The present invention is directed generally to stacked microfeature devices and methods for manufacturing such packages.
One method for increasing the density of microelectronic circuits for electronic devices (such as computers, portable phones, etc.) is to stack two or more microelectronic dies on top of each other. Accordingly, this arrangement can provide additional circuits within the same footprint normally occupied by a single die.
The first die 20 includes first die bond pads 21 that are coupled to corresponding first substrate bond pads 41a with first wirebonds 50a. The first substrate bond pads 41a are coupled to external substrate bond pads 41c with vias. The external substrate bond pads 41c each have a substrate solder ball 42 to provide communication between the first die 20 and devices located external to the package 10. Similarly, the second die 30 includes second die bond pads 31 coupled to corresponding second substrate bond pads 41b with second wirebonds 50b. The second substrate bond pads 41b are coupled to additional external substrate bond pads 41c to provide communication between the second die 30 and devices external to the package. Once the first and second wirebonds 50a, 50b are connected, the substrate 40, the first die 20, and the second die 30 can be at least partially enclosed with an encapsulant 12 to protect these components.
One feature of an arrangement shown in
The present invention is directed to stacked microfeature devices and associated methods. The term “microfeature device” is used throughout to include a device formed from a substrate upon which and/or in which submicron circuits or components and/or data storage elements or layers are fabricated. Submicron features in the substrate include, but are not limited to, trenches, vias, lines, and holes. These features typically have a submicron width (e.g., ranging from, for example, 0.1 micron to 0.75 micron) generally transverse to a major surface (e.g., a front side or a back side) of the device. The term microfeature device is also used to include substrates upon which and/or in which micromechanical features are formed. Such features include read/write head features and other micromechanical features having submicron or supermicron dimensions. In many of these embodiments, the substrate is formed from suitable materials, including ceramics, and may support layers and/or other formations of other materials, including but not limited to metals, dielectric materials and photoresists.
A microfeature device package in accordance with one aspect of the invention can include a first microfeature device having a plurality of first bond pads at least proximate to a first bond pad surface, and a second microfeature device having a plurality of second bond pads at least proximate to a second bond pad surface. The second bond pad surface can face toward the first bond pad surface. A package connection site can be positioned to provide electrical communication between the first microfeature device and components external to the device package. A wirebond can be coupled between at least one of the first bond pads and the package connection site, and an electrically conductive link can be coupled between the first microfeature device and at least one of the second bond pads of the second microfeature device.
In a particular aspect of the invention, the wirebond is one of a plurality of wirebonds and all the wirebonds of the package are connected directly to the first microfeature device. In a further particular aspect of the invention, the first microfeature device includes an intermediate bond pad electrically coupled to the at least one first bond pad, and the electrically conductive link is connected between the intermediate bond pad and the at least one second bond pad of the second microfeature device. In yet another aspect of the invention, the first microfeature device includes an intermediate bond pad electrically isolated from the at least one first bond pad, and the electrically conductive link is connected between the intermediate bond pad and the at least one second bond pad of the second microfeature device.
The present invention is also directed towards methods for forming a microfeature device package. In one aspect of the invention, the method includes positioning a first microfeature device at least proximate to a second microfeature device, with the first microfeature device having a first bond pad surface with a plurality of first bond pads at least proximate to the first bond pad surface, and with the second microfeature device having a second bond pad surface with a plurality of second bond pads at least proximate to the second bond pad surface. The first bond pad surface can be positioned to face toward the second bond pad surface. A wire bond can be coupled between at least one of the first bond pads and a package connection site that is positioned to provide electrical communication between the first microfeature device and components external to the device package. An electrically conductive link can be coupled between the first microfeature device and at least one of the second bond pads of the second microfeature device.
In a particular aspect of the invention, the wire bond is one of a plurality of wire bonds and the method further includes connecting all the wire bonds of the package directly to the first microfeature device. In other aspects of the invention, the first microfeature device can include an intermediate bond pad electrically coupled to the at least one first bond pad, and coupling an electrically conductive link between the first microfeature device and the at least one second bond pad can include coupling the electrically conductive link between the intermediate bond pad and the at least one second bond pad. In yet another aspect of the invention, the intermediate bond pad is electrically isolated from the at least one first bond pad.
Several specific details of the invention are set forth in the following description and in
In one aspect of an embodiment shown in
In one aspect of an embodiment shown in
The first microfeature device 120 can also carry intermediate bond pads 122. In one aspect of this embodiment, some or all of the intermediate bond pads 122 are not electrically connected to features within the first microfeature device 120, but instead, provide an intermediate point in an electrical communication link between the second microfeature device 130 and the support member 140. In another embodiment, at least some of the intermediate bond pads 122 are electrically connected to corresponding first device bond pads 122 (e.g., via a redistribution layer) or directly to features within the first microfeature device 120. In another embodiment, the intermediate bond pads 122 can be connected to the second substrate bond pads 141b with second wirebonds 150b. As described in greater detail below, the second microfeature device 130 can also be electrically coupled to the intermediate bond pads 122 to complete the communication link between the second package connection sites 143b located at the support member 140, and the features within the second microfeature device 130.
The second microfeature device 130 can include second bond pads 131 that are electrically connected to features within the second microfeature device 130. In one aspect of an embodiment shown in
In a particular aspect of an embodiment shown in
One feature of an embodiment of the package 110 described above with reference to
Another advantage of the foregoing arrangement is that the encapsulant 111 need not envelop the entire second microfeature device 130. For example, if the second microfeature device 130 includes a first surface 135a and a second, oppositely facing surface 135b, the second surface 135b need not be covered with the encapsulant 111. As a result the rate at which heat is transferred from the second microfeature device 130 can be enhanced, due to the exposed second surface 135b.
Another feature of an embodiment of the package 110 described above with reference to
Still another feature of an embodiment of the package 110 described above with reference to
In other embodiments, the package 110 can have other configurations. For example, the first and second microfeature devices 120, 130 can have generally similar shapes and configurations, with the second device bond pads 131 arranged in a mirror image of the first device bond pads 121. Signals dedicated to either the first or second microfeature device can be routed via arrangements generally similar to those described below with reference to
In one aspect of an embodiment shown in
As described above, the second microfeature device 330 can have features arranged generally similarly to those of the first microfeature device 320. Accordingly, the second microfeature device 330 can include a second bond pad surface 335, second device bond pads 331 (also labeled with numerals 1-8) at least proximate to the second bond pad surface 335, and second wirebond pads 338 coupled to the second device bond pads 331 with second couplers 337. The first and second microfeature devices 320, 330 can be stacked in a face-to-face arrangement on the support member 340, as described in greater detail below.
In one aspect of an embodiment shown in
In a particular aspect of an embodiment shown in
Microfeature devices having the foregoing arrangement can be positioned on the bottom of the stack (e.g., in the position of the first microfeature device 420) or, by rotating the microfeature device and placing it face down, on the top of the stack (e.g., in the position of the second microfeature device 430). The second microfeature device 430 includes a second bond pad surface 435 that carries second device bond pads 431 electrically coupled to second wirebond pads 438 with second couplers 437. Those second wirebond pads 438 that are aligned with the wirebonds 450 below can include electrically conductive members 433 (e.g., solder balls) that physically couple the second microfeature device 430 to the first microfeature device 420, and electrically couple the second device bond pads 431 to the corresponding first device bond pads 421. Accordingly, signals transmitted to and/or received by the first device bond pads 421 are also transmitted to and/or received by the second bond pads 431.
The second microfeature device 530 can have a layout identical to that of the first microfeature device 520, with ten active second device bond pads 531a-531j aligned along a first axis 580, and corresponding second intermediate bond pads 532a-532j generally aligned along a second axis 581. The first axis 580 and the second axis 581 can be equidistant from a centerline 536 of the second microfeature device 530. Accordingly, when the second microfeature device 530 is positioned above the first microfeature device 520, it is rotated so that the second device bond pads 531 align with the correspondingly numbered first intermediate bond pads 522, and the second intermediate bond pads 532 align with the correspondingly numbered first device bond pads 521.
Some signals transmitted to/from the package 510 are shared by the first microfeature device 520 and the second microfeature device 530 and are accordingly transmitted via both the first device bond pads 521 and the correspondingly numbered second device bond pads 531. For example, signals transmitted via the first device bond pads 521a-e, i and j are also transmitted via the corresponding second device bond pads 531a-e, i and j, respectively. Accordingly, the couplers 527 for these bond pads connect these bond pads to the correspondingly numbered intermediate bond pads 522, 532 mirrored across the device centerlines 526, 536. Electrically conductive members 533 (e.g., solder balls) disposed on the first intermediate bond pads 522 electrically connect the first bond pads 521 of the first microfeature device 520 to the corresponding second bond pads 531 of the second microfeature device 530. For example, signals transmitted to/from the first device bond pad 521a are also transmitted to/from the second device bond pad 531a via an electrically conductive member 533 disposed between the first intermediate bond pad 522a and the second device bond pad 531a.
Other signals transmitted to/from the package 510 are transmitted to/from only the first microfeature device 520 and/or only the second microfeature device 530. For example, signals transmitted via the first device bond pads 521f and 521h of the first microfeature device 520 are independent of signals transmitted via the second device bond pads 531f and 531h of the second microfeature device 530. Accordingly, the first device bond pad 521f is not electrically coupled to its corresponding first intermediate bond pad 522f, but instead has an independent coupler 527f1 connected to a wirebond 550f1 at a first wirebond pad 528f1. The first intermediate bond pad 522f has a separate coupler 527f2 connected at a corresponding first wirebond pad 528f2 to wirebond 550f2. An electrically conductive member 533 at the first intermediate bond pad 522f electrically couples the wirebond 550f2 to the second device bond pad 531f of the second microfeature device 530. Accordingly, signals transmitted via the first device bond pad 521f are transmitted independently of signals transmitted via the second device bond pad 531f.
A generally similar though more complex arrangement is used to transmit signals via the first bond pad 521h independently of signals transmitted via the second bond pad 531h. The first bond pad 521h is coupled with a coupler 527h1 to a corresponding wirebond pad 528h1 and a corresponding wirebond 550h1. Accordingly, signals travel to/from the first device bond pad 521h directly via the coupler 527h1 and the wirebond 550h1.
A separate and electrically isolated coupler 527h2 is connected between a first intermediate bond pad 522h2 and a wirebond pad 528h2, which is coupled to a wirebond 550h2. The first intermediate bond pad 522h2 is positioned on a third axis 572. Additional first intermediate bond pads 522h3, 522h and 522h4 are electrically connected to each other and are positioned on the centerline 526, the second axis 571, and a fourth axis 573, respectively. The fourth axis 573 mirrors the third axis 572 about the centerline 526. Electrically conductive members 533 are disposed on the intermediate bond pads 522h2, 522h3 and 522h. Corresponding second intermediate bond pads 532h2, 532h, 532h3 and 532h4 on the second microfeature device are positioned to route electrical signals between the second device bond pad 531h and the wirebond 550h2, as follows: When the second microfeature device 530 is positioned face down on the first microfeature device 520 and physically and electrically coupled to it, signals travel to/from the second device bond pad 531h along a path that includes the wirebond 550h2, the coupler 527h2, the first intermediate bond pad 522h2, then to the corresponding second intermediate bond pad 532h4 (of the second microfeature device 530), then to the second intermediate bond 532h3 (of the second microfeature device 530) then to the corresponding first intermediate bond pad 522h3 (of the first microfeature device 520) then to the first intermediate bond pad 522h and finally to the second bond pad 531h of the second microfeature device 530.
One feature of an arrangement of microfeature devices described above with reference to
Another feature of the microfeature devices 520, 530 described above with reference to
From the foregoing, it will be appreciated that specific embodiments of the invention have been described herein for purposes of illustration, but that various modifications may be made without deviating from the spirit and scope of the invention. Accordingly, the invention is not limited except as by the appended claims.
This application is a continuation of U.S. application Ser. No. 16/104,862, filed Aug. 17, 2018, now U.S. Pat. No. 11,373,979, which is a continuation of U.S. application Ser. No. 15/368,158, filed Dec. 2, 2016, now U.S. Pat. No. 10,062,667; which is a continuation of U.S. application Ser. No. 13/845,953, filed Mar. 18, 2013, now U.S. Pat. No. 9,515,046; which is a divisional of U.S. application Ser. No. 12/820,704, filed Jun. 22, 2010, now U.S. Pat. No. 8,400,780; which is a divisional of U.S. application Ser. No. 11/416,740, filed May 3, 2006, now U.S. Pat. No. 7,742,313; which is a continuation of U.S. application Ser. No. 10/651,912, filed Aug. 29, 2003, now U.S. Pat. No. 7,071,421; each of which is incorporated herein by reference in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
5128831 | Fox et al. | Jul 1992 | A |
5145099 | Wood et al. | Sep 1992 | A |
5252857 | Kane et al. | Oct 1993 | A |
5445311 | Trask et al. | Aug 1995 | A |
5518957 | Kim | May 1996 | A |
5616520 | Nishiuma et al. | Apr 1997 | A |
5677566 | Brooks et al. | Oct 1997 | A |
5826628 | Hamilton | Oct 1998 | A |
5879965 | Jiang et al. | Mar 1999 | A |
5883426 | Tokuno et al. | Mar 1999 | A |
5925930 | Farnworth et al. | Jul 1999 | A |
5933713 | Farnworth | Aug 1999 | A |
5946553 | Wood et al. | Aug 1999 | A |
5986209 | Tandy | Nov 1999 | A |
5990566 | Farnworth et al. | Nov 1999 | A |
RE36469 | Wood et al. | Dec 1999 | E |
6011306 | Kimura | Jan 2000 | A |
6020624 | Wood et al. | Feb 2000 | A |
6020629 | Farnworth et al. | Feb 2000 | A |
6028365 | Akram et al. | Feb 2000 | A |
6048744 | Corisis et al. | Apr 2000 | A |
6048755 | Jiang et al. | Apr 2000 | A |
6051878 | Akram et al. | Apr 2000 | A |
6072233 | Corisis et al. | Jun 2000 | A |
6072236 | Akram et al. | Jun 2000 | A |
6081429 | Barrett | Jun 2000 | A |
6097087 | Farnworth et al. | Aug 2000 | A |
6103547 | Corisis et al. | Aug 2000 | A |
6107122 | Wood et al. | Aug 2000 | A |
6130474 | Corisis | Oct 2000 | A |
6133068 | Kinsman | Oct 2000 | A |
6133622 | Corisis et al. | Oct 2000 | A |
6137063 | Jiang | Oct 2000 | A |
6148509 | Schoenfeld et al. | Nov 2000 | A |
6150710 | Corisis | Nov 2000 | A |
6153924 | Kinsman | Nov 2000 | A |
6159764 | Kinsman et al. | Dec 2000 | A |
6169331 | Manning et al. | Jan 2001 | B1 |
6175149 | Akram | Jan 2001 | B1 |
6180426 | Lin | Jan 2001 | B1 |
6212767 | Tandy | Apr 2001 | B1 |
6215182 | Ozawa et al. | Apr 2001 | B1 |
6225689 | Moden et al. | May 2001 | B1 |
6228548 | King et al. | May 2001 | B1 |
6229202 | Corisis | May 2001 | B1 |
6235554 | Akram et al. | May 2001 | B1 |
6239489 | Jiang | May 2001 | B1 |
6246108 | Corisis et al. | Jun 2001 | B1 |
6246110 | Kinsman et al. | Jun 2001 | B1 |
6258623 | Moden et al. | Jul 2001 | B1 |
6258624 | Corisis | Jul 2001 | B1 |
6261865 | Akram | Jul 2001 | B1 |
6271580 | Corisis | Aug 2001 | B1 |
6281577 | Oppermann et al. | Aug 2001 | B1 |
6284571 | Corisis et al. | Sep 2001 | B1 |
6291894 | Farnworth et al. | Sep 2001 | B1 |
6294839 | Mess et al. | Sep 2001 | B1 |
6297547 | Akram | Oct 2001 | B1 |
6303981 | Moden | Oct 2001 | B1 |
6303985 | Arson et al. | Oct 2001 | B1 |
6310390 | Moden | Oct 2001 | B1 |
6329222 | Corisis et al. | Dec 2001 | B1 |
6329705 | Ahmad | Dec 2001 | B1 |
6331448 | Ahmad | Dec 2001 | B1 |
6335104 | Sambucetti et al. | Jan 2002 | B1 |
6344976 | Schoenfeld et al. | Feb 2002 | B1 |
6413797 | Oka et al. | Jul 2002 | B2 |
6420787 | Kobayashi et al. | Jul 2002 | B1 |
6429528 | King et al. | Aug 2002 | B1 |
6438224 | Forman et al. | Aug 2002 | B1 |
6469370 | Kawahara | Oct 2002 | B1 |
6522015 | Glenn et al. | Feb 2003 | B1 |
6544880 | Akram | Apr 2003 | B1 |
6548376 | Jiang | Apr 2003 | B2 |
6548757 | Russell et al. | Apr 2003 | B1 |
6552910 | Moon et al. | Apr 2003 | B1 |
6555917 | Heo | Apr 2003 | B1 |
6560117 | Moon | May 2003 | B2 |
6579744 | Jiang | Jun 2003 | B1 |
6607937 | Corisis | Aug 2003 | B1 |
6639315 | Kazama | Oct 2003 | B2 |
6670702 | Corisis et al. | Dec 2003 | B2 |
6683374 | Goller et al. | Jan 2004 | B2 |
6836009 | Koon et al. | Dec 2004 | B2 |
6847105 | Koopmans | Jan 2005 | B2 |
6857470 | Park | Feb 2005 | B2 |
6906415 | Jiang et al. | Jun 2005 | B2 |
6914259 | Sakiyama | Jul 2005 | B2 |
7009304 | Bando et al. | Mar 2006 | B2 |
7071421 | Heng et al. | Jul 2006 | B2 |
7161249 | Shim et al. | Jan 2007 | B2 |
7332372 | Derderian | Feb 2008 | B2 |
7368810 | Seng et al. | May 2008 | B2 |
7518223 | Derderian | Apr 2009 | B2 |
7742313 | Heng et al. | Jun 2010 | B2 |
8187965 | Lin et al. | May 2012 | B2 |
8258616 | Liou | Sep 2012 | B1 |
8400780 | Heng et al. | Mar 2013 | B2 |
8476117 | Brooks | Jul 2013 | B2 |
9515046 | Heng et al. | Dec 2016 | B2 |
10062667 | Heng et al. | Aug 2018 | B2 |
20010000013 | Lin | Mar 2001 | A1 |
20010000157 | Oka et al. | Apr 2001 | A1 |
20010002726 | Oka et al. | Jun 2001 | A1 |
20020027295 | Kikuma et al. | Mar 2002 | A1 |
20020121686 | Uchida et al. | Sep 2002 | A1 |
20020125556 | Oh | Sep 2002 | A1 |
20020149097 | Lee et al. | Oct 2002 | A1 |
20020153600 | Chang et al. | Oct 2002 | A1 |
20020167079 | Pu et al. | Nov 2002 | A1 |
20020180025 | Miyata et al. | Dec 2002 | A1 |
20030042591 | Goller et al. | Mar 2003 | A1 |
20030089998 | Chan et al. | May 2003 | A1 |
20030102567 | Eskildsen | Jun 2003 | A1 |
20030111716 | Ano | Jun 2003 | A1 |
20030127717 | Fang et al. | Jul 2003 | A1 |
20030160311 | Ismail et al. | Aug 2003 | A1 |
20030230796 | Ismail et al. | Dec 2003 | A1 |
20030230801 | Jiang et al. | Dec 2003 | A1 |
20040026773 | Koon et al. | Feb 2004 | A1 |
20040063242 | Karnezos et al. | Apr 2004 | A1 |
20040067606 | Fehr et al. | Apr 2004 | A1 |
20050045378 | Heng et al. | Mar 2005 | A1 |
20060201704 | Heng et al. | Sep 2006 | A1 |
20090206460 | Reyes et al. | Aug 2009 | A1 |
20100258939 | Heng et al. | Oct 2010 | A1 |
20110147910 | Reynolds et al. | Jun 2011 | A1 |
20130154117 | Tan et al. | Jun 2013 | A1 |
20130217183 | Heng et al. | Aug 2013 | A1 |
20140141544 | Eng et al. | May 2014 | A1 |
20150001538 | Masuda et al. | Jan 2015 | A1 |
20150303176 | Seng | Oct 2015 | A1 |
20170084585 | Heng et al. | Mar 2017 | A1 |
20180358331 | Heng et al. | Dec 2018 | A1 |
Number | Date | Country |
---|---|---|
2004109327 | Dec 2004 | WO |
Entry |
---|
“Search Report and Written Opinion for Singapore Application No. 200305589-4, Australian Patent Office, dated Apr. 8, 2005.” |
Number | Date | Country | |
---|---|---|---|
20230008716 A1 | Jan 2023 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 12820704 | Jun 2010 | US |
Child | 13845953 | US | |
Parent | 11416740 | May 2006 | US |
Child | 12820704 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 16104862 | Aug 2018 | US |
Child | 17850122 | US | |
Parent | 15368158 | Dec 2016 | US |
Child | 16104862 | US | |
Parent | 13845953 | Mar 2013 | US |
Child | 15368158 | US | |
Parent | 10651912 | Aug 2003 | US |
Child | 11416740 | US |