The present invention is directed to microelectronic assemblies that include stacked semiconductor chips in a face-down orientation, as well as methods of manufacturing same.
Semiconductor chips are commonly provided in packages that facilitate handling of the chip during manufacture and during mounting of the chip on an external substrate such as a circuit board or other circuit panel. For example, many semiconductor chips are provided in packages suitable for surface mounting. Numerous packages of this general type have been proposed for various applications. Most commonly, such packages include a substrate, commonly referred to as a “chip carrier” with terminals formed as plated or etched metallic structures on the dielectric. These terminals typically are connected to the contacts of the chip itself by features such as thin traces extending along the chip carrier itself and by fine leads or wires extending between the contacts of the chip and the terminals or traces. In a surface mounting operation, the package is placed onto a circuit board so that each terminal on the package is aligned with a corresponding contact pad on the circuit board. Solder or other bonding material is provided between the terminals and the contact pads. The package can be permanently bonded in place by heating the assembly so as to melt or “reflow” the solder or otherwise activate the bonding material.
Many packages include solder masses in the form of solder balls, typically about 0.1 mm and about 0.8 mm (5 and 30 mils) in diameter, attached to the terminals of the package. A package having an array of solder balls projecting from its bottom surface is commonly referred to as a ball grid array or “BGA” package. Other packages, referred to as land grid array or “LGA” packages are secured to the substrate by thin layers or lands formed from solder. Packages of this type can be quite compact. Certain packages, commonly referred to as “chip scale packages,” occupy an area of the circuit board equal to, or only slightly larger than, the area of the device incorporated in the package. This is advantageous in that it reduces the overall size of the assembly and permits the use of short interconnections between various devices on the substrate, which in turn limits signal propagation time between devices and thus facilitates operation of the assembly at high speeds.
It is also desirable to produce a chip package that presents a low, overall height or dimension perpendicular to the plane of the circuit panel. Such thin microelectronic packages allow for placement of a circuit panel having the packages mounted therein in close proximity to neighboring structures, thus producing the overall size of the product incorporating the circuit panel. Various proposals have been advanced for providing plural chips in a single package or module. In the conventional “multi-chip module”, the chips are mounted side-by-side on a single package substrate, which in turn can be mounted to the circuit panel. This approach offers only limited reduction in the aggregate area of the circuit panel occupied by the chips. The aggregate area is still greater than the total surface area of the individual chips in the module.
It has also been proposed to package plural chips in a “stack” arrangement, i.e., an arrangement where plural chips are placed one on top of another. In a stacked arrangement, several chips can be mounted in an area of the circuit panel that is less than the total area of the chips. Certain stacked chip arrangements are disclosed, for example, in certain embodiments of the aforementioned U.S. Pat. Nos. 5,679,977; 5,148,265; and U.S. Pat. No. 5,347,159, the disclosures of which are incorporated herein by reference. U.S. Pat. No. 4,941,033, also incorporated herein by reference, discloses an arrangement in which chips are stacked on top of another and interconnected with one another by conductors on so-called “wiring films” associated with the chips.
Despite these efforts in the art, further improvements would be desirable in the case of multi-chip packages for chips having contacts located substantially in central regions of the chips. Certain semiconductor chips, such as some memory chips, are commonly made with the contacts in one or two rows located substantially along a central axis of the chip.
In accordance with an aspect of the invention, a microelectronic assembly can include a substrate having first and second opposed surfaces each extending in first and second transverse directions, a peripheral edge extending between the first and second surfaces and in the second direction, first and second openings extending between the first and second surfaces, and a peripheral region of the second surface extending between the peripheral edge and one of the openings. Each of the openings can have an elongated first dimension extending in the first direction, and a second dimension in the second direction shorter than the first dimension.
The microelectronic assembly can also include a first microelectronic element having a front surface facing toward the first surface and bond pads at the front surface aligned with the first opening, a rear surface opposite from the front surface, and an edge extending between the front and rear surfaces. The microelectronic assembly can also include a second microelectronic element having a front surface facing toward the rear surface of the first microelectronic element and projecting beyond the edge of the first microelectronic element, and bond pads at the front surface of the second microelectronic element aligned with the second opening.
The microelectronic assembly can also include a plurality of terminals exposed at the second surface and electrically connected with the bond pads of the first and second microelectronic elements. The terminals can be configured for connecting the microelectronic assembly to at least one component external to the assembly. At least one of the terminals can be disposed at least partially within the peripheral region such that a straight line extending in the first direction and passing through the at least one terminal passes through or over at least one of the openings.
In one example, the peripheral edge can be a first peripheral edge, the peripheral region can be a first peripheral region, and the at least one of the terminals can be a first terminal. The substrate can have a second peripheral edge opposite the first peripheral edge extending between the first and second surfaces and in the second direction. The substrate can have a second peripheral region of the second surface extending between the second peripheral edge and the one of the openings. At least one of the terminals can be a second terminal disposed at least partially within the second peripheral region such that a straight line extending in the first direction and passing through the second terminal passes through or over at least one of the openings.
In a particular embodiment, the peripheral region can be a first peripheral region, the one of the openings can be the first opening, and the at least one of the terminals can be a first terminal. The substrate can have a second peripheral region of the second surface extending between the peripheral edge and the second opening. At least one of the terminals can be a second terminal disposed at least partially within the second peripheral region such that a straight line extending in the first direction and passing through the second terminal passes through or over the second opening.
In an exemplary embodiment, the peripheral edge can be a first peripheral edge, the substrate can have a second peripheral edge opposite the first peripheral edge extending between the first and second surfaces and in the second direction, and the substrate can have third and fourth peripheral regions of the second surface extending between the second peripheral edge and the respective first and second openings. At least one of the terminals can be a third terminal disposed at least partially within the third peripheral region such that a straight line extending in the first direction and passing through the third terminal passes through or over the first opening. At least one of the terminals can be a fourth terminal disposed at least partially within the fourth peripheral region such that a straight line extending in the first direction and passing through the fourth terminal passes through or over the second opening.
In one embodiment, the bond pads of the first and second microelectronic elements can be electrically connected to conductive elements of the substrate. In a particular example, the bond pads of the first microelectronic element can be electrically connected to the conductive elements by first leads having portions aligned with the first opening, and the bond pads of the second microelectronic element can be electrically connected to the conductive elements by second leads having portions aligned with the second opening. In one example, at least one of: the first leads may not extend through the first opening, or the second leads may not extend through the second opening. In a particular embodiment, the bond pads of the first microelectronic element can be electrically connected to the conductive elements by first wire bonds extending through the first opening, and the bond pads of the second microelectronic element can be electrically connected to the conductive elements by second wire bonds extending through the second opening. In one embodiment, the first wire bonds may extend through only the first opening, and the second wire bonds may extend through only the second opening.
In a particular example, the edge of the first microelectronic element can be a first edge and the first microelectronic element can have a second edge opposite therefrom. The second microelectronic element can have first and second opposed edges. Each microelectronic element can have at least one row of five or more of the bond pads extending in the first direction in a central region of the front surface thereof. Each central region can extending a middle third of a distance between the respective first and second edges. In one embodiment, each microelectronic element can embody a greater number of active devices to provide memory storage array function than any other function. In an exemplary embodiment, the first microelectronic element can have a width between the edge and an opposite edge extending between the front and rear surfaces thereof, and the second microelectronic element can have a width between opposed edges each extending between the front and rear surfaces thereof. The width of the first microelectronic element can be greater than the second dimension of the first opening, and the width of the second microelectronic element can be greater than the second dimension of the second opening.
In one embodiment, one of the first and second openings can extend to a location closer to the peripheral edge than the other one of the first and second openings. In a particular example, the substrate can have third and fourth openings extending between the first and second surfaces, each of the third and fourth openings having an elongated first dimension extending in the second direction, and a second dimension in the first direction shorter than the first dimension. The microelectronic assembly can also include third and fourth microelectronic elements each having a front surface facing the first surface of the substrate, the third and fourth microelectronic elements each having bond pads at a front surface thereof aligned with the respective third or fourth opening. The bond pads of the third and fourth microelectronic elements can be electrically connected to conductive elements of the substrate. In one example, the substrate can also include an aperture extending between the first and second surfaces in the peripheral region. The aperture can be configured to receive flow of an encapsulant or underfill material therethrough.
In accordance with another aspect of the invention, a microelectronic assembly can include a substrate having first and second opposed surfaces each extending in first and second transverse directions, a peripheral edge extending between the first and second surfaces and in the second direction, first and second openings extending between the first and second surfaces, the first opening located between the second opening and the peripheral edge, and a peripheral region of the second surface extending between the peripheral edge and the first opening. The first opening can have an elongated first dimension extending in the first direction and a second dimension in the second direction shorter than the first dimension. The second opening can have an elongated first dimension extending in the second direction and a second dimension in the first direction shorter than the first dimension.
The microelectronic assembly can also include a first microelectronic element having a front surface facing toward the first surface and bond pads at the front surface aligned with the first opening, a rear surface opposite from the front surface, and an edge extending between the front and rear surfaces. The microelectronic assembly can also include a second microelectronic element having a front surface facing toward the rear surface of the first microelectronic element and projecting beyond the edge of the first microelectronic element, and bond pads at the front surface of the second microelectronic element aligned with the second opening.
The microelectronic assembly can also include a plurality of terminals exposed at the second surface and electrically connected with the bond pads of the first and second microelectronic elements. The terminals can be configured for connecting the microelectronic assembly to at least one component external to the assembly. At least one of the terminals can be disposed at least partially within the peripheral region such that a straight line extending in the first direction and passing through the at least one terminal passes through or over the first opening.
In one example, the peripheral edge can be a first peripheral edge, the peripheral region can be a first peripheral region, and the at least one of the terminals can be a first terminal. The substrate can have a second peripheral edge extending between the first and second surfaces and in the first direction, and the substrate can have a second peripheral region of the second surface extending between the second peripheral edge and the second opening. At least one of the terminals can be a second terminal disposed at least partially within the second peripheral region such that a straight line extending in the second direction and passing through the second terminal passes through or over the second opening.
In a particular embodiment, the substrate can have a third peripheral edge opposite the second peripheral edge extending between the first and second surfaces and in the first direction, and the substrate can have a third peripheral region of the second surface extending between the third peripheral edge and the second opening. At least one of the terminals can be a third terminal disposed at least partially within the third peripheral region such that a straight line extending in the second direction and passing through the third terminal passes through or over the second opening.
In accordance with yet another aspect of the invention, a microelectronic assembly can include a substrate having first and second opposed surfaces each extending in first and second transverse directions, a peripheral edge extending between the first and second surfaces and in the first direction, a first opening extending between the first and second surfaces and having an elongated first dimension extending in the first direction and a second dimension in the second direction shorter than the first dimension, a second opening extending between the first and second surfaces and having an elongated first dimension extending in the second direction and a second dimension in the first direction shorter than the first dimension, and a peripheral region of the second surface extending between the peripheral edge and the second opening.
The microelectronic assembly can also include a first microelectronic element having a front surface facing toward the first surface and bond pads at the front surface aligned with the first opening, a rear surface opposite from the front surface, and an edge extending between the front and rear surfaces. The microelectronic assembly can also include a second microelectronic element having a front surface facing toward the rear surface of the first microelectronic element and projecting beyond the edge of the first microelectronic element, and bond pads at the front surface of the second microelectronic element aligned with the second opening.
The microelectronic assembly can also include a plurality of terminals exposed at the second surface and electrically connected with the bond pads of the first and second microelectronic elements. The terminals can be configured for connecting the microelectronic assembly to at least one component external to the assembly. At least one of the terminals can be disposed at least partially within the peripheral region such that a straight line extending in the second direction and passing through the at least one terminal passes through or over the second opening.
In one example, the peripheral edge can be a first peripheral edge, the peripheral region can be a first peripheral region, and the at least one of the terminals can be a first terminal. The substrate can have a second peripheral edge opposite the first peripheral edge extending between the first and second surfaces and in the first direction, and the substrate can have a second peripheral region of the second surface extending between the second peripheral edge and the second opening. At least one of the terminals can be a second terminal disposed at least partially within the second peripheral region such that a straight line extending in the second direction and passing through the second terminal passes through or over the second opening.
In a particular embodiment, the peripheral region can be a first peripheral region, the at least one of the terminals can be a first terminal, the edge of the first microelectronic element can be a first edge, and the substrate can have a third opening extending between the first and second surfaces and having an elongated first dimension extending in the second direction and a second dimension in the first direction shorter than the first dimension. The substrate can have a second peripheral region of the second surface extending between the peripheral edge and the third opening. At least one of the terminals can be a second terminal disposed at least partially within the second peripheral region such that a straight line extending in the second direction and passing through the second terminal passes through or over the third opening. The microelectronic assembly can also include a third microelectronic element having a front surface facing toward the rear surface of the first microelectronic element and projecting beyond a second edge of the first microelectronic element opposite the first edge thereof, and bond pads at the front surface of the third microelectronic element aligned with the third opening.
In an exemplary embodiment, the front surfaces of the second and third microelectronic elements can be positioned in a single plane. In one embodiment, the peripheral edge can be a first peripheral edge, the substrate can have a second peripheral edge opposite the first peripheral edge extending between the first and second surfaces and in the first direction, and the substrate can have third and fourth peripheral regions of the second surface extending between the second peripheral edge and the respective second and third openings. At least one of the terminals can be a third terminal disposed at least partially within the third peripheral region such that a straight line extending in the second direction and passing through the third terminal passes through or over the first opening. At least one of the terminals can be a fourth terminal disposed at least partially within the fourth peripheral region such that a straight line extending in the second direction and passing through the fourth terminal passes through or over the second opening.
In particular example, the substrate can have a fourth opening extending between the first and second surfaces and having an elongated first dimension extending in the first direction and a second dimension in the second direction shorter than the first dimension. The microelectronic assembly can also include a fourth microelectronic element having bond pads at a front surface thereof aligned with the fourth opening. In one example, the second, third, and fourth microelectronic elements can each have first and second opposed edges. Each microelectronic element can have at least one row of five or more of the bond pads extending in a direction parallel to the first and second edges thereof in a central region of the front surface thereof. Each central region can extend a middle third of a distance between the respective first and second edges.
In accordance with still another aspect of the invention, a microelectronic assembly can include a substrate having first and second dielectric elements each having top and bottom opposed surfaces. Each surface can extend in first and second transverse directions. The dielectric elements can be spaced apart from one another in at least one of the first or second transverse directions. A first surface of the substrate can include the top surfaces of both dielectric elements. A second surface of the substrate can include the bottom surfaces of both dielectric elements. The substrate can also have a first opening defined by an open area between adjacent opposed edges of the first and second dielectric elements, the adjacent opposed edges each having a first dimension extending in the first direction, the first opening having a second dimension in the second direction shorter than the first dimension, and a second opening enclosed by the second dielectric element.
The microelectronic assembly can also include a first microelectronic element having a front surface facing toward the first surface and bond pads at the front surface aligned with one of the first and second openings, a rear surface opposite from the front surface, and an edge extending between the front and rear surfaces. The microelectronic assembly can also include a second microelectronic element having a front surface facing toward the rear surface of the first microelectronic element and projecting beyond the edge of the first microelectronic element, and bond pads at the front surface of the second microelectronic element aligned with the other one of the first and second openings. The microelectronic assembly can also include a plurality of terminals exposed at the second surface and electrically connected with the bond pads of the first and second microelectronic elements. The terminals can be configured for connecting the microelectronic assembly to at least one component external to the assembly.
In a particular embodiment, the second opening can have an elongated first dimension extending in the first direction and a second dimension in the second direction shorter than the first dimension. In one example, the second opening can have an elongated first dimension extending in the second direction and a second dimension in the first direction shorter than the first dimension. In an exemplary embodiment, the substrate can also include a dielectric region extending between the adjacent opposed edges of the first and second dielectric elements. The first surface of the substrate can include a top surface of the dielectric region. The second surface can include a bottom surface of the dielectric region. In a particular example, the dielectric region can have a higher Young's modulus in a plane of the substrate than the dielectric elements.
In one embodiment, the bond pads at the front surface of the first microelectronic element can be aligned with the first opening, and the bond pads at the front surface of the second microelectronic element can be aligned with the second opening. In a particular embodiment, the terminals can include first and second terminals exposed at the bottom surface of the respective first and second dielectric elements. At least some of the bond pads of the first microelectronic element can be electrically connected to the first and second terminals. In one example, the bond pads at the front surface of the first microelectronic element can be aligned with the second opening. The bond pads at the front surface of the second microelectronic element can be aligned with the first opening.
In accordance with another aspect of the invention, a microelectronic assembly can include a substrate having first and second opposed surfaces each extending in first and second transverse directions. The substrate can have first and second dielectric elements spaced apart from one another in at least one of the first or second transverse directions. The microelectronic assembly can also include a first microelectronic element having a front surface facing toward the first surface and bond pads at the front surface, a rear surface opposite from the front surface, and an edge extending between the front and rear surfaces. The microelectronic assembly can also include a second microelectronic element having a front surface facing toward the rear surface of the first microelectronic element and projecting beyond the edge of the first microelectronic element, and bond pads at the front surface of the second microelectronic element. The microelectronic assembly can also include a plurality of terminals exposed at the second surface and electrically connected with the bond pads of the first and second microelectronic elements. The terminals can be configured for connecting the microelectronic assembly to at least one component external to the assembly.
In one example, at least one of the microelectronic elements can at least partially overlies the top surface of each of the first and second dielectric elements. In an exemplary embodiment, the edge of the first microelectronic element can be a first edge and the first microelectronic element can have a second edge opposite therefrom. The second microelectronic element can have first and second opposed edges. Each microelectronic element can have at least one row of five or more of the bond pads extending in the first direction in a central region of the front surface thereof. Each central region can extend a middle third of a distance between the respective first and second edges.
In accordance with yet another aspect of the invention, a microelectronic assembly can include a substrate having first, second, and third dielectric elements each having top and bottom opposed surfaces. Each surface can extend in first and second transverse directions. The dielectric elements can be spaced apart from one another in at least one of the first or second transverse directions. A first surface of the substrate can include the top surfaces of the first, second, and third dielectric elements. A second surface of the substrate can include the bottom surfaces of the first, second, and third dielectric elements. The substrate can also have a first opening defined by an open area between adjacent opposed edges of the first and second dielectric elements. The adjacent opposed edges can each have a first dimension extending in the first direction. The first opening can have a second dimension in the second direction shorter than the first dimension. The substrate can also have a second opening defined by an open area between adjacent opposed edges of the second and third dielectric elements. The adjacent opposed edges can each have a first dimension extending in the first direction. The first opening can have a second dimension in the second direction shorter than the first dimension.
The microelectronic assembly can also include a first microelectronic element having a front surface facing toward the first surface and bond pads at the front surface aligned with one of the first and second openings, a rear surface opposite from the front surface, and an edge extending between the front and rear surfaces. The microelectronic assembly can also include a second microelectronic element having a front surface facing toward the rear surface of the first microelectronic element and projecting beyond the edge of the first microelectronic element, and bond pads at the front surface of the second microelectronic element aligned with the other one of the first and second openings. The microelectronic assembly can also include a plurality of terminals exposed at the second surface and electrically connected with the bond pads of the first and second microelectronic elements. The terminals can be configured for connecting the microelectronic assembly to at least one component external to the assembly.
In one embodiment, the bond pads at the front surface of the first microelectronic element can be aligned with the first opening, and the bond pads at the front surface of the second microelectronic element can be aligned with the second opening. In a particular example, the first microelectronic element can at least partially overlie the top surface of each of the first and second dielectric elements, and the second microelectronic element can at least partially overlie the top surface of each of the second and third dielectric elements. In an exemplary embodiment, the bond pads at the front surface of the first microelectronic element can be aligned with the second opening, and the bond pads at the front surface of the second microelectronic element can be aligned with the first opening.
In a particular embodiment, the terminals can include first, second, and third terminals exposed at the bottom surface of the respective first, second, and third dielectric elements. At least some of the bond pads of at least one of the microelectronic elements can be electrically connected with two or more of the first, second, and third terminals. In one example, at least some of the bond pads of the first microelectronic element can be electrically connected to the first and second terminals. In a particular example, at least some of the bond pads of the second microelectronic element can be electrically connected to the second and third terminals.
In an exemplary embodiment, the substrate can have a peripheral edge extending between the first and second surfaces and in the second direction and a peripheral region of the second surface extending between the peripheral edge and one of the openings. At least one of the terminals can be disposed at least partially within the peripheral region such that a straight line extending in the first direction and passing through the at least one terminal passes through or over at least one of the openings.
In one example, the peripheral region can be a first peripheral region, the one of the openings can be the first opening, and the at least one of the terminals can be a first terminal. The substrate can have a second peripheral region of the second surface extending between the peripheral edge and the second opening. At least one of the terminals can be a second terminal disposed at least partially within the second peripheral region such that a straight line extending in the first direction and passing through the second terminal passes through or over the second opening. In a particular embodiment, the second dielectric element can include portions of both the first and second peripheral regions. In one embodiment, the first dielectric element can include a portion of the first peripheral region, and the third dielectric element can include a portion of the second peripheral region.
In a particular example, a system can include a microelectronic assembly as described above and one or more other electronic components electrically connected to the microelectronic assembly. In one example, the system can also include a housing, the microelectronic assembly and the other electronic components being mounted to the housing.
The first and second microelectronic elements 136,153 may be positioned on the substrate 102 so that the outer edges (i.e., first, second, third, fourth edges 144,145,146,147) of the first microelectronic element 136 and outer edges (i.e., first, second, third, fourth edges 161,162,163,164) of the second microelectronic element 153 are positioned on the first surface 104 of the substrate 102 and do not extend beyond the peripheral edge of the substrate 102.
In particular embodiments, the substrate can be a dielectric element of various types of construction, such as of polymeric material or inorganic material such as ceramic or glass, the substrate having conductive elements thereon such as terminals and leads, e.g., traces, substrate contacts, or other conductive elements electrically connected with the terminals. In another example, the substrate can consist essentially of a semiconductor material such as silicon, or alternatively include a layer of semiconductor material and one or more dielectric layers thereof. In yet another embodiment, the substrate can be a lead frame having leads, wherein the terminals can be portions of the leads, such as end portions of the leads.
As best shown in
Referring to
Conductive traces 108 may be formed from any electrically conductive material, but most typically are formed from copper, copper alloys, gold or combinations of these materials. The thickness of the traces will also vary with the application, but typically is about 5 to 25 microns. The substrate 102 and traces 108 can be fabricated by a process such as that disclosed in co-pending, commonly assigned U.S. Pat. No. 7,462,936, the disclosure of which is incorporated by reference herein.
Referring to
In one example, the first opening 116 can have a long dimension A1 greater than a short dimension A2, the long dimension A1 extending in the first direction D1, and the short dimension A2 extending in the second direction D2. The second opening 126 can have a long dimension B1 greater than a short dimension B2, the long dimension B1 extending in the second direction D2, and the short dimension B2 extending in the first direction D1.
Referring now to
Turning to
As is typical with regard to DRAM chips, the conductive elements may include first bond pads 142 that extend along the central region 924 of the front surface 140 of the first microelectronic element 136. The conductive elements provide for an electrical connection between the first microelectronic element 136 and the first set of contacts 109 positioned on the second surface 106 of the substrate 102. An adhesive 101 can be used to attach the first microelectronic element 136 to the substrate 102.
Referring to
The second microelectronic element 153 may be similar to the first microelectronic element 136. A front surface 157 of the second microelectronic element having bond pads thereon, faces forward the first microelectronic element 136, such that the second microelectronic element 153 overlies the rear surface 138 of the first microelectronic element 136. As shown in
As can be seen in
Turning to
Referring to
Conductive elements may be used to electrically connect the bond pads 159 on the first microelectronic element 136 with a second set of contacts 111 on the second surface 106 of the substrate 102. In this embodiment, bond wires 165 may be used to connect the bond pads 159 on the second microelectronic element 153 with the second set of contacts 111 (
As shown in
Referring to
In a particular example, the substrate 102 can also have a first peripheral edge 3 extending between the first and second surfaces 104, 106 and in the second direction D2. The substrate 102 can also have a second peripheral edge 103 extending between the first and second surface 104, 106 and in the first direction D1. The substrate 102 can also have a third peripheral edge 105 opposite the second peripheral edge 103 extending between the first and second surfaces 104, 106 and in the first direction D1.
The first opening 116 can be located between the second opening 126 and the first peripheral edge 3 and can have an elongated first dimension L1 extending in the first direction D1 and a second dimension W1 in the second direction D2 shorter than the first dimension. The second opening 126 can have an elongated first dimension L2 extending in the second direction D2 and a second dimension W2 in the first direction D1 shorter than the first dimension.
The substrate 102 can have a first peripheral region P1 of the second surface 106 extending between the first peripheral edge 3 and the first opening 116. The substrate 102 can also have a second peripheral region P2 of the second surface 106 extending between the second peripheral edge 103 and the second opening 126. The substrate 102 can also have a third peripheral region P3 of the second surface 106 extending between the third peripheral edge 105 and the second opening 126. The second and third peripheral regions P2, P3 can be located at opposite sides of the second opening 126.
As shown in
The remaining embodiments, discussed herein, are substantially similar to the embodiment of
Referring to
As can be seen in
In a particular example, the first microelectronic element 36 can have a width between the edge 46 and an opposite edge extending between the front and rear surfaces thereof, and the second microelectronic element 53 can have a width between opposed edges each extending between the front and rear surfaces thereof. The width of the first microelectronic element 36 can be greater than the second W1 dimension of the first opening 16, and the width of the second microelectronic element 53 can be greater than the second dimension W2 of the second opening 26.
An array of solder balls 15 may be attached to terminal contacts 10 exposed at the second surface 6 of the substrate 2. Traces can extend from first and second sets of substrate contacts 9, 11 along the second surface 6 to provide an electrical connection between the substrate contacts 9, 11 and the terminal contacts 10 supporting the solder balls 15. The bond pads 42, 59 of the respective first and second microelectronic elements 36, 53 can be electrically connected with conductive elements of the substrate 2 (e.g., the substrate contacts 9, 11 and the terminals 10). The terminals 10 can be configured for connecting the microelectronic assembly 100′ to at least one component external to the assembly.
In a particular example, the substrate 2 can also have first and second opposed peripheral edges 3, 5 each extending between the first and second surfaces 4, 6 and in the second direction D2. The substrate 2 can have first and second peripheral regions P1, P2 of the second surface 6 extending between the first peripheral edge 3 and the respective first and second openings 16, 26. The substrate 2 can also have third and fourth peripheral regions P3, P4 of the second surface 6 extending between the second peripheral edge 5 and the respective first and second openings 16, 26. The first and third peripheral regions P1, P3 can be located at opposite sides of the first opening 16, and the second and fourth peripheral regions P2, P4 can be located at opposite sides of the second opening 26.
As shown in
As shown in
At least one of the terminals 10, for example a third terminal 10c, can be disposed at least partially within the third peripheral region P3 such that a straight line extending in the second direction D3 and passing through the third terminal passes through or over the first opening 16. At least one of the terminals 10, for example a fourth terminal 10d, can be disposed at least partially within the fourth peripheral region P4 such that a straight line extending in the first direction D1 and passing through the fourth terminal passes through or over the second opening 26. In a particular example, the same straight line S1 can extend through the first terminal 10a and the third terminal 10c, but that need not be the case. In one embodiment, the same straight line S2 can extend through the second terminal 10b and the fourth terminal 10d, but that need not be the case.
In one example, the bond pads 42 of the first microelectronic element 36 can be electrically connected to the conductive elements 9 by first leads 48 having portions aligned with the first opening 16. Likewise, the bond pads 59 of the second microelectronic element 53 can be electrically connected to the conductive elements 11 by second leads 65 having portions aligned with the second opening 26. In one embodiment, the first leads 48 may not extend through the first opening 16, for example, if the first leads are lead bonds. Likewise, the second leads 65 may not extend through the second opening 26, for example, if the second leads are lead bonds.
As shown in
In an exemplary embodiment, the first and second microelectronic elements 36 and 53 can have respective bond pads 42 and 59 that are configured in a manner similar to that shown in
In another example, any or each of the dielectric elements described herein, such as the dielectric elements 2a and 2b shown in
The first opening 16c can be defined by an open area between adjacent opposed edges 102a, 102b of the first and second dielectric elements 2a, 2b. The adjacent opposed edges 102a, 102b can each have a first dimension L1 and can each extend in the first direction D1. The first opening 16c can have a second dimension W1 in the second direction D2 shorter than the first dimension L1. The second opening 26 can be the same as in
Similar to the embodiment shown in
In a particular example, the second opening 26 can be oriented perpendicularly to the first opening 16c. For example, the second opening 26 can have a first dimension L2 in the second direction D2 and a second dimension W2 in the first direction D1 shorter than the first dimension. In one embodiment, the substrate 2 can also include a dielectric region R extending between the adjacent opposed edges 102a, 102b of the first and second dielectric elements 2a, 2b, the first surface of the substrate including a top surface of the dielectric region, the second surface including a bottom surface of the dielectric region. In a particular example, the dielectric region R can have a higher Young's modulus in a plane of the substrate than the dielectric elements 2a, 2b.
As shown in
The first opening 16d, similar to the first opening 16c of
Similar to the embodiment shown in
In one example, the terminals 10 can include first, second, and third terminals exposed at the bottom surface of the respective first, second, and third dielectric elements 2a, 2b, and 2c, and at least some of the bond pads 42, 59 of at least one of the microelectronic elements 36, 53 can be electrically connected with two or more of the first, second, and third terminals of the respective first, second, and third substrate portions. In a particular embodiment, at least some of the bond pads 42 of the first microelectronic element 36 can be electrically connected to the terminals 10 of the first and second substrate portions 2a, 2b. In one embodiment, at least some of the bond pads 59 of the second microelectronic element 53 can be electrically connected to the terminals 10 of the second and third substrate portions 2b, 2c.
The embodiment shown in
Although in
Although in
In a particular example, any of the configurations of microelectronic elements and openings shown in
In one example, the fourth microelectronic element 88 of
The embodiment of
As best shown in
A third opening 232 may be positioned adjacent the second end 224 of the first opening 216, so that the long edges 234 of the third opening 232 extend in a direction that is transverse to the direction in which the long edges 220 of the first opening 216 extend. In this configuration, the second and third openings 226,232 can be parallel to one another and also perpendicular to the first opening 216, so as to form the shape of an I. Alternatively, the first, second, and third openings 216,226,232 may be joined together such that they form one continuous opening. As in previous embodiments, one or more of the first, second, or third openings 216,226,232 may be comprised of a plurality of openings.
In one example, the first opening 216 can have a long dimension A1 greater than a short dimension A2, the long dimension A1 extending in a first direction D1, and the short dimension A2 extending in a second direction D2 transverse to the first direction. The second opening 226 can have a long dimension B1 greater than a short dimension B2, the long dimension B1 extending in the second direction D2, and the short dimension B2 extending in the first direction D1. The third opening 232 can have a long dimension C1 greater than a short dimension C2, the long dimension C1 extending in the second direction D2, and the short dimension C2 extending in the first direction D1.
The first and second microelectronic elements 236,253 are stacked in an arrangement similar to the embodiment of
As described above with respect to the embodiments having two microelectronic elements, the third microelectronic element 268 can have at least one row of five or more bond pads 274 extending in a direction in the central region of the front surface of the third microelectronic element. In a particular example, at least one row of five or more of the bond pads 274 of the third microelectronic element 268 can be disposed adjacent a peripheral edge of the third microelectronic element. As shown in
Conductive connections may be used to connect each of the bond pads on the respective microelectronic elements with respective sets of contacts on the bottom surface of the substrate. For example, as shown, bond wires 280 connect bond pads 274 exposed at the surface of the third microelectronic element 268 with a third set of contacts 213 on the second surface 206 of the substrate 202. Referring to
As with respect to the previous embodiment, the arrangement of the first, second, and third microelectronic elements 236,253,268 allows for each of the respective bond pads 242,259,274 (
In a particular example, the substrate 202 can also have a first peripheral edge 203 extending between the first and second surfaces 204, 206 and in the first direction D1. The substrate 202 can also have a second peripheral edge 205 extending between the first and second surface 204, 206 and in the first direction D1.
The first opening 216 can have an elongated first dimension L1 extending in the first direction D1 and a second dimension W1 in the second direction D2 shorter than the first dimension. The second opening 226 can have an elongated first dimension L2 extending in the second direction D2 and a second dimension W2 in the first direction D1 shorter than the first dimension. The third opening 232 can have an elongated first dimension L3 extending in the second direction D2 and a second dimension W3 in the first direction D1 shorter than the first dimension.
The substrate 202 can have first and second peripheral regions P1, P2 of the second surface 206 extending between the first peripheral edge 203 and the respective second and third openings 226, 232. The substrate 202 can also have third and fourth peripheral regions P3, P4 of the second surface 206 extending between the second peripheral edge 205 and the respective second and third openings 226, 232. The first and third peripheral regions P1, P3 can be located at opposite sides of the second opening 226, and the second and fourth peripheral regions P2, P4 can be located at opposite sides of the third opening 232.
As shown in
At least one of the terminals 210, for example a third terminal 210c, can be disposed at least partially within the third peripheral region P3 such that a straight line extending in the second direction D2 and passing through the third terminal 210c passes through or over the second opening 226. In a particular example, the same straight line S1 can extend through the first terminal 210a and the third terminal 210c, but that need not be the case.
At least one of the terminals 210, for example a fourth terminal 210d, can be disposed at least partially within the fourth peripheral region P4 such that a straight line extending in the second direction D2 and passing through the fourth terminal 210d passes through or over the third opening 232. In a particular example, the same straight line S2 can extend through the second terminal 210b and the fourth terminal 210d, but that need not be the case.
Referring now to
In one example, the first opening 316 can have a long dimension A1 greater than a short dimension A2, the long dimension A1 extending in a first direction D1, and the short dimension A2 extending in a second direction D2 transverse to the first direction. The second opening 326 can have a long dimension B1 greater than a short dimension B2, the long dimension B1 extending in the first direction D1, and the short dimension B2 extending in the second direction D2. The third opening 332 can have a long dimension C1 greater than a short dimension C2, the long dimension C1 extending in the second direction D2, and the short dimension C2 extending in the first direction D1. The fourth opening 382 can have a long dimension E1 greater than a short dimension E2, the long dimension E1 extending in the second direction D2, and the short dimension E2 extending in the first direction D1.
Referring to
The third and fourth microelectronic elements 368,388 may be positioned over the substrate 302, as well as the first and second microelectronic elements 336,353. As best shown in
As shown in
The orientation of the respective microelectronic elements over the substrate 302 allows for an electrical connection between the bond pads 342 (
As shown in
Similar to the embodiments shown and described with respect to
In the embodiment shown in
As further shown in
Referring now to
As in the previous embodiments, bond wires can be used to connect bond pads on the respective microelectronic elements with contacts on the substrate. Bond wires 449 on the first microelectronic element 436 extend from the bond pads 442 on the first microelectronic element 436, through a first opening 416 in the substrate 402 and to a first set of contacts 409 on the substrate 402. Bond wires 460 on the second microelectronic element 453 extend from bond pads 459 through a second opening 426 and connect to a second set of contacts 411 on the substrate 402. Bond wires 475 on the third microelectronic element 468 extend from the bond pads 474 through the third opening 432 and connect to a third set of contacts 413 on the substrate 402. As shown in
Similar to the embodiments shown and described with respect to
Turning to
It is to be appreciated that although the prior embodiments disclosed stacked microelectronic assemblies incorporating center-bonded chips, it is possible to also incorporate into any of the foregoing microelectronic assemblies at least one chip that is not center bonded. For example, referring to
As shown in
It is to be appreciated that although in the previously disclosed embodiments, bond wires extending through an opening in the substrate were used to establish an electrical connection between the microelectronic element and contacts on the second surface of the substrate, any known structures or methods for establishing such a connection may be used. For example, in one embodiment, referring to
Referring first to
The various microelectronic assemblies discussed above can be utilized in construction of diverse electronic systems. For example, referring to
It will be appreciated that the various dependent claims and the features set forth therein can be combined in different ways than presented in the initial claims. It will also be appreciated that the features described in connection with individual embodiments may be shared with others of the described embodiments in various combinations.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims.
The present application is a continuation of U.S. patent application Ser. No. 13/741,890, filed Jan. 15, 2013, which is a continuation of U.S. patent application Ser. No. 13/565,613, filed Aug. 2, 2012, which is a continuation-in-part of U.S. patent application Ser. No. 13/306,300, filed Nov. 29, 2011, which claims the benefit of the filing date of U.S. Provisional Patent Application No. 61/477,877, filed Apr. 21, 2011, the disclosures of all of which are hereby incorporated herein by reference. The following commonly-owned applications are hereby incorporated herein by reference: U.S. Provisional Patent Application Nos. 61/477,820, 61/477,883, and 61/477,967, all filed Apr. 21, 2011.
Number | Name | Date | Kind |
---|---|---|---|
4941033 | Kishida | Jul 1990 | A |
5138438 | Masayuki et al. | Aug 1992 | A |
5148265 | Khandros et al. | Sep 1992 | A |
5148266 | Khandros et al. | Sep 1992 | A |
5222014 | Lin | Jun 1993 | A |
5347159 | Khandros et al. | Sep 1994 | A |
5480840 | Barnes et al. | Jan 1996 | A |
5679977 | Khandros et al. | Oct 1997 | A |
5777391 | Nakamura et al. | Jul 1998 | A |
5804874 | An et al. | Sep 1998 | A |
5861666 | Bellaar | Jan 1999 | A |
5883426 | Tokuno et al. | Mar 1999 | A |
5977640 | Bertin et al. | Nov 1999 | A |
5998864 | Khandros et al. | Dec 1999 | A |
6021048 | Smith | Feb 2000 | A |
6072233 | Corisis et al. | Jun 2000 | A |
6093029 | Kwon et al. | Jul 2000 | A |
6150724 | Wenzel et al. | Nov 2000 | A |
6169325 | Azuma et al. | Jan 2001 | B1 |
6180881 | Isaak | Jan 2001 | B1 |
6199743 | Bettinger et al. | Mar 2001 | B1 |
6218728 | Kimura | Apr 2001 | B1 |
6218731 | Huang et al. | Apr 2001 | B1 |
6268649 | Corisis et al. | Jul 2001 | B1 |
6335565 | Miyamoto et al. | Jan 2002 | B1 |
6353539 | Horine et al. | Mar 2002 | B1 |
6369448 | McCormick | Apr 2002 | B1 |
6385049 | Chia-Yu et al. | May 2002 | B1 |
6392292 | Morishita | May 2002 | B1 |
6414396 | Shim et al. | Jul 2002 | B1 |
6426560 | Kawamura et al. | Jul 2002 | B1 |
6445594 | Nakagawa et al. | Sep 2002 | B1 |
6472741 | Chen et al. | Oct 2002 | B1 |
6492726 | Quek et al. | Dec 2002 | B1 |
6583502 | Lee et al. | Jun 2003 | B2 |
6703713 | Tseng et al. | Mar 2004 | B1 |
6720666 | Lim et al. | Apr 2004 | B2 |
6731009 | Jones et al. | May 2004 | B1 |
6734542 | Nakatani et al. | May 2004 | B2 |
6742098 | Halbert et al. | May 2004 | B1 |
6762942 | Smith | Jul 2004 | B1 |
6793116 | Harada | Sep 2004 | B2 |
6811580 | Littecke | Nov 2004 | B1 |
6818474 | Kim et al. | Nov 2004 | B2 |
6977440 | Pflughaupt et al. | Dec 2005 | B2 |
7061105 | Masuda et al. | Jun 2006 | B2 |
7061121 | Haba | Jun 2006 | B2 |
7095104 | Blackshear | Aug 2006 | B2 |
7205656 | Kim et al. | Apr 2007 | B2 |
7389937 | Ito | Jun 2008 | B2 |
7462936 | Haba et al. | Dec 2008 | B2 |
7504284 | Ye et al. | Mar 2009 | B2 |
7633146 | Masuda et al. | Dec 2009 | B2 |
7638868 | Haba | Dec 2009 | B2 |
7855462 | Boon et al. | Dec 2010 | B2 |
7880310 | Mathew | Feb 2011 | B2 |
7892889 | Howard et al. | Feb 2011 | B2 |
7969006 | Lin et al. | Jun 2011 | B2 |
8026589 | Kim et al. | Sep 2011 | B1 |
8254155 | Crisp et al. | Aug 2012 | B1 |
8288862 | Khiang et al. | Oct 2012 | B2 |
8304881 | Haba et al. | Nov 2012 | B1 |
8338963 | Haba | Dec 2012 | B2 |
8378478 | Desai et al. | Feb 2013 | B2 |
RE45463 | Haba | Apr 2015 | E |
9013033 | Haba | Apr 2015 | B2 |
20010005311 | Duesman et al. | Jun 2001 | A1 |
20020030267 | Suzuki | Mar 2002 | A1 |
20020053727 | Kimura | May 2002 | A1 |
20020175421 | Kimura | Nov 2002 | A1 |
20030064547 | Akram et al. | Apr 2003 | A1 |
20030116349 | Hashimoto | Jun 2003 | A1 |
20030179549 | Zhong et al. | Sep 2003 | A1 |
20030183917 | Tsai et al. | Oct 2003 | A1 |
20030193788 | Farnworth et al. | Oct 2003 | A1 |
20030224553 | Manansala | Dec 2003 | A1 |
20040016939 | Akiba et al. | Jan 2004 | A1 |
20040016999 | Misumi | Jan 2004 | A1 |
20040124520 | Rinne | Jul 2004 | A1 |
20040184240 | Su | Sep 2004 | A1 |
20040262774 | Kang et al. | Dec 2004 | A1 |
20050110125 | Blackshear | May 2005 | A1 |
20050110162 | Meyer-Berg et al. | May 2005 | A1 |
20050116326 | Haba et al. | Jun 2005 | A1 |
20050116358 | Haba | Jun 2005 | A1 |
20050133932 | Pohl et al. | Jun 2005 | A1 |
20050164486 | Lua et al. | Jul 2005 | A1 |
20050173807 | Zhu et al. | Aug 2005 | A1 |
20050218514 | Massingill | Oct 2005 | A1 |
20050258538 | Gerber | Nov 2005 | A1 |
20060006405 | Mazzochette | Jan 2006 | A1 |
20060027902 | Ararao et al. | Feb 2006 | A1 |
20060081583 | Hembree et al. | Apr 2006 | A1 |
20060097379 | Wang | May 2006 | A1 |
20060097400 | Cruz et al. | May 2006 | A1 |
20060113653 | Xiaoqi et al. | Jun 2006 | A1 |
20060145323 | Lee | Jul 2006 | A1 |
20060197210 | Kim | Sep 2006 | A1 |
20060231938 | Mangrum | Oct 2006 | A1 |
20060249827 | Fasano et al. | Nov 2006 | A1 |
20060290005 | Thomas et al. | Dec 2006 | A1 |
20070066139 | Roeper et al. | Mar 2007 | A1 |
20070075409 | Letterman et al. | Apr 2007 | A1 |
20070108592 | Lai et al. | May 2007 | A1 |
20070120238 | Vaiyapuri | May 2007 | A1 |
20070152310 | Osborn et al. | Jul 2007 | A1 |
20070160817 | Roh | Jul 2007 | A1 |
20070164407 | Jun et al. | Jul 2007 | A1 |
20070176297 | Zohni | Aug 2007 | A1 |
20070176298 | Osone et al. | Aug 2007 | A1 |
20070181989 | Corisis et al. | Aug 2007 | A1 |
20070218689 | Ha et al. | Sep 2007 | A1 |
20070235886 | Yilmaz et al. | Oct 2007 | A1 |
20070257376 | Shimokawa et al. | Nov 2007 | A1 |
20080001241 | Tuckerman et al. | Jan 2008 | A1 |
20080001309 | Tago | Jan 2008 | A1 |
20080023805 | Howard et al. | Jan 2008 | A1 |
20080036067 | Lin | Feb 2008 | A1 |
20080042249 | Haba | Feb 2008 | A1 |
20080048777 | Kohjiro et al. | Feb 2008 | A1 |
20080073777 | Cui et al. | Mar 2008 | A1 |
20080093725 | Jung et al. | Apr 2008 | A1 |
20080116557 | Paek et al. | May 2008 | A1 |
20080122067 | Wang | May 2008 | A1 |
20080136006 | Jang et al. | Jun 2008 | A1 |
20080237844 | Aleksov et al. | Oct 2008 | A1 |
20080237887 | Takiar et al. | Oct 2008 | A1 |
20080237891 | Irsigler et al. | Oct 2008 | A1 |
20080246130 | Carney et al. | Oct 2008 | A1 |
20080296717 | Beroz et al. | Dec 2008 | A1 |
20080303153 | Oi et al. | Dec 2008 | A1 |
20080315377 | Eichelberger et al. | Dec 2008 | A1 |
20090017583 | Jun et al. | Jan 2009 | A1 |
20090045524 | Mohammed et al. | Feb 2009 | A1 |
20090051043 | Wong et al. | Feb 2009 | A1 |
20090057864 | Choi et al. | Mar 2009 | A1 |
20090068858 | Di Stefano | Mar 2009 | A1 |
20090079061 | Mallik et al. | Mar 2009 | A1 |
20090104734 | Specht et al. | Apr 2009 | A1 |
20090108422 | Sasaki et al. | Apr 2009 | A1 |
20090166839 | Suzuki et al. | Jul 2009 | A1 |
20090168366 | Clayton et al. | Jul 2009 | A1 |
20090179321 | Sakamoto et al. | Jul 2009 | A1 |
20090185317 | Dijkhuis et al. | Jul 2009 | A1 |
20090200652 | Oh et al. | Aug 2009 | A1 |
20090200680 | Shinohara et al. | Aug 2009 | A1 |
20090236700 | Moriya | Sep 2009 | A1 |
20090243064 | Camacho et al. | Oct 2009 | A1 |
20090256266 | Lao et al. | Oct 2009 | A1 |
20090267222 | Zhong et al. | Oct 2009 | A1 |
20100019377 | Arvelo et al. | Jan 2010 | A1 |
20100044861 | Chiu et al. | Feb 2010 | A1 |
20100065955 | Chye et al. | Mar 2010 | A1 |
20100072602 | Sutardja | Mar 2010 | A1 |
20100090326 | Baek et al. | Apr 2010 | A1 |
20100127044 | Ota et al. | May 2010 | A1 |
20100127362 | Fan et al. | May 2010 | A1 |
20100133665 | Ha et al. | Jun 2010 | A1 |
20100193930 | Lee | Aug 2010 | A1 |
20100230795 | Kriman et al. | Sep 2010 | A1 |
20100244278 | Shen | Sep 2010 | A1 |
20100258928 | Chi et al. | Oct 2010 | A1 |
20100295166 | Kim | Nov 2010 | A1 |
20100314740 | Choi et al. | Dec 2010 | A1 |
20100321885 | Huang | Dec 2010 | A1 |
20100327419 | Muthukumar et al. | Dec 2010 | A1 |
20110079905 | Sanchez et al. | Apr 2011 | A1 |
20110085304 | Bindrup et al. | Apr 2011 | A1 |
20110193582 | Cho | Aug 2011 | A1 |
20120091574 | Lin et al. | Apr 2012 | A1 |
20120092832 | Haba et al. | Apr 2012 | A1 |
20120126389 | Desai et al. | May 2012 | A1 |
20120153435 | Haba et al. | Jun 2012 | A1 |
20120155049 | Haba et al. | Jun 2012 | A1 |
20120267796 | Haba et al. | Oct 2012 | A1 |
20120267798 | Haba et al. | Oct 2012 | A1 |
20130015586 | Crisp et al. | Jan 2013 | A1 |
20130082394 | Crisp et al. | Apr 2013 | A1 |
20130099387 | Caskey et al. | Apr 2013 | A1 |
20130168843 | Zohni | Jul 2013 | A1 |
20130249116 | Mohammed et al. | Sep 2013 | A1 |
20140035121 | Haba et al. | Feb 2014 | A1 |
Number | Date | Country |
---|---|---|
101055840 | Oct 2007 | CN |
62107391 | May 1987 | JP |
H08-227908 | Sep 1996 | JP |
H11-145323 | May 1999 | JP |
H11345932 | Dec 1999 | JP |
2000243875 | Sep 2000 | JP |
2001085609 | Mar 2001 | JP |
2001118876 | Apr 2001 | JP |
2001196407 | Jul 2001 | JP |
2001223324 | Aug 2001 | JP |
2002-076252 | Mar 2002 | JP |
2003-101207 | Apr 2003 | JP |
2004-063767 | Feb 2004 | JP |
2005045251 | Feb 2005 | JP |
2005166892 | Jun 2005 | JP |
2005243975 | Sep 2005 | JP |
2005251957 | Sep 2005 | JP |
2006079629 | Mar 2006 | JP |
2006093189 | Apr 2006 | JP |
2006514438 | Apr 2006 | JP |
2006-210892 | Aug 2006 | JP |
2006303079 | Nov 2006 | JP |
2007123595 | May 2007 | JP |
2007134426 | May 2007 | JP |
2008177241 | Jul 2008 | JP |
2008-198841 | Aug 2008 | JP |
2008187146 | Aug 2008 | JP |
2008-235576 | Oct 2008 | JP |
2010501118 | Jan 2010 | JP |
2010-098098 | Apr 2010 | JP |
2010206083 | Sep 2010 | JP |
2013546197 | Dec 2013 | JP |
2001-0002214 | Jan 2001 | KR |
20010081922 | Aug 2001 | KR |
2001-0094894 | Nov 2001 | KR |
10-0382035 | May 2003 | KR |
10-0393095 | Jul 2003 | KR |
2005-0119414 | Dec 2005 | KR |
2006-0120365 | Nov 2006 | KR |
10-0690247 | Feb 2007 | KR |
1020060004298 | Mar 2007 | KR |
2007-0088177 | Aug 2007 | KR |
2009-0008341 | Jan 2009 | KR |
2009-0086314 | Aug 2009 | KR |
2010-0041430 | Apr 2010 | KR |
101011863 | Jan 2011 | KR |
101061531 | Sep 2011 | KR |
I301314 | Sep 2008 | TW |
I313049 | Aug 2009 | TW |
201239998 | Oct 2012 | TW |
9812568 | Mar 1998 | WO |
2004080134 | Sep 2004 | WO |
2007088757 | Aug 2007 | WO |
2011001789 | Jan 2011 | WO |
Entry |
---|
Japanese Office Action for Application No. 2104-506416 dated Jun. 19, 2015. |
Japanese Office Action for Application No. 2014-506417 dated Aug. 4, 2015. |
Non-Final Rejection mailed Nov. 19, 2012 in U.S. Appl. No. 12/907,522. |
Amendment Filed Mar. 19, 2013 in Response to Non-Final Rejection mailed Nov. 19, 2012 in U.S. Appl. No. 12/907,522. |
Final Rejection mailed May 8, 2013 in U.S. Appl. No. 12/907,522. |
Amendment Filed May 24, 2013 in Response to Final Rejection mailed May 8, 2013 in U.S. Appl. No. 12/907,522. |
Non-Final Rejection mailed Jan. 9, 2014 in U.S. Appl. No. 14/406,233. |
Amendment Filed Apr. 9, 2014 in Response to Non-Final Rejection mailed Jan. 9, 2014 in U.S. Appl. No. 14/046,233. |
Final Rejection mailed Jun. 20, 2014 in U.S. Appl. No. 14/046,233. |
Amendment Filed Aug. 19, 2014 in Response to Final Rejection mailed Jun. 20, 2014 in U.S. Appl. No. 14/046,233. |
Japanese Office Action for Application No. 2014-506417 dated Apr. 14, 2015. |
Taiwanese Office Action for Application No. 101112511 dated Sep. 30, 2014. |
Taiwanese Office Action for Application No. 102138051 dated Apr. 7, 2015. |
Asinash Roy et al: “Effects of Coupling Capacitance and Inductance on Delay Uncertainty and Clock Skew” , 2007 44th ACM/IEEE Design Automation Conference , San Diego, CA, Jun. 4-8, 2007, IEEE, PI Scataway, NJ , Jun. 1, 2007, pp. 184-187, XP031183328. |
European Examination Report for Application No. 11776969.5 dated Jun. 27, 2014. |
International Preliminary Report on Patentability for Application No. PCT/US2011/056352 dated Apr. 23, 2013. |
International Search Report and Written Opinion for application No. PCT/US2012/029873 dated Jun. 4, 2012. |
International Search Report and Written Opinion for Application No. PCT/US2012/029876 dated Aug. 17, 2012. |
International Search Report and Written Opinion for Application No. PCT/US2012/032997 dated Aug. 7, 2012. |
International Search Report and Written Opinion for Application No. PCT/US2012/071630 dated Apr. 4, 2013. |
International Search Report and Written Opinion for Application No. PCT/US2013/053240 dated Sep. 16, 2013. |
International Search Report and Written Opinion for Application No. PCT/US2013/065605 dated Feb. 21, 2014. |
International Search Report and Written Opinion for PCT/US2012/034196 dated Jun. 4, 2012. |
International Search Report Application No. PCT/US2011/031391, dated Dec. 12, 2011. |
International Search Report for Application No. PCT/US2011/056352 dated Apr. 5, 2012. |
Korean Application No. 10-2011-0041843, dated May, 3, 2011 (English translation of Spec and drawings). |
Korean Search Report from U.S. Appl. No. 61/477,820, dated Sep. 6, 2011. |
Korean Search Report from U.S. Appl. No. 61/477,877, dated Sep. 6, 2011. |
Korean Search Report from U.S. Appl. No. 61/477,883, dated Sep. 6, 2011. |
Korean Search Report from U.S. Appl. No. 61/477,967, dated Sep. 6, 2011. |
Office Action from Korean Patent Application No. 10-2010-0129888 dated Jan. 18, 2011. |
Office Action from Korean Patent Application No. 10-2010-0129890 dated Jan. 18, 2011. |
Partial International Search Report Application No. PCT/US2011/031391, dated Aug. 25, 2011. |
Partial International Search Report for Application No. PCT/US2012/032997 dated Jun. 27, 2012. |
Partial Search Report for Application No. PCT/US2013/065605 dated Nov. 28, 2013. |
Search Report from Korean Patent Application No. 10-2010-0129888 dated Jan. 18, 2011. |
Search Report from Korean Patent Application No. 10-2010-0129890 dated Jan. 18, 2011. |
Second Written Opinion for Application No. PCT/US2013/053240 dated Jul. 29, 2014. |
Taiwanese Office Action for Application No. 101112514 dated Mar. 13, 2014. |
U.S. Appl. No. 61/477,877, filed Apr. 21, 2011. |
Written Opinion of the International Preliminary Examining Authority dated Apr. 16, 2013 for Application No. PCT/US2012/029876. |
Number | Date | Country | |
---|---|---|---|
20150221617 A1 | Aug 2015 | US |
Number | Date | Country | |
---|---|---|---|
61477877 | Apr 2011 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 13741890 | Jan 2013 | US |
Child | 14689346 | US | |
Parent | 13565613 | Aug 2012 | US |
Child | 13741890 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 13306300 | Nov 2011 | US |
Child | 13565613 | US |