BRIEF DESCRIPTION OF THE DRAWINGS
The invention is described below in relation to several embodiments illustrated in the accompanying drawings. Throughout the drawings like reference numbers indicate like exemplary elements, components, or steps, and the thickness of layers may be exaggerated for clarity.
FIG. 1 is a perspective view illustrating a micro battery according to an example embodiment.
FIG. 2 is a perspective view of region B of FIG. 1.
FIGS. 3 and 4 are perspective views to show portions of the micro battery according to an example embodiment.
FIG. 5 is a cross-sectional view taken along line I-I′ of FIG. 1.
FIGS. 6 to 8 are cross-sectional views taken along line II-II′ of FIG. 1.
FIG. 9 is a cross-sectional view illustrating an organization of a semiconductor package incorporating a micro battery according to an example embodiment.
FIG. 10 is a cross-sectional view taken along line III-III′ of FIG. 9.
FIG. 11 through FIG. 13 are cross-sectional views illustrating semiconductor packages incorporating a battery, according to other example embodiments.