1. Field of the Invention
Embodiments of the present invention relate to a semiconductor die substrate for preventing delamination of the die and/or die cracking, and a semiconductor package incorporating the substrate.
2. Description of the Related Art
The strong growth in demand for portable consumer electronics is driving the need for high-capacity storage devices. Non-volatile semiconductor memory devices, such as flash memory storage cards, are becoming widely used to meet the ever-growing demands on digital information storage and exchange. Their portability, versatility and rugged design, along with their high reliability and large capacity, have made such memory devices ideal for use in a wide variety of electronic devices, including for example digital cameras, digital music players, video game consoles, PDAs and cellular telephones.
While a wide variety of packaging configurations are known, flash memory storage cards may in general be fabricated as system-in-a-package (SiP) or multichip modules (MCM), where a plurality of die are mounted on a substrate. The substrate may in general include a rigid, dielectric base having a conductive layer etched on one or both sides. Electrical connections are formed between the die and the conductive layer(s), and the conductive layer(s) provide an electric lead structure for communication between the die and an external electronic system. Once electrical connections between the die and substrate are made, the assembly is then typically encased in a molding compound to form a protected semiconductor package.
A cross-section of a conventional semiconductor package 20 is shown in
The upper surface of the substrate 22 is not flat. As a result of the etched conductance pattern in the conductive layer 28, the portions of the substrate where the conductive layer 28 remains has a greater thickness than the gaps between conductive traces where the layer 28 has been etched away. Moreover, openings and small imperfections in the conductive layer 28 and/or core layer 26 can also result in an uneven surface of the substrate. Thus, when the solder mask 34 is coated onto the substrate, the upper surface of the solder mask 34 similarly is not flat.
When the die is mounted to the solder mask layer with the die attach film, the film is generally an uncured, relatively viscous liquid, and does not adhere to all of the small valleys on the uneven surface of the solder mask 34. As a result, tiny air bubbles get trapped in the spaces where the die attach film does not adhere to the solder mask. Although small when initially trapped, these air bubbles tend to expand when the package is heated, as during the encapsulation process.
These expanding air bubbles present at least two problems. First, the die may delaminate from the substrate if enough of these air bubbles develop. Second, the die are subjected to large forces during the encapsulation process. The molding machine may output an injection force typically about 0.8 tons to drive the molding compound into the mold cavity. For die having a footprint of about 4.5 mm by 2.5 mm, this injection force may result in a pressure down on the die of about 1.2 kgf/mm2. The uneven surface below the die resulting from the air bubbles may cause deformation of the die. This deformation can cause fractures in the die, known as die cracking.
In the past, the thickness of the die was such that delamination of the die could be cured by increasing the molding pressure to reduce the delaminated area. Moreover, the thicker die were sturdier and much less prone to die cracking. However, chip scale packages (“CSP”) and the constant drive toward smaller form factor packages require very thin die. It is presently known to employ wafer backgrind during the semiconductor fabrication process to thin die to a range of about 2 mils to 13 mils. At these thicknesses, the die are often not able to withstand the stress concentrations generated during the molding process. Similarly, the prior solution of increasing molding pressure to reduce delamination is generally no longer an option. Thus, as the thicknesses of the die continue to decrease, the problems presented by trapped air bubbles are becoming more significant.
Embodiments of the invention relate to a semiconductor die substrate for preventing delamination of the die and/or die cracking, and a semiconductor package incorporating the substrate. The semiconductor die package may be formed of a substrate including conductance patterns formed on its top and/or bottom surface. One or more semiconductor die may be mounted on a first surface of a substrate, and a molding compound may then be provided for encapsulating the one or more semiconductor die and substrate.
Before the die are mounted on the substrate, a solder mask may be laminated on the first surface of the substrate to prevent the solder from sticking to any metallization except where openings are patterned into the solder mask. In accordance with embodiments of the invention, the solder mask may be patterned with one or more passageways, or canals. The canals may have a wavy, undulating shape, but a variety of different shapes are contemplated.
When the semiconductor die are mounted to the solder mask with a die attach film, at least a portion of the one or more canals are positioned beneath the semiconductor die. In embodiments, the canals may extend beneath the semiconductor die in a direction generally parallel to a direction of flow of the molding compound as the compound encapsulates the die. As air bubbles develop and/or expand, for example during the molding process, the air bubbles may be expelled from the beneath the semiconductor die through the one or more canals. Thus, the problem of delamination and/or die cracking due to the formation and expansion of trapped air bubbles may be significantly reduced or avoided altogether.
Embodiments of the invention will now be described with reference to
Referring initially to the top and cross-sectional views of
The conductive layers 108 and 110 may be formed of copper or copper alloys, plated copper or plated copper alloys, Alloy 42 (42Fe/58Ni), copper plated steel, or other metals and materials known for use on substrates. The layers 108 and 110 may have a thickness of about 10 μm to 24 μm, although the thickness of the layers 108 and 110 may vary outside of that range in alternative embodiments.
The layer 108 and/or layer 110 may be etched with a conductance pattern for communicating signals between one or more semiconductor die and an external device. One process for forming the conductance pattern on the substrate 100 is explained with reference to the flowchart of
Once patterned, the top and bottom conductive layers 108, 110 may be laminated with a solder mask 112, and, in embodiments where substrate 100 is used for example as an LGA package, one or more gold layers may be formed on portions of the bottom conductive layer 110 to define contact fingers 114 as is known in the art for communications with external devices.
As explained in the Background of the Invention section, owing to the unevenness of the upper surface of the solder mask, air bubbles form on the substrate between the solder mask and a die attach adhesive for attaching a semiconductor die (explained hereinafter). These air bubbles can delaminate and/or crack the die, for example during the encapsulation process where the trapped air bubbles conventionally expand with the increase in temperature.
Therefore, according to embodiments of the present invention, the layer of solder mask 112 which receives the semiconductor die may be patterned with one or more canals 120 as shown in
The canals 120 may be patterned into the solder mask by a variety of known processes, at the same time and manner as openings 122. Canals 120 may be formed at a different time and/or in a different manner than openings 122 in alternative embodiments. An example of the steps which may be used to apply solder mask 112 to substrate 100 is disclosed in U.S. Pat. No. 6,825,569, to Jiang, et al., entitled, “BGA Package Having Substrate with Patterned Solder Mask Defining Open Die Attach Area,” which patent is hereby incorporated by reference in its entirety. In general, in one embodiment, the solder mask may comprise a photoimageable, dielectric material that can be blanket deposited on layers 108 and 110 as a wet or dry, positive or negative tone resist film. One suitable resist film is commercially available from Taiyo America, Inc., Carson City, Nev. under the trademark “PSR-4000.” The PSR-4000 resist can be mixed with an epoxy such as epoxy “720” manufactured by Ciba-Geigy (e.g., 80% PSR-4000 and 20% epoxy “720”). Another suitable resist is commercially available from Shipley, Co. under the trademark “XP-9500.” Other materials from which solder mask 112 may be formed are known.
The mask materials can be blanket deposited onto the substrate 100 using a suitable deposition process, such as by spraying the mask materials through a nozzle onto the substrate 100, or by moving the substrate 100 through a curtain coater conveyor having curtains of the mask materials. A representative thickness of the mask materials can be from about 1 mil to 4 mils.
Following blanket deposition of the mask materials, a prebaking step can be performed to partially harden the mask materials. For example, the mask materials can be prebaked at about 95° C. for about 15 minutes. Following prebaking, the mask materials can be exposed in a desired pattern using a suitable mask, and a conventional UV aligner. A representative UV dose can be about 165 mJ/cm2. The mask includes the pattern for the one or more canals 120.
Following exposure of the mask materials, a developing step can be performed. The developing step can be performed using a suitable developing solution such as a 1 to 1.5 percent solution of sodium monohydrate (Na2CO3—H2O), or potassium carbonate monohydrate (K2CO—H2O). Following the developing step, the mask materials can be rinsed, dried and cured. Curing can be performed by exposure to UV at a desired power (e.g., 3-5 J/cm2), or by heating to a desired temperature (e.g., 150-155° C.) for a desired time (e.g., one hour). Solder mask 112 may be formed with the one or more canals 120 by other known methods in alternative embodiments.
As shown in
The one or more die 116 may be mounted on the top surface of the substrate 100 in a known adhesive or eutectic die bond process, using a known die attach film 118. The die attach film may be for example any of various polymer adhesives. Such die attach compounds are manufactured for example by Semiconductor Packaging Materials, Inc. of Armonk, N.Y.
Referring now to
The mold compound is introduced over the substrate 100 and semiconductor die 116 from the direction indicated by arrows A in
Canal 120 also has an end 120a, which as shown in
As indicated above, a number of canals 120 may be etched into the solder mask 112, such as for example between 1 and 5 such canals, though the number may be higher than that in alternative embodiments. Additionally, the canal 120 may take on a variety of different configurations and accomplish the venting of air bubbles from beneath the semiconductor die 116. Some of these alternative configurations are shown in
The amplitude of the canals (i.e., distance between the peaks/valleys) may vary in alternative embodiments. Canal 520 shown in
In a further alternative embodiment shown in
In accordance with embodiments of the present invention, as air bubbles develop and/or expand, for example during the molding process, the canals allow the air bubbles to be expelled from the beneath the semiconductor die. Thus, the problem of delamination and/or die cracking due to the formation and expansion of trapped air bubbles may be significantly reduced or avoided altogether. Each of the above-described canals is an example of a passageway for air bubbles to be expelled from beneath the semiconductor die. Those of skill in the art will appreciate that other passageway configurations are possible. The total area of the canal(s) beneath the semiconductor may vary in alternative embodiments.
A process for forming the finished die package 140 is explained with reference to the flowchart of
In embodiments where package 140 is for example an LGA package, after the solder mask is applied, the contact fingers for external connection are completed. A soft gold layer is applied over certain exposed surfaces of the conductive layer on the bottom surface of the substrate, as for example by thin film deposition, in step 178. As the contact fingers are subject to wear by contact with external electrical connections, a hard layer of gold may be applied, as for example by electrical plating, in step 180. It is understood that a single layer of gold may be applied in alternative embodiments. A router then separates the panel into individual substrates in step 182. The individual substrates are then inspected and tested in an automated step (step 184) and in a final visual inspection (step 186) to check electrical operation, and for contamination, scratches and discoloration. The substrates that pass inspection are then sent through the die attach process in step 188, and the substrate and die are then packaged in step 190 in a known injection mold process to form a JEDEC standard (or other) package. It is understood that the die package 140 including canals as described above may be formed by other processes in alternative embodiments.
The foregoing detailed description of the invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed. Many modifications and variations are possible in light of the above teaching. The described embodiments were chosen in order to best explain the principles of the invention and its practical application to thereby enable others skilled in the art to best utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims appended hereto.