Flipped die stacks with multiple rows of leadframe interconnects

Information

  • Patent Grant
  • 9859257
  • Patent Number
    9,859,257
  • Date Filed
    Tuesday, November 22, 2016
    7 years ago
  • Date Issued
    Tuesday, January 2, 2018
    6 years ago
Abstract
Stacked microelectronic packages comprise microelectronic elements each having a contact-bearing front surface and edge surfaces extending away therefrom, and a dielectric encapsulation region contacting an edge surface. The encapsulation defines first and second major surfaces of the package and a remote surface between the major surfaces. Package contacts at the remote surface include a first set of contacts at positions closer to the first major surface than a second set of contacts, which instead are at positions closer to the second major surface. The packages are configured such that major surfaces of each package can be oriented in a nonparallel direction with the major surface of a substrate, the package contacts electrically coupled to corresponding contacts at the substrate surface. The package stacking and orientation can provide increased packing density.
Description
BACKGROUND OF THE INVENTION

Field of the Invention


The subject matter of this application relates to microelectronic packages and assemblies in which a plurality of semiconductor chips are stacked one above the other and electrically interconnected with a support element such as a package element or other circuit panel.


Description of the Related Art


Semiconductor die or chips are flat bodies with contacts disposed on the front surface that are connected to the internal electrical circuitry of the chip itself. Semiconductor chips are typically packaged with substrates to form microelectronic packages having terminals that are electrically connected to the chip contacts. The package may then be connected to test equipment to determine whether the packaged device conforms to a desired performance standard. Once tested, the package may be connected to a larger circuit, e.g., a circuit in an electronic product such as a computer, e.g., a server, among others.


Microelectronic packages can be fabricated which include semiconductor chips mounted on leadframes. Such packages can be incorporated in larger assemblies, typically as surface-mounted devices coupled to a circuit panel. In order to save space certain conventional designs have stacked multiple microelectronic elements or semiconductor chips within a package. This allows the package to occupy a surface area on a substrate that is less than the total surface area of the chips in the stack. However, conventional stacked packages have disadvantages of complexity, cost, thickness and testability.


In spite of the above advances, there remains a need for improved stacked packages and especially stacked chip packages which incorporate multiple chips for certain types of memory, e.g., flash memory. There is a need for such packages which are reliable, thin, testable, and that are economical to manufacture.


BRIEF SUMMARY OF THE INVENTION

In accordance with an aspect of the invention, a stacked microelectronic assembly can comprise a plurality of stacked encapsulated microelectronic packages. Each encapsulated microelectronic package may comprise a microelectronic element having a front surface which defines a plane, and a plurality of edge surfaces extending away from the plane of the front surface, the microelectronic element having a plurality of chip contacts at the front surface. Each package has a plurality of remote surfaces, and an encapsulation region contacting at least one edge surface of the microelectronic element and extending in the first direction away from the at least one edge surface to a corresponding one of the remote surfaces. The encapsulation region has a major surface substantially parallel to the plane of the microelectronic element. A plurality of electrically conductive package contacts are disposed adjacent a first plane defined by the first major surface and a plurality of second electrically conductive package contacts are disposed adjacent a second plane parallel to the first plane and displaced therefrom. The first package contacts and the second package contacts are disposed at a single one of the remote surfaces, and the chip contacts are electrically coupled with the package contacts. The plurality of microelectronic packages can be stacked one above another in the stacked assembly such that the planes of the microelectronic elements in each of the plurality of microelectronic packages are parallel with one another.


In accordance with one or more particular aspects, the first package contacts and the second package contacts of each package in the stacked assembly face and are electrically coupled with a corresponding set of substrate contacts at a major surface of a substrate external to the encapsulation regions of each package of the stacked assembly, wherein the major surface of the substrate is oriented non-parallel, e.g., perpendicular to or tilted relative to the planes of the microelectronic elements in the stacked assembly.


The packages are stacked such that the first major surface of each next higher ordered package faces the second major surface of the next lower ordered package adjacent thereto. In accordance with a particular embodiment, a plurality of pairs of first and second package contacts are aligned and electrically coupled with one another, each pair comprising a first package contact of each next higher ordered package and the second package contact of the next lower ordered package aligned and electrically coupled therewith.


In another example, the substrate contacts comprise a plurality of sets of substrate contacts, and each set comprises a plurality of the first substrate contacts joined with the first package contacts of only one of the microelectronic packages via an electrically conductive bonding material. A plurality of second substrate contacts can be joined with the second package contacts of only the one microelectronic package via an electrically conductive bonding material.


In one embodiment, each of the first package contacts and the second package contacts of each package is a portion of a first leadframe element or a portion of a second leadframe element, respectively, of a common leadframe. The second leadframe elements can have first portions interdigitated among neighboring first leadframe elements, wherein the second package contacts are remote from the first portions and remote from the first leadframe elements. The second leadframe elements of at least one of the packages may have bends between the first portions and the second package contacts. In one embodiment, the common leadframe of at least one of the packages further comprises a die attach pad, wherein the microelectronic element has a face bonded to the die attach pad.


In one embodiment, at least one of the packages includes a first microelectronic element, the face of the first microelectronic element bonded to a first surface of the die attach pad, and includes a second microelectronic element, the face of the second microelectronic element bonded to a second surface of the die attach pad opposite from the first surface.


In one embodiment, at least one package includes a plurality of first stacked microelectronic elements including the first microelectronic element, each first stacked microelectronic element overlying the first surface and electrically coupled with at least one of the first or second package contacts, and includes a plurality of second stacked microelectronic elements including the second microelectronic element, each second stacked microelectronic element overlying the second surface and electrically coupled with at least one of the first or second package contacts.


In one embodiment, the stacked microelectronic assembly may further comprise third package contacts, wherein the first package contacts, the second package contacts and the third package contacts are portions of first leadframe elements, second leadframe elements, and third leadframe elements, respectively, wherein immediately adjacent package contacts are spaced apart from one another in a direction orthogonal to the major surfaces of the package and the first package contacts are spaced farther apart in the orthogonal direction from the third package contacts than from the second package contacts.


In one embodiment, each of the microelectronic packages has an identical arrangement of the first package contacts and the second package contacts, wherein the packages comprise first packages each having a first orientation, and second packages having a second orientation opposite from the first orientation, wherein at least some of the first packages are stacked immediately adjacent with at least some of the second packages among the stacked packages.


In accordance with an aspect of the invention, an encapsulated microelectronic package can comprise a microelectronic element having a front surface defining a plane, a plurality of edge surfaces extending away from the plane of the front surface, and a plurality of chip contacts at the front surface. The package may have a plurality of remote surfaces, and an encapsulation region contacting at least one edge surface of the microelectronic element and extending away from the at least one edge surface to a corresponding one of the remote surfaces, and the encapsulation region having first and second oppositely-facing major surfaces, each major surface being at least substantially parallel to the plane of the microelectronic element. A plurality of first electrically conductive package contacts may be disposed adjacent a plane defined by the first major surface and a plurality of second electrically conductive package contacts disposed adjacent a plane defined by the second major surface, the first package contacts and the second package contacts being disposed at a single one of the remote surfaces, the chip contacts electrically coupled with the package contacts.


In one embodiment, each of the first package contacts and the second package contacts of each package is a portion of a first leadframe element or a portion of a second leadframe element, respectively, of a common leadframe, the second leadframe elements having first portions interdigitated among neighboring first leadframe elements, the second package contacts being remote from the first portions and remote from the first leadframe elements.


In one embodiment, the second leadframe elements of at least one of the packages have bends between the first portions and the second package contacts. In one embodiment, the common leadframe may further comprise a die attach pad, wherein the microelectronic element has a face bonded to the die attach pad.


In one embodiment, the microelectronic element is a first microelectronic element, the face of the first microelectronic element facing toward a first surface of the die attach pad, the package further comprising a second microelectronic element, the face of the second microelectronic element facing toward a second surface of the die attach pad opposite from the first surface.


In one embodiment, the microelectronic element may comprise first and second microelectronic elements, the faces of the first and second microelectronic elements overlying and mechanically coupled with a first surface of the die attach pad.


In one embodiment, the microelectronic element may comprise a plurality of the first microelectronic elements stacked and overlying the first surface and electrically coupled with at least one of the first package contacts or second package contacts, and comprises a plurality of the second microelectronic elements stacked and overlying the second surface and electrically coupled with at least one of the first package contacts or the second package contacts.


In one embodiment, the microelectronic package can have third package contacts, wherein the first package contacts, the second package contacts and the third package contacts are end portions of first leadframe elements, second leadframe elements, and third leadframe elements, respectively, wherein immediately adjacent end portions are spaced apart from one another in a direction orthogonal to the major surfaces of the package and the first package contacts are spaced farther apart in the orthogonal direction from the third package contacts than from the second package contacts.


In one embodiment, the plurality of first stacked microelectronic elements are stacked such that an edge surface of each first stacked microelectronic element is offset in a direction perpendicular to the edge surface from the edge surface of each first stacked microelectronic element which is immediately beneath such first stacked microelectronic element, and the plurality of first stacked microelectronic elements are electrically coupled with the first package contacts and the second package contacts via wire bonds.


In one embodiment, the first package contacts and the second package contacts do not extend more than 25 microns beyond a surface of the encapsulation region, the package further comprising a compliant material disposed between first leadframe elements and at least some of the second leadframe elements at locations proximate to said remote surface of the encapsulation.


In one embodiment, the second leadframe elements protrude beyond a surface of the encapsulation region by more than 50 microns.





BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS


FIG. 1 is a perspective view from above top and edge surfaces of a microelectronic assembly according to an embodiment of the invention.



FIG. 2 is a perspective view from below the bottom and edge surfaces of a microelectronic assembly according to an embodiment of the invention.



FIG. 3 is a side elevational view illustrating a microelectronic assembly according to an embodiment of the invention.



FIG. 4 is a partial enlarged side elevational view of a microelectronic package according to an embodiment of the invention.



FIG. 5 is a top-down plan view of an in-process structure according to an embodiment of the invention.



FIG. 6A is a bottom elevational view of a microelectronic assembly according to an embodiment of the invention.



FIG. 6B is a bottom elevational view of a microelectronic assembly according to a variation of the embodiment of the invention seen in FIG. 6A.



FIG. 6C is a corresponding side elevational view of the microelectronic assembly according to the variation seen in FIG. 6B.



FIG. 6D is a bottom elevational view of a microelectronic assembly according to another variation of the embodiment of the invention seen in FIG. 6A.



FIG. 7 is a bottom elevational view of a microelectronic assembly according to an embodiment of the invention.



FIG. 8 is a side elevational view of a microelectronic assembly according to an embodiment of the invention.



FIG. 9 is a side elevational view of a microelectronic package according to an embodiment of the invention.



FIG. 10 is a side elevational view of a microelectronic package according to an embodiment of the invention.



FIG. 11 is a bottom elevational view of a microelectronic assembly according to an embodiment of the invention.



FIG. 12 is a side elevational view of a microelectronic package according to an embodiment of the invention.



FIG. 13 is a bottom elevational view of a microelectronic assembly incorporating a plurality of packages according to an embodiment of the invention as depicted in FIG. 12.



FIG. 14 is a side elevational view illustrating a microelectronic assembly according to an embodiment of the invention.



FIG. 15 is a side elevational view of a microelectronic package according to an embodiment of the invention.



FIG. 16 is a side elevational view illustrating a microelectronic assembly according to an embodiment of the invention.





DETAILED DESCRIPTION OF THE INVENTION

As used in this disclosure with reference to a dielectric region or a dielectric structure of a component, e.g., circuit structure, interposer, microelectronic element, capacitor, voltage regulator, circuit panel, substrate, etc., a statement that an electrically conductive element is “at” a surface of the dielectric region or component indicates that, when the surface is not covered or assembled with any other element, the electrically conductive element is available for contact with a theoretical point moving in a direction perpendicular to that surface of the dielectric region from outside the dielectric region or component. Thus, a terminal or other conductive element which is at a surface of a dielectric region may project from such surface; may be flush with such surface; or may be recessed relative to such surface in a hole or depression in the dielectric region.


As shown in the perspective views of FIGS. 1-2 and the corresponding side elevational view of FIG. 3, a microelectronic assembly 100 includes a package stack 110 which, in turn, includes a plurality of stacked microelectronic subassemblies or microelectronic packages 108, each microelectronic package including one or more microelectronic elements 112, at least one being a semiconductor chip. Microelectronic assembly 100 and other microelectronic assemblies disclosed or referenced herein can provide enhanced storage density which can be especially advantageous in systems used in data centers, among which include enterprise systems, government systems, hosted systems, search engine systems, cloud storage, or other large-scale data centers.


Referring to the microelectronic package 108 according to the embodiment seen in FIG. 4, for example, each microelectronic element 112 can be arranged in a stack of similar microelectronic elements. In one example, each of the microelectronic elements may include a semiconductor chip having one or more memory storage arrays, which may include a particular memory type such as nonvolatile memory. Nonvolatile memory can be implemented in a variety of technologies some of which include memory cells that incorporate floating gates, such as, for example, flash memory, and others which include memory cells which operate based on magnetic polarities. Flash memory chips are currently in widespread use as solid state storage as an alternative to magnetic fixed disk drives for computing and mobile devices. Flash memory chips are also commonly used in portable and readily interchangeable memory drives and cards, such as Universal Serial Bus (USB) memory drives, and memory cards such as Secure Digital or SD cards, microSD cards (trademarks or registered trademarks of SD-3C), compact flash or CF card and the like. Flash memory chips typically have NAND or NOR flash type devices therein; NAND type devices are more common. Other examples of semiconductor chips are one or more DRAM, NOR, microprocessor, controller die, etc. or combinations thereof. Each semiconductor chip may be implemented in one of various semiconductor materials such as silicon, germanium, gallium arsenide or one or more other Group III-V semiconductor compounds or Group II-VI semiconductor compounds, etc. The microelectronic elements 112 in one or more microelectronic packages 108 and in one or more package stacks 110 may be a combination of different chip functionalities as described above and a combination of various semiconductor materials as described above. In one embodiment, a microelectronic element may have a greater number of active devices for providing memory storage array function than for any other function. In one embodiment, a dummy spacer made from glass, silicon, or other appropriate material can be positioned adjacent to or between microelectronic elements in a microelectronic package or subassembly.


Each microelectronic element can be a semiconductor chip having a front surface 114 defining a respective plane 116-x of a plurality of planes 116-1, 116-2, etc. Each semiconductor chip 112 has a plurality of contacts 118 at its front surface and an edge surface 120 which extends away from the front surface of such chip. Each chip also has a rear surface 122 opposite from its front surface 114. The front and rear surfaces of adjacent microelectronic elements within a package may be bonded together with an adhesive (not shown). In one embodiment, the adhesive may be or include one or more layers of epoxy, elastomer, polyimide or other polymeric material. In some cases, a material used as a conformal dielectric coating over one or more of the microelectronic elements may also function as an adhesive. In one embodiment, such conformal dielectric coating can be a polyxylylene material such as commonly referred to as “parylene”. Parylene can also be used as a die attach adhesive between adjacent microelectronic elements. In one embodiment, one or more microelectronic elements may be packaged as a fan-out wafer level package.


The chip contacts 118 on one or more microelectronic elements 112 in the package 108 are electrically coupled with package contacts disposed at a periphery of the package. The package contacts of each package 108 include first package contacts 127 and second package contacts 129. A plurality of first package contacts 127 are disposed adjacent a plane 126-1 defined by a first major surface 132 of the package which is substantially parallel to the planes 116-x of the one or more microelectronic elements 112. A plurality of second package contacts 129 of the same package 108 are disposed adjacent a plane 126-2 defined by a second major surface 134 of the package which is substantially parallel to the planes 116-x of the one or more microelectronic elements 112.


In the embodiment depicted in FIG. 4, each of the package contacts 127, 129 is disposed at a single remote surface 130 of the respective package 108, and the single remote surface is defined by a vertically-oriented plane at which each package contact 127, 129 terminates, within a manufacturing tolerance. Alternatively, package contacts 127 may extend farther in a direction parallel to plane 126-1 than the package contacts 129; or the package contacts 129 may extend farther in a direction parallel to plane 126-1 than the package contacts 127. For example, the package contacts may project beyond the remote surface 130 a distance of 50 microns or more. One or both of such features may help accommodate a particular interconnection arrangement between the package and a substrate electrically coupled with the package such as described below with reference to FIGS. 8-9.


In one example, the first package contacts 127 and the second package contacts 129 are portions of individual leadframe elements severed from a single common leadframe. The first package contacts can be straight leadframe elements which extend parallel to the major surface 132 of the package. The second package contacts can be portions of other leadframe elements which are bent relative to the major surface 132 of the package such that at least one portion of the leadframe element extends in a direction at an angle to the major surface 132 of the package. In some cases, the second package contacts are terminal ends of leadframe elements 137 that have a flattened S-shape as seen in the elevational view of FIG. 4. The leadframe elements can be formed either prior to or after other fabrication processes used to electrically couple microelectronic elements in the package with the leadframe elements. The one or more microelectronic elements in each package can be supported on a die attach pad 152, a portion of the same leadframe which provides the package contacts. For example, a rear surface 122 of a lowest microelectronic element 112 in a stack thereof can be attached to an inwardly facing major surface of the leadframe die attach pad 152.


A dielectric region 135 may overlie or contact the front and edge surfaces of the package, and have a remote surface 130 spaced apart from the microelectronic element's edge surface 120 which is closest to the remote surface. In particular cases, the dielectric region can extend from two or more edge surfaces of the microelectronic element to corresponding remote surfaces of the package spaced apart from the edge surfaces. Each microelectronic element may have such dielectric region overlying the edge surface thereof. In an example, the dielectric region 135 may be or may include a molded dielectric region. In one example, the dielectric region may comprise a polymeric dielectric material, or alternatively a polymeric dielectric material with a filler therein which may have a lower coefficient of thermal expansion than the polymeric material. In some examples, the filler may include particles, flakes or a mesh or scaffold of an inorganic material such as a glass, quartz, ceramic or semiconductor material, among others.



FIG. 4 further illustrates locking features 154, 156 which can be etched out portions of the die attach pad 152 and the leadframe elements 137, such features serving to avoid forces acting on the die attach pad 152 and the leadframe elements 137 from outside the package from loosening, pulling or ripping the leadframe elements 137 out from the encapsulation region.


All first package contacts and second package contacts of the same package can be at the same remote surface 130 of the dielectric region 135. The package contacts can be portions of leadframe elements 137 which extend inwardly towards positions closer to edge surfaces 120 of the microelectronic elements in the package As seen in FIGS. 4-5, each package contact can be electrically coupled with the chip contact 118 at a front surface of a microelectronic element through a wire bond 128. Wire bonds can be formed, for example, by heating an end of an extruded wire projecting from an exposed tip of a capillary bonding tool to form a molten metal ball at the tip of the wire, and bonding the ball under heat and pressure to the chip contact. Thereafter, the tip of the bonding tool then is moved to a position at the surface of a leadframe element 137 where the bonding tool stitch bonds a segment of the wire and then severs the bonded end of the wire to complete the process. In one variation, a reverse wire bonding technique can be employed in which the wire is ball bonded to the leadframe element and then stitch bonded to the chip contact of the respective microelectronic element. In some cases, reverse wire bonding may be selected to provide wire bonds having reduced loop height in comparison to wire bonds 128 having ball bonds on the microelectronic elements.


Referring to FIG. 4, more than one microelectronic element can be provided in an individual microelectronic package 108. An advantage of providing a plurality of microelectronic elements in the same package is a potential to increase a density of interconnection between the microelectronic elements and a substrate 138 having a finite interconnection area at a major surface 142 thereof. Microelectronic packages 108 which incorporate two microelectronic elements per package can be electrically interconnected with a substrate 138 at an effective pitch which is one half a pitch of interconnection among the package contacts 127, 129 provided at an interconnection interface with the substrate 138. In a particular embodiment, when microelectronic elements in a package 108 are microelectronic elements having memory storage arrays therein, corresponding chip contacts which on all of the microelectronic elements in the package may be electrically coupled with a single package contact of the package. The same can apply to most or all of the chip contacts of each microelectronic element, except for chip contacts assigned to receive signals routed uniquely to one of the microelectronic elements, such as a chip select input, for example. The same applies to microelectronic elements which provide non-volatile memory storage array function, such non-volatile memory storage array implemented by a greater number of active devices in the microelectronic element than for any other function of the microelectronic element.


The number of microelectronic elements stacked one above the other in each microelectronic package can range from a small number such as one or two to a much larger number, for example, eight, sixteen or even greater. In the example depicted in FIGS. 3-4, four microelectronic elements can be stacked within a single package and electrically coupled with the package contacts of such package. In another example (not shown) similar to that shown in FIG. 4, eight microelectronic elements can be stacked within a single package and electrically coupled with the package contacts 127, 129 of such package.


In a variation of the structure shown in FIG. 4, other ways can be provided for electrically coupling the microelectronic elements with the leadframe elements. For example, a conformal electrically conductive material can be deposited in contact with the chip contacts 118, front surfaces 114 and edge surfaces 120 of one or more microelectronic elements in the stack to form lines which extend from the chip contacts 118 to the leadframe elements 137. In one example, the electrically conductive material can be deposited by plating. In a particular example, the electrically conductive material can be an electrically conductive polymeric material or electrically conductive ink as disclosed in U.S. Pat. No. 8,178,978, the disclosure of which is incorporated herein, and the lines of electrically conductive material can be formed as disclosed therein.


As particularly shown in the in-process structure seen in FIG. 5, during fabrication of each package 108, the wire bonds 128 can be formed while the leadframe elements are integral portions of a leadframe, after which an encapsulant can be applied to the in-process structure, and the leadframe can be severed where shown at the dashed line to sever the individual leadframe elements into separate leadframe fingers having package contacts at ends thereof.


Referring again to FIG. 4, all the front surfaces of each of the microelectronic elements in the package 108 are oriented in the same direction. In a variation of that shown in FIG. 4, the front surfaces of one or more of the microelectronic elements in the package can be oriented in the opposite direction. In a particular embodiment, for example, as seen in FIG. 12, the front surfaces of at least two of the microelectronic elements which are adjacent one another may either face each other or face in opposite directions away from one another.


As further shown in FIG. 3, a stacked microelectronic assembly 100 comprises a plurality of packages 108 having first package contacts 127 and second package contacts 129 electrically coupled to substrate contacts 140 at a surface 142 of a substrate 138 through electrically conductive masses 144 of bonding material. The substrate 138 may be a dielectric element or other substrate and which may have one or multiple layers of dielectric material and one or multiple electrically conductive layers thereon. The substrate 138 can be formed of various materials, which may or may not include a polymeric component, and may or may not include an inorganic component. Alternatively, the substrate may be wholly or essentially polymeric or may be wholly or essentially inorganic. In various non-limiting examples, the support element can be formed of a composite material such as glass-reinforced epoxy, e.g., FR-4, a semiconductor material, e.g., silicon or gallium arsenide, or glass or ceramic material.


The substrate can be one that has contacts on a lower surface facing away from the microelectronic assemblies, the contacts configured for surface mounting to another component which can be a card, tray, motherboard, etc., such as via a land grid array (LGA), ball grid array (BGA), or other technique. In another example, the substrate can be a card component having slide contacts on top and bottom surfaces thereof, such as for insertion into a socket. In yet another example, another component such as universal serial bus (USB) controller or other communications controller can be mounted to the substrate and electrically coupled with the microelectronic assembly, such component assisting in or controlling a flow of information between the microelectronic assembly and a system.


As illustrated in FIG. 3, the parallel planes 116-x may be oriented in a direction orthogonal to the plane 136 of the substrate major surface, and the major surface 142 of the substrate faces the edge surfaces 120 of each chip. An adhesive 146, which may be an underfill, may be applied surrounding the electrical connections between the leadframe interconnects and the substrate contacts and the adhesive may have a function to mechanically reinforce or stiffen such electrical connections and may help the electrical connections withstand stresses due to differential thermal expansion between the chips microelectronic elements 112 and the support element 138.


In a variation of the microelectronic assembly illustrated in FIGS. 1-4, a plurality of the package stacks 110 can be mounted and electrically connected to the substrate contacts 140, each package stack 110 comprising a plurality of stacked microelectronic packages, such as shown, for example in FIG. 2 of U.S. application Ser. 14/883,864 filed Oct. 15, 2015, the disclosure of which is incorporated herein by reference. The distance in an orthogonal direction between major surfaces of respective adjacent package stacks 108 defines a gap which, in some cases may be 100 microns, or may range from 100 to 200 microns in dimension, or may have a greater value. In some cases, this gap may be as large as 1 millimeter. Within such gap an adhesive can be provided, and/or other elements, which may in some cases include a heat spreader as further describe below, or passive components, hardware, or other components which may or may not be electrically interconnected with one or more of the package stacks 110.


As further seen in FIG. 6A, in a view of a package stack 110 looking towards bottom surfaces of packages 108 therein which are configured to be coupled with the substrate contacts, the first package contacts 127 of microelectronic packages 108 in a package stack 110 are seen adjacent a package first major surface 132 oriented in a first direction, while the second package contacts 129 of the microelectronic packages 108 are adjacent a package second major surface 134 oriented in a direction opposite the first direction. The second package contacts 127 are seen aligned and adjacent with corresponding ones of the first package contacts, wherein the aligned and adjacent first and second package contacts of the immediately adjacent packages 108 may touch or may come close to touching. Thus, the packages can be stacked such that the first major surface 132 of each next higher ordered package faces the second major surface 134 of the next lower ordered package adjacent thereto, wherein the first package contacts of each next higher ordered package are aligned with the second package contacts of the next lower ordered package adjacent thereto.


As further seen in FIG. 3, the aligned and adjacent first and second package contacts of immediately adjacent packages 108 can be electrically coupled with the same substrate contact. Specifically, the same electrically conductive mass 144 may join an individual substrate contact 140 at the substrate major surface 142 with a first package contact 127 of one package 108 and with the aligned and adjacent second package contact 127 of another package 108 immediately adjacent to such package.


In the particular arrangement of FIG. 6A, each package 108 can be identical to every other package, but some packages 108-1 have different orientations from other package 108-2. In the example of FIG. 6A, each package 108-1 is rotated 180 degrees relative to the orientation of each package 108-2.


As seen in FIGS. 6B-6C, in a variation of the above-described embodiment, each of the packages 108-1, 108-2 in the package stack 110A can be identical to one another and have the same orientation. In this way, second package contacts 129 of one package 108-1 which are closest to the first package contacts 127 of the adjacent package 108-2 in the package stack 110A are not aligned with one another. Such arrangement can facilitate the formation of separate electrical connections between these first and second package contacts 127, 129 of adjacent packages 108-1, 108-2 to the substrate contacts 140, as seen, for example in FIG. 6C. Optionally, as seen in FIGS. 6B-C, a spacer 109 can be positioned between adjacent packages 108-1, 108-2 in the package stack to provide adequate and/or optionally uniform spacing between the first package contacts 127 and the second package contacts 129 which are closest thereto. In a particular embodiment, the leadframe elements from which the package contacts are formed can be bent or placed to maintain a relatively constant pitch of the package contacts 127, 129 even between adjacent packages.


In the package stack 110B according to the further variation seen in FIG. 6D, the second package contacts 129 can be displaced in a direction away from the second major surface 134 of each package 108B therein. In one example, the leadframe elements can be bent or placed to form the second package contacts 129 with less separation in height from the first package contacts 127 of each individual package 108B. In another example, the dielectric region 135, e.g., encapsulation of each package 108B can be formed to a greater height than in the example shown in FIG. 6A. The variation according to FIG. 6D can also facilitate the formation of separate electrical connections between first and second package contacts 127, 129 of adjacent packages 108-1, 108-2 and the substrate contacts 140, as seen, for example in FIG. 6C by providing increased separation between the first and second package contacts 127, 129 of the adjacent packages 108B seen in FIG. 6D.


In another variation seen in FIG. 7, each package has the same orientation as every other package. However, each package 108-2 is offset in a direction parallel to a major surface 132 of such package from each package 108-1. In this case, some of the first package contacts 127 on a given package may not be aligned with some of the corresponding second package contacts 129 on the package immediately adjacent thereto.



FIG. 8 illustrates a microelectronic assembly 200 according to a particular embodiment in which the plane defined by the major surface 134 of each package 208 therein is oriented at an acute angle 148 relative to the plane 136 defined by the substrate major surface. With packages 208 tilted relative to the substrate, it is possible to accommodate a same or different number of packages as in the embodiment seen in FIGS. 1-5 above, but within a shorter height 212 from the major surface 142 of the substrate that varies with a factor based on the sine of the angle 148. In a particular example, when the angle 148 is 45 degrees, the height can be reduced by a factor based upon the sine of the angle (sin 45°). Thus, the height is reduced to less than the original height and closer to a value that equals the sine of the angle or about 0.7 the original height. In another example, if angle 148 can be reduced to 30 degrees, the height can be reduced by a factor based on the sine of the angle (sin 30°), to a value that is closer to about half the original height. Additional reinforcing material such as underfill 146 or other structure between the package stack and the substrate may be provided to reinforce the mechanical integrity of the tilted microelectronic assembly seen in FIG. 8. Although FIG. 8 indicates the front surfaces of the stacked microelectronic elements facing or tilting towards the plane 136 of the major surface of the substrate 138, tilt in the opposite direction is also possible.


Referring to FIG. 9, in a particular example of the tilted microelectronic assembly, first package contacts 227 may extend farther from the encapsulation in a direction parallel to the package major surface 134 than the second package contacts 229. In such case, the first package contacts 227 and second package contacts 229 may terminate at positions which intersect an interconnection plane 247 disposed at an acute angle 248 relative to the substrate major surface 132. In particular embodiments, the angle 248 may have the same or a different measure as the angle 148. With package contacts on one side of the package longer than those on the other side of the package, the first package contacts and the second package contacts can define a planar interconnection interface advantageous for interconnection with the substrate in the tilted microelectronic assembly seen in FIG. 8. In another embodiment, second package contacts 229 may extend farther from the encapsulation in a direction parallel to the package major surface 134 than the first package contacts 227.



FIG. 10 illustrates another variation in which leadframe elements 329 which form the second package contacts can include only a single bend, such that the leadframe element forms a flattened L-shape rather than the flattened S-shape as in the above-described example.



FIG. 11 illustrates another variation of a microelectronic assembly 350 in which adjacent first and second package contacts 367, 369 on each package 358 therein intersect the same plane 356 parallel to an edge surface 360 of the microelectronic assembly. Package contacts 367, 369 which are adjacent one another on adjacent packages 358 may be electrically coupled to one another by bonding material 144 that electrically couples the package contacts to a corresponding substrate contact 140, as seen, for example, in FIG. 3. Alternatively, package contacts 367, 369 which are adjacent to one another on adjacent packages 358 may remain electrically separate from one another in that separate bonding material masses 144 can be used to electrically couple each of the adjacent package contacts 367, 369 to separate substrate contacts, similar to the example seen in FIG. 8 except that the packages can be oriented perpendicularly or at an angle relative to the major surface of the substrate.



FIG. 12 illustrates yet another variation in which first and second stacks 411, 421 of microelectronic elements can be attached to oppositely facing surfaces of leadframe die attach pad therein and microelectronic elements are electrically coupled with first package contacts 427, second package contacts 429, and third package contacts 431. In such case, first package contacts 427 can be disposed at a central position of the package 408 between the planes adjacent to which the second package contacts 429 and third package contacts 431 are disposed. In a particular example, the package contacts can be arranged at bottom-facing surfaces of the package 408 in a manner as seen in FIG. 13, such arrangement being similar to that described above relative to FIG. 6A except as to the particular arrangement including the additional third package contacts 431 and that the first package contacts are disposed centrally. In another embodiment, only first package contact 427 along with either of second package contact 429 or third package contact 431 would be formed.


In a particular variation seen in FIG. 14, individual stacks 510 of more than one microelectronic package can be separated from one another by spaces 518 which accommodate other elements such as heat spreaders, other microelectronic packages or packaging structure, other integrated or discrete components such as resistors, capacitors, inductors or other passive or active electronic components. A further such component 520 may overlie the assembly and be electrically, mechanically and/or thermally coupled to the components within the spaces between adjacent package stacks 510.


In one variation seen in FIGS. 15-16, first and second leadframe elements 637-1 and 637-2 can extend to and terminate in first package contacts 627 and second package contacts 629 which are flush with the remote surface 630 of the package within a manufacturing tolerance therefor. In such embodiment, a compliant feature 640 may be incorporated into the package to absorb stresses due to differential thermal expansion between the external substrate (e.g., substrate 138, FIG. 3) and the contacts of the package. FIG. 16 illustrates a microelectronic assembly 600 which incorporates a plurality of packages 608 in which the package contacts are so arranged. Although, FIG. 15 depicts that first package contacts 627 and second package contacts 629 are flush with the remote surface 630, they may also be recessed inside the remote surface 630.


Although not specifically shown in the Figures or particularly described in the foregoing, elements in the various Figures and various described embodiments can be combined together in additional variations of the invention.

Claims
  • 1. A stacked microelectronic assembly, comprising: a plurality of stacked encapsulated microelectronic packages stacked one above another in the stacked microelectronic assembly, each encapsulated microelectronic package comprising:a microelectronic element having a front surface and a plurality of edge surfaces extending away from the front surface;a plurality of remote surfaces and an encapsulation region contacting at least one edge surface of the microelectronic element, the encapsulation region having a major surface being at least substantially parallel to the front surface of the microelectronic element; anda plurality of first electrically conductive package contacts disposed within a first plane parallel to the major surface, and a plurality of second electrically conductive package contacts disposed within a second plane parallel to the first plane and displaced from the first package contacts, the first package contacts and the second package contacts being disposed at or adjacent to a single one of the remote surfaces,wherein the first package contacts and the second package contacts of each microelectronic package face and are electrically coupled with respective sets of first substrate contacts and second substrate contacts at a major surface of a substrate via an electrically conductive bonding material, the major surface oriented non-parallel with the front surfaces of the microelectronic elements, each set of first substrate contacts joined with the first package contacts of only one of the microelectronic packages, and each set of second substrate contacts joined with the second package contacts of only the one of the microelectronic packages.
  • 2. The stacked microelectronic assembly as claimed in claim 1, wherein the front surfaces of the microelectronic elements in each of the plurality of microelectronic packages are parallel with one another.
  • 3. The stacked microelectronic assembly as claimed in claim 1, wherein the major surface of each microelectronic package is a first major surface, the encapsulation region of each microelectronic package having a second major surface opposite the corresponding first major surface and being at least substantially parallel to the front surface of the corresponding microelectronic element.
  • 4. The stacked microelectronic assembly as claimed in claim 3, wherein the second major surface of each microelectronic package extends within the second plane of the corresponding microelectronic package.
  • 5. The stacked microelectronic assembly as claimed in claim 3, wherein the second plane of each microelectronic package is displaced from the second major surface of the corresponding microelectronic package in a direction orthogonal to the corresponding second major surface.
  • 6. The stacked microelectronic assembly as claimed in claim 1, wherein each microelectronic package has a same rotational orientation with respect to the other ones of the microelectronic packages.
  • 7. The stacked microelectronic assembly as claimed in claim 1, wherein each of the first package contacts and the second package contacts of each package is a portion of a first leadframe element or a portion of a second leadframe element, respectively, of a common leadframe, the second leadframe elements having first portions interdigitated among neighboring first leadframe elements, the second package contacts being remote from the first portions and remote from the first leadframe elements.
  • 8. The stacked microelectronic assembly as claimed in claim 7, wherein the second leadframe elements of at least one of the packages have bends between the first portions and the second package contacts.
  • 9. The stacked microelectronic assembly as claimed in claim 7, wherein the common leadframe of at least one of the packages further comprises a die attach pad, wherein the microelectronic element has a face bonded to the die attach pad.
  • 10. A stacked microelectronic assembly, comprising: a plurality of stacked encapsulated microelectronic packages stacked one above another in the stacked microelectronic assembly, each encapsulated microelectronic package comprising:a microelectronic element having a front surface and a plurality of edge surfaces extending away from the front surface;a plurality of remote surfaces, and an encapsulation region contacting at least one edge surface of the microelectronic element, the encapsulation region having first and second oppositely-facing major surfaces, each major surface being at least substantially parallel to the front surface of the microelectronic element; anda plurality of first electrically conductive package contacts disposed within a first plane parallel to the first major surface and a plurality of second electrically conductive package contacts disposed within a second plane parallel to the first plane and displaced from the first package contacts, the first package contacts and the second package contacts being disposed at or adjacent to a single one of the remote surfaces, the plurality of second electrically conductive package contacts being displaced from the second major surface in a direction orthogonal to the second major surface.
  • 11. The stacked microelectronic assembly as claimed in claim 10, wherein the first package contacts and the second package contacts of each package in the stacked assembly face and are electrically coupled with corresponding substrate contacts at a major surface of a substrate external to the encapsulation regions of each microelectronic package of the stacked microelectronic assembly, the major surface oriented non-parallel with the front surfaces of the microelectronic elements in the stacked microelectronic assembly.
  • 12. The stacked microelectronic assembly as claimed in claim 11, wherein the substrate contacts comprise a plurality of sets of substrate contacts, each set comprising a plurality of the first substrate contacts joined with the first package contacts of only one of the microelectronic packages via an electrically conductive bonding material, and a plurality of second substrate contacts joined with the second package contacts of only the one of the microelectronic packages via an electrically conductive bonding material.
  • 13. The stacked microelectronic assembly as claimed in claim 10, wherein each microelectronic package has a same rotational orientation with respect to the other ones of the microelectronic packages.
  • 14. An encapsulated microelectronic package, comprising: a microelectronic element having a front surface and a plurality of edge surfaces extending away from the front surface;a plurality of remote surfaces, and an encapsulation region contacting at least one edge surface of the microelectronic element, the encapsulation region having first and second oppositely-facing major surfaces, each major surface being at least substantially parallel to the front surface of the microelectronic element; anda plurality of first electrically conductive package contacts disposed within a first plane parallel to the first major surface and a plurality of second electrically conductive package contacts disposed within a second plane parallel to the first plane and displaced from the first package contacts, the first package contacts and the second package contacts being disposed at or adjacent to a single one of the remote surfaces, the plurality of second electrically conductive package contacts being displaced from the second major surface in a direction orthogonal to the second major surface.
  • 15. The microelectronic package as claimed in claim 14, wherein each of the first package contacts and the second package contacts of each package is a portion of a first leadframe element or a portion of a second leadframe element, respectively, of a common leadframe, the second leadframe elements having first portions interdigitated among neighboring first leadframe elements, the second package contacts being remote from the first portions and remote from the first leadframe elements.
  • 16. The microelectronic package as claimed in claim 15, wherein the second leadframe elements of at least one of the packages have bends between the first portions and the second package contacts.
  • 17. The microelectronic package as claimed in claim 15, wherein the common leadframe further comprises a die attach pad, wherein the microelectronic element has a face bonded to the die attach pad.
  • 18. The microelectronic package as claimed in claim 17, wherein the microelectronic element comprises first and second microelectronic elements, the faces of the first and second microelectronic elements overlying and mechanically coupled with a first surface of the die attach pad.
  • 19. The microelectronic package as claimed in claim 15, wherein the second leadframe elements protrude beyond a surface of the encapsulation region by more than 50 microns.
  • 20. The microelectronic package as claimed in claim 14, wherein the plurality of first stacked microelectronic elements are stacked such that an edge surface of each first stacked microelectronic element is offset in a direction perpendicular to the edge surface from the edge surface of each first stacked microelectronic element that is immediately beneath such first stacked microelectronic element, and the plurality of first stacked microelectronic elements are electrically coupled with the first package contacts and the second package contacts via wire bonds.
CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No. 14/971,384, filed on Dec. 16, 2015, the disclosure of which is hereby incorporated herein by reference.

US Referenced Citations (332)
Number Name Date Kind
3639888 Pittman et al. Feb 1972 A
4323914 Berndlmaier et al. Apr 1982 A
4336551 Fujita et al. Jun 1982 A
4363076 McIver Dec 1982 A
4500905 Shibata Feb 1985 A
4706166 Go Nov 1987 A
4726777 Billman et al. Feb 1988 A
4784972 Hatada Nov 1988 A
4951122 Tsubosaki et al. Aug 1990 A
4967262 Farnsworth Oct 1990 A
5047837 Kitano et al. Sep 1991 A
5107325 Nakayoshi Apr 1992 A
5138438 Masayuki et al. Aug 1992 A
5200362 Lin et al. Apr 1993 A
5218234 Thompson et al. Jun 1993 A
5239447 Cotues et al. Aug 1993 A
5304737 Kim Apr 1994 A
5311401 Gates, Jr. et al. May 1994 A
5327327 Frew et al. Jul 1994 A
5331591 Clifton Jul 1994 A
5334872 Ueda et al. Aug 1994 A
5347428 Carson et al. Sep 1994 A
5365106 Watanabe Nov 1994 A
5434745 Shokrgozar et al. Jul 1995 A
5466634 Beilstein, Jr. et al. Nov 1995 A
5534729 Russell Jul 1996 A
5538758 Beach et al. Jul 1996 A
5571754 Bertin et al. Nov 1996 A
5592019 Ueda et al. Jan 1997 A
5616953 King et al. Apr 1997 A
5629566 Doi et al. May 1997 A
5675180 Pedersen et al. Oct 1997 A
5691248 Cronin et al. Nov 1997 A
5698895 Pedersen et al. Dec 1997 A
5716759 Badehi Feb 1998 A
5721151 Padmanabhan et al. Feb 1998 A
5731631 Yama et al. Mar 1998 A
5737191 Horiuchi et al. Apr 1998 A
5801448 Ball Sep 1998 A
5870351 Ladabaum et al. Feb 1999 A
5879965 Jiang et al. Mar 1999 A
5891761 Vindasius et al. Apr 1999 A
5910687 Chen et al. Jun 1999 A
5946545 Bertin et al. Aug 1999 A
5965947 Nam et al. Oct 1999 A
6005776 Holman et al. Dec 1999 A
6030854 Mashimoto et al. Feb 2000 A
6034438 Petersen Mar 2000 A
6071139 Corisis et al. Jun 2000 A
6087716 Ikeda Jul 2000 A
6088237 Farnworth et al. Jul 2000 A
6107164 Ohuchi Aug 2000 A
6175158 Degani et al. Jan 2001 B1
6225689 Moden et al. May 2001 B1
6228686 Smith et al. May 2001 B1
6255726 Vindasius et al. Jul 2001 B1
6262476 Vidal Jul 2001 B1
6271598 Vindasius et al. Aug 2001 B1
6297657 Thiessen et al. Oct 2001 B1
6303977 Schroen et al. Oct 2001 B1
6315856 Asagiri et al. Nov 2001 B1
6320253 Kinsman et al. Nov 2001 B1
6326244 Brooks et al. Dec 2001 B1
6326689 Thomas Dec 2001 B1
6338980 Satoh Jan 2002 B1
6351030 Havens et al. Feb 2002 B2
6418033 Rinne Jul 2002 B1
6472744 Sato et al. Oct 2002 B1
6472746 Taniguchi et al. Oct 2002 B2
6473291 Stevenson Oct 2002 B1
6476467 Nakamura et al. Nov 2002 B2
6566760 Kawamura et al. May 2003 B1
6569709 Derderian May 2003 B2
D475981 Michii Jun 2003 S
6580165 Singh Jun 2003 B1
6582992 Poo et al. Jun 2003 B2
6593648 Emoto Jul 2003 B2
6607938 Kwon et al. Aug 2003 B2
6607941 Prabhu et al. Aug 2003 B2
6621155 Perino et al. Sep 2003 B1
6621172 Nakayama et al. Sep 2003 B2
6624505 Badehi Sep 2003 B2
6656827 Tsao et al. Dec 2003 B1
6667543 Chow et al. Dec 2003 B1
6670701 Matsuura et al. Dec 2003 B2
6674159 Peterson et al. Jan 2004 B1
6686655 Moden et al. Feb 2004 B2
6706971 Albert et al. Mar 2004 B2
6710246 Mostafazadeh et al. Mar 2004 B1
6717061 Yamaguchi et al. Apr 2004 B2
6722213 Offen et al. Apr 2004 B2
6730997 Beyne et al. May 2004 B2
6737743 Urakawa May 2004 B2
6747348 Jeung et al. Jun 2004 B2
6750547 Jeung et al. Jun 2004 B2
6756252 Nakanishi Jun 2004 B2
6777767 Badehi Aug 2004 B2
6802446 Chaudhuri et al. Oct 2004 B2
6844623 Peterson et al. Jan 2005 B1
6849802 Song et al. Feb 2005 B2
6853557 Haba et al. Feb 2005 B1
6908784 Farnworth et al. Jun 2005 B1
6910268 Miller Jun 2005 B2
6940022 Vinciarelli et al. Sep 2005 B1
6956283 Peterson Oct 2005 B1
6964915 Farnworth et al. Nov 2005 B2
6972480 Zilber et al. Dec 2005 B2
6973718 Sheppard, Jr. et al. Dec 2005 B2
6984885 Harada et al. Jan 2006 B1
7005324 Imai Feb 2006 B2
7029949 Farnworth et al. Apr 2006 B2
7061125 Cho et al. Jun 2006 B2
7115986 Moon et al. Oct 2006 B2
7125750 Kwan et al. Oct 2006 B2
7127807 Yamaguchi et al. Oct 2006 B2
7180168 Imai Feb 2007 B2
7190060 Chiang Mar 2007 B1
7196262 Gronet Mar 2007 B2
7208335 Boon et al. Apr 2007 B2
7208345 Meyer et al. Apr 2007 B2
7215018 Vindasius et al. May 2007 B2
7221051 Ono et al. May 2007 B2
7245021 Vindasius et al. Jul 2007 B2
7259455 Seto Aug 2007 B2
7279363 Cherukuri et al. Oct 2007 B2
7285865 Kwon et al. Oct 2007 B2
7335533 Derderian Feb 2008 B2
7344917 Gautham Mar 2008 B2
7355274 Lim Apr 2008 B2
7402911 Thomas et al. Jul 2008 B2
7405138 Ohuchi et al. Jul 2008 B2
7408243 Shiffer Aug 2008 B2
7429782 Brunnbauer et al. Sep 2008 B2
7452743 Oliver et al. Nov 2008 B2
7514350 Hashimoto Apr 2009 B2
7521288 Arai et al. Apr 2009 B2
7535109 Robinson et al. May 2009 B2
7564142 Hashimoto Jul 2009 B2
7595222 Shimoishizaka et al. Sep 2009 B2
7601039 Eldridge et al. Oct 2009 B2
7638869 Irsigler et al. Dec 2009 B2
7662670 Noma et al. Feb 2010 B2
7662671 Saeki Feb 2010 B2
7704794 Mess et al. Apr 2010 B2
7732912 Damberg Jun 2010 B2
7768795 Sakurai et al. Aug 2010 B2
7829438 Haba et al. Nov 2010 B2
7863159 Co et al. Jan 2011 B2
7888185 Corisis et al. Feb 2011 B2
7901989 Haba et al. Mar 2011 B2
7919846 Hembree Apr 2011 B2
7923349 McElrea et al. Apr 2011 B2
7951649 Val May 2011 B2
7952195 Haba May 2011 B2
8022527 Haba et al. Sep 2011 B2
8040682 Shimoda Oct 2011 B2
8076788 Haba et al. Dec 2011 B2
8178978 McElrea et al. May 2012 B2
8373280 Harada et al. Feb 2013 B2
8390109 Popovic et al. Mar 2013 B2
8431435 Haba et al. Apr 2013 B2
8551815 Avsian et al. Oct 2013 B2
8618659 Sato et al. Dec 2013 B2
8619659 Lee et al. Dec 2013 B2
8629543 McElrea et al. Jan 2014 B2
8633576 Zohni et al. Jan 2014 B2
8674482 Shi et al. Mar 2014 B2
8704379 Crane et al. Apr 2014 B2
8723332 McElrea et al. May 2014 B2
8772920 Thacker et al. Jul 2014 B2
8952514 Chun Feb 2015 B2
9123418 Lin et al. Sep 2015 B2
9136251 Cheah et al. Sep 2015 B2
9490195 Prabhu et al. Nov 2016 B1
9508691 Delacruz Nov 2016 B1
20010012725 Maeda et al. Aug 2001 A1
20010031548 Elenius et al. Oct 2001 A1
20020006686 Cloud et al. Jan 2002 A1
20020027257 Kinsman et al. Mar 2002 A1
20020045290 Ball Apr 2002 A1
20020096349 Hedler et al. Jul 2002 A1
20020127775 Haba et al. Sep 2002 A1
20020168798 Glenn et al. Nov 2002 A1
20020180010 Tsubosaki et al. Dec 2002 A1
20020185725 Moden et al. Dec 2002 A1
20020187260 Sheppard et al. Dec 2002 A1
20020190368 Shimoe et al. Dec 2002 A1
20030038353 Derderian Feb 2003 A1
20030038356 Derderian Feb 2003 A1
20030038357 Derderian Feb 2003 A1
20030060034 Beyne et al. Mar 2003 A1
20030071338 Jeung et al. Apr 2003 A1
20030071341 Jeung et al. Apr 2003 A1
20030080403 Jeung et al. May 2003 A1
20030092326 Nishikawa et al. May 2003 A1
20030096454 Poo et al. May 2003 A1
20030099085 Duva May 2003 A1
20030122243 Lee et al. Jul 2003 A1
20030143819 Hedler et al. Jul 2003 A1
20030148597 Tan et al. Aug 2003 A1
20030162369 Kobayashi Aug 2003 A1
20030209772 Prabhu Nov 2003 A1
20040113283 Farnworth et al. Jun 2004 A1
20040142509 Imai Jul 2004 A1
20040150095 Fraley et al. Aug 2004 A1
20040173892 Nakanishi Sep 2004 A1
20040195667 Karnezos Oct 2004 A1
20040198033 Lee et al. Oct 2004 A1
20040212083 Yang Oct 2004 A1
20040217446 Headley et al. Nov 2004 A1
20040227235 Hashimoto Nov 2004 A1
20040238933 Chen et al. Dec 2004 A1
20040251520 Sasaki et al. Dec 2004 A1
20040262035 Ko et al. Dec 2004 A1
20050013927 Yamazaki Jan 2005 A1
20050067680 Boon et al. Mar 2005 A1
20050067694 Pon et al. Mar 2005 A1
20050082651 Farnworth et al. Apr 2005 A1
20050085050 Draney et al. Apr 2005 A1
20050101039 Chen et al. May 2005 A1
20050104179 Zilber et al. May 2005 A1
20050121758 Di Stefano Jun 2005 A1
20050135067 Park et al. Jun 2005 A1
20050148160 Farnworth et al. Jul 2005 A1
20050156323 Tokunaga Jul 2005 A1
20050230802 Vindasius et al. Oct 2005 A1
20050248021 Morkner Nov 2005 A1
20050258530 Vindasius et al. Nov 2005 A1
20050287705 Yang Dec 2005 A1
20050287709 Lee et al. Dec 2005 A1
20060003552 Okada Jan 2006 A1
20060035408 Derderian Feb 2006 A1
20060046436 Ohuchi et al. Mar 2006 A1
20060055050 Numata et al. Mar 2006 A1
20060068567 Beyne et al. Mar 2006 A1
20060076690 Khandros et al. Apr 2006 A1
20060094165 Hedler et al. May 2006 A1
20060097356 Fujii et al. May 2006 A1
20060103000 Kurosawa May 2006 A1
20060121645 Ball Jun 2006 A1
20060138626 Liew et al. Jun 2006 A1
20060220262 Meyer et al. Oct 2006 A1
20060233012 Sekiguchi et al. Oct 2006 A1
20060252180 Moden et al. Nov 2006 A1
20060267173 Takiar et al. Nov 2006 A1
20060273365 Cross et al. Dec 2006 A1
20060278971 Barnes et al. Dec 2006 A1
20070023900 Toyoda Feb 2007 A1
20070029684 Arai et al. Feb 2007 A1
20070065987 Mess et al. Mar 2007 A1
20070102801 Ishida et al. May 2007 A1
20070132082 Tang et al. Jun 2007 A1
20070158799 Chiu et al. Jul 2007 A1
20070158807 Lu et al. Jul 2007 A1
20070170572 Liu et al. Jul 2007 A1
20070181989 Corisis et al. Aug 2007 A1
20070187811 Arai et al. Aug 2007 A1
20070194462 Kim et al. Aug 2007 A1
20070222054 Hembree Sep 2007 A1
20070252262 Robinson et al. Nov 2007 A1
20070284716 Vindasius et al. Dec 2007 A1
20070290333 Saini et al. Dec 2007 A1
20080029866 Kim et al. Feb 2008 A1
20080029884 Grafe et al. Feb 2008 A1
20080083976 Haba et al. Apr 2008 A1
20080083977 Haba et al. Apr 2008 A1
20080094086 Kim Apr 2008 A1
20080112150 Jones May 2008 A1
20080150158 Chin Jun 2008 A1
20080166836 Jobetto Jul 2008 A1
20080173792 Yang et al. Jul 2008 A1
20080180242 Cottingham Jul 2008 A1
20080203566 Su Aug 2008 A1
20080206915 Yamazaki Aug 2008 A1
20080208043 Smith et al. Aug 2008 A1
20080251913 Inomata Oct 2008 A1
20080251939 Chung et al. Oct 2008 A1
20080284044 Myers Nov 2008 A1
20080290493 Tsunozaki Nov 2008 A1
20080303131 McElrea et al. Dec 2008 A1
20080308921 Kim Dec 2008 A1
20080315407 Andrews, Jr. et al. Dec 2008 A1
20090020887 Mizuno et al. Jan 2009 A1
20090020889 Murayama et al. Jan 2009 A1
20090045524 Mohammed et al. Feb 2009 A1
20090065948 Wang Mar 2009 A1
20090068790 Caskey et al. Mar 2009 A1
20090102038 McElrea et al. Apr 2009 A1
20090146137 Kim et al. Jun 2009 A1
20090160065 Haba et al. Jun 2009 A1
20090209061 Jeong Aug 2009 A1
20090230528 McElrea et al. Sep 2009 A1
20090316378 Haba et al. Dec 2009 A1
20100140753 Hembree Jun 2010 A1
20100140811 Leal et al. Jun 2010 A1
20100148352 Moden Jun 2010 A1
20100207277 Bauer et al. Aug 2010 A1
20100327461 Co et al. Dec 2010 A1
20110006432 Haba et al. Jan 2011 A1
20110031629 Haba et al. Feb 2011 A1
20110033979 Haba et al. Feb 2011 A1
20110049696 Haba et al. Mar 2011 A1
20110169154 Kweon et al. Jul 2011 A1
20110187007 Haba et al. Aug 2011 A1
20110248410 Avsian et al. Oct 2011 A1
20110266684 Leal Nov 2011 A1
20120049376 Harada et al. Mar 2012 A1
20120051695 Harada et al. Mar 2012 A1
20120056327 Harada et al. Mar 2012 A1
20120061846 Rathburn Mar 2012 A1
20120080807 Haba et al. Apr 2012 A1
20120133057 Haba et al. May 2012 A1
20120211878 Popovic et al. Aug 2012 A1
20120313264 Sato et al. Dec 2012 A1
20130083583 Crisp et al. Apr 2013 A1
20130099392 McElrea et al. Apr 2013 A1
20130099393 Jeong et al. Apr 2013 A1
20130119542 Oh May 2013 A1
20130154117 Tan et al. Jun 2013 A1
20130286707 Crisp et al. Oct 2013 A1
20130299977 Dayringer et al. Nov 2013 A1
20130336039 Frans Dec 2013 A1
20130341803 Cheah et al. Dec 2013 A1
20140070423 Woychik et al. Mar 2014 A1
20140097526 Suleiman et al. Apr 2014 A1
20140104786 Clayton et al. Apr 2014 A1
20140264945 Yap et al. Sep 2014 A1
20150098677 Thacker et al. Apr 2015 A1
20150200181 Haga et al. Jul 2015 A1
20160035698 Lee et al. Feb 2016 A1
20160141232 Cannon May 2016 A1
20170018485 Prabhu et al. Jan 2017 A1
Foreign Referenced Citations (58)
Number Date Country
1041624 Oct 2000 CN
2512114 Sep 2002 CN
1531069 Sep 2004 CN
1638118 Jul 2005 CN
1905148 Jan 2007 CN
104332462 Feb 2015 CN
102004039906 Aug 2005 EP
1763894 Mar 2007 EP
2650880 Oct 2013 EP
2704690 Nov 1994 FR
07-509104 Oct 1995 JP
11-260851 Sep 1999 JP
2000269411 Sep 2000 JP
2001210782 Aug 2001 JP
2003-142518 May 2003 JP
2003163324 Jun 2003 JP
2004047702 Feb 2004 JP
2004-119473 Apr 2004 JP
2004153130 May 2004 JP
2004158536 Jun 2004 JP
2004-214548 Jul 2004 JP
2005005529 Jan 2005 JP
2005026564 Jan 2005 JP
2006-351793 Dec 2006 JP
2007073803 Mar 2007 JP
2007523482 Aug 2007 JP
2008160119 Jul 2008 JP
2008205453 Sep 2008 JP
2008236688 Oct 2008 JP
2009-026969 Feb 2009 JP
2009027039 Feb 2009 JP
20-1994-0004952 Jul 1994 KR
10-1999-0008537 Feb 1999 KR
20010062722 Jul 2001 KR
20050009036 Jan 2005 KR
20070018057 Feb 2007 KR
100813624 Mar 2008 KR
20080045259 May 2008 KR
20080069549 Jul 2008 KR
20080091980 Oct 2008 KR
475244 Feb 2002 TW
200425356 Nov 2004 TW
200504995 Feb 2005 TW
200527549 Aug 2005 TW
200605298 Feb 2006 TW
200721471 Jun 2007 TW
200913208 Mar 2009 TW
200940570 Oct 2009 TW
9425987 Nov 1994 WO
9907015 Feb 1999 WO
9909599 Feb 1999 WO
0164344 Sep 2001 WO
2005081315 Sep 2005 WO
2005101492 Oct 2005 WO
2009032371 Mar 2009 WO
2009052150 Apr 2009 WO
2009114670 Sep 2009 WO
2010057339 May 2010 WO
Non-Patent Literature Citations (5)
Entry
Cheah, Bok Eng, et al., Modeling and Electrical Characteristics Evaluation of Vertical Side-Chip Internconnection or Compact 3D Integration, School of Electrical and Electronic Engineering, Universiti Sains Malaysia, 13th Electronics Materials and Packaging (EMAP), Nov. 2011, 7 pages.
Han, Sang Wook, Wireless Interconnect using Inductive Coupling in 3D-ICs, University of Michigan, 2012, 133 pages.
Kong, J., et al., Sensitivity Study of Channel Termination on Vertical Side-Chip Interconnection, Universiti Sains Malaysia, 35th International Electronic Manufacturing Technology Conference, 2012, 6 pages.
U.S. Appl. No. 14/883,864 dated Oct. 15, 2015.
International Search Report for Application No. PCT/US2016/062304 dated Mar. 6, 2017.
Related Publications (1)
Number Date Country
20170179081 A1 Jun 2017 US
Continuations (1)
Number Date Country
Parent 14971384 Dec 2015 US
Child 15358380 US