To increase dissipation of heat generated by constituent CSPs, the thermal gradient between the lower CSP and upper CSP in a CSP stack or module should be minimized. Prior art solutions to CSP stacking do not, however, address thermal gradient minimization in disclosed constructions.
In other applications, module height concerns impact the utility of known solutions in integrated circuit aggregation. In some stacking solutions, the bad die problem is significant. Indigenous as well as processing-acquired defects can lead to unacceptably high failure rates for stacks created by aggregating IC elements before testing the constituent members of the assembly. For example, where stacking techniques employ one or more unpackaged die, there is typically not an opportunity for adequate preassembly test before the constituent ICs of the assembly are aggregated. Then, testing typically reveals bad stacks, it does not prevent their assembly and consequent waste of resources.
What is needed, therefore, is a technique and system for stacking integrated circuits using a technology that provides a thermally efficient, reliable structure that performs well at higher frequencies, but does not add excessive height to the stack yet allows pre-stacking test of constituent stack elements with production at reasonable cost with readily understood and managed materials and methods.
The present invention integrates an IC die and a flexible circuit structure into an integrated lower stack element that can be stacked with either further integrated lower stack element iterations or with pre-packaged ICs in any of a variety of package types. The present invention can be used to advantage where size minimization, thermal efficiency and or test before stacking are significant concerns. The present invention may be employed to stack similar or dissimilar integrated circuits and may be used to create modularized systems.
In the present invention, an IC die is integrated with flex circuitry to create an integrated lower stack element. In a preferred embodiment, a die is positioned above the surface of portions of a pair of flex circuits. Connection is made between the die and the flex circuitry. A protective layer such as a molded plastic, for example, is formed to create a body that protects the flex-connected die and its connection to the flex. Connective elements are placed along the flex circuits to create an array of module contacts along the second side of the flex circuitry. Portions of the pair of flex circuits are positioned above the body to create an integrated lower stack element. The integrated lower stack element may be stacked either with further iterations of the integrated lower stack element or with pre-packaged ICS to create a multi-element stacked circuit module. The present invention may be employed to advantage in numerous configurations and combinations in modules provided for high-density memories or high capacity computing.
Upper IC element 14 that is depicted in
Integrated lower stack element 12 is shown with die 16 and connections 20 that connect die 16 to flex circuits 18. Protective surround 22 is disposed to protect connections 20 and die 16. In a preferred embodiment, protective surround 22 is a plastic surround. As a protective surround 22 is formed about die 16, a body 23 is formed having lateral sides 21 and an upper surface 25. Protective body 23 will, in a preferred embodiment, surround portions of die 16 that would otherwise be exposed to potential environmental damage.
As shown in
Flex 18 may be configured to interconnect to die 16 with other connective configurations. For example, as a variant on the flip-chip connectivity scheme, flex attachments 26 may be placed on the side of flex circuits 18 opposite that shown in
With reference to
As shown in this preferred embodiment, module contacts 30 are fixed along flex circuits 18A and 18B opposite the side of the flex circuits nearest to which die 16 is adjacent. The shown preferred module contacts 30 are familiar to those in the art and may be comprised of eutectic, lead-free, solid copper, or other conductive materials. Other contact implementing structures may be used to create module contacts 30 as long as the conductive layer or layers of the flex circuitry can be connected to module contacts 30 to allow conveyance of the signals conducted in flex circuits 18 to be transmitted to an environment external to integrated lower stack element 12. Balls are well understood, but other techniques and structures such as connective rings, built-up pads, or even leads may be placed along flex circuits 18 to create module contacts 30 to convey signals from module 10 to an external environment. Any of the standard JEDEC patterns may be implemented with module contacts 30 as well as custom arrays of module contacts for specialized applications.
Any flexible or conformable substrate with a conductive pattern may be used as a flex circuit in the invention. The preferred flex circuitry will employ more than one conductive layer, but the invention may be implemented with flex circuitry that has only a single conductive layer.
Even though single conductive layer flex circuitry may readily be used in the invention, flex circuit 18 is preferably a multi-layer flexible circuit structure that has at least two conductive layers. This is particularly appropriate where frequencies to be encountered are higher. Preferably, the conductive layers are metal such as copper alloy 110 although any conductive material may be employed in this role. The use of plural conductive layers provides advantages such as the creation of a distributed capacitance across module 10 intended to reduce noise or bounce effects that can, particularly at higher frequencies, degrade signal integrity, as those of skill in the art will recognize.
The entire flex circuit may be flexible or, as those of skill in the art will recognize, a PCB structure made flexible in certain areas to allow conformability around body 23 and rigid in other areas for planarity along surfaces may be employed as an alternative flex circuitry in the present invention. For example, structures known as rigid-flex may be employed.
Flex circuits 18A and 18B shown in
It should be understood that in some embodiments of the invention, there will be fewer layers employed in flex circuit 18. For example, a flex circuit 18 may be devised for use in the present invention that lacks first outer surface 36 and/or second outer surface 38. In such a case, first conductive layer 40 will be on the surface of the particular flex circuit 18. Where there is a first outer surface, to make contact with first conductive layer 40 as shown in
In a preferred embodiment, first conductive layer 40 is employed as a ground plane, while second conductive layer 42 provides the functions of being a signal conduction layer and a voltage conduction layer. Thus, second conductive layer 42 is employed to implement signal connections between integrated lower stack element 12 and upper IC element 14, while first conductive layer 40 is employed to implement ground connections between integrated lower stack element 12 and upper IC element 14. Those of skill will note that roles of the first and second conductive layers may be reversed. This may be implemented by flex layer design or by attendant use of interconnections. As is understood, thermal management is typically related to conductive layer materials and mass as well as the proximity between the die and the conductive layer.
Selective connections between first and second conductive layers 40 and 42 may be implemented with vias such as the via indicated in
As will be illustrated in later figures, traces are delineated in conductive layers to convey, where needed, signals between selected module contacts 30 and particular die connectors 32 in the case of flip-chip style die 16 or between module contacts 30 and flex connectors 26 in the case where wire-bond connections 20 are implemented or between upper and lower flex contacts as will be described herein. Those of skill will recognize that traces can be implemented in a variety of configurations and manners and where die connectors are positioned coincident with module contact placement, trace use is minimized. For example, in some cases, if the die connectors 32 (illustrated as flip-chip connectors) are placed appropriately on die 16, a via 50 may be used to directly connect a selected die connector 32 to a selected module contact 30 without intermediate lateral conveyance between the two through a trace. Where a single conductive layer flex circuitry is employed in an embodiment, there will be no need for a via if a die connector 32 is positioned coincident with a module contact 30 to implement connection through a lower flex contact 62 such as is depicted in
As those of skill will recognize, die 16 is connected to flex circuits 18A and 18B through die pads 24 and die connectors 32. Flex circuits 18A and 18B are depicted with first and second outer layers 36 and 38, respectively. Support layer 54 provides structure for flex circuits 18A and 18B and conductive layer 52 provides conductivity between die connectors 32 and module contacts 30. Conductive layer 52 also provides conductivity between integrated lower stack element 12 and added elements such as another integrated lower stack element 12 or upper IC element 14 that may be aggregated to create module 10.
Those of skill will recognize that in the depicted embodiment, conductive layer 52 is disposed closer to module contacts 30 than is support layer 54. This relative placement is preferred but not required. Such persons will also recognize that support layer 54 provides a support function similar to that provided by intermediate layer 44 in multi-layer flex circuitry embodiments such as those earlier described herein.
Demarcation gap 56 depicted in
With continuing reference to
In the depicted embodiment of
Each of flex circuits 18A and 18B in the depicted preferred embodiment have both upper flex contacts 60 and lower flex contacts 62. Depending upon the contact pattern of die 16 and upper IC element 14, some embodiments may exhibit only lower or only upper flex contacts in flex circuits 18A or 18B.
In the preferred embodiment depicted in
As those of skill will recognize, interconnection of respective contacts of upper IC element 14 and integrated lower stack element 12 will also preferably provide a thermal path between the two elements 12 and 14 to assist in moderation of thermal gradients through module 10. Those of skill will notice that between first and second conductive layers 40 and 42, there is at least one intermediate layer 44 that, in a preferred embodiment, is a polyimide. Placement of such an intermediate layer between ground-conductive first conductive layer 40 and signal/voltage conductive second conductive layer 42 provides, in the combination, a distributed capacitance that assists in mitigation of ground bounce phenomena to improve high frequency performance of module 10.
With continuing reference to
To improve high frequency performance, signal traces 64 may be devised to exhibit path routes determined to provide substantially equal signal lengths between corresponding flex contacts 60A and 62A. For example, such relatively equal length traces are illustrated in U. S. Pat. No. 6,576,992 which is incorporated by reference into this application.
As shown in the depicted preferred embodiment of
Lower flex contacts 62B and upper flex contacts 60B provide connection to VDD plane 66. In a preferred embodiment, upper flex contacts 60B and lower flex contacts 62B selectively connect upper IC element 14 and integrated lower stack element 12, respectively, to VDD plane 66.
Lower flex contacts 62 that are connected to first conductive layer 40 by vias 50 are identified as lower flex contacts 62C. To enhance the clarity of the view, only exemplar individual lower flex contacts 62C are literally identified in
In some embodiments, as shown in incorporated U.S. Pat. No. 6,576,992, module 10 will exhibit an array of module contacts 30 that has a greater number of contacts than the constituent elements of module 10 individually exhibit. In such embodiments, some of the module contacts 30 may contact lower flex contacts 62 that do not make contact with one of the die contacts 24 of integrated lower stack element 12 but are connected to upper IC contacts 19 of upper IC element 14. This allows module 10 to express a wider datapath than that expressed by constituent integrated lower stack element 12 or upper IC element 14.
A module contact 30 may also be in contact with a lower flex contact 62 to provide a location through which different levels of constituent elements of the module may be enabled when no unused contacts are available or convenient for that purpose.
Those of skill will recognize that as flex circuitry 18 is partially wrapped about lateral side 21 of integrated lower stack element 12, first conductive layer 40 becomes, on the part of flex 18 disposed above upper surface 23 of integrated lower stack element 12, the lower-most conductive layer of flex 18 from the perspective of upper IC element 14. In the depicted embodiment, those upper IC element contacts 19 of upper IC element 14 that provide ground (VSS) connections are connected to the first conductive layer 40. First conductive layer 40 lies beneath, however, second conductive layer 42 in that part of flex 18 that is wrapped above lower stack element 12. Consequently, in the depicted preferred embodiment, those upper flex contacts 60 that are in contact with ground-conveying upper IC element contacts 25 of upper IC element 14 have vias that route through intermediate layer 44 to reach first conductive layer 40. These vias may preferably be “on-pad” or coincident with the flex contact 60 to which they are connected.
As those of skill will recognize, there may be embodiments of the present invention that may profitably employ off-pad vias such as are described in previously cited U.S. application Ser. No. 10/005,581, filed Oct. 26, 2001, (the “'581 application) pending, which is incorporated by reference herein.
Those of skill who refer to the '581 application will note that the figures in that application will be instructive in teaching details concerning a flex circuitry construction for preferred embodiments of the present invention. Further, as those of skill will recognize, the details on location and relationships between upper and lower flex contacts as described in the '581 application are useful to preferred embodiments of the present invention as modified to fit the particulars of the considered embodiment. Further, alternative embodiments depicted in the '581 application are instructive in understanding alternatives available for embodiments of the present invention. For example, the '581 application provides teachings that are descriptive of features that may be employed to advantage in preferred embodiments in accordance with the present invention where module 10 expresses a datapath that is wider than that of the constituent circuits of either integrated lower stack element 12 or upper IC element 14 or where differential enablement of the respective elements of module 10 is desired as those skilled in the field will understand.
An embodiment of flex circuit 18A, 18B is shown in
As depicted in
Although the present invention has been described in detail, it will be apparent to those skilled in the art that the invention may be embodied in a variety of specific forms and that various changes, substitutions and alterations can be made without departing from the spirit and scope of the invention. The described embodiments are only illustrative and not restrictive and the scope of the invention is, therefore, indicated by the following claims.
This application is a continuation-in-part of U.S. application Ser. No. 10/005,581, filed Oct. 26, 2001, now U.S. Pat. No. 6,576,992, issued Jun. 10, 2003, which is hereby incorporated by reference for all purposes.
Number | Name | Date | Kind |
---|---|---|---|
3411122 | Schiller et al. | Nov 1968 | A |
3436604 | Hyltin | Apr 1969 | A |
3654394 | Gordon | Apr 1972 | A |
3727064 | Bottini | Apr 1973 | A |
3746934 | Stein | Jul 1973 | A |
3766439 | Isaacson | Oct 1973 | A |
3772776 | Weisenburger | Nov 1973 | A |
3806767 | Lehrfeld | Apr 1974 | A |
3983547 | Almasi | Sep 1976 | A |
4079511 | Grabbe | Mar 1978 | A |
4103318 | Schwede | Jul 1978 | A |
4288841 | Gogal | Sep 1981 | A |
4381421 | Coats et al. | Apr 1983 | A |
4398235 | Lutz et al. | Aug 1983 | A |
4406508 | Sadigh-Behzadi | Sep 1983 | A |
4420794 | Anderson | Dec 1983 | A |
4437235 | McIver | Mar 1984 | A |
4466183 | Burns | Aug 1984 | A |
4513368 | Houseman | Apr 1985 | A |
4587596 | Bunnell | May 1986 | A |
4645944 | Uya | Feb 1987 | A |
4696525 | Coller et al. | Sep 1987 | A |
4712129 | Orcutt | Dec 1987 | A |
4722691 | Gladd et al. | Feb 1988 | A |
4733461 | Nakano | Mar 1988 | A |
4758875 | Fujisaki et al. | Jul 1988 | A |
4763188 | Johnson | Aug 1988 | A |
4821007 | Fields et al. | Apr 1989 | A |
4823234 | Konishi et al. | Apr 1989 | A |
4833568 | Berhold | May 1989 | A |
4839717 | Phy et al. | Jun 1989 | A |
4862249 | Carlson | Aug 1989 | A |
4884237 | Mueller et al. | Nov 1989 | A |
4891789 | Quattrini et al. | Jan 1990 | A |
4903169 | Kitagawa et al. | Feb 1990 | A |
4911643 | Perry et al. | Mar 1990 | A |
4953060 | Lauffer et al. | Aug 1990 | A |
4956694 | Eide | Sep 1990 | A |
4983533 | Go | Jan 1991 | A |
4985703 | Kaneyama | Jan 1991 | A |
5012323 | Farnworth | Apr 1991 | A |
5016138 | Woodman | May 1991 | A |
5034350 | Marchisi | Jul 1991 | A |
5041015 | Travis | Aug 1991 | A |
5041902 | McShane | Aug 1991 | A |
5050039 | Edfors | Sep 1991 | A |
5057903 | Olla | Oct 1991 | A |
5064782 | Nishiguchi | Nov 1991 | A |
5068708 | Newman | Nov 1991 | A |
5081067 | Shimizu et al. | Jan 1992 | A |
5099393 | Bentlage et al. | Mar 1992 | A |
5104820 | Go et al. | Apr 1992 | A |
5117282 | Salatino | May 1992 | A |
5122862 | Kajihara et al. | Jun 1992 | A |
5138430 | Gow, 3rd et al. | Aug 1992 | A |
5138434 | Wood et al. | Aug 1992 | A |
5158912 | Kellerman et al. | Oct 1992 | A |
5159434 | Kohno et al. | Oct 1992 | A |
5159535 | Desai et al. | Oct 1992 | A |
5168926 | Watson et al. | Dec 1992 | A |
5198888 | Sugano et al. | Mar 1993 | A |
5198965 | Curtis et al. | Mar 1993 | A |
5214307 | Davis | May 1993 | A |
5219794 | Satoh et al. | Jun 1993 | A |
5222014 | Lin | Jun 1993 | A |
5224023 | Smith et al. | Jun 1993 | A |
5229641 | Katayama | Jul 1993 | A |
5229916 | Frankeny et al. | Jul 1993 | A |
5239198 | Lin et al. | Aug 1993 | A |
5240588 | Uchida | Aug 1993 | A |
5241454 | Ameen et al. | Aug 1993 | A |
5243133 | Engle et al. | Sep 1993 | A |
5247423 | Lin et al. | Sep 1993 | A |
5252855 | Ogawa et al. | Oct 1993 | A |
5252857 | Kane et al. | Oct 1993 | A |
5259770 | Bates et al. | Nov 1993 | A |
5261068 | Gaskins et al. | Nov 1993 | A |
5262927 | Chia et al. | Nov 1993 | A |
5276418 | Klosowiak et al. | Jan 1994 | A |
5279029 | Burns | Jan 1994 | A |
5281852 | Normington | Jan 1994 | A |
5289062 | Wyland | Feb 1994 | A |
5289346 | Carey et al. | Feb 1994 | A |
5311401 | Gates, Jr. et al. | May 1994 | A |
5313097 | Haj-Ali-Ahmadi et al. | May 1994 | A |
5337388 | Jacobowitz et al. | Aug 1994 | A |
5343075 | Nishino | Aug 1994 | A |
5343366 | Cipolla et al. | Aug 1994 | A |
5345205 | Kornrumpf | Sep 1994 | A |
5347159 | Khandros et al. | Sep 1994 | A |
5347428 | Carson et al. | Sep 1994 | A |
5357478 | Kikuda et al. | Oct 1994 | A |
5361228 | Adachi et al. | Nov 1994 | A |
5362656 | McMahon | Nov 1994 | A |
5375041 | McMahon | Dec 1994 | A |
5377077 | Burns | Dec 1994 | A |
5384690 | Davis et al. | Jan 1995 | A |
5386341 | Olson et al. | Jan 1995 | A |
5394010 | Tazawa et al. | Feb 1995 | A |
5394303 | Yamaji | Feb 1995 | A |
5396573 | Ecker et al. | Mar 1995 | A |
5397916 | Normington | Mar 1995 | A |
5402006 | O'Donley | Mar 1995 | A |
5420751 | Burns | May 1995 | A |
5428190 | Stopperan | Jun 1995 | A |
5432630 | Lebby et al. | Jul 1995 | A |
5438224 | Papageorge et al. | Aug 1995 | A |
5446620 | Burns et al. | Aug 1995 | A |
5448511 | Paurus et al. | Sep 1995 | A |
5455740 | Burns | Oct 1995 | A |
5475920 | Burns et al. | Dec 1995 | A |
5477082 | Buckley, III et al. | Dec 1995 | A |
5479318 | Burns | Dec 1995 | A |
5484959 | Burns | Jan 1996 | A |
5493476 | Burns | Feb 1996 | A |
5499160 | Burns | Mar 1996 | A |
5502333 | Bertin et al. | Mar 1996 | A |
5509197 | Stone | Apr 1996 | A |
5514907 | Moshayedi | May 1996 | A |
5516989 | Uedo et al. | May 1996 | A |
5523619 | McAllister et al. | Jun 1996 | A |
5523695 | Lin | Jun 1996 | A |
5541812 | Burns | Jul 1996 | A |
5543664 | Burns | Aug 1996 | A |
5561591 | Burns | Oct 1996 | A |
5566051 | Burns | Oct 1996 | A |
5572065 | Burns | Nov 1996 | A |
5588205 | Roane | Dec 1996 | A |
5592364 | Roane | Jan 1997 | A |
5594275 | Kwon et al. | Jan 1997 | A |
5610833 | Chang et al. | Mar 1997 | A |
5612570 | Eide et al. | Mar 1997 | A |
5615089 | Yoneda et al. | Mar 1997 | A |
5620782 | Davis et al. | Apr 1997 | A |
5631193 | Burns | May 1997 | A |
5642055 | Difrancesco | Jun 1997 | A |
5644161 | Burns | Jul 1997 | A |
5644839 | Stone | Jul 1997 | A |
5646446 | Nicewarner, Jr. et al. | Jul 1997 | A |
5654877 | Burns | Aug 1997 | A |
5657537 | Saia et al. | Aug 1997 | A |
5677569 | Choi et al. | Oct 1997 | A |
5717556 | Yanagida | Feb 1998 | A |
5729894 | Rostoker et al. | Mar 1998 | A |
5744827 | Jeong et al. | Apr 1998 | A |
5751553 | Clayton | May 1998 | A |
5763296 | Casati et al. | Jun 1998 | A |
5764497 | Mizumo et al. | Jun 1998 | A |
5776797 | Nicewarner et al. | Jul 1998 | A |
5778522 | Burns | Jul 1998 | A |
5783464 | Burns | Jul 1998 | A |
5789815 | Tessier et al. | Aug 1998 | A |
5801437 | Burns | Sep 1998 | A |
5801439 | Fujisawa et al. | Sep 1998 | A |
5804870 | Burns | Sep 1998 | A |
5805422 | Otake et al. | Sep 1998 | A |
5828125 | Burns | Oct 1998 | A |
5835988 | Ishii | Nov 1998 | A |
5841721 | Kwon et al. | Nov 1998 | A |
5852326 | Khandros et al. | Dec 1998 | A |
5869353 | Levy et al. | Feb 1999 | A |
5895969 | Masuda et al. | Apr 1999 | A |
5895970 | Miyoshi et al. | Apr 1999 | A |
5899705 | Akram | May 1999 | A |
5917709 | Johnson et al. | Jun 1999 | A |
5922061 | Robinson | Jul 1999 | A |
5925934 | Lim | Jul 1999 | A |
5926369 | Ingraham et al. | Jul 1999 | A |
5933712 | Bernhardt et al. | Aug 1999 | A |
5949657 | Karabatsos | Sep 1999 | A |
5953215 | Karabatsos | Sep 1999 | A |
5959839 | Gates | Sep 1999 | A |
5963427 | Bolleson | Oct 1999 | A |
5973395 | Suzuki et al. | Oct 1999 | A |
5995370 | Nakamori | Nov 1999 | A |
6002167 | Hatano et al. | Dec 1999 | A |
6002589 | Perino et al. | Dec 1999 | A |
6013948 | Akram et al. | Jan 2000 | A |
6014316 | Eide | Jan 2000 | A |
6025642 | Burns | Feb 2000 | A |
6028352 | Eide | Feb 2000 | A |
6028365 | Akram et al. | Feb 2000 | A |
6034878 | Osaka et al. | Mar 2000 | A |
6040624 | Chambers et al. | Mar 2000 | A |
6084293 | Ohuchi | Jul 2000 | A |
6084294 | Tomita | Jul 2000 | A |
6084778 | Malhi | Jul 2000 | A |
6097087 | Farnworth et al. | Aug 2000 | A |
6102710 | Beilin et al. | Aug 2000 | A |
6111761 | Peana et al. | Aug 2000 | A |
6114763 | Smith | Sep 2000 | A |
6121676 | Solberg | Sep 2000 | A |
RE36916 | Moshayedi | Oct 2000 | E |
6130477 | Chen et al. | Oct 2000 | A |
6157541 | Hacke | Dec 2000 | A |
6165817 | Akram | Dec 2000 | A |
6166443 | Inaba et al. | Dec 2000 | A |
6172874 | Bartilson | Jan 2001 | B1 |
6178093 | Bhatt et al. | Jan 2001 | B1 |
6186106 | Glovatsky | Feb 2001 | B1 |
6187652 | Chou et al. | Feb 2001 | B1 |
6205654 | Burns | Mar 2001 | B1 |
6208521 | Nakatsuka | Mar 2001 | B1 |
6218731 | Huang et al. | Apr 2001 | B1 |
6222737 | Ross | Apr 2001 | B1 |
6225688 | Kim et al. | May 2001 | B1 |
6233650 | Johnson et al. | May 2001 | B1 |
6234820 | Perino et al. | May 2001 | B1 |
6236565 | Gordon | May 2001 | B1 |
6262476 | Vidal | Jul 2001 | B1 |
6262895 | Forthun | Jul 2001 | B1 |
6265660 | Tandy | Jul 2001 | B1 |
6265766 | Moden | Jul 2001 | B1 |
6266252 | Karabatsos | Jul 2001 | B1 |
6271058 | Yoshida | Aug 2001 | B1 |
6272741 | Kennedy et al. | Aug 2001 | B1 |
6281577 | Oppermann et al. | Aug 2001 | B1 |
6285560 | Lyne | Sep 2001 | B1 |
6288907 | Burns | Sep 2001 | B1 |
6300679 | Mukerji et al. | Oct 2001 | B1 |
6303981 | Moden | Oct 2001 | B1 |
6310392 | Burns | Oct 2001 | B1 |
6313998 | Kledzik | Nov 2001 | B1 |
6316825 | Park et al. | Nov 2001 | B1 |
6320137 | Bonser et al. | Nov 2001 | B1 |
6323060 | Isaak | Nov 2001 | B1 |
6329708 | Komiyama | Dec 2001 | B1 |
6336262 | Dalal et al. | Jan 2002 | B1 |
6351029 | Isaak | Feb 2002 | B1 |
6360433 | Ross | Mar 2002 | B1 |
6360935 | Flake | Mar 2002 | B1 |
6368896 | Farnworth et al. | Apr 2002 | B2 |
6376769 | Chung | Apr 2002 | B1 |
6384339 | Neuman | May 2002 | B1 |
6392162 | Karabatsos | May 2002 | B1 |
6410857 | Gonya | Jun 2002 | B1 |
6414384 | Lo et al. | Jul 2002 | B1 |
6423622 | Chen et al. | Jul 2002 | B1 |
6426240 | Isaak | Jul 2002 | B2 |
6426549 | Isaak | Jul 2002 | B1 |
6426560 | Kawamura et al. | Jul 2002 | B1 |
6433418 | Fujisawa et al. | Aug 2002 | B1 |
6437990 | Degani et al. | Aug 2002 | B1 |
6444490 | Bertin et al. | Sep 2002 | B2 |
6444921 | Wang et al. | Sep 2002 | B1 |
6446158 | Karabatsos | Sep 2002 | B1 |
6447321 | Perino et al. | Sep 2002 | B1 |
6449159 | Haba | Sep 2002 | B1 |
6452826 | Kim et al. | Sep 2002 | B1 |
6462408 | Wehrly, Jr. | Oct 2002 | B1 |
6462412 | Kamei et al. | Oct 2002 | B2 |
6462423 | Akram et al. | Oct 2002 | B1 |
6465877 | Farnworth et al. | Oct 2002 | B1 |
6465893 | Khandros et al. | Oct 2002 | B1 |
6473308 | Forthun | Oct 2002 | B2 |
6486544 | Hashimoto | Nov 2002 | B1 |
6487078 | Kledzik et al. | Nov 2002 | B2 |
6489178 | Coyle et al. | Dec 2002 | B2 |
6489687 | Hashimoto | Dec 2002 | B1 |
6492718 | Ohmori | Dec 2002 | B2 |
6500697 | Ahmad | Dec 2002 | B2 |
6504104 | Hacke et al. | Jan 2003 | B2 |
6509639 | Lin | Jan 2003 | B1 |
6514793 | Isaak | Feb 2003 | B2 |
6522018 | Tay et al. | Feb 2003 | B1 |
6528870 | Fukatsu et al. | Mar 2003 | B2 |
6532162 | Schoenborn | Mar 2003 | B2 |
6538895 | Worz et al. | Mar 2003 | B2 |
6549413 | Karnezos et al. | Apr 2003 | B2 |
6552910 | Moon et al. | Apr 2003 | B1 |
6559521 | Tuttle | May 2003 | B2 |
6560117 | Moon | May 2003 | B2 |
6572387 | Burns et al. | Jun 2003 | B2 |
6576992 | Cady et al. | Jun 2003 | B1 |
6588095 | Pan | Jul 2003 | B2 |
6590282 | Wang et al. | Jul 2003 | B1 |
6600222 | Levardo | Jul 2003 | B1 |
6608763 | Burns et al. | Aug 2003 | B1 |
6614664 | Lee | Sep 2003 | B2 |
6617510 | Schreiber et al. | Sep 2003 | B2 |
6620651 | He et al. | Sep 2003 | B2 |
6624507 | Nguyen et al. | Sep 2003 | B1 |
6627984 | Bruce et al. | Sep 2003 | B2 |
6646333 | Hogerl | Nov 2003 | B1 |
6657134 | Spielberger et al. | Dec 2003 | B2 |
6660561 | Forthun | Dec 2003 | B2 |
6670700 | Hashimoto | Dec 2003 | B1 |
6673651 | Ohuchi et al. | Jan 2004 | B2 |
6677670 | Kondo | Jan 2004 | B2 |
6683377 | Shim et al. | Jan 2004 | B1 |
6689634 | Lyne | Feb 2004 | B1 |
6690584 | Uzuka et al. | Feb 2004 | B2 |
6699730 | Kim et al. | Mar 2004 | B2 |
6707148 | Mostafazedeh et al. | Mar 2004 | B1 |
6707684 | Andric et al. | Mar 2004 | B1 |
6709893 | Moden et al. | Mar 2004 | B2 |
6724076 | Kahlisch et al. | Apr 2004 | B1 |
6746894 | Fee et al. | Jun 2004 | B2 |
6762495 | Reyes et al. | Jul 2004 | B1 |
6762769 | Guo et al. | Jul 2004 | B2 |
6765288 | Damberg | Jul 2004 | B2 |
6768660 | Kong et al. | Jul 2004 | B2 |
6773848 | Nortoft et al. | Aug 2004 | B1 |
6776797 | Blom | Aug 2004 | B1 |
6778404 | Bolken et al. | Aug 2004 | B1 |
6781240 | Choi et al. | Aug 2004 | B2 |
6803651 | Chiang | Oct 2004 | B1 |
6812567 | Kim et al. | Nov 2004 | B2 |
6821029 | Grung et al. | Nov 2004 | B1 |
6833984 | Belgacem | Dec 2004 | B1 |
6841855 | Jaeck et al. | Jan 2005 | B2 |
6849949 | Lyu et al. | Feb 2005 | B1 |
6867496 | Hashimoto | Mar 2005 | B1 |
6869825 | Chiu | Mar 2005 | B2 |
6876074 | Kim | Apr 2005 | B2 |
6879047 | Heo | Apr 2005 | B1 |
6884653 | Larson | Apr 2005 | B2 |
6891729 | Ko et al. | May 2005 | B2 |
6893897 | Sweterlitsch | May 2005 | B2 |
6908792 | Bruce et al. | Jun 2005 | B2 |
6914324 | Rapport et al. | Jul 2005 | B2 |
6919626 | Burns | Jul 2005 | B2 |
6955945 | Rapport et al. | Oct 2005 | B2 |
6965166 | Hikita et al. | Nov 2005 | B2 |
6998704 | Yamazaki et al. | Feb 2006 | B2 |
7023701 | Stocken et al. | Apr 2006 | B2 |
7081373 | Roeters et al. | Jul 2006 | B2 |
7104804 | Batinovich | Sep 2006 | B2 |
7129571 | Kang | Oct 2006 | B2 |
20010006252 | Kim et al. | Jul 2001 | A1 |
20010013423 | Dalal et al. | Aug 2001 | A1 |
20010015487 | Forthun | Aug 2001 | A1 |
20010035572 | Isaak | Nov 2001 | A1 |
20010040793 | Inaba | Nov 2001 | A1 |
20020006032 | Karabatsos | Jan 2002 | A1 |
20020030995 | Shoji | Mar 2002 | A1 |
20020044423 | Primavera et al. | Apr 2002 | A1 |
20020048849 | Isaak | Apr 2002 | A1 |
20020076919 | Peters et al. | Jun 2002 | A1 |
20020101261 | Karabatsos | Aug 2002 | A1 |
20020114143 | Morrison et al. | Aug 2002 | A1 |
20020126951 | Sutherland et al. | Sep 2002 | A1 |
20020139577 | Miller | Oct 2002 | A1 |
20020164838 | Moon et al. | Nov 2002 | A1 |
20020180022 | Emoto | Dec 2002 | A1 |
20030016710 | Kamoto | Jan 2003 | A1 |
20030045025 | Coyle et al. | Mar 2003 | A1 |
20030049886 | Salmon | Mar 2003 | A1 |
20030067064 | Kim | Apr 2003 | A1 |
20030081392 | Cady et al. | May 2003 | A1 |
20030107118 | Pflughaupt et al. | Jun 2003 | A1 |
20030109078 | Takahashi et al. | Jun 2003 | A1 |
20030113998 | Ross | Jun 2003 | A1 |
20030164551 | Lee et al. | Sep 2003 | A1 |
20030168725 | Warner et al. | Sep 2003 | A1 |
20040000708 | Rapport et al. | Jan 2004 | A1 |
20040004281 | Bai et al. | Jan 2004 | A1 |
20040021211 | Damberg | Feb 2004 | A1 |
20040028936 | Kogiso et al. | Feb 2004 | A1 |
20040031972 | Pflughaupt et al. | Feb 2004 | A1 |
20040045159 | DiStefano et al. | Mar 2004 | A1 |
20040065963 | Karnezos | Apr 2004 | A1 |
20040075991 | Haba et al. | Apr 2004 | A1 |
20040099938 | Kang et al. | May 2004 | A1 |
20040104470 | Bang et al. | Jun 2004 | A1 |
20040115866 | Bang et al. | Jun 2004 | A1 |
20040124527 | Chiu | Jul 2004 | A1 |
20040150107 | Cha et al. | Aug 2004 | A1 |
20040157352 | Beroz et al. | Aug 2004 | A1 |
20040173902 | Kim et al. | Sep 2004 | A1 |
20040203190 | Pflughaupt et al. | Oct 2004 | A1 |
20040217461 | Damberg | Nov 2004 | A1 |
20040217471 | Haba | Nov 2004 | A1 |
20040238931 | Haba et al. | Dec 2004 | A1 |
20040245617 | Damberg et al. | Dec 2004 | A1 |
20040267409 | De Lorenzo et al. | Dec 2004 | A1 |
20050018495 | Bhakta et al. | Jan 2005 | A1 |
20050035440 | Mohammed | Feb 2005 | A1 |
20050040508 | Lee | Feb 2005 | A1 |
20050047250 | Ruckerbauer et al. | Mar 2005 | A1 |
20050133897 | Baek et al. | Jun 2005 | A1 |
Number | Date | Country |
---|---|---|
004215467 | Nov 1992 | DE |
004214102 | Dec 1992 | DE |
122-687 | Oct 1984 | EP |
0 298 211 | Jan 1989 | EP |
0426-303 | Oct 1990 | EP |
461-639 | Dec 1991 | EP |
57-31166 | Feb 1982 | JP |
58-96756 | Jun 1983 | JP |
58-112348 | Jul 1983 | JP |
359088863 | May 1984 | JP |
60-254762 | Dec 1985 | JP |
60-254762 | Dec 1985 | JP |
60254762 | Dec 1985 | JP |
3641047659 | Mar 1986 | JP |
62-230027 | Aug 1987 | JP |
62-230027 | Oct 1987 | JP |
63-153849 | Jun 1988 | JP |
4-209562 | Jul 1992 | JP |
404368167 | Dec 1992 | JP |
5-21697 | Jan 1993 | JP |
50-29534 | Feb 1993 | JP |
63-153849 | Jun 1998 | JP |
2000-88921 | Mar 2000 | JP |
2000307029 | Nov 2000 | JP |
2001077294 | Mar 2001 | JP |
2001085592 | Mar 2001 | JP |
2001332683 | Nov 2001 | JP |
2003037246 | Feb 2003 | JP |
2003086760 | Mar 2003 | JP |
2003086761 | Mar 2003 | JP |
2003309247 | Oct 2003 | JP |
2003309246 | Oct 2003 | JP |
2003347475 | Dec 2003 | JP |
2003347503 | Dec 2003 | JP |
834-957 | May 1981 | SU |
WO9744824 | Nov 1997 | WO |
WO 03037053 | May 2003 | WO |
Number | Date | Country | |
---|---|---|---|
20040000707 A1 | Jan 2004 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 10005581 | Oct 2001 | US |
Child | 10435192 | US |