This invention relates to semiconductor packaging. In particular this invention relates to semiconductor packages that include processor and memory chips in the package.
It is desirable in some applications to include semiconductor memory chips in the same package as a processor, such as a CPU or ASIC or GPU.
It is also desirable generally in the computing industry to increase performance while minimizing the sizes of computing devices and also lowering costs and increasing manufacturing yields.
This invention is directed to multi-package modules that include a processor and a plurality of memory packages mounted on a surface of the multi-package module substrate.
According to the invention, a processor, such as an ASIC or a CPU or a GPU, is mounted on a surface of a module substrate, and two or more memory packages are mounted on the upper surface of the substrate.
Generally, the invention features various configurations of multi-package modules. According to the invention the memory packages may include stacked die packages; or the memory packages may include stacked memory packages. Also according to the invention the processor may be mounted on the lower surface of the module substrate, or the processor may be mounted on the upper surface of the module substrate. In embodiments in which the processor is mounted on the upper surface of the module substrate, it may be situated on a portion of the substrate surface at or near the center of the substrate, and the plurality of memory packages or of stacked memory package assemblies may be situated on parts of the module substrate surface adjacent the processor. Or, in embodiments in which the processor is mounted on the upper surface of the module substrate, the plurality of memory packages or of stacked memory package assemblies may be stacked over the processor.
Also according to the invention the z-interconnection between the memory packages and the module substrate is formed by wire bonding. Where the memory packages are configured as stacked memory package assemblies the overlying memory packages in each stack may be connected to a common stacked memory package assembly substrate, and in such embodiments the z-interconnection between the memory packages and the module substrate is formed by wire bonding the common stacked memory package assembly substrate to the module substrate. Also, where the memory packages are configured as stacked memory package assemblies the memory packages may be of a ball grid array (BGA) type or of a land grid array (LGA) type.
In one general aspect the invention features a multi-package module including a processor, such as a CPU, GPU or ASIC, mounted on a part of the lower surface of a module substrate, and a plurality of memory packages each mounted on a portion of the upper surface of the module substrate. The z-interconnect between the memory packages and the module substrate is made by wire bonding between the package substrates and the module substrate. Preferably according to this aspect of the invention the memory packages are inverted LGA type packages; that is, the side of the memory package substrate on which the memory die is affixed faces downward toward the upper surface of the module substrate.
In another general aspect the invention features a multi-package module including a processor, such as a CPU, GPU or ASIC, mounted on a part of the upper surface of a module substrate, and a plurality of memory packages in a memory package assembly are mounted over the processor. The memory packages in the memory package assembly are mounted on a common memory assembly substrate, and the z-interconnect between the memory packages and the module substrate is made by wire bonding between the common memory assembly substrate and the module substrate. The memory packages may be configured as memory package stacks, including for example two memory packages in each stack.
The memory packages may be BGA type packages, the array of balls providing for connection of each BGA memory package to a surface of the common memory assembly substrate. In embodiments in which the memory packages are BGA packages configured as memory package stacks, an upper package in the stack is connected by way of its array of balls to the upper surface of the common memory assembly substrate and a lower package in the stack is inverted and connected by way of its array of balls to the lower surface of the common memory assembly substrate.
Or, the memory packages may be LGA type packages. The LGA type memory packages may be configured as memory package stacks, including for example two memory packages in each stack. The z-interconnection between the LGA memory packages and the module substrate may be made by wire bonding between each LGA memory package substrate and the module substrate. In some configurations the LGA memory packages in each stack may be stacked in like orientation, and they may be separated by spacers to provide relief for z-interconnect wire bond loops. In other configurations each LGA memory package in each stack may be wire bonded to a common memory assembly substrate, and the z-interconnect between the memory packages and the module substrate is made by wire bonding between the common memory assembly substrate and the module substrate. In some such embodiments a lower package in each stack is affixed to, and is wire bond connected to, a lower surface of the common memory assembly substrate; and an upper package in each stack is inverted and affixed to, and is wire bond connected to, an upper surface of the common memory assembly substrate.
In another general aspect the invention features a multi-package module including a processor, such as a CPU, GPU or ASIC, mounted on a portion of the upper surface of a module substrate, and a plurality of memory packages in a memory package assembly are mounted onto or over portions of the module substrate adjacent the portion to which the processor is mounted. In some embodiments the processor is mounted onto a portion of the module substrate surface at or near the center, and the memory packages are mounted onto or are situated over portions of the surface to one side of the processor mounting portion or, more usually, to opposite sides of the processor mounting portion of the module substrate surface. In some embodiments the memory modules are mounted onto or are situated over portions of the module substrate surface adjacent the processor mounting portion.
According to this aspect of the invention, the memory packages may be arranged in a memory package assembly. In some such embodiments the packages are mounted on a common memory assembly substrate, and the z-interconnect between the memory packages and the module substrate is made by wire bonding between the common memory assembly substrate and the module substrate. The memory packages may be configured as memory package stacks, including for example two memory packages in each stack.
Also according to this aspect of the invention, where the memory packages are arranged in a memory package assembly and the memory packages are mounted onto or over portions of the substrate surface on opposite sides of the processor mounting portion, the common memory assembly substrate may span the area over the processor, or may be provided with an opening over the processor. Where an opening is provided in the common memory assembly substrate over the processor, a heat slug may occupy the volume between the top of the processor and the top of the module. At the top of the module the heat slug may contact a broader heat spreader; or, the heat slug may be configured at the top of the module as a broader heat spreader.
Also according to this aspect of the invention the memory packages may be BGA type packages, the array of balls providing for connection of each BGA memory package to a surface of the common memory assembly substrate. In embodiments in which the memory packages are BGA packages configured as memory package stacks, an upper package in the stack is connected by way of its array of balls to the upper surface of the common memory assembly substrate and a lower package in the stack is inverted and connected by way of its array of balls to the lower surface of the common memory assembly substrate.
Also according to this aspect of the invention, the memory packages may be LGA type packages. The LGA type memory packages may be configured as memory package stacks, including for example two memory packages in each stack. The z-interconnection between the LGA memory packages and the module substrate may be made by wire bonding between each LGA memory package substrate and the module substrate. In some configurations the LGA memory packages in each stack may be stacked in like orientation, and they may be separated by spacers to provide relief for z-interconnect wire bond loops. In other configurations each LGA memory package in each stack may be wire bonded to a common memory assembly substrate, and the z-interconnect between the memory packages and the module substrate is made by wire bonding between the common memory assembly substrate and the module substrate. In some such embodiments a lower package in each stack is affixed to, and is wire bond connected to, a lower surface of the common memory assembly substrate; and an upper package in each stack is inverted and affixed to, and is wire bond connected to, an upper surface of the common memory assembly substrate.
In another general aspect the invention features a multi-package module including a processor, such as a CPU, GPU or ASIC, mounted on a portion of the upper surface of a module substrate, and a plurality of memory packages configured in a plurality of memory package stacks mounted onto portions of the module substrate adjacent the portion to which the processor is mounted. In some embodiments the processor is mounted onto a portion of the module substrate surface at or near the center, and the memory package stacks are mounted onto portions of the surface to one side of the processor mounting portion or, more usually, to opposite sides of the processor mounting portion of the module substrate surface. In some embodiments the memory stacks are mounted onto portions of the module substrate surface adjacent the processor mounting portion.
According to this aspect of the invention, the memory packages in each stack may be arranged in a memory package stack assembly, including for example two memory packages in each stack. In some such embodiments the packages are mounted on a common memory stack substrate, and the z-interconnect between the memory packages and the module substrate is made by wire bonding between the common memory stack substrate and the module substrate.
Also according to this aspect of the invention, a heat slug may occupy the volume between the top of the processor and the top of the module. At the top of the module the heat slug may contact a broader heat spreader; or, the heat slug may be configured at the top of the module as a broader heat spreader.
Also according to this aspect of the invention the memory packages may be BGA type packages, the array of balls providing for connection of each BGA memory package to a surface of the common memory stack substrate. In embodiments in which the memory packages are BGA packages configured as memory package stacks, an upper package in the stack is connected by way of its array of balls to the upper surface of the common memory stack substrate and a lower package in the stack is inverted and connected by way of its array of balls to the lower surface of the common memory stack substrate.
Also according to this aspect of the invention, the memory packages may be LGA type packages. The LGA type memory packages may be configured as memory package stacks, including for example two memory packages in each stack. The z-interconnection between the LGA memory packages and the module substrate may be made by wire bonding between each LGA memory package substrate and the module substrate. In some configurations the LGA memory packages in each stack may be stacked in like orientation, and they may be separated by spacers to provide relief for z-interconnect wire bond loops. In other configurations each LGA memory package in each stack may be wire bonded to a common memory assembly substrate, and the z-interconnect between the memory packages and the module substrate is made by wire bonding between the common memory assembly substrate and the module substrate. In some such embodiments a lower package in each stack is affixed to, and is wire bond connected to, a lower surface of the common memory assembly substrate; and an upper package in each stack is inverted and affixed to, and is wire bond connected to, an upper surface of the common memory assembly substrate.
In another general aspect the invention features a multi-package module including a processor, such as a CPU, GPU or ASIC, mounted on a portion of the upper surface of a module substrate, and a plurality of stacked die memory packages mounted onto portions of the module substrate adjacent the portion to which the processor is mounted. In some embodiments the processor is mounted onto a portion of the module substrate surface at or near the center, and the stacked die memory packages are mounted onto portions of the surface to one side of the processor mounting portion or, more usually, to opposite sides of the processor mounting portion of the module substrate surface. In some embodiments the memory modules are mounted onto portions of the module substrate surface adjacent the processor mounting portion.
According to this aspect of the invention, the stacked die in each memory package are wire bonded to the memory package substrate, and the z-interconnect between the memory packages and the module substrate is made by wire bonding between the memory package substrates and the module substrate.
Also according to this aspect of the invention, a heat slug may occupy the volume between the top of the processor and the top of the module. At the top of the module the heat slug may contact a broader heat spreader; or, the heat slug may be configured at the top of the module as a broader heat spreader.
Preferably according to this aspect of the invention the memory packages may be LGA type packages. The z-interconnection between the LGA memory packages and the module substrate may be made by wire bonding between each LGA memory package substrate and the module substrate.
In another general aspect the invention features a method for making a multi-package module including a processor and a plurality of memory packages, by providing a module substrate, providing the processor, and providing the memory packages; mounting the processor on a surface of the substrate; mounting the memory packages over or onto a surface of the substrate; and forming wire bonds to make z-interconnection of the memory packages and the module substrate.
In some embodiments of the method the processor is mounted on a lower surface of the module substrate, that is, on the surface on which the solder balls are to be attached, for connection of the module to, for example, a motherboard; and in such embodiments the processor attachment portion of the substrate is in an area of the lower substrate surface not including solder ball pads. In other embodiments the processor is mounted on an upper surface of the module substrate, that is, on the surface opposite the surface on which the solder balls are to be attached, for connection of the module to, for example, a motherboard.
In some embodiments the memory packages are provided as a memory package assembly or as a memory package stack, and the z-interconnection is made by forming wire bonds between a common memory assembly substrate or a common memory stack substrate and the module substrate.
In methods according to the invention for making multi-package modules any of the various packages, or package stacks, or package assemblies, may be readily tested at various stages in the assembly process, so that components that are when tested not within specification can be discarded before they are combined with additional components. Particular advantages of the method of the invention include the use of established manufacturing infrastructure, the use of standard memory and processor components, low production cost, and design flexibility. The resulting multi-package modules are within accepted footprint and thickness dimensions.
Additional process steps will be employed to complete the multi-package modules according to the invention, as will be appreciated in view of the description herein.
The multi-package modules according to the invention can be used for building computers, telecommunications equipment, and consumer and industrial electronics devices.
The invention will now be described in further detail by reference to the drawings, which illustrate various embodiments of the invention. The drawings are diagrammatic, showing features of the invention and their relation to other features and structures, and are not made to scale. For improved clarity of presentation, the FIGS. do not include some details of engineering and design, which are not necessary to an understanding of the invention, but will be clearly understood in view of the state of the art. Also for improved clarity of presentation, in the FIGS. illustrating embodiments of the invention, elements corresponding to elements shown in other drawings are not all particularly renumbered, although they are all readily identifiable in all the FIGS. Terms indicating relative orientation, such as “upper”, “lower”, “top”, “bottom”, “right”, “left” and the like are employed for convenient reference to directions shown in the drawings and, as will be appreciated, any of the embodiments may be deployed in other orientations (upside down, for instance) than as shown in the FIGS.
Turning now to
A processor 120 is mounted onto a processor mounting portion of the lower surface of the module substrate 116. As shown in this example, the processor 120 has a flip-chip configuration; it includes a die 124 electrically connected by way of balls or bumps 128 to interconnect sites (not shown) on selected traces in the lower surface of the module substrate, and affixed to the surface using an adhesive underfill material 125. A plurality of memory packages 130, 130′ (there may typically be four memory packages; two are shown in the view of
A configuration as shown in
In the illustrative embodiment of
Further referring to
As in the example of
A module such as is illustrated by way of example in
The invention as exemplified in
A module such as is illustrated by way of example in
A module as in
A module as shown in
Stacked LGA memory packages 70 as illustrated in
As shown in
The configuration as in
The multi-package module of
As
The configuration as in
The multi-package module of
The multi-package module of
Processes for making various of the components (such as, for example, substrates, die, various BGA and LGA packages, and the like) for use in assembly according to the invention of the various configurations of the invention are known in the art and many are well established in the industry.
Testing of BGA memory packages and of BGA processor units is well established in the industry, and typically is done by accessing contact to the solder ball pads. LGA packages can be tested in either of two ways, namely by accessing the LGA pads on the lower surface of the LGA of the substrate, similar to the pads of the solder balls in a BGA; or by accessing the z-interconnect pads on the upper surface of the substrate. The completed module can be tested in the same as for testing BGAs.
The MPM assembly process is apparent from the various views of the drawings. Particularly, for example, the views in
Other combinations are contemplated within the scope of the invention and will be readily apparent from the description and drawings.
This application is a Continuation of U.S. application Ser. No. 11/355,920, filed Feb. 16, 2006, now U.S. Pat. No. 7,306,973, which is a division of U.S. application Ser. No. 10/618,933, now U.S. Pat. No. 7,034,387 B2, which was filed on 14 Jul. 2003 and which claims the benefit of U.S. Provisional Application No. 60/460,541, filed 4 Apr. 2003, each of which is hereby incorporated by reference in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
4147889 | Andrews et al. | Apr 1979 | A |
4982265 | Watanabe et al. | Jan 1991 | A |
5132773 | Braden et al. | Jul 1992 | A |
5138438 | Masayuki et al. | Aug 1992 | A |
5222014 | Lin | Jun 1993 | A |
5226582 | Kubota et al. | Jul 1993 | A |
5229960 | De Givry | Jul 1993 | A |
5252783 | Baird | Oct 1993 | A |
5340771 | Rostoker | Aug 1994 | A |
5373189 | Massit et al. | Dec 1994 | A |
5394303 | Yamaji | Feb 1995 | A |
5397747 | Angiulli et al. | Mar 1995 | A |
5436203 | Lin | Jul 1995 | A |
5444296 | Kaul et al. | Aug 1995 | A |
5495398 | Takiar et al. | Feb 1996 | A |
5550711 | Burns et al. | Aug 1996 | A |
5633783 | Yamamoto | May 1997 | A |
5652185 | Lee | Jul 1997 | A |
5744863 | Culnane et al. | Apr 1998 | A |
5842628 | Nomoto et al. | Dec 1998 | A |
5874780 | Murakami | Feb 1999 | A |
5898219 | Barrow | Apr 1999 | A |
5899705 | Akram | May 1999 | A |
5903049 | Mori | May 1999 | A |
5977640 | Bertin et al. | Nov 1999 | A |
5982633 | Jeansonne | Nov 1999 | A |
5994166 | Akram et al. | Nov 1999 | A |
6020629 | Farnworth et al. | Feb 2000 | A |
6025648 | Takahashi et al. | Feb 2000 | A |
6034875 | Heim et al. | Mar 2000 | A |
6075289 | Distefano | Jun 2000 | A |
6075712 | McMahon | Jun 2000 | A |
6083772 | Bowman et al. | Jul 2000 | A |
6118176 | Tao et al. | Sep 2000 | A |
6133626 | Hawke et al. | Oct 2000 | A |
6150724 | Wenzel et al. | Nov 2000 | A |
6157080 | Tamaki et al. | Dec 2000 | A |
6201266 | Ohuchi et al. | Mar 2001 | B1 |
6201302 | Tzu | Mar 2001 | B1 |
6229217 | Fukui et al. | May 2001 | B1 |
6238949 | Nguyen et al. | May 2001 | B1 |
6258626 | Wang et al. | Jul 2001 | B1 |
6265766 | Moden | Jul 2001 | B1 |
6274930 | Vaiyapuri et al. | Aug 2001 | B1 |
6316838 | Ozawa et al. | Nov 2001 | B1 |
6333552 | Kakimoto et al. | Dec 2001 | B1 |
6340846 | LoBianco et al. | Jan 2002 | B1 |
6376904 | Haba et al. | Apr 2002 | B1 |
6388313 | Lee et al. | May 2002 | B1 |
6392896 | Stoller | May 2002 | B1 |
6400007 | Wu et al. | Jun 2002 | B1 |
6407456 | Ball | Jun 2002 | B1 |
6413798 | Asada | Jul 2002 | B2 |
6414381 | Takeda | Jul 2002 | B1 |
6424050 | Komiyama | Jul 2002 | B1 |
6441496 | Chen et al. | Aug 2002 | B1 |
6445064 | Ishii et al. | Sep 2002 | B1 |
6456044 | Darmawaskita | Sep 2002 | B1 |
6462421 | Hsu et al. | Oct 2002 | B1 |
6472732 | Terui | Oct 2002 | B1 |
6472741 | Chen et al. | Oct 2002 | B1 |
6489676 | Taniguchi et al. | Dec 2002 | B2 |
6492726 | Quek et al. | Dec 2002 | B1 |
6495912 | Huang et al. | Dec 2002 | B1 |
6501165 | Farnworth et al. | Dec 2002 | B1 |
6512303 | Moden | Jan 2003 | B2 |
6538319 | Terui | Mar 2003 | B2 |
6545365 | Kondo et al. | Apr 2003 | B2 |
6545366 | Michii et al. | Apr 2003 | B2 |
6552423 | Song et al. | Apr 2003 | B2 |
6552426 | Ishio et al. | Apr 2003 | B2 |
6555902 | Lo et al. | Apr 2003 | B2 |
6555917 | Heo | Apr 2003 | B1 |
6563206 | Kamikuri et al. | May 2003 | B2 |
6570249 | Liao et al. | May 2003 | B1 |
6583503 | Akram et al. | Jun 2003 | B2 |
6590281 | Wu et al. | Jul 2003 | B2 |
6593647 | Ichikawa | Jul 2003 | B2 |
6593648 | Emoto | Jul 2003 | B2 |
6593662 | Pu et al. | Jul 2003 | B1 |
6596561 | Takahashi et al. | Jul 2003 | B2 |
6599779 | Shim et al. | Jul 2003 | B2 |
6607937 | Corisis | Aug 2003 | B1 |
6611063 | Ichinose et al. | Aug 2003 | B1 |
6621169 | Kikuma et al. | Sep 2003 | B2 |
6621172 | Nakayama et al. | Sep 2003 | B2 |
6633078 | Hamaguchi et al. | Oct 2003 | B2 |
6649448 | Tomihara | Nov 2003 | B2 |
6650019 | Glenn et al. | Nov 2003 | B2 |
6657290 | Fukui et al. | Dec 2003 | B2 |
6664644 | Morozumi | Dec 2003 | B2 |
6667556 | Moden | Dec 2003 | B2 |
6690089 | Uchida | Feb 2004 | B2 |
6700178 | Chen et al. | Mar 2004 | B2 |
6706557 | Koopmans | Mar 2004 | B2 |
6716676 | Chen et al. | Apr 2004 | B2 |
6717252 | Saeki | Apr 2004 | B2 |
6727581 | Abe et al. | Apr 2004 | B2 |
6734539 | Degani et al. | May 2004 | B2 |
6734552 | Combs et al. | May 2004 | B2 |
6737738 | Koh et al. | May 2004 | B2 |
6737750 | Hoffman et al. | May 2004 | B1 |
6746894 | Fee et al. | Jun 2004 | B2 |
6747361 | Ichinose | Jun 2004 | B2 |
6760224 | Moden et al. | Jul 2004 | B2 |
6762472 | Loh et al. | Jul 2004 | B2 |
6762488 | Maeda et al. | Jul 2004 | B2 |
6768190 | Yang et al. | Jul 2004 | B2 |
6777799 | Kikuma et al. | Aug 2004 | B2 |
6777819 | Huang | Aug 2004 | B2 |
6778390 | Michael | Aug 2004 | B2 |
6787915 | Uchida et al. | Sep 2004 | B2 |
6787916 | Halahan | Sep 2004 | B2 |
6791166 | Foster | Sep 2004 | B1 |
6794749 | Akram | Sep 2004 | B2 |
6818980 | Pedron, Jr. | Nov 2004 | B1 |
6828665 | Pu et al. | Dec 2004 | B2 |
6829147 | Streltsov | Dec 2004 | B2 |
6835598 | Baek et al. | Dec 2004 | B2 |
6838761 | Karnezos | Jan 2005 | B2 |
6847105 | Koopmans | Jan 2005 | B2 |
6864566 | Choi | Mar 2005 | B2 |
6881593 | Le et al. | Apr 2005 | B2 |
6882057 | Hsu | Apr 2005 | B2 |
6890798 | McMahon | May 2005 | B2 |
6900528 | Mess et al. | May 2005 | B2 |
6906415 | Jiang et al. | Jun 2005 | B2 |
6906416 | Karnezos | Jun 2005 | B2 |
6919626 | Burns | Jul 2005 | B2 |
6930378 | St. Amand et al. | Aug 2005 | B1 |
6930396 | Kurita et al. | Aug 2005 | B2 |
6933598 | Karnezos | Aug 2005 | B2 |
6951982 | Chye et al. | Oct 2005 | B2 |
6972481 | Karnezos | Dec 2005 | B2 |
6979904 | Farnworth et al. | Dec 2005 | B2 |
6992395 | Fukasawa | Jan 2006 | B2 |
7034387 | Karnezos | Apr 2006 | B2 |
7034388 | Yang et al. | Apr 2006 | B2 |
7045887 | Karnezos | May 2006 | B2 |
7049691 | Karnezos | May 2006 | B2 |
7053476 | Karnezos | May 2006 | B2 |
7053477 | Karnezos et al. | May 2006 | B2 |
7057269 | Karnezos | Jun 2006 | B2 |
7061088 | Karnezos | Jun 2006 | B2 |
7064426 | Karnezos | Jun 2006 | B2 |
7071568 | St. Amand et al. | Jul 2006 | B1 |
7081678 | Liu | Jul 2006 | B2 |
7101731 | Karnezos | Sep 2006 | B2 |
7132311 | Akiba et al. | Nov 2006 | B2 |
7166494 | Karnezos | Jan 2007 | B2 |
7166495 | Ball | Jan 2007 | B2 |
7169642 | Karnezos | Jan 2007 | B2 |
7245008 | Lee | Jul 2007 | B2 |
7247519 | Karnezos et al. | Jul 2007 | B2 |
7306973 | Karnezos | Dec 2007 | B2 |
20020017719 | Taniguchi et al. | Feb 2002 | A1 |
20020027275 | Fujimoto et al. | Mar 2002 | A1 |
20020079567 | Lo et al. | Jun 2002 | A1 |
20020096755 | Fukui et al. | Jul 2002 | A1 |
20020096781 | Toyosawa | Jul 2002 | A1 |
20020096784 | Kamikuri et al. | Jul 2002 | A1 |
20020130404 | Ushijima et al. | Sep 2002 | A1 |
20020137258 | Akram | Sep 2002 | A1 |
20020142513 | Fee et al. | Oct 2002 | A1 |
20020151103 | Nakamura et al. | Oct 2002 | A1 |
20020180025 | Miyata et al. | Dec 2002 | A1 |
20020180058 | Uchida | Dec 2002 | A1 |
20020185744 | Katagiri et al. | Dec 2002 | A1 |
20030011060 | Le et al. | Jan 2003 | A1 |
20030020151 | Chen et al. | Jan 2003 | A1 |
20030030151 | Morozumi | Feb 2003 | A1 |
20030032216 | Nakaoka et al. | Feb 2003 | A1 |
20030045029 | Emoto | Mar 2003 | A1 |
20030045072 | Jiang | Mar 2003 | A1 |
20030047813 | Goller et al. | Mar 2003 | A1 |
20030048624 | Damberg et al. | Mar 2003 | A1 |
20030071340 | Derderian | Apr 2003 | A1 |
20030071362 | Derderian | Apr 2003 | A1 |
20030082845 | Hoffman et al. | May 2003 | A1 |
20030092205 | Wu et al. | May 2003 | A1 |
20030111716 | Ano | Jun 2003 | A1 |
20030111720 | Tan et al. | Jun 2003 | A1 |
20030113952 | Sambasivam et al. | Jun 2003 | A1 |
20030122237 | Saeki | Jul 2003 | A1 |
20030134451 | Chen | Jul 2003 | A1 |
20030141582 | Yang et al. | Jul 2003 | A1 |
20030146517 | Lasky et al. | Aug 2003 | A1 |
20030146519 | Huang | Aug 2003 | A1 |
20030148597 | Tan et al. | Aug 2003 | A1 |
20030153134 | Kawata et al. | Aug 2003 | A1 |
20030160231 | Cole et al. | Aug 2003 | A1 |
20030160311 | Ismail et al. | Aug 2003 | A1 |
20030160312 | Lo et al. | Aug 2003 | A1 |
20030164543 | Kheng Lee | Sep 2003 | A1 |
20030173679 | Levardo et al. | Sep 2003 | A1 |
20030189257 | Corisis et al. | Oct 2003 | A1 |
20030203542 | Chee | Oct 2003 | A1 |
20030230801 | Jiang et al. | Dec 2003 | A1 |
20040061213 | Karnezos | Apr 2004 | A1 |
20040100772 | Chye et al. | May 2004 | A1 |
20040104469 | Yagi et al. | Jun 2004 | A1 |
20040212096 | Wang | Oct 2004 | A1 |
20060043556 | Su et al. | Mar 2006 | A1 |
20060138631 | Tao et al. | Jun 2006 | A1 |
20060138649 | Karnezos | Jun 2006 | A1 |
Number | Date | Country |
---|---|---|
05152505 | Jun 1993 | JP |
09-064099 | Mar 1997 | JP |
09-162348 | Jun 1997 | JP |
11-243175 | Sep 1999 | JP |
2000-294723 | Oct 2000 | JP |
2001223326 | Aug 2001 | JP |
2001068614 | Jul 2001 | KR |
2004085348 | Oct 2004 | KR |
554509 | Sep 2003 | TW |
Number | Date | Country | |
---|---|---|---|
20090027863 A1 | Jan 2009 | US |
Number | Date | Country | |
---|---|---|---|
60460541 | Apr 2003 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 10618933 | Jul 2003 | US |
Child | 11355920 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 11355920 | Feb 2006 | US |
Child | 11953857 | US |