Claims
- 1. A method of manufacturing a multi-chip module, comprising:
- providing a substrate having a top surface and a bottom surface, at least one opening therethrough, and a plurality of conductive areas on said top surface;
- attaching at least one semiconductor die having a plurality of bond pads on an active surface thereof adjacent said bottom surface of said substrate such that said bond pads are exposed through said at least one opening;
- connecting at least one of said bond pads to at least one of said conductive areas with an intermediate conductive element;
- attaching at least one semiconductor die to said top surface of said substrate; and
- electrically connecting said at least one semiconductor die attached to said top surface to at least another of said plurality of conductive areas.
- 2. The method of claim 1, wherein said connecting said at least one bond pad to said at least one conductive area comprises wire bonding or TAB attachment.
- 3. The method of claim 1, wherein said electrically connecting said at least one semiconductor die attached to said top surface is effected by wire bonding, TAB attachment or flip chip bonding.
- 4. The method of claim 1, further including forming a wall around at least a portion of a perimeter of said top surface of said substrate.
- 5. The method of claim 4, further including attaching a lid to said wall.
- 6. The method of claim 4, further including contacting at least a portion of said at least one semiconductor die attached to said top surface with said lid.
- 7. The method of claim 1, further including forming a wall around at least a portion of a perimeter of said bottom surface of said substrate.
- 8. The method of claim 7, further including attaching a lid to said wall.
- 9. The method of claim 8, further including contacting at least a portion of said at least one semiconductor die attached adjacent said bottom surface with said lid.
- 10. The method of claim 1, further including encapsulating at least said at least one semiconductor die attached to said top surface.
- 11. The method of claim 1, further comprising attaching said at least one semiconductor die to said top surface over said at least one opening.
- 12. The method of claim 1, further including introducing a non-conductive underfill between said at least one semiconductor die attached to said top surface and said top surface.
- 13. The method of claim 12, further including disposing said at least one semiconductor die attached to said top surface over said at least one opening, and at least partially filling said at least one opening with said underfill.
- 14. The method of claim 1, further including forming said substrate with a recess in said bottom surface and disposing said at least one semiconductor die attached adjacent said bottom surface at least partially within said recess.
- 15. The method of claim 14, further including disposing said at least one semiconductor die attached adjacent said bottom surface completely within said recess.
- 16. The method of claim 15, further including disposing a lid on said bottom surface and over said at least one semiconductor die disposed in said recess.
- 17. The method of claim 1, further including encapsulating at least said at least one semiconductor die attached adjacent said bottom surface.
Parent Case Info
This is a division of application Ser. No. 08/974,796, filed Nov. 20, 1997, now U.S. Pat. No. 5,811,879.
US Referenced Citations (30)
Foreign Referenced Citations (1)
Number |
Date |
Country |
2810054 |
Sep 1978 |
DEX |
Divisions (1)
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Number |
Date |
Country |
Parent |
974796 |
Nov 1997 |
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