The disclosed embodiments relate to semiconductor die assemblies and to support members in such assemblies. In several embodiments, the present technology relates to die assemblies that can include a controller die and memory dies carried above the controller die.
Packaged semiconductor dies, including memory chips, microprocessor chips, and imager chips, can include semiconductor dies mounted on a package substrate. The semiconductor dies are encased in a plastic protective covering, and each die includes functional features, such as memory cells, processor circuits, and imager devices. Bond pads on the dies are electrically connected between the functional features and terminals on the package substrate that allow the dies to be connected to external circuitry.
To increase the density of dies within a package, the dies can be stacked upon one another within the casing. One challenge with vertically stacked dies, however, is that the dies can have different sizes or footprints. For example, in a memory package, a memory controller die can have a smaller footprint than the memory dies within the package. The memory controller die can be more difficult to wirebond because it is offset from the memory dies. Also, the memory dies can sometimes tilt when stacked upon the smaller memory controller die.
Specific details of several embodiments of stacked semiconductor die assemblies having spacer support members and associated systems and methods are described below. The term “semiconductor die” generally refers to a die having integrated circuits or components, data storage elements, processing components, and/or other features manufactured on semiconductor substrates. For example, semiconductor dies can include integrated circuit memory and/or logic circuitry. Semiconductor dies and/or other features in semiconductor die packages can be said to be in “thermal contact” with one another if the two structures can exchange energy through heat. A person skilled in the relevant art will also understand that the technology may have additional embodiments, and that the technology may be practiced without several of the details of the embodiments described below with reference to
As used herein, the terms “vertical,” “lateral,” “upper” and “lower” can refer to relative directions or positions of features in the semiconductor die assemblies in view of the orientation shown in the Figures. For example, “upper” or “uppermost” can refer to a feature positioned closer to the top of a page than another feature. These terms, however, should be construed broadly to include semiconductor devices having other orientations, such as being flipped on their side or inverted.
The assembly 100 further includes a package casing 115 composed of an encapsulant 116 that at least partially encapsulates the controller die 103, the memory dies 106, and the support members 130. In the illustrated embodiment, the encapsulant 116 also extends into a cavity 118 between the package substrate 102 and the first memory die 106a to at least partially fill the region beneath the first memory die 106a not occupied by the controller die 103 and the support members. In some embodiments, the portion of the encapsulant 116 in the cavity 118 can reinforce the support members 130 and provide further mechanical support beneath the first memory die 106a. The encapsulant 116 can include, for example, a thermoset material, an epoxy resin, or other suitable compound that provides mechanical support, shielding from the ambient environment (e.g., from humidity), and/or electrical isolation (e.g., between wire bonds).
The controller die 103 and the memory dies 106 can each be formed from a semiconductor substrate, such as silicon, silicon-on-insulator, compound semiconductor (e.g., Gallium Nitride), or other suitable substrate. The semiconductor substrate can be cut or singulated into semiconductor dies having any of variety of integrate circuit components or functional features, such as dynamic random-access memory (DRAM), static random-access memory (SRAM), flash memory, other forms of integrated circuit devices, including memory, processing circuits, imaging components, and/or other semiconductor devices. In selected embodiments, the assembly 100 can be configured as a memory in which the memory dies 106 provide data storage (e.g., NAND dies) and the controller die 103 provides memory control (e.g., NAND control). In some embodiments, the assembly 100 can include other semiconductor dies in addition to and/or in lieu of one or more of the controller die 103 and/or the memory dies 106. For example, instead of two memory dies, the assembly 100 can include more than two memory dies (e.g., four dies, eight dies, etc.) or only a single memory die. Further, in various embodiments, the dies of the assembly 100 can have different sizes. For example, in some embodiments one or both of the memory dies 106 can extend beyond the support members 130 at one or more sides.
As further shown in
In some conventional package assemblies, the controller die can be positioned between the package substrate and a stack of memory dies. This configuration is typically formed by encapsulating the controller die with an encapsulant and then the memory dies are stacked upon the surface of the encapsulant. One challenge with encapsulating the controller die at this stage, however, is that it complicates manufacturing. For example, the mounting surface on the encapsulant can be uneven. When the memory dies are stacked on an uneven mounting surface, they can cant or tilt to the extent that the dies project outside of the protective casing. Also, die tilt can make wirebonding more difficult because the wire bonds have different lengths at the opposite sides of the assembly. Another conventional manufacturing technique involves forming a cavity in the package substrate into which the controller die can be inserted. This technique can also complicate manufacturing and increase costs because it requires the package substrate to be milled or etched to form the cavity.
Embodiments of die assemblies configured in accordance with several embodiments of the present technology can address these and other limitations of conventional die assemblies. For example, one advantage is that the stack of memory dies 106 can be mounted to the support members 130 without having to first encapsulate the controller die 103 beneath the memory dies 106. A related advantage is that the high temperature molding and curing steps for encapsulating the controller die can be eliminated and thus reduce thermal cycling. Accordingly, manufacturing can be less complicated because it can eliminate several manufacturing steps. Another advantage is that the support members 130 can have a coefficient of thermal expansion (CTE) that is similar to or the same as the memory dies 106. For example, the support members 130 can be formed from semiconductor materials, such as silicon. Such CTE matching reduces thermal stresses within the package during operation. Yet another advantage is that the memory dies 106 are not prone to tilt because the support members 130 can have the same height and the die-attach materials 140, 141a-b, and 142 can be formed from a laminate film with a uniform thickness.
Referring to
Any one of the stacked semiconductor die assemblies described above with reference to
From the foregoing, it will be appreciated that specific embodiments of the technology have been described herein for purposes of illustration, but that various modifications may be made without deviating from the disclosure. Also, certain aspects of the new technology described in the context of particular embodiments may also be combined or eliminated in other embodiments. Moreover, although advantages associated with certain embodiments of the new technology have been described in the context of those embodiments, other embodiments may also exhibit such advantages and not all embodiments need necessarily exhibit such advantages to fall within the scope of the technology. Accordingly, the disclosure and associated technology can encompass other embodiments not expressly shown or described herein.
This application is a continuation of U.S. patent application Ser. No. 15/229,651, filed Aug. 5, 2016, which is a divisional of U.S. patent application Ser. No. 14/264,584, filed Apr. 29, 2014, which issued as U.S. Pat. No. 9,418,974, each of which is incorporated herein by reference in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
6930378 | St. Amand | Aug 2005 | B1 |
7220615 | Bolken | May 2007 | B2 |
8368192 | Chen | Feb 2013 | B1 |
8378483 | Mah | Feb 2013 | B2 |
20020096785 | Kimura et al. | Jul 2002 | A1 |
20030038374 | Shim et al. | Feb 2003 | A1 |
20050196907 | Ratificar et al. | Sep 2005 | A1 |
20070181990 | Huang et al. | Aug 2007 | A1 |
20080054451 | Bauer et al. | Mar 2008 | A1 |
20080233684 | Chee Peng et al. | Sep 2008 | A1 |
20080241995 | Fukui et al. | Oct 2008 | A1 |
20090051043 | Wong et al. | Feb 2009 | A1 |
20090115035 | Bayan et al. | May 2009 | A1 |
20090321907 | Lee et al. | Dec 2009 | A1 |
20100027233 | Low et al. | Feb 2010 | A1 |
20100090350 | Chow et al. | Apr 2010 | A1 |
20100314740 | Choi et al. | Dec 2010 | A1 |
20120219262 | Hendrix et al. | Aug 2012 | A1 |
20120317332 | Kwak et al. | Dec 2012 | A1 |
20130032942 | Sasaki et al. | Feb 2013 | A1 |
20130037802 | England et al. | Feb 2013 | A1 |
20130049228 | Nam et al. | Feb 2013 | A1 |
20130105989 | Pagaila et al. | May 2013 | A1 |
20130258577 | Wu et al. | Oct 2013 | A1 |
20150311185 | Ng et al. | Oct 2015 | A1 |
Number | Date | Country |
---|---|---|
101095215 | Dec 2007 | CN |
101232011 | Jul 2008 | CN |
101419963 | Apr 2009 | CN |
101661927 | Mar 2010 | CN |
102160163 | Aug 2011 | CN |
103178036 | Jun 2013 | CN |
103229296 | Jul 2013 | CN |
103633076 | Mar 2014 | CN |
2005327789 | Nov 2005 | JP |
2013038106 | Feb 2013 | JP |
2013131557 | Jul 2013 | JP |
20010073344 | Aug 2001 | KR |
100894173 | Apr 2009 | KR |
20130024567 | Mar 2013 | KR |
200837922 | Sep 2008 | TW |
201140769 | Nov 2011 | TW |
201312723 | Mar 2013 | TW |
201348367 | Dec 2013 | TW |
201349363 | Dec 2013 | TW |
I455214 | Oct 2014 | TW |
Entry |
---|
CN Patent Application No. 201580023622.9—Chinese Office Action and Search Report, dated Apr. 18, 2018, with English Translation, 23 pages. |
EP Patent Application No. 15785531.3—Extended European Search Report, dated Feb. 2, 2018, 21 pages. |
JP Patent Application No. 2016-564565—Japanese Office Action and Search Report, dated Oct. 3, 2017, with English Translation, 10 pages. |
JP Patent Application No. 2016-564565—Japanese Office Action, dated Mar. 20, 2018, with English Translation, 6 pages. |
KR Patent Application No. 10-2016-7032761—Korean Office Action and Search Report, dated Nov. 14, 2017, with English Translation, 16 pages. |
KR Patent Application No. 10-2016-7032761—Korean Office Action, dated Jun. 28, 2018, with English Translation, 8 pages. |
Office Action dated Feb. 22, 2019 for China Patent Application No. 201580023622.9. |
Office Action dated Jan. 8, 2019 for European Application No. 15785531.3, 8 pages. |
Office Action dated Jun. 20, 2019 for China Patent Application No. 201580023622.9; 24 pages (with translation). |
International Search Report dated Aug. 18, 2015 in Application No. PCT/US2015/028138, 18 pages. |
Office Action dated Apr. 18, 2017 in Taiwan Application No. 104113105, 18 pages. |
Office Action dated Dec. 13, 2016 in Taiwan Application No. 104113105, 27 pages. |
Office Action dated May 4, 2016 in Taiwan Application No. 104113105, 26 pages. |
Office Action dated Feb. 3, 2020 for China Patent Application No. 201580023622.9; 24 pages (with translation). |
Reexamination Notification dated Sep. 29, 2020 for China Patent Application No. 201580023622.9; 23 pages (with translation). |
Number | Date | Country | |
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20200105737 A1 | Apr 2020 | US |
Number | Date | Country | |
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Parent | 14264584 | Apr 2014 | US |
Child | 15229651 | US |
Number | Date | Country | |
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Parent | 15229651 | Aug 2016 | US |
Child | 16678195 | US |