1. Field
The present disclosure generally relates to multi-chip modules (MCMs) for semiconductor chips. More specifically, the present disclosure relates to an MCM that includes assembly features with different reflow characteristics that are reflowed during assembly of the MCM.
2. Related Art
As integrated-circuit (IC) technology continues to scale to smaller critical dimensions, it is increasingly difficult for existing interconnects to provide suitable communication characteristics, such as: high bandwidth, low power, reliability and low cost. Engineers and researchers are investigating chip stacking in multi-chip modules (MCMs) to address these problems, and to enable future high-density, high-performance systems.
However, it is difficult to bond chips to each other and to carriers (such as printed circuit boards) in chip stacks using existing assembly techniques because of stringent requirements for alignment accuracy and manufacturing throughput. For example, if chips are bonded to each other using a silicone-based adhesive, a pick-and-place tool and non-standard fixturing may be needed to obtain the desired alignment.
Alternatively or additionally, an MCM may be assembled using balls and pits, in which adjacent chips in the MCM are aligned by placing the balls into collocated pits on surfaces of the chips. While this existing assembly technique can provide high alignment accuracy among the chips in the MCM, it typically involves multiple assembly operations, which makes assembly of the MCM complicated, time-consuming and expensive.
Hence, what is needed is a technique for assembling an MCM without the above-described problems.
One embodiment of the present disclosure provides a multi-chip module (MCM) that includes a first substrate having a first surface and a second surface on an opposite side of the first substrate from the first surface. A set of first coupling elements having a first reflow characteristic are disposed on the first surface. This set of first coupling elements may mechanically couple the first substrate to another component. Furthermore, the MCM includes a second substrate having a third surface that is mechanically coupled to one of the first surface and the second surface by a set of second coupling elements having a second reflow characteristic, where the first reflow characteristic is different than the second reflow characteristic.
Note that the first reflow characteristic includes a first temperature profile with a first peak temperature and a first duration that is used when reflowing at least a portion of the set of first coupling elements, and the second reflow characteristic includes a second temperature profile with a second peak temperature and a second duration that is used when reflowing at least a portion of the set of second coupling elements. Furthermore, the first peak temperature may be different from the second peak temperature, the first duration may be different from the second duration, or the first peak temperature and the second peak temperature may be different from the first duration and the second duration.
In some embodiments, the set of first coupling elements includes a set of first positive features that protrudes above the first surface, and the set of second coupling elements includes a set of second positive features that protrudes above the third surface, and one of the first surface and the second surface. A given positive feature in one of the set of first positive features and the set of second positive features may include a spherically shaped coupling component. Furthermore, the first reflow characteristic may be associated with the set of first positive features, and the second reflow characteristic may be associated with the set of second positive features.
Additionally, the set of first coupling elements may include a set of first negative features (such as etch pits) that are recessed below the first surface and that are mechanically coupled to corresponding first positive features. Note that the first reflow characteristic may be associated with: the set of first negative features; or the set of first positive features and the set of first negative features.
In some embodiments, the reflow characteristic of a given second positive feature in the set of second positive features varies as a function of an angular position on a surface of the given second positive feature. This angular variation of the reflow characteristic of the given second positive feature may facilitate modification of a spacing between the first substrate and the second substrate.
Additionally, the set of second coupling elements may include a set of first negative features (such as etch pits) that are recessed below one of the first surface and the second surface, and may include a set of second negative features (such as etch pits) that are recessed below the third surface. A given second positive feature in the set of second positive features may be, respectively, mechanically coupled to a pair of negative features that includes one of the first negative features and one of the second negative features. Note that the second reflow characteristic may be associated with: the set of first negative features and the set of second negative features; or the set of second positive features, the set of first negative features and the set of second negative features.
In some embodiments, the set of first coupling elements and the set of second coupling elements also provide electrical coupling.
In some embodiments, a set of first proximity connectors are disposed on one of the first surface and the second surface, and a set of second proximity connectors are disposed on the third surface. The set of second coupling elements may align the first proximity connectors and the second proximity connectors, and may assemble the MCM, thereby facilitating proximity communication between the first substrate and the second substrate.
Furthermore, the first reflow characteristic and the second reflow characteristic may facilitate selective disassembly of the MCM during rework.
Another embodiment provides a chip package that includes a substrate having a first surface, where a set of first coupling elements having the first reflow characteristic and a set of second coupling elements having the second reflow characteristic, which is different than the first reflow characteristic, are disposed on the first surface. Note that the set of first coupling elements may mechanically couple the substrate to another component. In addition, the chip package includes a flexible connector having a second surface that is mechanically coupled to the first surface by the set of second coupling elements.
Note that the flexible connector may be incompatible with the first peak temperature, and the second peak temperature, which is less than the first peak temperature, may therefore facilitate assembly of the chip package.
Another embodiment provides an electronic device that includes the MCM and/or the chip package.
Another embodiment provides a method for assembling an MCM. During this method, the first surface of the first substrate in the MCM is mechanically coupled to another component by reflowing the set of first coupling elements disposed on the first surface based on the first reflow characteristic of the first coupling elements. Then, one of the first surface and the second surface of the first substrate is mechanically coupled to the third surface of the second substrate in the MCM by reflowing the set of second coupling elements in the MCM based on the second reflow characteristic of the set of second coupling elements, where the first reflow characteristic is different than the second reflow characteristic.
Note that like reference numerals refer to corresponding parts throughout the drawings. Moreover, multiple instances of the same part are designated by a common prefix separated from an instance number by a dash.
Embodiments of a multi-chip module (MCM), a package, an electronic device that includes the MCM or the package, and a technique for assembling the MCM are described. This MCM includes at least two substrates, having facing surfaces, which are mechanically coupled by a set of coupling elements having a reflow characteristic. In addition, one of the two substrates includes another set of coupling elements having another reflow characteristic, which is different than the reflow characteristic. These different reflow characteristics of the sets of coupling elements allow different temperature profiles to be used when bonding the two substrates to each other than when bonding the one of the two substrates to a carrier. For example, the temperature profiles may have different peak temperatures and/or different durations from one another.
These reflow characteristics may facilitate the integration of multiple chips in the MCM. In particular, relative to existing assembly techniques, the assembly technique may: decrease the complexity of the MCM, increase the alignment accuracy, increase the manufacturing throughput, and/or lower the assembly cost. For example, the assembly technique may facilitate simultaneous alignment and assembly of large numbers of chips (such as two or more chips) in an MCM. In addition, the assembly technique may allow staggered reflowing of the sets of coupling elements during assembly of the MCM, which may allow temperature-sensitive components to be included in the MCM.
We now describe embodiments of an MCM.
In particular, negative features 120 that are recessed below surfaces 112, and which have edges that define openings (such as etch pits), may be defined on surfaces 112. These negative features may be loaded with positive features 114 that protrude above surfaces 112 (such as micro-spheres or balls, and, more generally, spherical or hemispherical shapes), and which each have a coating (such as coating 116-1) with a reflow characteristic around a core (such as core 118-1). For example, coatings 116 may include a solder material, such as: a tin-lead alloy (with a 63%/37% or 5%/95% composition), a tin-gold-copper alloy, or a tin-indium alloy. These coatings may have a thickness of 1-10 μm or up to 10% of the diameter of positive features 114. Furthermore, cores 118 may include a non-conducting material (such as a plastic, a polymer, polystyrene, divinylbenzene-copolymer, glass, ruby, sapphire, a ceramic, etc.) or a conducting material (such as stainless steel, a metal, copper, nickel, etc.).
Separately or additionally, negative features 120 on either or both surfaces 112 may include a wettable material 122 that corresponds to coatings 116 on positive features 114, and which may (or may not) also have the reflow characteristic. In general, the reflow characteristic may be associated with either or both of positive features 114 and negative features 120. (Note that each pair of negative features, in conjunction with the associated positive feature, may constitute a coupling element in coupling elements 126 in MCM 100.) For example, wettable material 122 may include: a nickel-gold alloy, a chromium-copper-nickel-gold alloy, etc.
As described further below with reference to
Simultaneously, mating positive features 114 and negative features 120 provides highly accurate self-alignment of proximity connectors 124 in an XY plane of substrates 110 (i.e., in the plane of surfaces 112), as well as co-planarity control, during the bonding. For example, the alignment over surfaces 112 may be within±1 μm in the XY plane. Furthermore, reflowing at least the portion of coatings 116 and/or wettable material 122 may also achieve alignment in the Z direction (i.e., out of the plane of the chip surfaces), thereby reducing the total bondline height in MCM 100 or bounding spacing 128, and facilitating proximity communication between proximity connectors 124.
In addition, substrate 110-1 may have positive features 130, as well as optional negative features 138, disposed on surface 112-1. (Alternatively, as shown in
Coupling elements 142 may mechanically couple substrate 110-1 to another component (not shown) in MCM 100, such as a carrier or a printed circuit board. For example, substrate 110-1 may be bonded to the other component in MCM 100 by melting or reflowing coatings 132 and/or wettable
material 140 by exposing MCM 100 to a temperature profile associated with the other reflow characteristic.
As described further below, because the reflow characteristic and the other reflow characteristic are different, MCM 100 provides additional degrees of freedom during assembly. For example, substrates 110 may be aligned and bonded to each other before or after substrate 110-1 is bonded to the other component (thus, there may be different temperature profiles associated with substrate-to-substrate bonding, substrate-to-carrier bonding and/or connector-to-MCM bonding). This capability may facilitate: improved alignment, increased yield, faster manufacturing throughput, lower-cost assembly, etc. For example, as described below with reference to
In an exemplary embodiment, the temperature profiles associated with the reflow characteristic and the other reflow characteristic each include a corresponding peak temperature and duration. This is shown in
coatings 116 or 132 (
We now describe a process for assembling an MCM.
As noted previously, this assembly technique allows substrates (or chips) to be aligned and bonded to each other using temperature profile T0. Moreover, one or more of the substrates can be bonded to a carrier using temperature profile T1 (such as a temperature profile associated with C4-solder balls). Furthermore, temperature-sensitive components, such as an interconnect cable or connector, can be bonded to one or more of the substrates using temperature profile T2. In addition, temperature profile T3 can be used during post processing to adjust spacing 128 (
Furthermore, as noted previously the order of these temperature profiles can be changed, as needed, based on the components included in an MCM, the desired alignment accuracy, etc. For example, substrates may be aligned and bonded to each other using temperature profile T0; then, one or more of the substrates may be bonded to a carrier using temperature profile T1. In particular, referring to
Alternatively, one or more of substrates 110 may be bonded to the carrier using temperature profile T1, and then the substrates may be aligned and bonded to each other using temperature profile T0 (or coatings 116 and 132 may have the same reflow characteristic). This latter order of the temperature profiles may make it easier to preassemble the components in the MCM, at the cost of larger misalignments between proximity connectors 124.
Note that, regardless of the order of the temperature profiles, process 300 in
This process is also amenable to batch processing, in which the balls are loaded into etch pits while the substrates (or chips) are in wafer form. After placement, the wafer may be passed through a reflow process, which locks the balls into place and eliminates any concerns that they may fall out during subsequent handling. Alternatively or additionally, wafer-level microfabrication techniques can be used to build up solder by plating or evaporation inside the etch pits, and this built-up material can then be reflowed to form the balls inside the pits.
Process 300 may include additional or fewer operations. Moreover, the order of the operations may be changed, and/or two or more operations may be combined into a single operation.
While the preceding discussion illustrated isotropic coatings on the positive features and/or isotropic material in the negative features in the MCM, in other embodiments at least some of the coatings and/or materials may be anisotropic. For example, there may be an angular dependence of the reflow characteristic on the surface of the positive features. This is shown in
Note that solder-coated balls (as opposed to solid metal or inorganic balls) may also provide some amount of compliance, which may also allow spacing 128 (
This assembly technique can be used in a variety of configurations and architectures to accurately align and bond chips together using a reflow process. One configuration is shown in
An illustration of a flip-chip configuration is shown in
However, the assembly technique can be used in applications other than MCMs that include island and bridge chips. For example, as shown in
In turn, substrate 712 may include or be attached to one or more coupling elements, such as coupling element 718, which has a third reflow characteristic. This coupling element may be used to mechanically couple substrate 712 to an additional component (not shown) in chip package 700 (such as a flexible connector).
Note that the first reflow characteristic, the second reflow characteristic and/or the third reflow characteristic may be different. This may allow substrate 712 to be mechanically coupled to substrate 710-1 at a different peak temperature than that used to mechanically couple substrate 710-1 to the carrier (such as an organic or ceramic substrate, or a silicon interposer). This can be useful because substrate 712 may be incompatible with a peak temperature in the temperature profile associated with the reflow characteristic of coupling elements 714-1. For example, interconnects or cables may deteriorate if the temperature during the reflow process is higher than 110-125 C. Consequently, coupling elements 714-1 may be reflowed first before substrate 710-1 is bonded to substrate 712. In particular, chip package 700 may be exposed to a first temperature profile to reflow coupling elements 714-1, and then may be exposed to a second temperature profile (with a lower peak temperature and/or a shorter duration) to reflow and bond chip package 700 to substrate 712. (More generally, this approach may be used to bond a connector to an MCM.) Thus, the different reflow characteristics may facilitate assembly of chip package 700.
As shown in
Another configuration is shown in
Embodiments of the MCM and the assembly technique may be used in a wide variety of applications, such as: a die stack in a memory application, flip-chip bonding and/or multi-layer stacks. A general application of an MCM is shown in
In general, an MCM may include an array of chip modules (CMs) or single-chip modules (SCMs), and a given SCM may include at least one substrate, such as a semiconductor die. Furthermore, the substrate may communicate with other substrates, CMs, SCMs, and/or optical devices in the MCM using proximity communication of electromagnetically coupled signals (which is referred to as ‘electromagnetic proximity communication’). For example, the proximity communication may include: communication of capacitively coupled signals (‘electrical proximity communication’) and/or communication of optical signals (‘optical proximity communication’). In some embodiments, the electromagnetic proximity communication includes inductively coupled signals and/or conductively coupled signals.
Furthermore, embodiments of the MCM may be used in a variety of applications, including: VLSI circuits, communication systems (such as in wavelength division multiplexing), storage area networks, data centers, networks (such as local area networks), and/or computer systems (such as multiple processor-core computer systems). For example, an MCM may be included in a backplane that is coupled to multiple processor blades, or an MCM may couple different types of components (such as processors, memory, I/O devices, and/or peripheral devices). In some embodiments, an MCM performs the functions of: a switch, a hub, a bridge, and/or a router.
Note that electronic device 900 may include, but is not limited to: a server, a laptop computer, a communication device or system, a personal computer, a work station, a mainframe computer, a blade, an enterprise computer, a data center, a portable-computing device, a supercomputer, a network-attached-storage (NAS) system, a storage-area-network (SAN) system, and/or another electronic computing device. Moreover, note that a given computer or computer system may be at one location or may be distributed over multiple, geographically dispersed locations.
The MCMs in the preceding embodiments and/or electronic device 900 may include fewer components or additional components. For example, there may be more than two substrates or components in an MCM (such as N components), and the assembly technique (which may include M temperature profiles, where M may be the same or different from N) may allow precise alignment of proximity connectors in multiple regions on these substrates or components. Moreover, substrates 110 (
While the coupling elements in the preceding MCMs were used to align and mechanically couple components, in other embodiments the coupling elements may also provide electrical coupling. For example, coupling elements 126 and/or 142 (
Furthermore, although the MCMs in the preceding discussion are illustrated as having a number of discrete items, these MCMs are intended to be functional descriptions of the various features that may be present rather than structural schematics of the embodiments described herein. Consequently, in these embodiments two or more components may be combined into a single component, and/or a position of one or more components may be changed.
Additionally, note that components in the MCMs may be fabricated, and the MCMs may be assembled, using a wide variety of techniques, as is known to one of skill in the art.
The foregoing description is intended to enable any person skilled in the art to make and use the disclosure, and is provided in the context of a particular application and its requirements. Moreover, the foregoing descriptions of embodiments of the present disclosure have been presented for purposes of illustration and description only. They are not intended to be exhaustive or to limit the present disclosure to the forms disclosed. Accordingly, many modifications and variations will be apparent to practitioners skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present disclosure. Additionally, the discussion of the preceding embodiments is not intended to limit the present disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed herein.