1. Field of the Invention
The invention relates generally to the field of integrated circuit (IC) device packaging technology, and more particularly to heat spreading techniques in ball grid array (BGA) packages.
2. Related Art
Integrated circuit (IC) dies are typically mounted in or on a package that is attached to a printed circuit board (PCB). One such type of IC die package is a ball grid array (BGA) package. BGA packages provide for smaller footprints than many other package solutions available today. A BGA package has an array of solder balls located on a bottom external surface of a package substrate. The solder balls are reflowed to attach the package to the PCB. The IC die is mounted to a top surface of the package substrate. Wire bonds typically couple signals in the IC die to the substrate. The substrate has internal routing which electrically couples the IC die signals to the solder balls on the bottom substrate surface.
A number of BGA package substrate types exist, including ceramic, plastic, and tape (also known as “flex”). In some BGA package types, a stiffener may be attached to the substrate to supply planarity and rigidity to the package. In such packages, the IC die may be mounted to the stiffener instead of the substrate. Openings in the stiffener may be used to allow the IC die to be wire-bonded to the substrate.
Die-up and die-down BGA package configurations exist. In die-up BGA packages, the IC die is mounted on a top surface of the substrate or stiffener, opposite of the side to which the solder balls are attached. In die-down BGA packages, the IC die is mounted on a bottom surface of the substrate or stiffener, on the same side as which the solder balls are attached.
Conventional BGA packages are subject to high thermal stresses that result from the heat given off during operation of the mounted IC die. The thermal stresses are primarily imposed on the IC die and solder balls due to the mismatch of the thermal expansion coefficient (CTE) between the semiconductor die and the metal stiffener. As a result, conventional flex BGA packages have difficulty in meeting reliability requirements for die sizes larger than 9 mm. See, e.g., Thompson, T., et al., Reliability Assessment of a Thin (Flex) BGA Using a Polyimide Tape Substrate, International Electronics Manufacturing Technology Symposium, IEEE, pp. 207–213 (1999).
The tape substrate used in flex BGA packages is typically polyimide, which has very low values of thermal conductivity. Consequently, the IC die is separated from the PCB by the tape substrate thermal barrier. The lack of direct thermal connection from IC die to PCB leads to relatively high resistance to heat transfer from IC die-to-board (theta-jb).
A stiffener attached to a substrate enhances heat spreading. However, the openings on the stiffener for wire bond connections tend to reduce the thermal connections between the IC die and the edges of the stiffener. As a result, heat spreading is limited largely to the region of the IC die attach pad, while areas at the stiffener peripheral do not contribute effectively to heat spreading.
Furthermore, because of the high density of the substrate routing circuitry, it is difficult to bond each power and ground pad on the IC die to the substrate by a corresponding bond finger. As a result, the distribution of ground and power signals connecting to the IC die is frequently compromised in conventional BGA packages.
Ball grid array packages that use plastic substrates (for example, BT or FR4 plastic) are commonly known as plastic BGAs, or PBGAs. See, e.g., Lau, J. H., Ball Grid Array Technology, McGraw-Hill, New York, (1995). A PBGA package, for example, may add solder balls to the bottom substrate surface under the IC die to aid in conducting heat to the PCB. Solder balls such as these are referred to as thermal balls. The cost of the PBGA package, however, will increase with the number of thermal balls. Furthermore, a large array of thermal balls may be necessary for heat dissipation into the PCB for high levels of IC device power.
Hence, what is needed are BGA packages with improved heat spreading capabilities, while also providing for high levels of IC electrical performance.
The present invention is directed at ball grid array (BGA)packages having enhanced electrical and thermal characteristics. In one aspect, a substrate has a first surface and a second surface. A heat spreader has a first surface and a second surface. The first heat spreader surface is attached to the second substrate surface. A plurality of solder balls are attached to the second substrate surface outside an outer dimensional profile of the heat spreader. The second heat spreader surface is configured to be coupled to a printed circuit board (PCB).
In a further aspect, a metal ring is attached to the first substrate surface. An outer profile of said heat spreader overlaps with an inner profile of the metal ring.
In a still further aspect, the substrate has a window opening. An integrated circuit (IC) die is mounted to the first heat spreader surface and is accessible through the window opening. The IC die has a surface that includes at least one contact pad. A wire bond corresponding to each contact pad couples the contact pad to a corresponding metal trace on the first substrate surface. The IC die has a surface that includes at least one ground contact pad. A ground wire bond corresponding to each ground contact pad couples the ground contact pad to the first heat spreader surface. The second heat spreader surface is coupled to a ground potential of the PCB.
In an alternative aspect, an IC die is mounted to the first substrate surface. The IC die is mounted to the first substrate surface in a flip chip configuration. At least one conductive bump on an active surface of the IC die is connected to a corresponding conductive pad on the first substrate surface. A second heat spreader is attached to a non-active surface of said IC die.
In a further aspect, at least one via extends through the substrate. Each via is filled with a conductive material to couple one of the conductive bumps to the first heat spreader.
Further aspects of the present invention, and further features and benefits thereof, are described below. The accompanying drawings, which are incorporated herein and form a part of the specification, illustrate the present invention and, together with the description, further serve to explain the principles of the invention and to enable a person skilled in the pertinent art to make and use the invention.
The accompanying drawings, which are incorporated herein and form a part of the specification, illustrate the present invention and, together with the description, further serve to explain the principles of the invention and to enable a person skilled in the pertinent art to make and use the invention.
The present invention will now be described with reference to the accompanying drawings. In the drawings, like reference numbers indicate identical or functionally similar elements. Additionally, the left-most digit(s) of a reference number identifies the drawing in which the reference number first appears.
Overview
The present invention is directed to a method and system for improving the mechanical, thermal, and electrical performance of BGA packages. The present invention is applicable to all types of BGA substrates, including ceramic, plastic, and tape (flex) BGA packages. Furthermore the present invention is applicable to die-up (cavity-up) and die-down (cavity-down) orientations.
Numerous embodiments of the present invention are presented herein. In a first embodiment, the BGA package IC die is mounted to a heat spreader. In a second embodiment, a heat spreader is attached to a first side of a BGA package substrate, and the IC die is mounted to a second side of the substrate. In a third embodiment, a heat spreader is again mounted to the first side of the substrate, and the IC die is mounted to the second side of the substrate in a flip chip configuration. In a fourth embodiment, a heat spreader is again mounted to the first side of the substrate, and the IC die is mounted to the second side of the substrate in a flip chip configuration. Furthermore, a second heat spreader is mounted to a top surface of the IC die. In each embodiment, BGA package thermal dissipation and electrical performance are improved. In each embodiment, the first heat spreader may be coupled to a printed circuit board (PCB) to further improve thermal and electrical performance. The embodiments of the present invention presented herein allow large size dies with high input and output (I/O) counts to be packaged using BGA technology. For example, additional I/O counts may be gained due to the elimination or reduction in ground solder balls by the present invention.
Ball grid array package types are described below. Further detail on the above described embodiments, and additional embodiments according to the present invention, are presented below. The embodiments described herein may be combined in any applicable manner, as required by a particular application.
Ball Grid Array (BGA) Packages
A ball grid array (BGA) package is used to package and interface an IC die with a printed circuit board (PCB). BGA packages may be used with any type of IC die, and are particularly useful for high speed ICs. In a BGA package, solder pads do not just surround the package periphery, as in chip carrier type packages, but partially or entirely cover the bottom package surface in an array configuration. BGA packages are also referred to as pad array carrier (PAC), pad array, land grid array, and pad-grid array packages. BGA packages types are further described in the following paragraphs. For additional description on BGA packages, refer to Lau, J. H., Ball Grid Array Technology, McGraw-Hill, New York, (1995), which is herein incorporated by reference in its entirety.
Die-up and die-down BGA package configurations exist. In die-up BGA packages, the IC die is mounted on a top surface of the substrate or stiffener, in a direction away from the PCB. In die-down BGA packages, the IC die is mounted on a bottom surface of the substrate or stiffener, in a direction towards the PCB.
A number of BGA package substrate types exist, including ceramic, plastic (PBGA), and tape (also known as “flex”).
Tape substrate 104 is generally made from one or more conductive layers bonded with a dielectric material. For instance, the dielectric material may be made from various substances, such as polyimide tape. The conductive layers are typically made from a metal, or combination of metals, such as copper and aluminum. Trace or routing patterns are made in the conductive layer material. Substrate 104 may be a single-layer tape, a two-layer tape, or additional layer tape substrate type. In a two-layer tape, the metal layers sandwich the dielectric layer, such as in a copper-Upilex-copper arrangement. As described above, the IC die is separated from the PCB by the thermal barrier of substrate 104. In a plastic substrate embodiment, the plastic substrate may include one or more metal layers formed on an organic substrate (for example, BT resin or FR4 epoxy/glass).
In some BGA package types, particularly in flex BGA packages, a stiffener can be attached to the substrate to add planarity and rigidity to the package, such as stiffener 112. Stiffener 112 may be laminated to substrate 104. Stiffener 112 is typically made from a metal, or combination of metals, such as copper, tin, and aluminum. Alternatively, stiffener 112 may be made from a polymer. Stiffener 112 also may act as a heat sink, and allow for greater heat spreading in BGA package 100.
One or more wire bonds 108 connect IC die 102 to substrate 104. Wire bonds 108 may be gold, copper, or other types of conductors. When stiffener 112 is present, one or more openings 114 in stiffener 112 may be used to allow for wire bonds 108 to connect IC die 102 to substrate 104. Stiffener 112 may be configured in other ways, and have different opening arrangements than shown in
The use of a stiffener in a flex BGA package requires additional considerations when attempting to manage heat spreading.
IC die 102 is attached to stiffener 112. In alternative configurations, when a stiffener is not present, IC die 102 may be attached directly to substrate 104. IC die 102 may be attached by an epoxy, for example. IC die 102 is any type of semiconductor integrated circuit.
An encapsulant 116, which may be an epoxy, mold compound, or other encapsulating material, covers IC die 102 and wire bonds 108 for mechanical and environmental protection.
Note that although wire bonds, such as wire bonds 108, are shown and described herein, IC dies may be mounted and coupled to a substrate with solder balls located on the bottom (active) surface of the IC die, by a process commonly referred to as “C4” or “flip chip” interconnect.
As described above, the BGA package substrate provides vias and routing on one or more layers to connect contact pads for wire bonds on its upper surface to solder balls attached to the bottom substrate surface.
The present invention is applicable to improving thermal and electrical performance in the BGA package types described herein, and in other BGA package types.
Further details of structural and operational implementations of ball grid array packages of the present invention are described in the following sections. These structural and operational implementations are described herein for illustrative purposes, and are not limiting. For instance, the present invention as described herein may be implemented in both die-up and die-down BGA package types, as well as other IC package types. Furthermore, each of the embodiments presented below are applicable to tape substrate BGA packages, plastic substrate BGA packages, and ceramic substrate BGA packages. The description below is adaptable to these and other package types, as would be understood to persons skilled in the relevant art(s) from the teachings herein. For instance, in some tape BGA packages, a stiffener may be required in the BGA package.
Features of each of the embodiments presented below may be incorporated into BGA packages independently, or may be combined in any manner, as would be apparent to persons skilled in the relevant art(s) from the teachings herein.
According to embodiments of the present invention, the mechanical, electrical, and thermal performances of a BGA package are enhanced by attaching a heat spreader underneath the BGA package, to a bottom surface of the substrate. An IC die is mounted directly to the heat spreader through a window opening in the substrate, or is mounted to the top surface of the substrate. Furthermore, in a preferred embodiment, a stiffener or metal ring is also attached to the top surface of the substrate.
One or more wire bonds 108 connect corresponding bond pads 118 on IC die 102 to contact points 120 on substrate 104.
Substrate 104 has a bottom surface to which a top surface of heat spreader 504 is attached by a laminate or adhesive 508. The plurality of solder balls 106 are attached to a bottom surface of substrate 104. The plurality of solder balls 106 connect to vias and!or points on the bottom surface of substrate 104 to which signals internal to substrate 104 are routed and exposed. Substrate 104 in
As shown in
The material used for heat spreader 504 may be one or more metals such as copper and aluminum, for example. Heat spreader 504 may be machined, molded, or otherwise manufactured from these materials. Heat spreader 504 may be made from the same material as ring 502, for example.
In an embodiment, heat spreader 504 is configured to operate as a ground plane or power plane. For example, one or more power or ground wire bonds 506 may be used to connect bond pads 514 on IC die 102 to contact points 516 on heat spreader 504. One or more ground wire bonds may also be coupled from IC die 102 to a ground ring around the peripheral of IC die 102. For example, the ground ring may be a silver or palladium plated ground ring. The bottom surface of heat spreader 504 can be attached to a connection area on a PCB using solder, conductive epoxy, or other substance. The PCB connection area is connected to a PCB power or ground plane. Such a configuration may reduce or eliminate power or ground traces on substrate 104, and reduce the number of solder balls attached to substrate 104 that are dedicated to power or ground. This configuration may also lead to shorter current travel lengths, and may reduce inductance and resistance related to the BGA package. For example, this configuration may enhance electrical performance regarding simultaneous switching noise.
In an embodiment, stiffener or ring 502 is attached to the top surface of substrate 104. Ring 502 may be attached to substrate 104 by a laminate or adhesive 510. Encapsulant 116 is filled in and flushed to ring 502 after the attachment of ring 502. Ring 502 is preferably made of a metal, such as copper or aluminum, or a combination thereof, but may also be constructed from other applicable materials. Preferably, ring 502 is made from the same material as heat spreader 504, to minimize the mismatch of the thermal expansion coefficients. Ring 502 is preferably flush with the outer edges of substrate 104 to form an outer edge of the BGA package, but may also reside entirely within or partially outside an outer profile of substrate 104.
A primary benefit of attaching ring 502 to substrate 104 is an increase in stiffness of BGA package 500. Ring 502 may also aid in reducing the amount of warp of BGA package 500. Furthermore, ring 502 promotes heat dissipation from substrate 104, and may facilitate the attachment of an external heat spreader to BGA package 500.
Furthermore, ring 502 enhances the process of encapsulation of the BGA package. Ring 502 aids in creating a cavity that may be filled with a dispensed glob top or encapsulating material, such as encapsulant 116, that locks IC die 102 and surrounding elements in place.
As described above,
Note that vias may be formed in substrate 104, in the overlapping area, which may be filled with a conductive material to couple ring 502 to heat spreader 504, for greater thermal transfer. Furthermore, note that heat spreader 504 may be shaped in a variety of ways in addition to the rectangular shape shown in
In the embodiment of BGA package 700 shown in
The embodiments provided above in this section are presented herein for purposes of illustration, and not limitation. The invention is not limited to the particular examples of components and methods described herein. Alternatives (including equivalents, extensions, variations, deviations, etc., of those described herein) will be apparent to persons skilled in the relevant art(s) based on the teachings contained herein. Such alternatives fall within the scope and spirit of the present invention.
According to embodiments of the present invention, the mechanical, electrical, and thermal performances of a BGA package are enhanced by attaching a heat spreader underneath the BGA package, to a bottom surface of the package substrate. An IC die is mounted on a top surface of the substrate, in a flip chip configuration. In a preferred embodiment, a stiffener or metal ring is also attached to the top surface of the substrate. Furthermore, a second heat spreader may be attached to the IC die and metal ring to further enhance mechanical, electrical, and thermal performances.
In the embodiment of BGA package 900 shown in
An underfill 908, such as an epoxy or encapsulant, may be applied in the gap between IC die 102 and substrate 104 to strengthen their interconnection.
As described above, heat spreader 504 aids in dissipating heat produced by IC die 102 by transferring the heat to a PCB to which heat spreader 504 is attached, and/or by transferring heat through substrate 104 to ring 502. In an embodiment, thermal and electrical performance may be enhanced by forming one or more vias 906 in substrate 104 to couple conductive bumps 902 and conductive pads 904 more directly to heat spreader 504. Vias 906 may be filled with a conductive material to enhance the thermal and electrical performance of this arrangement. For example, when heat spreader 504 is coupled to a ground or voltage potential of a PCB, vias 906 may be used to provide a short path for the ground or voltage potential of the PCB to IC die 102.
In the embodiment of BGA package 1000 shown in
The material used for second heat spreader 1002 may be the same as, or different than the material used for heat spreader 504. For example, second heat spreader 1002 may be one or more metals such as copper and aluminum, for example. Heat spreader 1002 may be machined, molded, or otherwise manufactured from these materials. Heat spreader 1002 may be made from the same material as ring 502, for example. Furthermore, heat spreader 1002 may be shaped in a variety of ways.
Second heat spreader 1002 aids in dissipating heat produced by IC die 102 by transferring heat to ring 502 for transfer to a PCB, and by increasing heat dissipation into the environment. Furthermore, second heat spreader 1002 facilitates the connection of additional heat spreaders/heat sinks, such as fin type heat spreaders, to BGA package 1000. In other words, these additional heat spreaders can be attached to the top of heat spreader 1002.
The embodiments provided above in this section are presented herein for purposes of illustration, and not limitation. The invention is not limited to the particular examples of components and methods described herein. Alternatives (including equivalents, extensions, variations, deviations, etc., of those described herein) will be apparent to persons skilled in the relevant art(s) based on the teachings contained herein. Such alternatives fall within the scope and spirit of the present invention.
Flowchart 1300 begins with step 1302. Instep 1302, a substrate that has a first surface and a second surface is received. For example, the substrate is tape substrate 104, or another substrate type suitable for a BGA package. An IC die mounting position and/or contact points may be provided on a first, upper surface, and solder ball pads may be provided on a second, bottom surface of the substrate.
In step 1304, a first surface of a heat spreader is attached to the second substrate surface. For example, the heat spreader is heat spreader 504, which is attached to substrate 104.
In step 1306, a second surface of the heat spreader is configured to be coupled to a printed circuit board (PCB). For example, the second surface of heat spreader 504 may be formed as a substantially flat surface to conform to a PCB surface. The second heat spreader surface may be enabled to be surface mounted to soldering pads on the PCB. For example, the second surface of heat spreader 504 may be plated with solder or other metals such as nickel, gold, or layers of different metals, to aid in the surface mount process.
In step 1308, a plurality of solder balls are attached to the second substrate surface outside an outer dimensional profile of the heat spreader. For example, the plurality of solder balls are plurality of solder balls 106, which connect to vias and/or solder ball pads on the bottom surface of substrate 104. The solder balls may be arranged on the bottom surface of substrate 104 as shown in
Flowchart 1300 may include the additional step where a metal ring is attached to the first substrate surface. Attaching the metal ring enhances heat dissipation from the IC die and provides rigidity to the BGA package. For example, the metal ring is stiffener or ring 502.
In an embodiment, step 1304 includes the step where a first surface of the heat spreader is attached to the second substrate surface, wherein an outer profile of the heat spreader overlaps with an inner profile of the metal ring. For example, such an arrangement for heat spreader 504 and ring 502 is shown in
Flowchart 1300 may include the additional step where a window opening is formed in the substrate. For example, substrate 104 shown in
Flowchart 1300 may include the additional step where an integrated circuit (IC) die is mounted to the first heat spreader surface, wherein the IC die is accessible through the window opening, and may extend at least partially through the window opening. For example, as shown in
In an embodiment, the IC die has a surface that includes at least one contact pad, such as contact pad 118. Flowchart 1300 may include the additional step where a wire bond is coupled between one or more of the at least one contact pad and a corresponding metal trace on the first substrate surface. For example, wire bond 108 is coupled between contact pad 118 and contact point 120 on substrate 104. Contact point 120 is a contact point on a metal trace on the surface of substrate 104.
In an embodiment, the IC die has a surface that includes at least one ground contact pad, such as ground contact pad 514. Flowchart 1300 may include the additional step where a ground wire bond is coupled between at least one ground contact pad and the first heat spreader surface. For example, ground wire bond 506 is coupled between contact pad 514 and contact point 516 on heat spreader 504, as shown in
Flowchart 1300 may include the additional step where the second heat spreader surface is coupled to a ground potential of the PCB. For example, heat spreader 504 may be coupled to one or more conductive pads on a surface of the PCB that are coupled to PCB ground.
Flowchart 1300 may include the additional step where an integrated circuit (IC) die is mounted to the first substrate surface. For example, IC die 102 is mounted to substrate 104, as shown in
Flowchart 1300 may include the additional step where the IC die is mounted to the first substrate surface in a flip chip configuration. For example, as shown in
Flowchart 1300 may include the additional step where at least one conductive bump on an active surface of the IC die is connected to a corresponding conductive pad on the first substrate surface. For example, the plurality of conductive bumps 902 are coupled to corresponding conductive pads 904 on substrate 104.
Flowchart 1300 may include the additional step where a surface of a metal ring is attached to the first substrate surface. For example, ring 502 is attached to substrate 104, as shown in
In an embodiment, step 1304 includes the step where a first surface of the heat spreader is attached to the second substrate surface, wherein an outer profile of the heat spreader overlaps with an inner profile of the metal ring. For example, such an arrangement for heat spreader 504 and ring 502 is shown in
Flowchart 1300 may include the additional step where a second heat spreader is attached to a non-active surface of the IC die and a second surface of the metal ring. For example, second heat spreader 1002 is attached to IC die 102 and ring 502 (when present) as shown in
Flowchart 1300 may include the additional step where at least one of the conductive bumps is coupled to the heat spreader through at least one via that extends through the substrate. In an embodiment, this step may include the step where the at least one via is filled with a conductive material. For example, these vias are vias 906 shown in
Conclusion
While various embodiments of the present invention have been described above, it should be understood that they have been presented by way of example only, and not limitation. It will be apparent to persons skilled in the relevant art that various changes in form and detail can be made therein without departing from the spirit and scope of the invention. Thus, the breadth and scope of the present invention should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.
Number | Name | Date | Kind |
---|---|---|---|
3790866 | Meyer et al. | Feb 1974 | A |
4611238 | Lewis et al. | Sep 1986 | A |
5045921 | Lin et al. | Sep 1991 | A |
5065281 | Hernandez et al. | Nov 1991 | A |
5173766 | Long et al. | Dec 1992 | A |
5208504 | Parker et al. | May 1993 | A |
5216278 | Lin et al. | Jun 1993 | A |
5285352 | Pastore et al. | Feb 1994 | A |
5291062 | Higgins, III | Mar 1994 | A |
5294826 | Marcantonio et al. | Mar 1994 | A |
5366589 | Chang | Nov 1994 | A |
5394009 | Loo | Feb 1995 | A |
5397917 | Ommen et al. | Mar 1995 | A |
5397921 | Karnezos | Mar 1995 | A |
5409865 | Karnezos | Apr 1995 | A |
5433631 | Beaman et al. | Jul 1995 | A |
5438216 | Juskey et al. | Aug 1995 | A |
5474957 | Urushima | Dec 1995 | A |
5490324 | Newman | Feb 1996 | A |
5534467 | Rostoker | Jul 1996 | A |
5541450 | Jones et al. | Jul 1996 | A |
5552635 | Kim et al. | Sep 1996 | A |
5572405 | Wilson et al. | Nov 1996 | A |
5578869 | Hoffman et al. | Nov 1996 | A |
5583377 | Higgins, III | Dec 1996 | A |
5583378 | Marrs et al. | Dec 1996 | A |
5642261 | Bond et al. | Jun 1997 | A |
5648679 | Chillara et al. | Jul 1997 | A |
5650659 | Mostafazadeh et al. | Jul 1997 | A |
5650662 | Edwards et al. | Jul 1997 | A |
5691567 | Lo et al. | Nov 1997 | A |
5717252 | Nakashima et al. | Feb 1998 | A |
5736785 | Chiang et al. | Apr 1998 | A |
5744863 | Culnane et al. | Apr 1998 | A |
5796170 | Marcantonio | Aug 1998 | A |
5798909 | Bhatt et al. | Aug 1998 | A |
5801432 | Rostoker et al. | Sep 1998 | A |
5835355 | Dordi | Nov 1998 | A |
5843808 | Karnezos | Dec 1998 | A |
5844168 | Schueller et al. | Dec 1998 | A |
5856911 | Riley | Jan 1999 | A |
5866949 | Schueller | Feb 1999 | A |
5883430 | Johnson | Mar 1999 | A |
5889321 | Culnane et al. | Mar 1999 | A |
5889324 | Suzuki | Mar 1999 | A |
5894410 | Barrow | Apr 1999 | A |
5895967 | Stearns et al. | Apr 1999 | A |
5901041 | Davies et al. | May 1999 | A |
5903052 | Chen et al. | May 1999 | A |
5905633 | Shim et al. | May 1999 | A |
5907189 | Mertol | May 1999 | A |
5907903 | Ameen et al. | Jun 1999 | A |
5920117 | Sono et al. | Jul 1999 | A |
5949137 | Domadia et al. | Sep 1999 | A |
5953589 | Shim et al. | Sep 1999 | A |
5972734 | Carichner et al. | Oct 1999 | A |
5976912 | Fukutomi et al. | Nov 1999 | A |
5977626 | Wang et al. | Nov 1999 | A |
5977633 | Suzuki et al. | Nov 1999 | A |
5982621 | Li | Nov 1999 | A |
5986340 | Mostafazadeh et al. | Nov 1999 | A |
5986885 | Wyland | Nov 1999 | A |
5998241 | Niwa | Dec 1999 | A |
5999415 | Hamzehdoost | Dec 1999 | A |
6002147 | Iovdalsky et al. | Dec 1999 | A |
6002169 | Chia et al. | Dec 1999 | A |
6011304 | Mertol | Jan 2000 | A |
6011694 | Hirakawa | Jan 2000 | A |
6020637 | Karnezos | Feb 2000 | A |
6028358 | Suzuki | Feb 2000 | A |
6034427 | Lan et al. | Mar 2000 | A |
6040984 | Hirakawa | Mar 2000 | A |
6046077 | Baba | Apr 2000 | A |
6057601 | Lau et al. | May 2000 | A |
6060777 | Jamieson et al. | May 2000 | A |
6069407 | Hamzehdoost | May 2000 | A |
6077724 | Chen | Jun 2000 | A |
6084297 | Brooks et al. | Jul 2000 | A |
6084777 | Kalidas et al. | Jul 2000 | A |
6114761 | Mertol et al. | Sep 2000 | A |
6117797 | Hembree | Sep 2000 | A |
6122171 | Akram et al. | Sep 2000 | A |
6133064 | Nagarajan et al. | Oct 2000 | A |
6140707 | Plepys et al. | Oct 2000 | A |
6160705 | Stearns et al. | Dec 2000 | A |
6162659 | Wu | Dec 2000 | A |
6163458 | Li | Dec 2000 | A |
6166434 | Desai et al. | Dec 2000 | A |
6184580 | Lin | Feb 2001 | B1 |
6201300 | Tseng et al. | Mar 2001 | B1 |
6207467 | Vaiyapuri et al. | Mar 2001 | B1 |
6212070 | Atwood et al. | Apr 2001 | B1 |
6242279 | Ho et al. | Jun 2001 | B1 |
6246111 | Huang et al. | Jun 2001 | B1 |
6278613 | Fernandez et al. | Aug 2001 | B1 |
6288444 | Abe et al. | Sep 2001 | B1 |
6313521 | Baba | Nov 2001 | B1 |
6313525 | Sasano | Nov 2001 | B1 |
6347037 | Iijima et al. | Feb 2002 | B2 |
6362525 | Rahim | Mar 2002 | B1 |
6369455 | Ho et al. | Apr 2002 | B1 |
6380623 | Demore | Apr 2002 | B1 |
6462274 | Shim et al. | Oct 2002 | B1 |
6472741 | Chen et al. | Oct 2002 | B1 |
6525942 | Huang et al. | Feb 2003 | B2 |
6528869 | Glenn et al. | Mar 2003 | B1 |
6528892 | Caletka et al. | Mar 2003 | B2 |
6541832 | Coyle | Apr 2003 | B2 |
6545351 | Jamieson et al. | Apr 2003 | B1 |
6552266 | Carden et al. | Apr 2003 | B2 |
6552428 | Huang et al. | Apr 2003 | B1 |
6552430 | Perez et al. | Apr 2003 | B1 |
6559525 | Huang | May 2003 | B2 |
6563712 | Akram et al. | May 2003 | B2 |
6583513 | Utagikar et al. | Jun 2003 | B1 |
6583516 | Hashimoto | Jun 2003 | B2 |
6602732 | Chen | Aug 2003 | B2 |
6614660 | Bai et al. | Sep 2003 | B1 |
6617193 | Toshio et al. | Sep 2003 | B1 |
6657870 | Ali et al. | Dec 2003 | B1 |
6664617 | Siu | Dec 2003 | B2 |
6724071 | Combs | Apr 2004 | B2 |
6724080 | Ooi et al. | Apr 2004 | B1 |
6906414 | Zhao et al. | Jun 2005 | B2 |
20010001505 | Schueller et al. | May 2001 | A1 |
20010005050 | Ohsawa et al. | Jun 2001 | A1 |
20010040279 | Mess et al. | Nov 2001 | A1 |
20010045644 | Huang | Nov 2001 | A1 |
20020053731 | Chao et al. | May 2002 | A1 |
20020072214 | Yuzawa et al. | Jun 2002 | A1 |
20020079572 | Khan et al. | Jun 2002 | A1 |
20020096767 | Cote et al. | Jul 2002 | A1 |
20020098617 | Lee et al. | Jul 2002 | A1 |
20020109226 | Khan et al. | Aug 2002 | A1 |
20020171144 | Zhang et al. | Nov 2002 | A1 |
20020180040 | Camenforte et al. | Dec 2002 | A1 |
20020185717 | Eghan et al. | Dec 2002 | A1 |
20030138613 | Thoman et al. | Jul 2003 | A1 |
20050035452 | Zhang et al. | Feb 2005 | A1 |
Number | Date | Country |
---|---|---|
0 573 297 | Dec 1993 | EP |
0 573 297 | Dec 1993 | EP |
0 504 411 | Jun 1998 | EP |
0865082 | Sep 1998 | EP |
2 803 098 | Jun 2001 | FR |
59-188948 | Oct 1984 | JP |
61-49446 | Mar 1986 | JP |
7-283336 | Oct 1995 | JP |
10-50877 | Jul 1996 | JP |
K10189835 | Dec 1996 | JP |
10-50877 | Feb 1998 | JP |
10-247702 | Sep 1998 | JP |
10-247703 | Sep 1998 | JP |
11-17064 | Jan 1999 | JP |
11-102989 | Apr 1999 | JP |
2001-68512 | Aug 1999 | JP |
11-307674 | Nov 1999 | JP |
20000286294 | Oct 2000 | JP |
383908 | Mar 2000 | TW |
417219 | Jan 2001 | TW |
Number | Date | Country | |
---|---|---|---|
20020171144 A1 | Nov 2002 | US |