The present invention is in the field of semiconductor packaging and is more specifically directed to package with heat transfer.
The increasing demand for computer performance has led to higher chip internal clock frequencies and parallelism, and has increased the need for higher bandwidth and lower latencies. Processor frequencies are predicted to reach 29 GHz by 2018, and off-chip signaling interface speeds are expected to exceed 56 Gb/s. Optimization of bandwidth, power, pin count, or number of wires and cost are the goals for high-speed interconnect design. The electrical performance of interconnects is restricted by noise and timing limitations of the silicon, package, board and cable. To that end, semiconductor packages must be made smaller, conforming more and more closely to the size of the die encapsulated within. However, as the size of the package shrinks to the size of the die itself, the size of the package becomes insufficient to support the number of leads generally required by current applications.
Chip Scale Packages (CSP) have emerged as the dominant package for such applications.
To overcome the issues mentioned above, the semiconductor industry has moved toward Ball Grid Array (BGA) packages. The BGA is descended from the pin grid array (PGA), which is a package with one face covered (or partly covered) with pins in a grid pattern. These pins are used to conduct electrical signals from the integrated circuit (IC) to the printed circuit board (PCB) it is placed on. In a BGA, the pins are replaced by balls of solder stuck to the bottom of the package. The device is placed on a PCB that carries copper pads in a pattern that matches the solder balls. The assembly is then heated, either in a reflow oven or by an infrared heater, causing the solder balls to melt. Surface tension causes the molten solder to hold the package in alignment with the circuit board, at the correct separation distance, while the solder cools and solidifies. The BGA is a solution to the problem of producing a miniature package for an IC with many hundreds of I/O. As pin grid arrays and dual-in-line (DIP) surface mount (SOIC) packages are produced with more and more pins, and with decreasing spacing between the pins, difficulties arose in the soldering process. As package pins got closer together, the danger of accidentally bridging adjacent pins with solder grew. BGAs do not have this problem, because the solder is factory-applied to the package in exactly the right amount. Alternatively, solder balls can be replaced by solder landing pads, forming a Land Grid Array (LGA) package.
In one aspect of the invention, a process for forming a land grid array package comprises at least partially encasing a first leadframe strip in a first mold compound thereby forming a molded leadframe strip, mounting at least one semiconductor device on the molded leadframe strip, mounting bondwires on the at least one semiconductor device to effectuate electrical contact between the semiconductor device and the molded leadframe, at least partially encasing the molded leadframe strip, the semiconductor device, and bondwires, and singulating the molded leadframe strip to form discrete land grid array packages. In some embodiments, The process further comprises embossing at least one step cavity into the molded leadframe strip for encapsulating the at least one semiconductor device. Optionally, a cap is mounted thereby forming a full cavity into the molded leadframe strip for encapsulating the semiconductor device. The cap comprises at least one of the following materials: glass, silicon, ceramic, metal, epoxy, and plastic. In some embodiments, a second leadframe strip is coupled to the first leadframe strip to form a dual leadframe strip. The first leadframe strip and the second leadframe strip are able to be coupled by a soft metal which comprises at least one of the following materials: gold, silver, lead, and tin. The first and second mold compounds can be identical or differing materials.
In another aspect of the invention, an apparatus for forming a land grid array package comprises means for at least partially encasing a first leadframe strip in a first mold compound thereby forming a molded leadframe strip, means for mounting at least one semiconductor device on the molded leadframe strip, means for mounting bondwires on the at least one semiconductor device to effectuate electrical contact between the at least one semiconductor device and the molded leadframe, means for at least partially encasing the molded leadframe strip, the at least one semiconductor device, and bondwires in a second mold compound, and means for singulating the molded leadframe strip to form discrete land grid array packages. In some embodiments, the apparatus further comprises an embossing surface for forming a step cavity into the molded leadframe strip for encapsulating the at least one semiconductor device. Optionally, the apparatus further comprises means for mounting a cap thereby forming a full cavity into the molded leadframe strip for encapsulating the at least one semiconductor device. The cap comprises at least one of the following materials: glass, silicon, ceramic, metal, epoxy, and plastic. In some embodiments, the apparatus comprises means to couple the first leadframe to a second leadframe by a soft metal. The soft metal comprises at least one of the following materials: gold, silver, lead, and tin. The first and second mold compounds can be identical or differing materials.
In another aspect of the invention, a land grid array package comprises a first leadframe, a substrate for supporting the first leadframe, at least one semiconductor die mounted on the first leadframe, a plurality of bondwires to effectuate electrical contact between the at least one leadframe and the at least one semiconductor die. In some embodiments, the substrate comprises a first mold compound. Furthermore, the semiconductor device can comprise a second mold compound for at least partially encasing the at least one leadframe, the substrate, the at least one semiconductor device and the plurality of wirebonds. In some embodiments, the package further comprises a step cavity. Alternatively, the package comprises a cap for forming a full cavity. Optionally, package comprises a second leadframe coupled to the first leadframe by a soft metal. The soft metal is comprised of at least one of the following materials: gold, silver, lead and tin.
The novel features of the invention are set forth in the appended claims. However, for purpose of explanation, several embodiments of the invention are set forth in the following figures.
In the following description, numerous details and alternatives are set forth for purpose of explanation. However, one of ordinary skill in the art will realize that the invention can be practiced without the use of these specific details. In other instances, well-known structures and devices are shown in block diagram form in order not to obscure the description of the invention with unnecessary detail. For example, it is commonly known in the art of semiconductor device assembly that assembly is generally done on a matrix array of leadframes, often referred to as leadframe strips, each strip having a plurality of individual positions that will be processed in various ways to form individual packaged semiconductor devices. A position can have one or more semiconductor die within.
In a first aspect of the invention, a process 300 for forming semiconductor packages is detailed in
For more predictable molding results, carrier tape is able to be used effectuate the molding process as shown in
In some applications, it is advantageous for greater height clearance within the semiconductor package.
An alternative surface is shown in
In another aspect of the invention, a step cavity LGA and a process for producing the same 800 are disclosed in
In another aspect of the invention, a cavity LGA and a process for making the same 900 are disclosed. A leadframe strip 901 is mounted to adhesive tape 902. In some embodiments, the leadframe 901 is a half etched leadframe. The leadframe strip 901 is molded with a first mold compound 903. By way of example, the first mold compound is able to be a thermoset compound or a thermoplastic compound. In some embodiments, step cavities 904 are formed by the embossing procedure described in
In some applications, multiple hundreds of I/O are required, and more than one leadframe is required to effectuate contact between a semiconductor device and its application. Furthermore, flexibility in routing I/O is advantageous, since end users can have specific demands as to the locations of I/O on a package landing pattern. To those ends, a dual molded leadframe LGA package and a process for making the same 1000 are disclosed in
While the invention has been described with reference to numerous specific details, one of ordinary skill in the art will recognize that the invention can be embodied in other specific forms without departing from the spirit of the invention. Thus, one of ordinary skill in the art will understand that the invention is not to be limited by the foregoing illustrative details, but rather is to be defined by the appended claims.
This application claims benefit of priority under 35 U.S.C. section 119(e) of U.S. Provisional Patent Application 60/875,162 filed Dec. 14, 2006, entitled MOLDED-LEADFRAME SUBSTRATE SEMICONDUCTOR PACKAGE and U.S. Provisional Patent Application 60/877,274 filed Dec. 26, 2006, entitled MOLDED-LEADFRAME SUBSTRATE SEMICONDUCTOR PACKAGE, which are both incorporated herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
3611061 | Segerson | Oct 1971 | A |
4411719 | Lindberg | Oct 1983 | A |
4501960 | Jouvet et al. | Feb 1985 | A |
4801561 | Sankhagowit | Jan 1989 | A |
4855672 | Shreeve | Aug 1989 | A |
5105259 | McShane et al. | Apr 1992 | A |
5195023 | Manzione et al. | Mar 1993 | A |
5247248 | Fukunaga | Sep 1993 | A |
5248075 | Young et al. | Sep 1993 | A |
5281851 | Mills et al. | Jan 1994 | A |
5285104 | Kondo et al. | Feb 1994 | A |
5343076 | Katayama et al. | Aug 1994 | A |
5396185 | Honma et al. | Mar 1995 | A |
5397921 | Karnezos | Mar 1995 | A |
5479105 | Kim et al. | Dec 1995 | A |
5535101 | Miles et al. | Jul 1996 | A |
5596231 | Combs | Jan 1997 | A |
5767527 | Yoneda et al. | Jun 1998 | A |
5843808 | Karnezos | Dec 1998 | A |
5959363 | Yamada | Sep 1999 | A |
5990692 | Jeong et al. | Nov 1999 | A |
6072239 | Yoneda et al. | Jun 2000 | A |
6111324 | Sheppard et al. | Aug 2000 | A |
6159770 | Tetaka et al. | Dec 2000 | A |
6177729 | Benenati et al. | Jan 2001 | B1 |
6197615 | Song et al. | Mar 2001 | B1 |
6208020 | Minamio et al. | Mar 2001 | B1 |
6229200 | Mclellan et al. | May 2001 | B1 |
6242281 | Mclellan et al. | Jun 2001 | B1 |
6250841 | Ledingham | Jun 2001 | B1 |
6284569 | Sheppard et al. | Sep 2001 | B1 |
6285075 | Combs et al. | Sep 2001 | B1 |
6294100 | Fan et al. | Sep 2001 | B1 |
6304000 | Isshiki et al. | Oct 2001 | B1 |
6326678 | Karnezos et al. | Dec 2001 | B1 |
6329711 | Kawahara et al. | Dec 2001 | B1 |
6353263 | Dotta et al. | Mar 2002 | B1 |
6372625 | Shigeno et al. | Apr 2002 | B1 |
6376921 | Yoneda et al. | Apr 2002 | B1 |
6384472 | Huang | May 2002 | B1 |
6392427 | Yang | May 2002 | B1 |
6414385 | Huang et al. | Jul 2002 | B1 |
6429048 | McLellan et al. | Aug 2002 | B1 |
6448665 | Nakazawa | Sep 2002 | B1 |
6451709 | Hembree | Sep 2002 | B1 |
6455348 | Yamaguchi | Sep 2002 | B1 |
6476469 | Hung et al. | Nov 2002 | B2 |
6489218 | Kim et al. | Dec 2002 | B1 |
6498099 | McLellan et al. | Dec 2002 | B1 |
6507116 | Caletka et al. | Jan 2003 | B1 |
6545332 | Huang | Apr 2003 | B2 |
6545347 | McClellan | Apr 2003 | B2 |
6552417 | Combs | Apr 2003 | B2 |
6552423 | Song et al. | Apr 2003 | B2 |
6566740 | Yasunaga et al. | May 2003 | B2 |
6573121 | Yoneda et al. | Jun 2003 | B2 |
6585905 | Fan et al. | Jul 2003 | B1 |
6586834 | Sze et al. | Jul 2003 | B1 |
6635957 | Kwan et al. | Oct 2003 | B2 |
6661104 | Jiang | Dec 2003 | B2 |
6667191 | McLellan et al. | Dec 2003 | B1 |
6683368 | Mostafazadeh | Jan 2004 | B1 |
6686667 | Chen | Feb 2004 | B2 |
6703696 | Ikenaga et al. | Mar 2004 | B2 |
6723585 | Tu et al. | Apr 2004 | B1 |
6724071 | Combs | Apr 2004 | B2 |
6734044 | Fan et al. | May 2004 | B1 |
6734552 | Combs et al. | May 2004 | B2 |
6737755 | McLellan et al. | May 2004 | B1 |
6764880 | Wu et al. | Jul 2004 | B2 |
6781242 | Fan et al. | Aug 2004 | B1 |
6800948 | Fan et al. | Oct 2004 | B1 |
6812552 | Islam et al. | Nov 2004 | B2 |
6818472 | Fan et al. | Nov 2004 | B1 |
6818978 | Fan | Nov 2004 | B1 |
6818980 | Pedron, Jr. | Nov 2004 | B1 |
6841859 | Thamby et al. | Jan 2005 | B1 |
6876066 | Fee et al. | Apr 2005 | B2 |
6893169 | Exposito et al. | May 2005 | B1 |
6894376 | Mostafazadeh et al. | May 2005 | B1 |
6897428 | Minamio et al. | May 2005 | B2 |
6927483 | Lee et al. | Aug 2005 | B1 |
6933176 | Kirloskar et al. | Aug 2005 | B1 |
6933594 | McLellan et al. | Aug 2005 | B2 |
6940154 | Pedron et al. | Sep 2005 | B2 |
6946324 | McLellan et al. | Sep 2005 | B1 |
6964918 | Fan et al. | Nov 2005 | B1 |
6967126 | Lee et al. | Nov 2005 | B2 |
6979594 | Fan et al. | Dec 2005 | B1 |
6982491 | Fan et al. | Jan 2006 | B1 |
6984785 | Diao et al. | Jan 2006 | B1 |
6989294 | McLellan et al. | Jan 2006 | B1 |
6995460 | McLellan et al. | Feb 2006 | B1 |
7008825 | Bancod et al. | Mar 2006 | B1 |
7009286 | Kirloskar et al. | Mar 2006 | B1 |
7045883 | McCann et al. | May 2006 | B1 |
7049177 | Fan et al. | May 2006 | B1 |
7052935 | Pai et al. | May 2006 | B2 |
7060535 | Sirinorakul et al. | Jun 2006 | B1 |
7071545 | Patel et al. | Jul 2006 | B1 |
7091581 | McLellan et al. | Aug 2006 | B1 |
7101210 | Lin et al. | Sep 2006 | B2 |
7102210 | Ichikawa | Sep 2006 | B2 |
7125747 | Lee et al. | Oct 2006 | B2 |
7126218 | Darveaux | Oct 2006 | B1 |
7205178 | Shiu et al. | Apr 2007 | B2 |
7224048 | McLellan et al. | May 2007 | B1 |
7247526 | Fan et al. | Jul 2007 | B1 |
7253503 | Fusaro et al. | Aug 2007 | B1 |
7259678 | Brown et al. | Aug 2007 | B2 |
7274088 | Wu et al. | Sep 2007 | B2 |
7314820 | Lin et al. | Jan 2008 | B2 |
7315077 | Choi et al. | Jan 2008 | B2 |
7315080 | Fan et al. | Jan 2008 | B1 |
7342305 | Diao et al. | Mar 2008 | B1 |
7344920 | Kirloskar et al. | Mar 2008 | B1 |
7348663 | Kirloskar et al. | Mar 2008 | B1 |
7358119 | McLelland et al. | Apr 2008 | B2 |
7371610 | Fan et al. | May 2008 | B1 |
7372151 | Fan et al. | May 2008 | B1 |
7381588 | Patel et al. | Jun 2008 | B1 |
7399658 | Shim et al. | Jul 2008 | B2 |
7408251 | Hata et al. | Aug 2008 | B2 |
7411289 | McLellan et al. | Aug 2008 | B1 |
7449771 | Fan et al. | Nov 2008 | B1 |
7459345 | Hwan | Dec 2008 | B2 |
7476975 | Ogata | Jan 2009 | B2 |
7482690 | Fan et al. | Jan 2009 | B1 |
7495319 | Fukuda et al. | Feb 2009 | B2 |
7507603 | Berry et al. | Mar 2009 | B1 |
7595225 | Fan et al. | Sep 2009 | B1 |
7608484 | Lange et al. | Oct 2009 | B2 |
7709857 | Kim et al. | May 2010 | B2 |
7714418 | Lim et al. | May 2010 | B2 |
8035207 | Camacho et al. | Oct 2011 | B2 |
8710651 | Sakata | Apr 2014 | B2 |
20010005047 | Jimarez et al. | Jun 2001 | A1 |
20010007285 | Yamada et al. | Jul 2001 | A1 |
20020090162 | Asada | Jul 2002 | A1 |
20020109214 | Minamio et al. | Aug 2002 | A1 |
20030006055 | Chien-Hung et al. | Jan 2003 | A1 |
20030045032 | Abe | Mar 2003 | A1 |
20030071333 | Matsuzawa | Apr 2003 | A1 |
20030102540 | Lee | Jun 2003 | A1 |
20030143776 | Pedron, Jr. et al. | Jul 2003 | A1 |
20030178719 | Combs et al. | Sep 2003 | A1 |
20030201520 | Knapp et al. | Oct 2003 | A1 |
20030207498 | Islam et al. | Nov 2003 | A1 |
20030234454 | Pedron et al. | Dec 2003 | A1 |
20040014257 | Kim et al. | Jan 2004 | A1 |
20040026773 | Koon et al. | Feb 2004 | A1 |
20040046237 | Abe et al. | Mar 2004 | A1 |
20040046241 | Combs et al. | Mar 2004 | A1 |
20040070055 | Punzalan et al. | Apr 2004 | A1 |
20040080025 | Kasahara et al. | Apr 2004 | A1 |
20040110319 | Fukutomi et al. | Jun 2004 | A1 |
20050003586 | Shimanuki | Jan 2005 | A1 |
20050077613 | McLellan et al. | Apr 2005 | A1 |
20050104205 | Wang | May 2005 | A1 |
20050184404 | Huang | Aug 2005 | A1 |
20050236701 | Minamio et al. | Oct 2005 | A1 |
20050263864 | Islam et al. | Dec 2005 | A1 |
20060071351 | Lange | Apr 2006 | A1 |
20060170081 | Gerber et al. | Aug 2006 | A1 |
20060192295 | Lee et al. | Aug 2006 | A1 |
20060223229 | Kirloskar et al. | Oct 2006 | A1 |
20060223237 | Combs et al. | Oct 2006 | A1 |
20060237231 | Hata et al. | Oct 2006 | A1 |
20060273433 | Itou et al. | Dec 2006 | A1 |
20070001278 | Jeon et al. | Jan 2007 | A1 |
20070013038 | Yang | Jan 2007 | A1 |
20070029540 | Kajiwara et al. | Feb 2007 | A1 |
20070093000 | Shim et al. | Apr 2007 | A1 |
20070200210 | Zhao et al. | Aug 2007 | A1 |
20070235217 | Workman | Oct 2007 | A1 |
20080048308 | Lam | Feb 2008 | A1 |
20080150094 | Anderson | Jun 2008 | A1 |
20080251913 | Inomata | Oct 2008 | A1 |
20090014848 | Ong Wai Lian et al. | Jan 2009 | A1 |
20090152691 | Nguyen et al. | Jun 2009 | A1 |
20090152694 | Bemmerl et al. | Jun 2009 | A1 |
20090230525 | Chang Chien et al. | Sep 2009 | A1 |
20090236713 | Xu et al. | Sep 2009 | A1 |
20100133565 | Cho et al. | Jun 2010 | A1 |
20100149773 | Said | Jun 2010 | A1 |
20100178734 | Lin | Jul 2010 | A1 |
20100224971 | Li | Sep 2010 | A1 |
20110076805 | Nondhasitthichai et al. | Mar 2011 | A1 |
20110115061 | Krishnan et al. | May 2011 | A1 |
20110201159 | Mori et al. | Aug 2011 | A1 |
20130069221 | Lee et al. | Mar 2013 | A1 |
Entry |
---|
U.S. Appl. No. 11/788,496, filed May 19, 2007, Somchai Nondhasitthichai et al. |
U.S. Appl. No. 11/731,522, filed Mar. 30, 2007, Saravuth Sirinorakul et al. |
U.S. Appl. No. 12/002,186, filed Dec. 14, 2007, Somchai Nondhasitthichai et al. |
U.S. Appl. No. 12/002,187, filed Dec. 14, 2007, Somchai Nondhasitthichai et al. |
U.S. Appl. No. 12/154,483, filed May 22, 2008, Saravuth Sirinorakul et al. |
U.S. Appl. No. 11/899,189, Saravuth Sirinorakul et al. |
U.S. Appl. No. 12/231,710, Saravuth Sirinorakul et al. |
U.S. Appl. No. 12/287,174, Saravuth Sirinorakul et al. |
U.S. Appl. No. 12/378,119, Somchai Nondhasitthichai et al. |
U.S. Appl. No. 12/383,135, Somchai Nondhasitthichai et al. |
Office Action dated Nov. 30, 2009, U.S. Appl. No. 12/002,186, filed Dec. 14, 2007, Somchai Nondhasitthichai et al. |
Office Action dated Jan. 28, 2010, U.S. Appl. No. 12/378,119, filed Feb. 10, 2009, Somchai Nondhasitthichai et al. |
Office Action dated Aug. 3, 2011, U.S. Appl. No. 12/002,187, filed Dec. 14, 2007, Somchai Nondhasitthichai et al. |
Office Action dated Sep. 23, 2010, U.S. Appl. No. 12/002,186, filed Dec. 14, 2007, Somchai Nondhasitthichai et al. |
Office Action dated Oct. 29, 2010, U.S. Appl. No. 12/378,119, filed Feb. 2, 2009, Somchai Nondhasitthichai et al. |
Notice of Allowance, dated Nov. 28, 2012, U.S. Appl. No. 12/960,268, filed Dec. 3, 2012, Saravuth Sirinorakul et al. |
Non-Final Office Action mailed Dec. 20, 2012, U.S. Appl. No. 13/045,253, filed Mar. 10, 2011, Saravuth Sirinorakul. |
Office Action mailed Dec. 19, 2012, U.S. Appl. No. 12/834,688, filed Jul. 12, 2010, Saravuth Sirinorakul. |
Office Action dated Feb. 10, 2011, U.S. Appl. No. 12/002,187, filed Dec. 14, 2007, Somchai Nondhasitthichai et al. |
Office Action dated May 9, 2011, U.S. Appl. No. 12/231,710, filed Sep. 4, 2007, Saravuth Sirinorakul et al. |
Michael Quirk and Julian Serda, Semiconductor Manufacturing Technology, Pearson Education International, Pearson Prentice Hall , 2001, p. 587-588. |
Office Action dated Apr. 25, 2012, U.S. Appl. No. 12/960,268, filed Dec. 3, 2010, Somchai Nondhasitthichai et al. |
Office Action dated May 7, 2012, U.S. Appl. No. 12/576,846, filed Oct. 9, 2009, Somchai Nondhasitthichai et al. |
Office Action dated Dec. 5, 2011, U.S. Appl. No. 12/576,846, filed Oct. 9, 2009, Somchai Nondhasitthichai et al. |
Office Action mailed on Dec. 27, 2013, U.S. Appl. No. 12/002,186, filed Dec. 14, 2007, Somchai Nondhasitthichai et al. |
Office Action mailed on Jan. 15, 2014, U.S. Appl. No. 12/002,187, filed Dec. 14, 2007, Somchai Nondhasitthichai et al. |
Office Action mailed on Dec. 31, 2013, U.S. Appl. No. 12/378,119, filed Feb. 10, 2009, Somchai Nondhasitthichai et al. |
Office Action mailed on Dec. 27, 2013, U.S. Appl. No. 12/576,846, filed Oct. 9, 2009, Somchai Nondhasitthichai et al. |
Final Office Action mailed on Sep. 21, 2015, U.S. Appl. No. 12/964,698, filed Dec. 9, 2010, Somchai Nondhasitthichai et al. |
Office Action mailed on Nov. 2, 2015, U.S. Appl. No. 12/834,688, filed Jul. 12, 2010, Saravuth Sirinorakul, 17 pages. |
Final Office Action mailed on Apr. 25, 2016, U.S. Appl. No. 12/914,694, filed Oct. 28, 2010, Saravuth Sirinorakul, 41 pages. |
Office Action mailed on Aug. 24, 2016, U.S. Appl. No. 12/914,694, filed Oct. 28, 2010, Saravuth Sirinorakul, 22 pages. |
Number | Date | Country | |
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60875162 | Dec 2006 | US | |
60877274 | Dec 2006 | US |