The present invention relates to the field of electronics, and more particularly, to structures for bonding electronic substrates and related methods.
In packaging microelectronic devices, such as packaging integrated circuit chips en printed circuit boards, the integrated circuit chips are generally mounted parallel to and facing the printed circuit board such that faces of the integrated circuit chips are adjacent a face of the circuit board. This packaging technology allows a large number of input/output connections between the integrated circuit chips and the printed circuit board, especially when solder bump technology is used over the entire face of the integrated circuit chips. However, this technology may limit a packaging density, because the large faces of the integrated circuit chips are mounted adjacent the face of the printed circuit board.
To increase the packaging density of chips on a printed circuit board, three-dimensional packaging has been proposed, wherein the chips are mounted orthogonal to the circuit board so that edges of the chips are adjacent the face of the circuit board. See, for example, U.S. Pat. No. 5,347,428 to Carson et al. entitled “Module Comprising IC Memory Stack Dedicated to and Structurally Combined With an IC Microprocessor Chip” and U.S. Pat. No. 5,432,729 to Carson et al. entitled “Electronic Module Comprising a Stack of IC Chips Each Interacting With an IC Chip Secured to the Stack”, both of which are assigned to Irvine Sensors Corporation. In these patents, solder bumps are used to connect the edges, rather than the faces of integrated circuit chips to a substrate. Unfortunately, an edge-to-face connection may be difficult and costly to produce.
U.S. Pat. No. 5,113,314 to Wheeler et al. entitled “High Speed, High Density Chip Mounting” describes another three-dimensional packaging technique. The '314 patent describes a plurality of integrated circuit chips whose active faces are perpendicular to a chip carrier. Solder bumps are used to connect pads on the chips to pads on the substrate.
An issue in using solder bump technology to interconnect a three-dimensional package is how to get the solder bump to bridge from one substrate to another. In particular, it may be difficult to form solder which extends beyond the edge of a chip because a chip sawing or dicing operation may remove solder which extends beyond the chip edge. Moreover, during solder reflow, the solder may take the shape of a hemisphere or partial hemisphere on a contact pad. Thus, it may be difficult to cause the solder on one contact pad to extend onto another contact pad, in a three-dimensional package. Even if solder is placed on a pair of adjacent contact pads in a three-dimensional package, it may be difficult to cause the reflowed solder to join up, rather than forming individual solder bumps.
Solder interconnections are also discussed in U.S. Pat. Nos. 5,793,116; 6,418,033; and 6,392,163. Each of these patents are assigned to the assignee of the present invention, and the disclosures of each of these patents are hereby incorporated herein in their entirety by reference.
According to embodiments of the present invention, a solder structure may include a substrate and a solder wettable pad on the substrate adjacent an edge of the substrate. The solder wettable pad may have a length parallel to the edge of the substrate and a width perpendicular to the edge of the substrate wherein the length parallel to the edge of the substrate is greater than the width perpendicular to the edge of the substrate. In addition, a solder bump on the solder wettable pad may extend laterally from the solder wettable pad at least to within about 10 microns of the edge of the substrate. According to some embodiments, the solder bump may extend laterally from the solder wettable pad to and/or beyond the edge of the substrate.
According to additional embodiments of the present invention, a method of forming a solder structure may include providing a wafer including a plurality of die therein, and forming a solder wettable pad on one of the die adjacent an edge of the die. The solder wettable pad may have a length parallel to the edge of the die and a width perpendicular to the edge of the die wherein the length parallel to the edge of the die is greater than the width perpendicular to the edge of the die. A solder bump may be formed on the solder wettable pad, and the die may be separated from the wafer along the edge of the die after plating the solder bump on the solder wettable pad. After separating the die from the wafer, the solder bump on the solder wettable pad may be reflowed so that the solder structure extends laterally from the solder wettable pad toward the edge of the die. According to some embodiments, the solder bump may extend laterally to and/or beyond the edge of the die.
According to still additional embodiments of the present invention, a method of forming a solder structure may include providing a wafer including a plurality of die therein, and forming a solder wettable pad on one of the die adjacent an edge of the die. A solder bump may be formed on the solder wettable pad such that the solder bump is maintained within the edge of the die, and the die may be separated from the wafer along the edge of the die after forming the solder bump on the solder wettable pad. After separating the die from the wafer, the solder bump on the solder wettable pad may be subjected to reflow so that the solder bump extends laterally from the solder wettable pad to at least within about 10 microns of the edge of the die. According to some embodiments, the solder bump may extend to and/or beyond the edge of the die.
According to yet additional embodiments of the present invention, a method of forming a solder structure may include forming a solder wettable pad on a substrate adjacent an edge of the substrate. The solder wettable pad may have a length parallel to the edge of the substrate and a width perpendicular to the edge of the substrate wherein the length parallel to the edge of the substrate is greater than the width perpendicular to the edge of the substrate. In addition, a solder bump may be formed on the solder wettable pad wherein the solder bump extends laterally from the solder wettable pad to at least within about 10 microns of the edge of the substrate. According to some embodiments, the solder bump may extend to and/or beyond the edge of the substrate.
The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
In the drawings, the thickness of layers and regions are exaggerated for clarity. It will also be understood that when an element such as a layer, region or substrate is referred to as being on another element, it can be directly on the other element or intervening elements may also be present. In contrast, if an element such as a layer, region or substrate is referred to as being directly on another element, then no other intervening elements are present. As used herein, the term and/or includes any and all combinations of one or more of the associated listed items.
Furthermore, relative terms, such as beneath, upper, and/or lower may be used herein to describe one element's relationship to another element as illustrated in the figures. It will be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation depicted in the figures. For example, if the device in one of the figures is turned over, elements described as below other elements would then be oriented above the other elements. The exemplary term below, can therefore, encompasses both an orientation of above and below.
It will be understood that although the terms first and second are used herein to describe various regions, layers and/or sections, these regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one region, layer or section from another region, layer or section. Thus, a first region, layer or section discussed below could be termed a second region, layer or section, and similarly, a second region, layer or section could be termed a first region, layer or section without departing from the teachings of the present invention. Like numbers refer to like elements throughout.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
According to embodiments of the present invention, reservoir and pad geometries may provide bump overhang and increase a range of applications, and in particular applications with relatively fine pitch. In the analysis of Laplace-Young, at any point P on a surface S, the curvature of S at P can be represented by two orthogonal arcs or principal radii R1 and R2, as shown in
If S represents an air-liquid interface, then the pressure difference across the surface is:
For a spherical liquid body, this reduces to:
where (is the surface tension difference across the interface. This pressure may also represent a potential energy of the surface. Since natural forces may tend to reduce energy, the liquid surface may tend to increase R1 and R2.
According to embodiments of the present invention, solder bumps may be placed (such as by plating) adjacent the edge of a die or substrate in a wafer, and the wafer including the die or substrate may be diced or sawed to singulate the die or substrate. More particularly, a die may include a plurality of integrated circuits (such as transistors, resistors, capacitors, diodes, inductors, etc.) therein and a wafer may include a plurality of such die. The solder bumps on the die can then be melted (after singulating the die) to form solder bump structures extending beyond the edge of the die or substrate, and to cause the solder bump structures to touch and wet to pads on a mating substrate oriented at an angle to the edge of the die or substrate. The mating substrate, for example, may be another integrated circuit device and/or a printed circuit board.
In addition, an overhang of solder may be increased to accommodate uncertainty in the width of a dicing kerf after dicing. Moreover, pitch or center-to-center spacing of these solder bumps on a die may be reduced to increase the number of interconnections along the edge of the die or substrate. A formation of extraneous solder structures due to inherent instabilities and/or perturbations of the manufacturing processes may also be reduced.
Structures according to embodiments of the present invention are discussed below with respect to
A super-hemispheric bump geometry is shown in
According to embodiments of the present invention illustrated in
In
In
In
A size of the meniscus 71 (neck) can be reduced by changing the pressure differential, by either increasing the diameter of pad 73 or reducing the width of reservoir 75, as shown in
Increasing the pad diameter to reduce internal pressure and reducing pad diameter to increase overhang can be decoupled, as seen in the Laplace-Young equation. Recognition that the two principal radii are different allows the oval design of
Further improvement can be seen in
Since the liquid will not form a sharp angle, squaring the corners of pad 101 along the die edge as shown in
These designs may work because the internal pressure may be dominated by the smaller of the two principal radii.
Guidelines for solder wettable pads, solder wettable reservoirs, and solder bumps according to some embodiments of the present invention are provided below.
1.) Reservoir Design
2.) Pad Design
More particularly, solder may be plated to a uniform thickness in the reservoir and bump regions so that the plated solder in the bump region does not interfere when dicing the substrate from a wafer including the substrate. Once the substrate has been diced, the plated solder can be heated above its melting temperature so that solder flows from the reservoirs and branches thereof (1109a, 1109a′, 1109a″, 1109b, 1109b′, and 1109b″) to the bump 1101. Accordingly, the solder bump 1101 can expand laterally beyond the edge of the substrate 1103 for bonding with substrate 1107.
Structures according to additional embodiments of the invention are shown in
More particularly, solder may be plated to a uniform thickness in the reservoir and bump regions so that the plated solder in the bump region does not interfere when dicing the substrate from a wafer including the substrate. Once the substrate has been diced, the plated solder can be heated above its melting temperature so that solder flows from the reservoirs and branches thereof (1209a, 1209b, 1209b′, and 1209b″) to the bump 1201. Accordingly, the solder bump 1201 can expand laterally beyond the edge of the substrate 1203 for bonding with substrate 1207.
For example, a continuous seed layer may be formed across the wafer 1303, and the seed layer may be used as a plating electrode to selectively electroplate the solder bumps 1307 through a plating mask or template. The plating mask or template and portions of the seed layer not covered by the solder bumps may then be removed. Portions of the seed layer remaining between respective solder bumps 1307 and die 1301a-i may make up the solder wettable pads. For example, the seed layer and the resulting solder wettable pads may include an adhesion layer (such as a layer of titanium, tungsten, chrome, and/or combinations thereof) and a conduction layer (such as a layer of copper). Each of the solder wettable pads may also include a conductive barrier layer (such as a layer of nickel, platinum, palladium, and/or combinations thereof) which may be provided as a portion of a continuous seed layer or which may be electroplated prior to electroplating the solder bumps.
As shown in
After separating the die 1301a from the wafer 1303, the solder bumps may be heated to a reflow temperature so that the solder bumps 1307′ extend laterally toward an edge of the die 1301a. As shown in
According to some embodiments of the present invention, the solder bumps 1307 may be set back from a nearest edge of the die 1301a by at least about 20 microns before reflow so that the solder bumps do not interfere with separation of the die 1301a from the wafer 1303. After reflow, the solder bumps 1307′ may extend toward the nearest edge of the die 1301a. More particularly, the solder bumps 1307′ may extend at least to within about 10 microns from the edge of the die 1301a after reflow. According to some embodiments, the solder bumps 1307′ may extend at least to within about 5 microns of the edge of the die 1301a after reflow. As shown in
As used herein, the term solder wettable pad refers to one or more conductive layers provided between a solder bump and a substrate. A solder wettable pad may include an adhesion layer (such as a layer of titanium, tungsten, chrome, and/or combinations thereof), a conduction layer (such as a layer of copper), and/or a barrier layer (such as a layer of nickel, platinum, palladium, and/or combinations thereof). A solder bump may be a bump of one or more different solder materials. For example, a solder bump may include one or more of a single element, binary, ternary, and/or higher order solder; such as a lead-tin solder, a lead-bismuth solder, a lead-indium solder, a lead free solder, a tin-silver solder, a tin-silver-copper solder, an indium-tin solder, an indium-gallium solder, a gallium solder, an indium-bismuth solder, a tin-bismuth solder, an indium-cadmium solder, bismuth-cadmium solder, tin-cadmium, etc. Accordingly, a solder wettable pad may provide a surface that is wettable to a solder bump wherein the solder wettable surface of the solder wettable pad and the solder bump comprise different materials.
While the present invention has been particularly shown and described with reference to embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.
This application claims the benefit of priority as a divisional application to U.S. patent application Ser. No. 10/965,640 filed Oct. 13, 2004, U.S. Pat. No. 7,049,216, which claims the benefit of priority to U.S. Provisional Application No. 60/510,819 filed Oct. 14, 2003. The disclosures of both of the above referenced applications are hereby incorporated herein in their entirety by reference.
Number | Name | Date | Kind |
---|---|---|---|
3105869 | Branch et al. | Oct 1963 | A |
3244947 | Slater | Apr 1966 | A |
3259814 | Green | Jul 1966 | A |
3274458 | Boyer et al. | Sep 1966 | A |
3316465 | von Bermuth et al. | Apr 1967 | A |
3458925 | Napier et al. | Aug 1969 | A |
3461357 | Mutter et al. | Aug 1969 | A |
3489965 | Helsdon | Jan 1970 | A |
3501681 | Weir | Mar 1970 | A |
3663184 | Wood et al. | May 1972 | A |
3760238 | Hamer et al. | Sep 1973 | A |
3770874 | Krieger et al. | Nov 1973 | A |
3871014 | King et al. | Mar 1975 | A |
3871015 | Lin et al. | Mar 1975 | A |
3897871 | Zimnbauer | Aug 1975 | A |
3916080 | Wakamatsu | Oct 1975 | A |
3942187 | Gelsing et al. | Mar 1976 | A |
3959577 | Frink | May 1976 | A |
3986255 | Mandal | Oct 1976 | A |
3993123 | Chu et al. | Nov 1976 | A |
4074342 | Honn et al. | Feb 1978 | A |
4113578 | Del Monte | Sep 1978 | A |
4113587 | Chikamori | Sep 1978 | A |
4168480 | De Lucia | Sep 1979 | A |
4244002 | Sato et al. | Jan 1981 | A |
4257905 | Christophorou et al. | Mar 1981 | A |
4266282 | Henle et al. | May 1981 | A |
4273859 | Mones et al. | Jun 1981 | A |
4382517 | Welsch | May 1983 | A |
4449580 | Reisman et al. | May 1984 | A |
4473263 | Sunstein | Sep 1984 | A |
4511873 | Baier et al. | Apr 1985 | A |
4532576 | Reimer | Jul 1985 | A |
4545610 | Lakritz et al. | Oct 1985 | A |
4563697 | Miura | Jan 1986 | A |
4565901 | Hirooka et al. | Jan 1986 | A |
4657146 | Walters | Apr 1987 | A |
4661375 | Thomas | Apr 1987 | A |
4840302 | Gardner et al. | Jun 1989 | A |
4855809 | Malhi et al. | Aug 1989 | A |
4878611 | Lo Vasco et al. | Nov 1989 | A |
4897508 | Mahulikar et al. | Jan 1990 | A |
4927505 | Sharma et al. | May 1990 | A |
4948754 | Kondo et al. | Aug 1990 | A |
4950623 | Dishon | Aug 1990 | A |
4962058 | Cronin et al. | Oct 1990 | A |
5019943 | Fassbender | May 1991 | A |
5022580 | Pedder | Jun 1991 | A |
5024372 | Altman et al. | Jun 1991 | A |
5046161 | Takada | Sep 1991 | A |
5048747 | Clark et al. | Sep 1991 | A |
5113314 | Wheeler et al. | May 1992 | A |
5135155 | Kang et al. | Aug 1992 | A |
5160409 | Moore et al. | Nov 1992 | A |
5162257 | Yung | Nov 1992 | A |
5194137 | Moore et al. | Mar 1993 | A |
5227664 | Toshio | Jul 1993 | A |
5234149 | Katz et al. | Aug 1993 | A |
5239447 | Cotues et al. | Aug 1993 | A |
5240881 | Cayetano et al. | Aug 1993 | A |
5250843 | Eichelberger | Oct 1993 | A |
5289925 | Newmark | Mar 1994 | A |
5293006 | Yung | Mar 1994 | A |
5325265 | Turlik et al. | Jun 1994 | A |
5327013 | Moore et al. | Jul 1994 | A |
5327327 | Frew et al. | Jul 1994 | A |
5335795 | Chizen | Aug 1994 | A |
5347428 | Carson et al. | Sep 1994 | A |
5354711 | Heitzmann et al. | Oct 1994 | A |
5406701 | Pepe et al. | Apr 1995 | A |
5424920 | Miyake | Jun 1995 | A |
5432729 | Carson et al. | Jul 1995 | A |
5453582 | Amano et al. | Sep 1995 | A |
5475280 | Jones et al. | Dec 1995 | A |
5492235 | Crafts et al. | Feb 1996 | A |
5547740 | Higdon et al. | Aug 1996 | A |
5557502 | Bannerjee et al. | Sep 1996 | A |
5616962 | Ishikawa et al. | Apr 1997 | A |
5627396 | James et al. | May 1997 | A |
5680296 | Hileman et al. | Oct 1997 | A |
5736456 | Akram | Apr 1998 | A |
5739053 | Kawakita et al. | Apr 1998 | A |
5744382 | Kitayama et al. | Apr 1998 | A |
5751556 | Butler et al. | May 1998 | A |
5773359 | Mitchell et al. | Jun 1998 | A |
5793116 | Rinne et al. | Aug 1998 | A |
5812378 | Fielstad et al. | Sep 1998 | A |
5851911 | Farnworth | Dec 1998 | A |
5898574 | Tan et al. | Apr 1999 | A |
5923539 | Matsui et al. | Jul 1999 | A |
5963793 | Rinne et al. | Oct 1999 | A |
5990472 | Rinne | Nov 1999 | A |
6134120 | Baldwin | Oct 2000 | A |
6167615 | Ma et al. | Jan 2001 | B1 |
6169325 | Azuma | Jan 2001 | B1 |
6201305 | Darveaux et al. | Mar 2001 | B1 |
6268655 | Farnworth et al. | Jul 2001 | B1 |
6310390 | Moden | Oct 2001 | B1 |
6388203 | Rinne et al. | May 2002 | B1 |
6392163 | Rinne et al. | May 2002 | B1 |
6404064 | Tsai et al. | Jun 2002 | B1 |
6414374 | Farnworth et al. | Jul 2002 | B2 |
6418033 | Rinne | Jul 2002 | B1 |
6539624 | Kung et al. | Apr 2003 | B1 |
6825547 | Farnworth et al. | Nov 2004 | B2 |
6900079 | Kinsman et al. | May 2005 | B2 |
20020020551 | Rinne et al. | Feb 2002 | A1 |
20030102560 | Kim et al. | Jun 2003 | A1 |
20040187296 | Cowles et al. | Sep 2004 | A1 |
Number | Date | Country |
---|---|---|
42 05 029 | Feb 1993 | DE |
43 23 799 | Jan 1994 | DE |
0 609 062 | Aug 1994 | EP |
0 736 972 | Oct 1996 | EP |
0 918 355 | May 1999 | EP |
1 041 617 | Oct 2000 | EP |
2 406 893 | Oct 1978 | FR |
2 688 628 | Sep 1993 | FR |
2 705 832 | Dec 1994 | FR |
1288564 | Sep 1972 | GB |
2062 963 | May 1981 | GB |
2 194 387 | Mar 1988 | GB |
55-111127 | Aug 1980 | JP |
57-73952 | May 1982 | JP |
57-197838 | Dec 1982 | JP |
59-154041 | Sep 1984 | JP |
6-116552 | Jan 1986 | JP |
63099558 | Apr 1988 | JP |
63-222445 | Sep 1988 | JP |
4-150033 | May 1992 | JP |
07066207 | Jan 1994 | JP |
WO 9302831 | Feb 1993 | WO |
WO 9322475 | Nov 1993 | WO |
WO 9631905 | Oct 1996 | WO |
WO 9806118 | Feb 1998 | WO |
Number | Date | Country | |
---|---|---|---|
20060138675 A1 | Jun 2006 | US |
Number | Date | Country | |
---|---|---|---|
60510819 | Oct 2003 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 10965640 | Oct 2004 | US |
Child | 11362964 | US |