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Manufacture or treatment of micro-structural devices or systems
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B81C2201/00
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
Current Industry
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
Sub Industries
B81C2201/01
in or on a substrate
B81C2201/0101
Shaping material Structuring the bulk substrate or layers on the substrate Film patterning
B81C2201/0102
Surface micromachining
B81C2201/0104
Chemical-mechanical polishing [CMP]
B81C2201/0105
Sacrificial layer
B81C2201/0107
Sacrificial metal
B81C2201/0108
Sacrificial polymer, ashing of organics
B81C2201/0109
Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
B81C2201/0111
Bulk micromachining
B81C2201/0112
Bosch process
B81C2201/0114
Electrochemical etching, anodic oxidation
B81C2201/0115
Porous silicon
B81C2201/0116
Thermal treatment for structural rearrangement of substrate atoms
B81C2201/0118
Processes for the planarization of structures
B81C2201/0119
involving only addition of materials
B81C2201/0121
involving addition of material followed by removal of parts of said material
B81C2201/0122
Selective addition
B81C2201/0123
Selective removal
B81C2201/0125
Blanket removal
B81C2201/0126
Processes for the planarization of structures not provided for in B81C2201/0119 - B81C2201/0125
B81C2201/0128
Processes for removing material
B81C2201/0129
Diamond turning
B81C2201/013
Etching
B81C2201/0132
Dry etching
B81C2201/0133
Wet etching
B81C2201/0135
Controlling etch progression
B81C2201/0136
by doping limited material regions
B81C2201/0138
Monitoring physical parameters in the etching chamber
B81C2201/0139
with the electric potential of an electrochemical etching
B81C2201/014
by depositing an etch stop layer
B81C2201/0142
Processes for controlling etch progression not provided for in B81C2201/0136 - B81C2201/014
B81C2201/0143
Focussed beam
B81C2201/0145
Spark erosion
B81C2201/0146
Processes for removing material not provided for in B81C2201/0129 - B81C2201/0145
B81C2201/0147
Film patterning
B81C2201/0149
Forming nanoscale microstructures using auto-arranging or self-assembling material
B81C2201/015
Imprinting
B81C2201/0152
Step and Flash imprinting, UV imprinting
B81C2201/0153
Imprinting techniques not provided for in B81C2201/0152
B81C2201/0154
other processes for film patterning not provided for in B81C2201/0149 - B81C2201/015
B81C2201/0156
Lithographic techniques
B81C2201/0157
Gray-scale mask technology
B81C2201/0159
Lithographic techniques not provided for in B81C2201/0157
B81C2201/016
Passivation
B81C2201/0161
Controlling physical properties of the material
B81C2201/0163
Controlling internal stress of deposited layers
B81C2201/0164
by doping the layer
B81C2201/0166
by ion implantation
B81C2201/0167
by adding further layers of materials having complementary strains
B81C2201/0169
by post-annealing
B81C2201/017
Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169
B81C2201/0171
Doping materials
B81C2201/0173
Thermo-migration of impurities from a solid
B81C2201/0174
for making multi-layered devices, film deposition or growing
B81C2201/0176
Chemical vapour Deposition
B81C2201/0177
Epitaxy
B81C2201/0178
Oxidation
B81C2201/018
Plasma polymerization
B81C2201/0181
Physical Vapour Deposition [PVD]
B81C2201/0183
Selective deposition
B81C2201/0184
Digital lithography
B81C2201/0185
Printing
B81C2201/0187
Controlled formation of micro- or nanostructures using a template positioned on a substrate
B81C2201/0188
Selective deposition techniques not provided for in B81C2201/0184 - B81C2201/0187
B81C2201/019
Bonding or gluing multiple substrate layers
B81C2201/0191
Transfer of a layer from a carrier wafer to a device wafer
B81C2201/0192
by cleaving the carrier wafer
B81C2201/0194
the layer being structured
B81C2201/0195
the layer being unstructured
B81C2201/0197
Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192
B81C2201/0198
for making a masking layer
B81C2201/03
Processes for manufacturing substrate-free structures
B81C2201/032
LIGA process
B81C2201/034
Moulding
B81C2201/036
Hot embossing
B81C2201/038
Processes for manufacturing substrate-free structures not provided for in B81C2201/034 - B81C2201/036
B81C2201/05
Temporary protection of devices or parts of the devices during manufacturing
B81C2201/053
Depositing a protective layers
B81C2201/056
Releasing structures at the end of the manufacturing process
B81C2201/11
Treatments for avoiding stiction of elastic or moving parts of MEMS
B81C2201/112
Depositing an anti-stiction or passivation coating
B81C2201/115
Roughening a surface
B81C2201/117
Using supercritical fluid
Industries
Overview
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Impact
Patents Grants
last 30 patents
Information
Patent Grant
Micro-electro mechanical system device containing a bump stopper an...
Patent number
11,970,387
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chun-wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Flexible electrode and preparation method thereof
Patent number
11,970,391
Issue date
Apr 30, 2024
SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
Tianzhun Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sealed force sensor with etch stop layer
Patent number
11,965,787
Issue date
Apr 23, 2024
NEXTINPUT, INC.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
Patent number
11,965,797
Issue date
Apr 23, 2024
Wuxi Sencoch Semiconductor Co., Ltd.
Tongqing Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for controlling stress variation in a material...
Patent number
11,961,722
Issue date
Apr 16, 2024
SPTS Technologies Limited
Anthony Wilby
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for ablating or roughening wafer surfaces
Patent number
11,958,739
Issue date
Apr 16, 2024
University of Rhode Island Board of Trustees
Jason Rodger Dwyer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a microelectromechanical sensor and microelect...
Patent number
11,958,740
Issue date
Apr 16, 2024
Robert Bosch GmbH
Achim Kronenberger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
Patent number
11,953,674
Issue date
Apr 9, 2024
Texas Instruments Incorporated
Jose A. Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modification to rough polysilicon using ion implantation and silicide
Patent number
11,952,267
Issue date
Apr 9, 2024
Invensense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
Patent number
11,952,268
Issue date
Apr 9, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device production method
Patent number
11,953,675
Issue date
Apr 9, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-device structures with etch holes
Patent number
11,952,266
Issue date
Apr 9, 2024
X-CELEPRINT LIMITED
Pierluigi Rubino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic device
Patent number
11,944,965
Issue date
Apr 2, 2024
Imec VZW
Giuseppe Fiorentino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated digital force sensors and related methods of manufacture
Patent number
11,946,817
Issue date
Apr 2, 2024
DecaWave, Ltd.
Ali Foughi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
Patent number
11,946,822
Issue date
Apr 2, 2024
Sciosense B.V.
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
Patent number
11,944,998
Issue date
Apr 2, 2024
Korea Institute of Science and Technology
Byung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
Patent number
11,945,712
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Implantable microneedle and manufacturing method therefor
Patent number
11,938,308
Issue date
Mar 26, 2024
SNVIA CO., LTD.
Seung Yun Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for producing a micromechanica...
Patent number
11,940,618
Issue date
Mar 26, 2024
Robert Bosch GmbH
Alexander Eberspaecher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
Patent number
11,939,212
Issue date
Mar 26, 2024
Industrial Technology Research Institute
Heng-chung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Programmable structural building blocks
Patent number
11,939,213
Issue date
Mar 26, 2024
Raytheon Company
Anthony Serino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
Patent number
11,939,216
Issue date
Mar 26, 2024
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having a metallization structure embedded in a dielectr...
Patent number
11,932,534
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device manufacturing method, MEMS device, and shutter apparatu...
Patent number
11,932,535
Issue date
Mar 19, 2024
Sumitomo Precision Products Co., LTD
Gen Matsuoka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
Patent number
11,932,531
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Antimicrobial bandage with nanostructures
Patent number
11,931,225
Issue date
Mar 19, 2024
International Business Machines Corporation
Huan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Isolated protrusion/recession features in microelectromechanical sy...
Patent number
11,932,529
Issue date
Mar 19, 2024
Texas Instruments Incorporated
Patrick Ian Oden
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Signal processing circuit for triple-membrane MEMS device
Patent number
11,932,533
Issue date
Mar 19, 2024
Infineon Technologies AG
Marc Fueldner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfabrication of omni-view peripheral scanning system
Patent number
11,926,523
Issue date
Mar 12, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of forming nanostructures utilizing self-assembled nucleic...
Patent number
11,923,197
Issue date
Mar 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS
Publication number
20240133802
Publication date
Apr 25, 2024
HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
Achim BITTNER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
Publication number
20240124300
Publication date
Apr 18, 2024
STMICROELECTRONICS, INC.
Jefferson Sismundo TALLEDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
Publication number
20240120172
Publication date
Apr 11, 2024
Northwestern University
Vinayak P. Dravid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20240109769
Publication date
Apr 4, 2024
XINTEC INC.
Wei-Luen SUEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Spring Supported and Sealed MEMS Diaphragm Assembly
Publication number
20240109770
Publication date
Apr 4, 2024
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR
Publication number
20240108817
Publication date
Apr 4, 2024
SNVIA CO., LTD.
Seung Yun YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
Publication number
20240101413
Publication date
Mar 28, 2024
Intel Corporation
Jeremy D. Ecton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
Publication number
20240100566
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
Publication number
20240106357
Publication date
Mar 28, 2024
Saginomiya Seisakusho, Inc.
Noriko Shimomura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20240100565
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240092632
Publication date
Mar 21, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...
Publication number
20240092628
Publication date
Mar 21, 2024
BOE TECHNOLOGY GROUP CO., LTD.
Xiaochen MA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MIRROR DEVICE
Publication number
20240092634
Publication date
Mar 21, 2024
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240083742
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Li YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...
Publication number
20240067519
Publication date
Feb 29, 2024
TEXAS INSTRUMENTS INCORPORATED
John Wesley Hamlin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
Publication number
20240067520
Publication date
Feb 29, 2024
INFINEON TECHNOLOGIES AG
Fabian Streb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING MIRROR DEVICE
Publication number
20240059555
Publication date
Feb 22, 2024
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
Publication number
20240051819
Publication date
Feb 15, 2024
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Ping-He Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...
Publication number
20240044846
Publication date
Feb 8, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...
Publication number
20240043263
Publication date
Feb 8, 2024
STMicroelectronics S.r.l
Luca SEGHIZZI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMECHANICAL MICROSYSTEM
Publication number
20240034616
Publication date
Feb 1, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Laurent MOLLARD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
Publication number
20240034617
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing company Ltd.
JHENG-HONG JIANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR AND FORMATION METHOD THEREFOR
Publication number
20240027488
Publication date
Jan 25, 2024
SEMICONDUCTOR MANUFACTURING ELECTRONICS (SHAOXING) CORPORATION
Zhaolin ZHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20240024917
Publication date
Jan 25, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
Publication number
20240017986
Publication date
Jan 18, 2024
INFINEON TECHNOLOGIES AG
Stefan Barzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
Publication number
20240017989
Publication date
Jan 18, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Three Dimensional Microstructures With Selectively Removed Regions...
Publication number
20240019249
Publication date
Jan 18, 2024
The Regents of the University of Michigan
Khalil NAJAFI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
Publication number
20240017988
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jhao-Yi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE ST...
Publication number
20240017990
Publication date
Jan 18, 2024
Microfabrica Inc.
Duy P. Le
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Haptic Device with Multiple Fluidically-Controlled Voids
Publication number
20240019934
Publication date
Jan 18, 2024
Meta Platforms Technologies, LLC
Sean Jason Keller
B81 - MICRO-STRUCTURAL TECHNOLOGY