The present invention relates to interconnects of integrated circuits and semiconductor chip packages.
An integrated circuit (IC) die is a small device formed on a semiconductor wafer, such as a silicon wafer. Such a die is typically cut from the wafer and attached to a substrate for interconnect redistribution. Bond pads on the die are then electrically connected to the leads on the carrier via wire bonding. The die and the bonding wires are then encapsulated with a molding compound such that a package is formed.
Typically, the leads encapsulated in the package are redistributed in a network of conductors within the carrier and end in an array of terminal points outside the package. Manufacturers have been stacking two or more die within a single package. Such devices are sometimes referred to as stacked multichip packages.
One stacked multichip package is generally illustrated in
As known in the art, a stand-off stitch bonding process typically comprises placing a flat-topped bump on an active integrated circuit (IC) pad such as an aluminum pad, and then reverse bonding from the substrate or package back to the flat-topped ball bump. However, it is difficult to form the wire bond 18 on the bond pads of the second die 12 adjacent to the overhanging side edge 12a. The stress incurred by the wire bonder may cause peeling between the first die 11 and the second die 12 and reduce the production yield.
It is one objective of the claimed invention to provide an improved semiconductor chip package and a fabrication method thereof in order to solve the above-mentioned prior art problems.
According to one aspect of the invention, a semiconductor chip package includes a substrate; a semiconductor die mounted on the substrate, wherein the semiconductor die comprises a bond pad disposed on an active surface of the semiconductor die, and a passivation layer covering perimeter of the bond pad, wherein a bond pad opening in the passivation layer exposes a central area of the bond pad; a conductive paste post printed on the exposed central area of the bond pad; and a bonding wire secured to a top surface of the conductive paste post. The conductive paste post comprises copper paste.
According to another aspect of the invention, a semiconductor chip package includes a substrate; a semiconductor die mounted on the substrate, wherein the semiconductor die comprises a bond pad disposed on an active surface of the semiconductor die, and a passivation layer covering perimeter of the bond pad, wherein a bond pad opening in the passivation layer exposes a central area of the bond pad; a conductive paste post printed on the exposed central area of the bond pad; a conductive trace printed on the passivation layer and being electrically connected to the conductive paste post; a redistributed bond pad printed on the passivation layer, wherein the redistributed bond pad is electrically connected to the conductive paste post through the conductive trace; and a bonding wire secured to a top surface of the redistributed bond pad.
According to still another aspect of the invention, a method for forming a substrate is disclosed. A carrier is provided. A solder mask is coated on the carrier. The solder mask is patterned, thereby forming a plurality of openings in the solder mask. A first conductive paste is printed into the openings, thereby forming a first circuit layer. A dielectric layer is coated on the first circuit layer. The dielectric layer is patterned, thereby forming via openings in the dielectric layer. A second conductive paste is printed into the via openings and on the dielectric layer, thereby forming a second circuit layer.
According to still another aspect of the invention, a package-on-package is disclosed. The package-on-package includes a bottom package comprising a first semiconductor die mounted on a substrate, and a plurality of solder balls mounted on a lower surface of the substrate. The first semiconductor die is encapsulated by a first molding compound. Conductive traces are printed on the first molding compound. A second semiconductor die is mounted on the first molding compound.
According to still another aspect of the invention, a semiconductor chip package includes a semiconductor die mounted on a substrate; a plurality of solder balls mounted on a lower surface of the substrate; a molding compound encapsulating the semiconductor die; and a plurality of heat-dissipating features embedded in the top surface of the molding compound. The heat-dissipating features are composed of conductive paste.
According to still another aspect of the invention, a substrate includes a plurality of conductive traces is formed on a top surface of the substrate; a solder mask covering the plurality of conductive traces; a bonding finger disposed outbound of the solder mask; a solder mask opening in the solder mask to expose a via in the substrate; and a conductive trace printed over the solder mask to electrically connect the bonding finger to the via.
These and other objectives of the present invention will no doubt become obvious to those of ordinary skill in the art after reading the following detailed description of the preferred embodiment that is illustrated in the various figures and drawings.
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention. In the drawings:
In the following detailed description of embodiments of the invention, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific preferred embodiments in which the disclosure may be practiced.
These embodiments are described in sufficient detail to enable those skilled in the art to practice them, and it is to be understood that other embodiments may be utilized and that mechanical, chemical, electrical, and procedural changes may be made without departing from the spirit and scope of the present disclosure. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of embodiments of the present invention is defined only by the appended claims.
Please refer to
According to one embodiment of the invention, a passivation layer 124 such as a polyimide layer may be formed on the semiconductor die 120 and cover the perimeter of the bond pad 122. According to one embodiment of the invention, the bond pad opening 124a exposes a central area of the bond pad 122.
According to one embodiment of the invention, a conductive paste post 130 is printed on the exposed central area of the bond pad 122. For example, the conductive paste post 130 may comprise copper paste, but is not limited thereto. According to one embodiment of the invention, the conductive paste post 130 may be formed by using screen-printing processes. According to one embodiment of the invention, the conductive paste post 130 may be formed by using 3D printing processes. The conductive paste post 130 functions as a buffer to prevent aluminum extrusion.
Compared to the conventional flat-topped ball bump formed during a conventional stand-off stitch bonding process, the conductive paste post 130 has a flatter top surface 130a. The flatter top surface 130a of the conductive paste post 130 provides higher reliability and better performance of the package devices.
According to one embodiment of the invention, for example, the copper paste may comprise epoxy resin such as a thermosetting epoxy resin, and copper powder or silver-coated copper balls as filler, but is not limited thereto. After printing the conductive paste post 130 on the bond pad 122, the conductive paste post 130 may be subjected to a curing process. According to one embodiment of the invention, the conductive paste post 130 may be cured by thermal processes or ultraviolet (UV) light.
Optionally, the top surface 130a of the conductive paste post 130 may be subjected to an etching process to expose more metal filler, thereby reducing the contact resistance. According to anther embodiment of the invention, a conductive layer 131 having low resistance, for example, Pt or Au, may be coated on the top surface 130a of the conductive paste post 130.
The conductive paste post 130 may completely fill up the bond pad opening 124a, as shown in
Because of the resilient property of the conductive paste post 130, the conductive paste post 130 quickly recovers its shape after the bonding wire 180 is formed. The shorting between the adjacent bond pads may be avoided. Therefore, smaller bond pad opening and bond pad pitch may be employed.
Bonding wires 160 and 180 are formed to electrically connect the first die 110 and the second die 120 to the respective bond fingers 104 and 106 on the substrate 100 using a wire bonder. The substrate 100 may be a package substrate, but is not limited thereto. The bonding wire 180 may be secured to the bond finger 104 on the substrate 100 and then reverse bonded to the conductive paste post 130 on the second die 120.
It is understood that the package structures shown in
Please refer to
As shown in
According to one embodiment of the invention, a passivation layer 124 such as a polyimide layer may be formed on the semiconductor die 120 and cover the perimeter of the bond pad 122. According to one embodiment of the invention, the bond pad opening 124a exposes a central area of the bond pad 122.
According to one embodiment of the invention, a conductive paste post 130 is printed on the exposed central area of the bond pad 122. For example, the conductive paste post 130 may comprise copper paste, but is not limited thereto. According to one embodiment of the invention, the conductive paste post 130 may be formed by using screen-printing processes. According to one embodiment of the invention, the conductive paste post 130 may be formed by using 3D printing processes.
According to one embodiment of the invention, a conductive trace 136 is printed on the passivation layer 124. The conductive trace 136 is electrically connected to the conductive paste post 130. The conductive trace 136 may comprise copper paste, but is not limited thereto. According to one embodiment of the invention, the conductive paste post 130 and the conductive trace 136 may be printed by using the same printing process.
According to one embodiment of the invention, a redistributed bond pad 138 is also printed on the passivation layer 124. The redistributed bond pad 138 is electrically connected to the conductive paste post 130 through the conductive trace 136. The redistributed bond pad 138 is thicker than the conductive trace 136.
The conductive paste post 130, the conductive trace 136, and the redistributed bond pad 138 may be printed by using the same printing process, and may be subjected to a curing process. The conductive paste post 130 is structurally integral with the conductive trace 136 and the redistributed bond pad 138. The conductive paste post 130, the conductive trace 136, and the redistributed bond pad 138 constitute a redistribution layer structure 300.
As shown in
According to one embodiment of the invention, a passivation layer 124 such as a polyimide layer may be formed on the semiconductor die 120 and cover the perimeter of the bond pad 122. According to one embodiment of the invention, the bond pad opening 124a exposes a central area of the bond pad 122.
Likewise, a conductive paste post 130, a conductive trace 136, and a redistributed bond pad 138 are printed onto the semiconductor die 120 as described in
As shown in
According to one embodiment of the invention, a passivation layer 124 such as a polyimide layer may be formed on the semiconductor die 120 and cover the perimeter of the bond pad 122. According to one embodiment of the invention, the bond pad opening 124a exposes a central area of the bond pad 122.
A conductive paste post 130, a conductive trace 136, and a redistributed bond pad 138 are printed onto the semiconductor die 120 as described in
As shown in
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After the chip placement and bonding, the chip assembly is then subjected to a curing and solder reflow process at the second station to cure the copper paste of the substrate 400 and reflow the solder joints between the flip chip 520 and the substrate 400. For example, an infrared (IR) reflow device 530 may be used during the curing process, but is not limited thereto.
Thereafter, a molding process is performed at the third station. A molding compound 540 is applied. The molding compound 540 covers the attached flip chip 520 and the and the top surface of the substrate 400. The molding compound 540 may be subjected to a curing process. The molding compound 540 may comprise a mixture of epoxy and silica fillers, but not limited thereto. After the molding process, the semiconductor chip package 5 is detached from the TAB tape 510.
As shown in
As shown in
Although the first semiconductor die 620 is electrically connected to the substrate 610 through bonding wires in the figures, it is understood that the semiconductor die 620 may be a flip chip in other embodiments.
Subsequently, a printing process such as a screen printing process or a 3D printing process may be performed to print conductive traces 644 such as bonding fingers on the first molding compound 630. The printed conductive traces 644 are electrically connected to the through mold vias 640, respectively. After the printing process, the printed conductive traces 644 may be subjected to a curing process. Optionally, a conductive layer such as Pt, Ag, or the like may be provided on the printed conductive traces 644.
A second semiconductor die 650 is then mounted on the first molding compound 630. Bonding wires 652 are formed to electrically connect the second semiconductor die 650 to the conductive traces 644. Subsequently, the second semiconductor die 650 may be encapsulated by a second molding compound 660, thereby forming a package-on-package 6.
As shown in
Although the first semiconductor die 620 is electrically connected to the substrate 610 through bonding wires in this figure, it is understood that the first semiconductor die 620 may be a flip chip in other embodiments.
Subsequently, a printing process such as a screen printing process or a 3D printing process may be performed to print conductive traces 644 including bond pads 644a on the first molding compound 630. The printed conductive traces 644 are electrically connected to the through mold vias 640, respectively. After the printing process, the printed conductive traces 644 may be subjected to a curing process. Optionally, a conductive layer such as Pt, Ag, or the like may be provided on the printed conductive traces 644.
A second semiconductor die 650 is then bonded on the bond pads 644a in a flip chip configuration. Subsequently, the second semiconductor die 650 may be encapsulated by a second molding compound 660, thereby forming a package-on-package 6a.
As shown in
Although the first semiconductor die 720 is electrically connected to the substrate 710 through bonding wires in this figure, it is understood that the first semiconductor die 720 may be a flip chip in other embodiments.
Subsequently, a printing process such as a screen printing process or a 3D printing process may be performed to print conductive traces 740 such as bonding fingers on the top surface of the first molding compound 730. The conductive traces 740 may extend to the oblique sidewall of the first molding compound 730. The printed conductive traces 740 may be electrically connected to the conductive traces on or in the substrate 710. After the printing process, the printed conductive traces 740 may be subjected to a curing process. Optionally, a conductive layer such as Pt, Ag, or the like may be provided on the printed conductive traces 740.
A second semiconductor die 750 is then mounted on the first molding compound 730. Bonding wires 752 are formed to electrically connect the semiconductor die 750 to the conductive traces 740. Subsequently, the second semiconductor die 750 may be encapsulated by a second molding compound 760, thereby forming a package-on-package 7.
As shown in
Although the first semiconductor die 720 is electrically connected to the substrate 710 through bonding wires in this figure, it is understood that the first semiconductor die 720 may be a flip chip in other embodiments.
Subsequently, a printing process such as a screen printing process or a 3D printing process may be performed to print conductive traces 740 including bond pads 740a on the top surface of the first molding compound 730. The conductive traces 740 may extend to the oblique sidewall of the first molding compound 730. The printed conductive traces 740 may be electrically connected to the conductive traces on the substrate 710. After the printing process, the printed conductive traces 740 may be subjected to a curing process. Optionally, a conductive layer such as Pt, Ag, or the like may be provided on the printed conductive traces 740.
A second semiconductor die 750 is then bonded on the bond pads 740a in a flip chip configuration. Subsequently, the second semiconductor die 750 may be encapsulated by a second molding compound 760, thereby forming a package-on-package 7a.
Please refer to
Although the semiconductor die 820 is electrically connected to the substrate 810 through bonding wires in this figure, it is understood that the semiconductor die 820 may be a flip chip in other embodiments.
A plurality of heat-dissipating features 840 are embedded in the top surface of the molding compound 830. To form the heat-dissipating features 840, first, trenches are formed by laser marking laser in the top surface of the molding compound 830, conductive paste such as copper paste is then printed onto the top surface of the molding compound 830 and fills the trenches. The trenches formed in the top surface of the molding compound 830 are laser marking trenches and may comprise various patterns, letters or numbers so as to exhibit certain information such as trademarks or model.
As shown in
A conductive trace 913 is disposed over the solder mask 910 to electrically connect the bonding finger 932 to the via 923. The conductive trace 913 may be printed over the solder mask 910 by using a screen printing process or a 3D printing method. The conductive trace 913 may comprise conductive paste such as copper paste and may be subjected to a curing process. By providing such trace-over-solder mask configuration, a region 950 under the solder mask 910 may be spared so as to increase the routing flexibility of the substrate 90.
Those skilled in the art will readily observe that numerous modifications and alterations of the device and method may be made while retaining the teachings of the invention. Accordingly, the above disclosure should be construed as limited only by the metes and bounds of the appended claims.
This application is a continuation-in-part of U.S. application Ser. No. 15/063,433 filed Mar. 7, 2016, now U.S. Pat. No. 9,842,831, which itself claims the priority from U.S. provisional application No. 62/161,591 filed May 14, 2015 and U.S. provisional application No. 62/190,401 filed Jul. 9, 2015. This application also claims the priority from U.S. provisional application No. 62/442,473 filed Jan. 5, 2017 and U.S. provisional application No. 62/445,278 filed Jan. 12, 2017. All of the above-mentioned applications are included in their entirety herein by reference.
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Child | 15701456 | US |